VQ

Wire color Black Brown Red Orange Yellow Pink Blue Violet Gray White White Yellow Orange Yellow Pink Blue Violet Gray Orange Red Dot marking VQ 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 4 1 5 10 VQZ 16 11 20 17 VZ Multi-connector pin arrangement DIN rail mounting bracket VS White Black Black Red Red Red Black Black White Pin No. 1 SOL. 1 station SOL. 2 stations 2 SOL. 3 stations

Series VS

-8 VSS8-10 Description Description VSR8-8 VSR8-10 VSR8-10 VSR8-6 VSR8-6 VSR8-8 VSR8-10 VSR8-8 VSR8-6 1.

How to Order Series ZM Vacuum Ejector With Valve and Switch For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

Lead wire length: 1000 mm ZM-K1LO . 1 pc. VJ10-36-1A-10 . 2 pcs.

Power Valve Precision Regulator

VBA VBAT AP100 841 VEX13 Series 0 3 Specifications VEX1A33 VEX1B33 VEX113 0 3 VEX123 0 3 VEX133 0 3 VEX153 0 3 VEX173 0 3 VEX193 0 3 Model Port 1(P) 2(A) 3(R) M5 01 M5 01 01 02 01 02 03 02 04 04 06 10 12 14 10 20 1 8 1 8 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 2 3 4 2 1 1 1 1 1 Port size M5 M5 1 2 4 1 4 1 2 Operation Manual knob (Push locking slotted type) and Air operated type Manual knob (Push locking

58

(Different surfaces, Same surface), With 1 pc. 100 95 90 10 D-Y69 D-Y7PV D-Y7WV 100 + 30(n 4) 2 95 + 30(n 4) 2 90 + 30(n 4) 2 10 + 30(n 2) 2 (n = 4, 8, 12, 16) With n pcs. (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) (n = 2, 4, 6, 8) With 2 pcs.

Actuator Position Sensor

3 (62) Logic bit(24) 8 bit 0 Y 4 1 R/W 0x003F 2 R/W Mode bit(16) 8 bit 0 Y 5 BDC2 (63) 3 R/W Hysteresis bit(0) 16 bit 10 Y 1 to 400 SetPoint1 bit(16) 16 bit 3 Y 3 1 R/W 0x4000 BDC3 2 R/W SetPoint2 bit(0) 16 bit 3 Y 3 (16384) Logic bit(24) 8 bit 0 Y 4 1 R/W 0x4001 2 R/W Mode bit(16) 8 bit 0 Y 5 BDC3 (16385) 3 R/W Hysteresis bit(0) 16 bit 10 Y 1 to 400 SetPoint1 bit(16) 16 bit 3 Y 3 1 R/W 0x4002

Fieldbus system (PROFIBUS DP compliant)

Terminal No. 2 4 6 8 10 12 14 16 18 20 Output No. 1 3 5 7 9 11 13 15 24 V Type +COM EX510-S102 Terminal No. 1 3 5 7 9 11 13 15 17 19 Output No. 0 2 4 6 8 10 12 14 0 V Type + + + + + + + + -COM Terminal No. 2 4 6 8 10 12 14 16 18 20 Output No. 1 3 5 7 9 11 13 15 0 V Type + + + + + + + + -COM : Only a flat cable type manifold (P kit) can be connected to EX510-S 02 .

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

12 2 x 2 x M6 x 1.0 effective depth 10 2 x 5.4 through 52 12 1 28 40 Flat washer 10 10 7 7 28 42.5 + Stroke 5 40 47.5 + Stroke Note 1) Standard strokes available in 5 mm increments.

Rotary One-touch Fittings Manifold Series KM

-06-08-01S-3 33 80 83 84 17 20 15.5 12.8 45.4 17 11.1 18.5 76.5 77 78 41 6 KM14-06-08-02S-3 15.2 12.8 KM14-06-08-03S-3 1 4 3 8 1 2 10 6 KM14-06-10-02S-3 44 45 67 7.5 KM14-06-10-03S-3 18.5 12.8 KM14-06-10-04S-3 87.5 88.5 92 81.5 82 84 19 22 21 19 12.8 45.4 17 12.8 21 1 4 3 8 1 2 10 8 KM14-08-10-02S-3 48 88 89 90.5 94 95 98.5 19 71 7.5 KM14-08-10-03S-3 18.5 15.2 KM14-08-10-04S-3 22 22.5 19



size P , A port R port Body size Port 01 02 02 03 04 04 06 10 10 12 14 20 Nil 01 02 8 1 1 4 1 4 1 3 8 3 Body ported Base mounted 2 1 2 1 5 4 3 1 1 1 1 2 4 1 1 7 4 1 2 1 9 2 Without sub-plate 8 1 2 4 1 Option Description Part no. 0 3 0 3 0 3 0 3 0 3 0 3 VEX1A33 VEX1B33 VEX113 VEX123 VEX133 VEX153 VEX173 VEX193 B Bracket (With bolt and washer) VEX1-18-1A VEX1-18-1A VEX3-32A VEX5-32A VEX7-

Ejector Valve Unit Series ZYY/ZYX 1

ZSE1-00-14 ZSE1-00-15 ZSE1-00-16 ZSE1-00-17 ZSE1-00-18 ZSE1-00-19 ZSE1-00-55 Model -X129 (-X130) -X129 (-X130) -X129 (-X130) -X129 (-X130) -X129 (-X130) -X129 (-X130) -X129 (-X130) Sensor type Diffusion type semiconductor pressure sensor Set pressure range 0 to 101 kPa Hysteresis 1 to 10% of set pressure (Adjustable) 3% full span or less (Fixed) 1 to 10% of set pressure (Adjustable) 1% full

VP3145/3165/3185

0.47 5.4 23 0.32 6.2 21 0.39 5.8 28 0.36 7.6 26 0.35 7.0 VP3145 3 4 1.5 Weight (kg) Port size Effective area (mm2) Valve model Grommet 1 (IN), 2 (OUT) 3 (EXH) 1 2 (IN OUT) 230 280 310 570 650 650 2 3 (OUT EXH) 280 310 330 650 670 670 3 4 1 4 1 2.0 VP3165 1 1 4 1 1 4 1 VP3185 2.8 1 2 1 2 2 For grommet Conduit terminal +0.2 kg 4-10-2 3 Large Size 3 Port Solenoid Valve Rubber Seal Series

ZB-OM00301

10 ZB1-VPN3A KJ H 04 04 C2 2 H 02 2 C4 4 L 04 4 N1 1/8" 01 1/8" N3 5/32" 03 5/32" L2 2 4 L4 4 LN1 1/8" LN3 5/32" -N KJL04-C1-N 10 Assy ZB1-FE3-A 30m ZA ** 10 1 0-101kPa15V 2%F.S ZA ZB1-SE1-A 3 -100100kPa15V 2%F.S.

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

Relation of Operating Temperature and Maximum Operating Pressure Particulate Generation Grade Classifications 1.2 10 Average particle concentration Particles/ft Grade 4 Max. operating pressure MPa 1.0 10 0.8 Grade 3 10 0.6 10 Grade 2 10 0.4 Grade 1 100.2 0 5 0 20 40 60 1 0.1 0.2 Particle size m or less 0.3 0.5 Operating temperature C 1 Series AS-FPQ/FPG How to Order AS 2 1 1 2 F P Q 01 06

KB

KBE1-04 KBE1-06 KBE2-06 KBE2-08 KBE2-10 KBE3-08 KBE3-10 KBE3-12 KBE4-12 15.0 15.5 17.0 15.5 15.5 19.5 31.5 32.0 33.5 35.5 38.0 39.5 41.0 42.0 41.5 14 14 34.5 35.5 37.5 39.0 41.5 43.5 45.0 46.0 44.0 17.9 27.0 26.0 29.5 57.5 51.6 63.0 83.4 66.6 M12 X 1 16.0 4 13.6 17 6 M14 X 1 17.0 17 17.6 M16 X 1 M20 X 1 M16 X 1 M20 X 1 19 24 19 24 18.5 21.0 18.5 21.0 8 10 8 10 22 25.2 18.5 22.0 12 M22 X 1

Series CJ5-S ø10, ø16 Stainless Steel Cylinder

Bore size (mm) Mounting bracket Description 16 10 Foot Foot x 1 CJ-L016 Stainless steel CJK-L016 Stainless steel Flange Flange x 1 CJ-F016 Stainless steel CJK-F016 Stainless steel T-bracket T-bracket x 1 CJ-T010 Stainless steel CJ-T016 Stainless steel T-bracket is applicable to the double clevis style (D).

IDX-OM-W094

-1 5.2 . 5-2 5.2.1 . 5-2 5.2.2 . 5-2 6 . 6-1 6.1 . 6-1 6.2 . 6-4 IDFA60/70/80/90 Series IDX-OM-W094 7 . 7-1 7.1 . 7-1 7.2 GWP . 7-2 7.3 . 7-3 7.4 . 7-4 7.5 . 7-5 8 A . 8-1 8.1 . 8-1 8.2 . 8-1 8.3 . 8-1 8.4 . 8-1 8.5 . 8-2 9 C . 9-1 9.1 . 9-1 9.2 . 9-1 10 L . 10-1 10.1 . 10-1 10.2 . 10-1 10.3 . 10-2 10.4 . 10-2 11 R . 11-1 11.1 . 11-1 11.2 . 11-1 11.3 .

Stainless Steel Heat

x 3 x 60 = 2736g/h. 6 7 8 3 1 2 3 4 5 Dew point conversion chart 60 50 40 30 Pressure dew point C 20 10 1.5MPa 1.3MPa 1.1MPa 0.9MPa 0.7MPa 0.5MPa 0.3MPa 0.1MPa Atmospheric pressure 0 -40 -30 -20 -10 -60 -50 -60 -50 -40 -30 -20 -10 0 10 20 30 Atmospheric pressure dew point C 8 Series IDUS/IDFS Safety Instructions These safety instructions are intended to prevent a hazardous situation and/

Compact Rotary Actuator

socket head bolt 6 12 Hexagon socket head cap screw 2 11 Small hexagon nut 2 10 Magnet 2 Only magnet built-in type included 9 Wear ring 4 8 Packing retainer 2 7 Bearing retainer 1 6 Shaft 1 5 Piston 2 4 End cover 1 3 Plate 1 2 Cover 1 1 Body 1 No.

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

(Atmospheric conditions) 1.3 x 10-7 Pam3/sec Leakage:1.3 x 10-7 Pam3/sec or less (at normal temperatures, excluding gas permeation) 0.1 MX Note 1) This data indicates deterioration with age of the average number of particles per operation under the following test conditions. 5.0 10-7 Particulate generation [particles/cycle] Standard value Note 1) The data indicates the leakage measured in