Rotary Table

(g) Size 1 2 3 7 Basic Type 75 105 150 250 High precision Type 80 115 165 265 * Values excluding the weight of auto switch Effective torque 0.8 7 Effective torque (Nm) 0.6 3 0.4 2 0.2 1 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 Operating pressure (MPa) 19 - Internal construction and parts MSQ1 to 7 20 11 18 12 17 23 21 2 24 7 1 15 14 13 6 14 15 24 5 10 9 16 22 8 4 3 19 24 O ring 4 23 Hexagon socket set

Low-Speed Rotary Actuator

170to190 Port size M50.8 Rc 1/8 , G 1/8 NPT 1/8 , NPTF 1/8 Output (Nm) { At 0.5MPa } 0.3 0.75 1.8 3.1 5.3 Table 2 Allowable kinetic energy and adjustment range of rotating time Rotating speed adjustment range having Size Allowable kinetic energy stable operation J s/90 10 0.00025 0.7 to 5 15 0.00039 20 0.025 1 to 5 30 0.048 40 0.081 Weight Table 3 Weight (g) Weight * Size 90 180 10 120 150

MHS

120 60 10 19 31 55 88 140 251 1 N 12 21 35 61 97 153 268 mm 4 4 6 8 8 12 16 g 66 110 154 300 390 590 1,095 1) 1625 L=20mm 3263 L=30mm 0.5MPa 4 MHSJ3 MHSJ316D MHSJ320D MHSJ325D MHSJ332D MHSJ340D MHSJ350D MHSJ363D MHSJ380D mm 16 20 25 32 40 50 63 80 MPa 0.20.6 0.10.6 -1060 mm 0.01 c.p.m. 120 60 30 9 21 36 62 97 155 280 400 1 N 16 28 47 82 130 204 359 525 mm 4 4 6 8 8 12 16 20 g 95 150

MH-OMY0004

MHY2-10D MHY2-16D MHY2-20D MHY2-25D [mm] 10 16 20 25 [MPa] 0.10.6MPa [] -1060 [mm] 0.2mm [c.p.m] 60 c. p. m [Nm] 0.16 (1.6) 0.54 (5.5) 1.10 (11.2) 2.28 (23.3) (0.5MPa ) 180 ( ) -3 ) g 70 150 320 560 ) 5 2. 2-1. 1. ( ) 2. 3. 2-2. 1. 2.

MHx-OMZ0003

JMHZ2-16D mm 16 MPa 0.1~0.7 (oC) -10~60 (mm) 0.01 (c.p.m.) 120 32.7 (N) 43.5 mm 10 3 4M40.7 8 3.4 8 2 13 - 4-2.3 V114-5LU (oC) -1050( (ms) ON5 OFF4 Hz 20 / m/s2 150/30 V114-5LU L (L) (V) 24 -1010% (W) 0.4 [0.40.1] P .1367 LED 300 14 - 4-3.

MHx-OMZ0004

JMHZ2-16D mm 16 MPa 0.1~0.7 (oC) -10~60 (mm) 0.01 (c.p.m.) 120 32.7 (N) 43.5 (mm) 10 (g) 128 3 4M40.7 8 3.4 8 2 11 - 4-2.3 V114-5LU (oC) -1050( (ms) ON5 OFF4 Hz 20 / m/s2 150/30 V114-5LU L (L) (V) 24 -1010% 0.4 (W) [0.40.1] P .1367 LED 300 12 - 4-3.

MHx-OMZ0005

JMHZ2-16D mm 16 MPa 0.1~0.7 (oC) -10~60 (mm) 0.01 (c.p.m.) 120 32.7 (N) 43.5 (mm) 10 3 4M40.7 8 3.4 8 2 14 - 4-2.3 V114-5LU (oC) -1050( (ms) ON5 OFF4 Hz 20 / m/s2 150/30 V114-5LU L (L) (V) 24 -1010% (W) 0.4 [0.40.1] P .1367 LED 300 15 - 4-3.

LEF-OM006xx

LEC / (LEC ) () ID 1 164 1 IO 1: 64 1 S 0 +23) +2 10 -23) -2 -10 / 3000 3000 LEFS 0.5 LEFB 1 LEFS 0.5 LEFB 1 4) 0.00 CCW:-10+[] 9 CW-9+10-[] 1: /1:+2: SW 2 /1:2 W 1 0.00 W 2 0.00 0.00 1 2 (1-052) 2mm 3 CCW CW (+2 4) P29 -27- LEC / (LEC ) () 1) 2:CCW 1CW 2CCW 1 LEF 100 LEF16A 150 LEF25A 250 LEFS 200 LEFB 200 LEFS 30 LEFB 60 1000 LEFS 30 LEFB 60 0 1

Electric Actuator Slide table ／ High Precision Type High performance Battery-less absolute encoder

Product Weight [kg] Stroke [mm] Lock weight Model 50 75 100 150 8 1.06 1.23 0.16 16 2.39 2.78 0.32 25 4.82 5.42 6.22 0.61 -4- How to order Coution The actuator body and controller are sold as a package. If when only the actuator is purchased separately, confirm that the combination of the controller, which you have and the actuator is compatible.

JXCx-OMT0005CN

C RESET <>ON SVRE ON DRIVE ON (01-099) <> SET OFF DRV C RESET <> 66 - <>12 1 [] A [a ] (01-103) [] C RESET 2 [SW] A [a ] <> <> (01-144) D RESET SVON <> <> <>(M24V) (01-145) D RESET SVON <> <> <> (01-146) D RESET SVON <> 67 - <> <>(DC24V) D RESET SVON (01-147) <> <> <> (01-148) D RESET SVON <> <> (01-149) D RESET SVON <> <> Communicati on error. (01-150

JXCx-OMT0061CN

C RESET <> <>1 2 (1-103) C RESET 1 [] A [a ] [] A [a ] 2 [SW] <> <> ( (1-106) RESET SVON ) C <>1 <> <> 1-144 RESET SVON D 73 - <> ON <>(M24V) 1-145 RESET SVON (1) D <> <> <> 1-146 RESET SVON (1) D <> <> <>(C24V) RESET SVON (1) 1-147 D <> <> <> (1-148) RESET SVON (1) D <> 74 - <> 1-149 RESET SVON D <> <> <> *2 LED PLC 11 10: RESET SVON PLC 1-150

LEC-OM032xx

Comm Format: Data-SINT Comnection Parameters Instance Size Input 100 256 Output 150 256 Configuration 1 0 It is not necessary to set Connection and ModuleInfo. RSLogix5000TM is a registered trademark of Rockwell Automation. 20 - 5. External connection 5. 1 CN4: Power supply connector Connect the power supply. The gateway unit and the controller (LEC) should have the common 0V line.

IDX-OM-W016

Air Pressure 1.0MPa Ambient Temperature 2 ~ 40oC(Relative Humidity of 85% or less) Power source 1 AC230V10% 50Hz (Note 4) Specification Operating current(Note 2) 1.2A 1.2A 1.2A 1.4A 2.7A 2.9A Electrical Power consumption(Note 2) 180W 180W 180W 208W 385W 420W Circuit Breaker (Note 3) 5A 10A Noize at 50Hz 50dB Condenser Air cooling Refrigerant R134aHFC(WGP:1300) Refrigerant Charge Quantitiy 150

HRX-OM-M005

Table 7-1 Water Quality Standards Substance Facility water Circulating water spec. spec. pH (25C) 6.5 to 8.2 6.0 to 8.0 Electrical conductivity (25C) (s/cm) 100 to 800 0.5 to 300 Chloride ion (mgCl-/L) Max. 200 Max.50 Sulfate ion (mgSO42-/L) Max. 200 Max.50 Acid consumption (pH4.8) (mgCaCO3/L) Max. 100 Max.50 Total hardness (mgCaCO3/L) Max. 200 Max.70 Calcium hardness (mgCaCO3/L) Max. 150

Membrane Air Dryer

IDG75 IDG100 IDG60H IDG75H IDG100H Compressed Air Fluid Range of operating conditions Inlet air pressure MPa 0.31.0 -550 -550 Inlet air temperature oC Ambient temperature oC Standard performance Outlet air atmospheric pressure dew point oC Inlet air flow rate L/min(ANR) 725 900 1190 665 830 1110 Outlet air flow rate L/min(ANR) 600 750 1000 600 750 1000 Purge air flow rate L/min(ANR) 125 150

Coolant valve

Rc1/4 12 to 14 Rc3/8 22 to 24 Warning Rc1/2 28 to 30 Rc3/4 45 to 50 Rc1 65 to 70 Rc1 1/4 80 to 90 Rc1 1/2 100 to 110 Rc2 140 to 150 5. Connection of piping to products When connecting piping to a product, refer to its operation manual to avoid mistakes regarding the supply port, etc. 5 SGC200-OMM0002-F SGC / SGH Series Coolant Valve / Precautions 3 Be sure to read this before handling.

Fieldbus system EtherNet/IP TM compatible SI unit

Input =100 Output =150 Configuration =105 (5)Size: Set as below. Input =Number of inputs connected. Output =Number of outputs connected. Configuration =0 (4) (1) (5) (2) (3) -61No.EX-OMN0032-D I/O Map Each unit of the product has its own I/O occupied byte.

SI unit for DeviceNet ®

Installation example Nm L 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 L1 45 55.5 66 76.5 87 97.5 108 118.5 129 139.5 150 160.5 171 181.5 192 202.5 213 L2 89.8 110.8 131.8 152.8 173.8 194.8 215.8 236.8 257.8 278.8 299.8 (mm) : L1 shows the dimensions of the VQC1000 series solenoid valve.

EXxx-OMK0006

Please refer to the individual catalog for dimensions when other manifolds are connected. n m L 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 L1 45 55.5 66 76.5 87 97.5 108 118.5 129 139.5 150 160.5 171 181.5 192 202.5 213 L2 89.8 110.8 131.8 152.8 173.8 194.8 215.8 236.8 257.8 278.8 299.8 Wiring (for power supply, communication and input) and piping are installed on only one side of the product

Fieldbus system (SI unit – PROFIBUS DP compatible)

Please refer to an individual catalog for the size when other manifolds are connected. n_m L 0 1 2 3 4 5 6 7 8 L1 45 55.5 66 76.5 87 97.5 108 118.5 129 L2 89.8 110.8 131.8 152.8 173.8 194.8 215.8 236.8 257.8 n_m L 9 10 11 12 13 14 15 16 L1 139.5 150 160.5 171 181.5 192 202.5 213 L2 278.8 299.8 Wiring (for power supply, communication and input) and piping are done on only one side.