7.5

0 o 2 4 (B) (A) 2 4 (B) (A) 3 5 1 (EB) (P) (EA) 3 5 1 (EB) (P) (EA) 4(A) 2(B) i 5(EA)/3(EB) 1(P) 3 position closed center 3 position closed center/exhaust center/pressure center 3 position exhaust center 2 4 (B) (A) 2 4 (A) (B) !1 q y w e r t o !

LEC-OM02704CN

9960-1: 1 ) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4.

V

O D Y S I Z E 1 M3 2 M5 3 18 4 14 5 38 D I M E N S I O N S S E R I E S (N)ASV T E E T Y P E S Y M B O L S W I T H B U I LTI N S I L E N C E R B O D Y T Y P E 1 Tee 2 Elbow P O R T T H R E A D M3 M3x0.5 M5 M5x0.8 01 1/8 02 1/4 03 3/8 04 1/2 T U B I N G D I A M E T E R Metric (mm) 04 4mm 06 6mm 08 8mm 10 10mm 12 12mm Imperial (inch) 07 1/4 09 5/16 11 3/8 13 1/2 Model Applicable T H D1 D2

AC Servo Motor Driver (CC-Link Type ）

A L 3 7 # 0 0 P B 1 0 P B 1 1 P B 1 2 P B 1 6 S p d 0 0 1 Point table error details For the point table No.1 speed data error Point table No. with error Error item Spd: speed Acc: acceleration time constant Dec: deceleration time constant 15 113 16. SERVO MOTOR 16.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

1021-VQ2400 1021-VQ2301 1021-VQ2401 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r 1021-VQ2500 1021-VQ2501 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Component Parts Component Parts No.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

1021-VQ2400 1021-VQ2301 1021-VQ2401 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r 1021-VQ2500 1021-VQ2501 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Component Parts Component Parts No.

VFS

Port Port size BP01 BP02 P, A, B Rc Rc , EA, EB M5 Rc 1 8 1 8 ( ): Port size P02 1 4 1 8 Sub-plate Compact: Non plug-in VFS210--(B) Sub-plate assembly part no.: VFS2000-CS-(B) (01: Rc , 02: Rc ) 1 8 1 4 01 02 S01 S02 5-bottom ported size (Refer to the below right.) 2-4.5 mounting hole Bottom ported Port Size Port Port size S01 S02 EA, EB Rc Rc P, A, B Rc Rc 1 8 1 4 1 8 1 8 1 (Center) Bottom

VQ5000

Set pressure with a flat head screw driver. 42 Base Mounted Type Series VQ5000 Plug-in Unit Metal seal type Rubber seal type (A) 4 (B) 2 VQ5101 (A) 4 (B) 2 VQ5100 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5201 (A) 4 (B) 2 (A) 4 (B) 2 VQ5200 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5301 VQ5300 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5401 VQ5400 (A) 4 (B) 2 (A) 4

LVQ

S) C A B D 3/8 3/8 1/46 1/46 A B (Max.

Fluoropolymer Piping Equipment

3 4 4 5 5 6 6 A A B C A B A B A B A B 1 2 1 2 1 2 3 1 2 1 2 1 2 SMC Connection example Note 1) For each body class, the second and later numbers or symbols indicate reducing.

AC Servo Motor Driver (Network card type ）

_ _ 1 A 346 _ _ 0 B 818 _ _ 1 B 333 _ _ 0 C 750 _ _ 1 C 321 _ _ 0 D 692 _ _ 1 D 310 _ _ 0 E 642 _ _ 1 E 300 _ _ 0 F 600 _ _ 1 F 290 7 7 7.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Description Bore size Stroke range 12, 16 1 to 29 Stroke range 20, 25 1 to 49 32 to 63 1 to 99 Part no.: CQ2KB50-57D CQ2KB50-75D with 18 mm width spacer inside. B dimension is 115.5 mm.

Modular F.R.L. Unit

Metal bowl Optional specifications B B B B B B N.O.: Black N.C.: Gray M5 x 0.8 Barb fitting Applicable tubing: T0604 B O S 1/4 10 One-touch fitting Width across flats 17 O S Standard specification Accessory specification With bracket With auto drain Model Port size A B C D P E F G H J K L M B AFD20 1/8, 1/4 40 97 10 40 18 30 27 22 5.4 8.4 40 2.3 115 AFD30 1/4, 3/8 53 129 14 53 57 16 41 40

Fieldbus System

D side U side Stations 7 6 5 4 3 2 1 n [Communication connector D-sub] (DIN rail clamping screw) BUS OUT BUS R R R 76.7 76.7 62.5 BUS IN 58.7 3 3 3 X 12 X 12 X 12 40.5 B B B B B B B B PWR PWR P P P 25 1 1 1 A A A A A A A A A 18.5 9.5 7.5 56.9 13 20.5 (7.5) One-touch fitting [1(P), 3(R) port] 13.4 56.9 Applicable tube O.D.

Table of Contents

B side traveling parallelism to A side Refer to Graph (1).

V100

For driving air operated valves for fluid control N.C N.O N.C N.C Air operated style fluid control valve Vacuum valve Vacuum pad A, B 1(P) A, B 1(P) A, B 1(P) A, B 3(P) 3(R) 3(R) 3(R) 1(R) Vacuum releasing air Atmospheric pressure or micro pressure The characteristic values shown in the catalog are representative values, not warranting the performance. 4-3-1 2 Series SY100 Precautions Be

Best Pneumatics Vol. 14

73 D 52 59 75 75 C 73 86 92 93 B 160 201 239 242 A 40 53 70 75 G 40 55 80 80 AW20K AW30K AW40K AW40K-06 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 Optional specifications With barb fitting With drain guide Metal bowl Metal bowl with level gauge Model Port size B 160 214 252 255 B 234 272 275 B 208 246 249 B 209 247 250 AW20K AW30K AW40K AW40K-06 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 78 Mist Separator

Modular F.R.L. Unit

4 3/8 1/2 1/4 3/8 1/2 3/4 1/4 1/4 3/4 1/8 Port size Port size 3/4 1 3/4 1 1 3/8 3/8 1 1/4 How to Order How to Order AF 30 B X430 03 AF 30 B X425 03 Body size Body size For high pressure 20 30 40 50 60 For high/low temperature 30 40 50 60 3/8 1/2 3/4 1 1/8 3/8 1/2 3/4 1 X430 X440 Low temperature High temperature Option Option Description With bracket Symbol Nil B Symbol Nil B Description

Hydraulic

) Load (kN) 126 Technical Data 2 Series CH2E, CH2F, CH2G, CH2H Stroke range limit charts: Bore sizes 50, 63, 80, 100 Bore size 50 B-rod C-rod 5 2 4 8 3 7 2 4 8 3 7 5 2000 6 1 6 1 1000 Stroke (mm) 500 100 50 0.5 1 5 10 20 30 0.5 1 5 10 20 30 Load (kN) Load (kN) Bore size 63 B-rod C-rod 2000 1 2 8 5 4 3 7 6 1 2 3 5 4 8 7 6 1000 Stroke (mm) 500 100 50 0.5 1 5 10 20 50 0.5 1 5 10 20 50 Load (

Fieldbus System

thread (Rc, G, NPT/NPTF) 1/2 [1(P) port] 11.5 101.2 15.7 8 95.5 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 77.3 72 56.6 43.5 42.7 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 20.6 21.5 11.5 1/8: 1/8" female thread (Rc, G, NPT/NPTF) 1/8 (External pilot port) 27 31 1/8: 1/8" female thread (Rc, G, NPT/NPTF) 1/8 (Pilot EXH port) 38.7 (6.5) 25 65.5 1/4, 3/8, C8, C10, C12 [4(A), 2(B) port] 1/4: 1/4" female thread (Rc