Body Size: 40, Model Type: Filter Regulator + Lubricator, Thread: NPT, Port Size: 3/4, Float Type Auto Drain: w/o Auto Drain, Pressure Gauge/Digital Pressure Switch: w/o Pressure Gauge, Attachment: without Attachment, Set Pressure: 0.05 to 0.85 MPa Setting, Bowl Type + Lubricator: Metal Bowl w/Level Gauge + Lubricator w/Drain Cock, Bowl Guard: None, Air Filter Drain Port: Drain Guide 1/8:

Body Size: 40, Model Type: Filter Regulator + Lubricator, Thread: NPT, Port Size: 3/4, Float Type Auto Drain: w/o Auto Drain, Pressure Gauge/Digital Pressure Switch: Square Embedded Type Pressure Gauge, w/Limit Indicator, Attachment: without Attachment, Set Pressure: 0.05 to 0.85 MPa Setting, Bowl Type + Lubricator: Metal Bowl, Bowl Guard: None, Air Filter Drain Port: w/Drain Cock, Exhaust

Body Size: 40, Model Type: Filter Regulator + Lubricator, Thread: G, Port Size: 3/8, Float Type Auto Drain: w/o Auto Drain, Pressure Gauge/Digital Pressure Switch: Square Embedded Type Pressure Gauge, w/Limit Indicator, Attachment: Mounting Position: AF + AFM + AR + V, Set Pressure: 0.05 to 0.85 MPa Setting, Bowl Type + Lubricator: Standard (Polycarbonate Bowl + Lubricator), Bowl Guard: None

Body Size: 40, Model Type: Filter Regulator + Lubricator, Thread: G, Port Size: 1/2, Float Type Auto Drain: w/o Auto Drain, Pressure Gauge/Digital Pressure Switch: Square Embedded Type Pressure Gauge, w/Limit Indicator, Attachment: Mounting Position: AF + AFM + AR + V, Set Pressure: 0.05 to 0.85 MPa Setting, Bowl Type + Lubricator: Standard (Polycarbonate Bowl + Lubricator), Bowl Guard: None

Body Size: 40, Model Type: Filter Regulator + Lubricator, Thread: NPT, Port Size: 3/8, Float Type Auto Drain: w/o Auto Drain, Pressure Gauge/Digital Pressure Switch: w/o Pressure Gauge, Attachment: without Attachment, Set Pressure: 0.05 to 0.85 MPa Setting, Bowl Type + Lubricator: Standard (Polycarbonate Bowl + Lubricator), Bowl Guard: None, Air Filter Drain Port: w/Drain Cock, Exhaust Mechanism

Body Size: 40, Model Type: Filter Regulator + Lubricator, Thread: NPT, Port Size: 1/2, Float Type Auto Drain: w/o Auto Drain, Pressure Gauge/Digital Pressure Switch: Square Embedded Type Pressure Gauge, w/Limit Indicator, Attachment: without Attachment, Set Pressure: 0.05 to 0.85 MPa Setting, Bowl Type + Lubricator: Metal Bowl + Lubricator w/Drain Cock, Bowl Guard: None, Air Filter Drain

5 Port Air Operated Valve Series SYA3000/5000/7000 1

M5 x 0.8 (Piping port) (Piping port) With fiflter (80 mesh) 21.5 R1 P 8.5 6 6 2-1.8 (Bleed port) 17 17 15 R2 21 With fiflter (80 mesh) 24 32 45.5 3 position closed center/exhaust center/pressure center SYJA5 20-M5 3 position closed center/exhaust center/pressure center SYJA5 40-01 3 4 5 3 4 5 28 2-4.3 2-M5 x 0.8 2-M5 x 0.8 37.5 23 (Pilot port) (For mounting) (Pilot port) A B 11 20 23 5 3

ZSE1/ISE1

23 SE1-01-16/-17 I Z I Z SE1-01-16C/-17C Pressure setting trimmer 2 Pressure setting trimmer 1 Pressure setting trimmer 2 Pressure setting trimmer 1 SET1 SET2 L L H H 15 SET1 SET2 L L H H 15 Indicator light (Red, Green) 23 Indicator light (Red, Green) 23 600 (3000) 56.5 600 (3000) 49 8.5 47 47 3.5 3.5 8.5 2-3.5 Mounting hole T1: NPTF 1/8 01: R 1/8 M5 x 0.8 depth 5 Piping port M5 x 0.8 depth

KS/KX

17 23 23 29 38 56 64 82 76 93 1 8 1 4 14 8.6 8.6 4 30 31 32 37.5 38 39.5 40.5 42 1 8 15.2 17 26 6 18.5 21.6 14.9 17 8 1 4 3 8 1 4 3 8 1 2 3 8 1 2 10 18.5 22 31.5 21 30.5 25.0 22 7 24 20.9 24 34 22 8 35.1 35.1 12 Reference dimensions after R(PT) thread installation.

Digital Gap Checker ( compatible)

Refer to the "Bracket mounting" dimensions (page 23) for the mounting hole dimensions. Mount the bracket using M5 mounting screws (2 pcs.) or equivalent. The bracket plate thickness is approximately 1.6 mm.

Multi-Connector with One-Touch Fittings Series DMK

(Optional) Multi-connector Socket side only Socket case Plug side only ADC12, White half-polished finish DMK6-23 DMK6S-23 Plug case DMK6P-23 6 DMK-C-6 DMK6-04 DMK6S-04 Clamp ring DMK6P-04 SPCC, Chromated Plate DMK12S-23 DMK12-23 DMK12P-23 12 DMK-C-12 SPCC, Zinc chromated A5052, Hard anodized Holder DMK12S-04 DMK12-04 DMK12P-04 Socket C3604BD Electroless nickel plated, POM, Stainless steel

Multi-connector with One-touch Fittings DMK Series No. of Connecting Tubes: 6, 12

Model Plug side only DMK6P-23 DMK6P-04 DMK12P-23 DMK12P-04 Multi-connector DMK6-23 DMK6-04 DMK12-23 DMK12-04 Socket side only DMK6S-23 DMK6S-04 DMK12S-23 DMK12S-04 Cover Clamp ring 6 DMK-C-6 DMK6-P01 12 DMK-C-12 DMK12-P01 Specifications Applicable tubing materials Applicable tubing O.D.

Clean Regulator/Fluororesin Type

Description Material Note 12 Fluorine coated Valve spring 1 14 15 16 Insert bushing Nut Collar New PFA New PFA New PFA 13 Fluorine coated Valve spring 2 883 SRF Series Dimensions/SRF10 Integrated fittings 23 Pilot port Rc, NPT 1/8 12 R 54 32 48 40 1 2 SMC 4 x 3.5 (Mounting hole) 23 IN OUT 26 32 5.5 (81) HEX.18 With nut 23 Pilot port Rc, NPT 1/8 12 R 48 32 40 1 2 SMC 4 x 3.5 (Mounting hole

ø6, ø8, ø12, ø16, ø20, ø25 Series MXQR Air Slide Table/Reversible Type

23 30 315 250 210 170 140 385 23 25 23 35 30 47 745 490 450 380 340 335 655 40 45 40 60 53 75 1400 1250 835 735 670 610 605 1000 65 80 65 115 120 170 2900 2650 2350 1400 1200 1100 1100 1100 1750 110 130 110 180 140 220 4700 4300 3450 2400 1950 1750 1750 1750 2750 2

PFA/PFW

An application which has the possibility of having negative effects on people, property, or animals, requiring special safety analysis. 23 Series PFA/PFW Specific Product Precautions 1 Be sure to read before handling. Refer to page 23 for safety instructions. Design and Selection Design and Selection Warning Warning 9. Operate at a flow rate within the flow rate measurement range.

ZK2-C

ONOFF ON-OFF ON (23 ) "digit" () 0 () SI ONOFF ON -12NO.ZK2-OM00801-B A ON (23 ) (OUT1) "" (23 ) () 5%R.D.(5%) "()" () "F" () -13NO.ZK2-OM00801-B ,FG (Assy) No.

VEX-OMY0001

(P2) 12(P1) a,b 12(P1),23(P2) (2) a 12(P1) 1(P)2(A)3 3(R) 3(R) b 23(P2) 2(A) 2(A)3(R)1 1(P) 1(P) 12(P1) 1 2 3 23(P2) 4 5 6 7 8 POM 9 -12No.VEX-OMY0001 () () 3(R) 2(A) 1(P) 1(P) 2(A) 3(R) () a b P1P2 2(A) 1(P) -13No.VEX-OMY0001 (7) (1) (2) (3) (4) (5) (6) (12) (7) (8) () (9) (5) (6) (14) (10) (P2) (5) (4) (11) (4) (13) DCAC (7) 14 No.VEX-OMY0001

For Water, Oil, Steam, Air

Series VXZ22/23 Bronze NBR FKM N.C.

Process Pump Series PA3000/5000/PAX1000 Series PB1000

to 131) Ambient temperature C (F) 5 to 50 (23 to 122) 5 to 55 (23 to 131) 5 to 50 (23 to 122) Outlet air atmospheric pressure dew point C (F) Standard performance 20 (-4) Inlet air flow rate l/min (ANR) (SCFM) Note 2) 625 (22.0) 62 (2.19) 125 (4.41) 250 (8.82) 375 (13.24) Outlet air flow rate l/min (ANR) (SCFM) 50 (1.8) 100 (3.5) 200 (7.1) 300 (10.6) 500 (1.77) Purge air flow rate l/min

Made to Order Specifications:

Refer to How to Order for standard specifications on pages 14-20-3, 16, 23, and 31.