SMC Corporation of America
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-02 Performance/Specifications General specifications LC5-1-T1-02 Part no.

LVQ6m only Nil M R N LQ1 integral fitting LQ1 integral fitting Threaded Threaded Connection tubing O.D. 1/8" (3) Connection tubing O.D. 4 Rc 1/8 NP T1/8 P v v Option (1) Valve type 6 7 8 9 24 Nil 1 2 3 4 5 None With flow rate adjustment With bypass High back pressure with flow rate adjustment High back pressure with bypass 0 1 2 N.C. N.O.

't1 '12 = Mouoled on siacking manilotd block r,, NPT side ports (2) '14 = Mounled on stacking manifold block 7." NPT side & bottom pons (4) '16 = Mounted on stacking moLlnted block 7." NPT side (2) & bottom (5) ports To Order "Faclory Built" Valve/t anifotd Assmbty: EXAITPLE 1 Pce. Four Station Manifotd Ass y comprising:station 1. NVSA 411+12A Slation 2.

block disc in betu/een stations subiected to diflerent presaures lesslP ^ MRBF2000-00-P-1 MffBF2mo-oGP'2 Hequtalron r I @ Series NVFRz000:Base Mounted Tlpe M anifo Id/ O pt ion Par ts Plug in Ta pe / Non P lug in T U pe / D imc rc io ns inch(mm) SUP Relocation spacer NWFS2mO.P.3IT-l (Prug-in Vpe) NwFs2mo.P.3lT2 (Nm prus-in gpe) lspedty'l/8 (o1) ot 1t4 (o2 ) EXH Relocation spacer NWFS2OOGR-8]T1

Other items in the step data should be input beforehand using the controller setting kit (LEC-W2) and teaching box (LEC-T1). 17 No.JXC-OMW1019-A 8. Wiring of cables / Common precautions Warning (1) Adjusting, mounting or wiring change should never be done before shutting off the power supply to the product.

(Refer to Specific Product Precautions 4 on the next page for details.) 1.5 01: R 1/8 T1: NPT 1/8 ZSE40(F)/ISE40 W1 2-M4 x 0.7 thread depth 4 20 30 Rc 1/8 MPa 7 19 20 30 OUT2 OUT1 SET R 6.5 6.4 18.35 Atmospheric release port Lead wire length 600 (3000) 3.5 12.4 7.8 7 2.5 2.6 30 15.2 42 10.7 For splash proof use (IP65), insert an air tube into the atmospheric release port.

Power supply 11) 100/110V AC (50/60Hz) 200/220V AC (50/60Hz) 21) 1) Consult SMC if the supply voltage for LC1-1HV1 will be 110V AC or more, or the supply voltage for LC1-1HV2 will be 220V AC or more. or LC1-1-T1(Teaching box) are required.

over current alarm. 3 Error indicator ALARM LED (Red) The LED turns ON when an incorrect voltage alarm is generated for 100 ms or more. 4 Maintenance indicator NDL LED (Green) The LED is ON green when the emitter is contaminated or worn. 5 Air flow adjustment*1 BLOW SPEED Rotary switch Adjusts air flow with fan. 6 Balance adjustment Trimmer Adjusts offset voltage (ion balance). q w e r t1

't1 '12 = Mouoled on siacking manilotd block r,, NPT side ports (2) '14 = Mounled on stacking manifold block 7." NPT side & bottom pons (4) '16 = Mounted on stacking moLlnted block 7." NPT side (2) & bottom (5) ports To Order "Faclory Built" Valve/t anifotd Assmbty: EXAITPLE 1 Pce. Four Station Manifotd Ass y comprising:station 1. NVSA 411+12A Slation 2.

T1 (Terminal block of 1 row): 1-4 stations T2 (Terminal block of 2 rows): 5-8 stations T1 and T2 can be optionally chosen by adopting the combinations of single and double wiring(option spec.)etc.

Measuring conditions 10-CQSXB20-50D Chamber volume Cleanliness of air supplied to chamber 15l (0.53ft3) Same quality as supply air Hitachi Electronics Engineering Corporation TS-6200 Min. measurable particle dia. 0.1m Intake rate 28.3l/min (0.99CFM) Sampling time: 5min Interval time: 55min Operation frequency: 30cpm Average piston speed: 100mm/s (3.9inls) Mounting: Horizontal no-load Supply

T1 (Terminal block of 1 row): 1-4 stations T2 (Terminal block of 2 rows): 5-8 stations T1 and T2 can be optionally chosen by adopting the combinations of single and double wiring (option spec.) etc. The quantity of terminal blocks used depends on the number of manifold stations Double wiring (connected to SOL. A and SOL.

Temperature characteristics 12 to 24 VDC (Ripple 10% or less) Operating voltage 17 mA or less at 24 VDC, 2 output: 25 mA or less at 24 VDC Current consumption 8 1 8 1 01: R / , M5 x 0.8 T1: NPTF / , M5 x 0.8 00: ZM ejector mounted style Port size 0 to 60C (No condensation) Operating temperature range For details, refer to Best Pneumatics Vol. 16.

-02 Performance/Specifications General specifications LC5-1-T1-02 Part no.

Caution (1) Do not connect to equipment other than specified (LEC-W1, LEC-W2, LEC-T1, LEC-G).

Vacuum Pressure Switch: ZSE2-0R-15 ZSE2-0R-15 ZSE2-0R-15L ZSE2-0R-15C ZSE2-0R-15CL ZSE2-0R-15CN Indicator light (Red) Pressure setting trimmer Indicator light (Red) Pressure setting trimmer H L SET L SET H 15 15 9 9 2-M2.5 Mounting thread 2-M2.5 Mounting thread 25 25 31 31 600(3000) 42 600(3000) 49.5 40 40 3 3 20 20 18 18 16 16 13 11 13 11 9 9 Vacuum supply port 3.3 Vacuum supply port 3.3

each other. 4 3/16" Double acting 2 Material 6 1/4" Actuator section Applicable option Diaphragm PTFE Body type Symbol Note Body 6 1/4" End plate PPS 1 4 A Stacking type for manifold Nil PFA 3 8 Hydrofluoric acid compatible (Only LVC40, 50 type) PTFE F PVDF PFA 10 3/8" Ammonium hydroxide compatible 10 3/8" PTFE N PPS PFA 4 12 1/2" Pilot port thread type Symbol Thread type M5 Rc 1/8 NP T1

-25 NPN output NPN open collector 30V, 80mA, residual voltage: 1V or less ZSE401 T1-26 Vacuum Analog output 1~5V (+ 5%F.S.), load impedance : 1k ZSE401 T1-65 PNP output PNP open collector 80mA ISE4L01 T1-25 Positive Pressure NPN output NPN open collector 30V, 80mA, residual voltage: 1V or less ISE4L01 T1-26 100kPa Analog output 1~5V (+ 5%F.S.), load impedance: 1k ISE4L01 T1-65 (14.5PSI) Type

Bore size (mm) T1 T2 V W RS Weight (g) Part no.