48

2) 39.5 28 10 8.5 3 26 12 7.5 11 93 13 4.5 13 17 M5 x 0.8 12.5 M5 x 0.8 32 (25 x 2) 25, 50, 100 150, 200 44.5 30 12 11.5 3 32 15 7.5 13 109 16 8 16 21 M6 x 1 15 M6 x 1 40 (32 x 2) 54 37 16 13 4 41 19.5 21 12 17.5 9 120 20.5 4 20.5 27 M8 x 1.25 20 M6 x 1 Bore size OA OB OL P PD PE PW Q R S T U VA WA X YY YL Z Nil TN TF Nil TN TF 20 (16 x 2) 4.3 8 3.5 M5 x 0.8 7.5 19 21 10 36 18 66

Manifold Specifications

Applicable cable O.D. 3.5 to 7 (Lead wire length) MAX. 10 : With light/surge voltage suppressor 3-3-45 Series VZ3000 Type 42 Manifold: Side Ported VV5Z3-42Station 1-01 Manual override (Non-locking) Grommet (G), (H) M5 x 0.8 (PE port) (Pitch) (Mounting hole) 4-Rc 1/4 (1(P), 3/5(R) port) G: 300 mm H: 600 mm (Lead wire length) (Pitch) 24.5 P=17 (4(A), 2(B) port) 2n-Rc 1/8 (mm) Stations 2 3 66

MTS

) 48 58 (65) 5 (12) D-F9W, D-F9WV 10 (17) 0 0 54 59 (66) 48 58 (65) 5 (12) ( ): Denotes the values of D-A9V, D-M9V and D-F9WV.

EX500-GPR1A.eng

SI unit for SV series valves ( EX500-S 01 ) ( EX500-Q 02 ) PWR PWR COM COM 64.4 80.3 64.4 28 66 84.8 79.4 68.5 80.3 series 54.5 60 60 43.2 43 43.2 22.2 22 22.2 13 10.5 28.6 44 0 1 36 10.5 1 0 22 23 The mounting and removing methods of SI unit are as shown below.

VDW Series

L dimensions n (stations) Dimensions 3 8 9 2 6 10 4 7 5 L1 66 176 198 44 132 220 88 154 110 L2 75 185 207 53 141 229 97 163 119 L3 84 194 216 62 150 238 106 172 128 Manifold composition 3 stns. x 1 2 stns. + 3 stns. x 2 3 stns. x 3 2 stns. x 1 3 stns. x 2 2 stns. x 2 + 3 stns. x 2 2 stns. x 2 2 stns. x 2 + 3 stns. 2 stns. + 3 stns.

3-Screen Display Multi-channel Digital Sensor Monitor Up to 4 pressure sensors can be connected!

Analog voltage 1 to 5 V Analog voltage 1 to 5 V Or IO-Link hub (Commercially available) Process Data Bit offset 79 78 77 76 75 74 73 72 71 70 69 68 67 66 65 64 Item CH11 measured value: 16-bit signed integer Bit offset 63 62 61 60 59 58 57 56 55 54 53 52 51 50 49 48 Measurement data of sensors for 4 channels are combined and cyclically sent as a process data.

LUBRICATOR

35 11 13 90 3.2 47 AL60-A 70 66 35 11 13 90 3.2 47 Semi-standard specifications Drain cock with barb fitting Metal bowl Metal bowl with sight glass Metal bowl with sight glass and drain cock With drain cock Metal bowl, drain cock Model 59.9 56.3 59.3 87.7 84.5 87.5 115.1 123.6 104.1 117.6 124.1 147.1 155.6 136.1 149.6 156.1 149.1 157.6 138.1 151.6 158.1 220.1 228.6 209.1 222.6 229.1

Compact Guide Cylinder

98 72 50 12 140 M8 29.5 29.5 43 M10 x 1.5 22 M10 x 1.5 8.6 14 9 Rc1/4 NPT1/4 G1/4 13 19 49 35 115 52.5 133 104 122 92 Bore size [mm] WA WB X XA XB XC XL YY YL Z 25 st or less Over 25 st 100 st or less Over 100 st 25 st or less Over 25 st 100 st or less Over 100 st 32 24 48 124 33 45 83 42 4 4.5 3 6 M8 x 1.25 16 21 40 24 48 124 34 46 84 50 4 4.5 3 6 M8 x 1.25 16 22 50 24 48 124 36 48 86 66

Air Filter

40.5 11 13 113 3.2 52.5 259.9 AF60-D 1 95 234.1 32 45 30 45 70 66 40.5 11 13 113 3.2 52.5 273.9 Semi-standard specifications Metal bowl with PC/PA bowl Metal bowl level gauge With element Model With With With With With With service indicator barb drain drain drain drain drain fitting guide cock guide cock guide B B B B B B A C1 AF20-D 91.4 87.4 93.9 40 50.6 AF30-D 123.9 122.2 117.8 122.3

High Power Cylinder Series RHC

FT NF E E 10 10 A F K JD N N JC NA S + Stroke F H WH B FX ZZ + Stroke FZ (mm) H1 GB GA FZ FW FY FX FT FD F E D B A H2 Bore size (mm) Stroke range (mm) Effective thread length 15.5 5 47.5 53.5 68 38 21 51 6 7 16 14.5 10 32 18 8 200 to 700 20 19.5 6 49.5 56.5 70 44 27 53 9 7 16 18 12 36 22 8 200 to 700 25 19.5 6 51.5 55 72 50 33 55 9 7 19 18 12 44 22 9 200 to 1000 32 21 8 51.5 56 84 60 36 66

CV/MVGQ

For details about auto switches with pre-wire connector, refer to page 10-20-66. 10-15-10 Valve Mounted Cylinder Single Acting, Spring Return/Extend Series CVJ3 Specifications An auto switch cylinder with the switch installed can also be manufactured.

VK300

Refer to the above drawing for other dimensions. n L 1 38 28 2 57 47 3 76 66 4 95 85 5 114 104 6 133 123 7 152 142 8 171 161 9 190 180 10 209 199 11 228 218 12 247 237 13 266 256 14 285 275 15 304 294 16 323 313 17 342 332 18 361 351 19 380 370 20 399 389 L1 L2 1417 A VK300 Series Specific Product Precautions Be sure to read this before handling the products.

Pressure Relief 3 Port Valve with Locking Holes

26.5 VHS40-D 1/4, 3/8, 1/2 3/8 69.7 73.9 41.3 70 63 52 71 29 70 35.5 VHS40-06-D 3/4 1/2 71.7 75.9 43.3 75 63 52 71 29 70 35.5 VHS50-D 3/4, 1 1/2 86.5 90.7 44.5 90 80 72 90 33 90 45 Options specifications With bracket With built-in silencer Model K L M N Q R S T U V W VHS20-D 30 25.3 34 5.4 8.4 27 60 40 2.3 3 13 VHS30-D 41 33 43 6.5 10 36.5 71 50 2.3 3 17 VHS40-D 50 44 57 8.5 19 43.5 88 66

NVEPA|VEFseies

otr (101) 0.83 (211 5.08 (129) 3.74 (9s) 2.56 (65) 2.01 (51) U v w x Y z AA BB cc DD EE FF GG HH JJ KK 1.38 (35) 2.52 (64) 0.35 (9) 1.42 (36) o-u6 (154.5| 4.7 4 020.s) 2.09 (53) 3.23 t82l 2.28 (58) 3.19 (81) o.47 (121 4.O2 (102) 1.97 (50) 4.35 (110.5) z.ud (s2) 2.60 (66) Millimele|s in psrentheses NVEF, NVEP PROPORTIONAL VALVE Valve Installation Wiring Procedure for DIN FILTRATION Cord Relainer

XLC-25,40 ∗ -F7NJ ∗ - ∗ Series

seal (maintenance part) 6 (SUS304) Bellows (material: SUS316L) 5 Valve (material: SUS304) () 2 Valve seal (maintenance part) 4 (A6063) C C C C D D D D Body (material: A6063) K C C C C E E E E E E E E KF flange F F F Fn n n n (KF) () Heater (option) Auto switch H H H H J J J J G G G G B B B B A A A A A A A A Model A B C D E Fn G H J K XLC-25 50 120 48 1 12 40 26 39 27.5 8 XLC-40 65 171 66

High Vacuum L Type Valve

Outer dimensions Indicator Handle Ass'y(Maintenance part) (Including ,,,) 1 Bellows holder (Material: SUS304) 7 Heater(option) Exterior seal (Maintenance part) 3 Bellows (Material: SUS316L) Valve (Material: SUS304) 6 5 Valve seal (Maintenance part) 2 Body (Material: A6063) 4 D C E E F C H B G A A Unit: mm Model H XLH-16 40 100.5 38 1 30 17 35 XLH-25 50 114 48 1 12 40 26 41 XLH-40 65 162.5 66

ASx-OMX0006

for other sizes, re-insert it into the One-touch fitting without cutting the tube.When the tubing is re-inserted into the One-touch fitting, confirm that the tubing goes through the release button smoothly. tube tube tube 3.2 1/8 44 or more 35 or more 25 or more 16 or more 4 5/32 56 or more 44 or more 26 or more 20 or more 3/16 67 or more 52 or more 38 or more 24 or more 6 84 or more 66

MHL2

Finger opening port) M5 X 0.8 (Finger closing port) Auto switch mounting groove (4 locations) G 76 MHS 4-M8 X 1.25 (Piston rod and rack screw) H 33.2 6.5 11.5 1 16 27 18 Width across flats 13 23.5 MHC2 52 29 A (4 locations) 38 18.5 (81) MHT2 29 29 12 MHY2 40 14 Closed E 14 MHW2 64 21 21 Open F MRHQ 4-M8 X 1.25 through Auto switch (Thread for mounting attachment) J 146 244 282 A B C D E F G H 66

VK300

Refer to the above drawing for other dimensions. n L 1 38 28 2 57 47 3 76 66 4 95 85 5 114 104 6 133 123 7 152 142 8 171 161 9 190 180 10 209 199 11 228 218 12 247 237 13 266 256 14 285 275 15 304 294 16 323 313 17 342 332 18 361 351 19 380 370 20 399 389 L1 L2 4-5-9 10 Series VK300 Precautions Be sure to read before handling.

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

4.5 (Mounting hole) 2 18.5 R P R P 11.5 18 37 11.5 18 37 67.5 59 MAX.10 71.5 Pg.7 Manual override (Non-locking) 4-Rc 1/8 1(P), 3(R) port 18 25 31 53.5 300 (lead wire length) mPm Indicator light (Type DZ only) 4-Rc 1/8 1(P), 3(R) port 75.5 83 Manual override (Non-locking) n-Rc 1/8 2(A) port Applicable cable O.D. 4 to 6.5 A A P = 19 20 L Dimension n: Stations n L L1 L2 1 38 28 2 57 47 3 76 66