IZx-OMP0064

mA Residual voltage 1 V or less (Load current at 100 mA) Max. load current: 100 mA Residual voltage 1 V or less (Load current at 100 mA) Max. applied voltage: 26.4 VDC Max. load current: 100 mA Residual voltage 1 V or less (Load current at 100 mA) Max. load current: 100 mA Residual voltage 1 V or less (Load current at 100 mA) Max. applied voltage: 26.4 VDC Maintenance detection signal Output

Series CJ5-S ø10, ø16 Stainless Steel Cylinder

. () Minimum Stroke for Auto Switch Mounting D-G5BAL 20 25 32 40 50 63 100 80 HY !" # !" #! !" $!% ! (1 % -) (2 ) (& -) & -! !" (* // 4! 5 6 / ) 7 !! -/% Proper Auto Switch Mounting Position and Its Mounting Height C M 3 3 3 & () & / * -! D-G5BAL Hs *//!! . () B A () 20 25 32 40 50 63 80 100 Auto Switch Mounting Bracket / Part No. D* -!

MHF2

Protrusion of Auto switch Lead wire type In-line entry Perpendicular entry Illustration MHZ Auto switch Hysteresis L L Auto switch operating position (ON) Finger position MHF Auto switch operating position (OFF) MHL D-M9 D-F9W D-M9V D-F9WV Model MHR Open Close Open Close Open Close Open Close Open Close Open Close Open Close Open Close Open Close Open Close Open Close Open Close 4.5 4.5 4.5

MHF2

Protrusion of Auto switch Lead wire type In-line entry Perpendicular entry Illustration MHZ Auto switch Hysteresis L L Auto switch operating position (ON) Finger position MHF Auto switch operating position (OFF) MHL D-M9 D-F9W D-M9V D-F9WV Model MHR Open Close Open Close Open Close Open Close Open Close Open Close Open Close Open Close Open Close Open Close Open Close Open Close 4.5 4.5 4.5

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Parenlneses CPA1 BN do Boot with Boot' BORE D E G'GB J K M MM N P H z.

3 Port Air Operated Valve Series SYJA300

It can be used in the vacuum (up to 100 kPa) or low pressure line with 0.15 MPa or less.

Sensor Monitor

(Additional range) Relation between analog input and digital display Set value A B 0.002 0 kPa 2 kPa -0.1 0 kPa -101 kPa F0.1 -100 kPa 100 kPa 0.1 0 kPa 100 kPa 0.5 0 kPa 500 kPa 1 0 MPa 1 MPa 2 0 MPa 2 MPa 5 0 MPa 5 MPa 10 0 MPa 10 MPa 20 0 MPa 20 MPa 25 0 MPa 25 MPa USEr Input value (setting) Input value (setting) Available display unit and minimum set value Pressure range Rated pressure

How to Order MB Series ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Air Cylinder: Standard Type Double Acting, Single Rod

B Basic L Axial foot F Rod ange G Head ange C Single clevis D Double clevis T Center trunnion * Trunnion type is mounted before shipment. * Other mounting brackets 32 to 100: Shipped together. 125: Assembled before shipment. * For applicable auto switches, refer to the table below. * Only for D and T mounting types. * Pivot bracket is shipped together with the product. * For details, refer

VNC

42 54 100 105 120 20 24 24 134 146 162.5 135 140 155 210.5 226 250 130 150 180 Flange Type Port size: 65F, 80F Electrical entry hole: G1/2 Manual override (Non-locking) 4 x 2-18 mouting hole (80F: 8 x 2-18) Model Applicable flange 65 80 H F E D C B A 1 4 1 4 405.5 441.5 VNC81 -65F VNC91 -80F 65 80 140 150 204 235 175 185 305.5 341.5 210 240 17-4-26 7 Series VNC Coolant Valve: Air Operated

Electric Actuator/High Rigidity Slider Type Ball Screw Drive Series LEJS AC Servo Motor ( 100/200 W )

Example) S2S2: Standard cable (2 m) + Driver (LECSS2) S2 : Standard cable (2 m) Nil : Without cable and driver Applicable Stroke Table 4 )Standard DProduced upon receipt of order Stroke (mm) Model 200 400 300 500 600 700 800 900 1000 1200 1500 LEJS40 LEJS63 ) ) ) D D ) ) ) ) D D D D ) ) D ) D D D 4: Strokes other than those shown above are produced as special order (1 mm increments).

Speed Controller: Standard Type Series AS In-line Type

Meter-out M5 type U10/32 port AS3200-02-D Meter-out M5 type U10/32 port AS2210-01-D AS3210-02-D Component Parts No.

Prevents Micro-Bubbles

Dimensions LLCA--C Stations 4-Mounting hole for W Y A K D L3 L2 L1 (Max.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

A L D VQZ D KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 3.2 4 6 8 10 16 16 18 20.5 22 31.5 32 35 39 43 3.2 6 8 10 12 VQD Color: White VZS VFS EXH port silencer VS 63 Silencer is installed in the EXH port.

ASR

) L6 L8 Note 4) A2 M L7 L4 A1 Note 4) Weight (g) Note 5) Note 1) d D3 MAX.

High Purity Chemical Valve

Dimensions LLCmA-mm-C Stations 4 x Mounting hole for W Y A K D L3 L2 L1 (Max.

HRX-OM-X084

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-9 Connection of RS-232C 3.3 Installation HRR Series 3-18 HRX-OM-X084 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

Ejector Valve Unit Series ZYY/ZYX 1

Y3 X3 ZY -07L Max. vacuum pressure: 53 kPa Y3 X3 ZY -07S Max. vacuum pressure: 84 kPa Exhaust Characteristics Flow Characteristics Exhaust Characteristics Flow Characteristics 50 50 100 100 100 100 Vacuum pressure Suction flow rate (l/min(ANR)) Air consumption flow rate (l/min(ANR)) Suction flow rate (l/min(ANR)) Air consumption flow rate (l/min(ANR)) 40 40 80 80 80 80 Vacuum pressure (kPa

Digital Flow Switch (Integrated display type)

Model Max. rated flow Model Max. rated flow [L/min] [L/min] PFM710--C/E 10 (5) PFM710--D/F 10 (5) PFM725--C/E 25 (12.5) PFM725--D/F 25 (12.5) PFM750--C/E 50 (25) PFM750--D/F 50 (25) PFM711--C/E 100 (50) PFM711--D/F 100 (50) : ( ): Fluid: CO2 : ( ): Fluid: CO2 Flow adjustment needle revolution Flow characteristics (reference value) -57No.PF-OMJ0006-J Pressure loss (at 350 [kPa]) -58No.PF-OMJ0006

ITV-E

Repl ace t he sol enoi d val ve. For t he repl acem ent procedure cont act SM C. Sol enoi d val ve f ai l ure. Prevent over current errors by ensuri ng t he l oad m eet s t he speci f i cat i on. O ver current errors i n out put Ref er t o t he SM C w ebsi t e ( U RL ht t p: //w w w . sm cw orl d. com ) f or m ore i nf orm at i on about t roubl eshoot i ng.

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D-DN