5.0 MPa Pilot Operated 2/3 Port Solenoid Valve & Check Valve Series VCH

2 28 DIN connector 233 Series VCH400 Dimensions VCH410 G1/4 x 7 Pilot EXH G1/2, 3/4:97 G1:102 41 17.5 62 50.5 17 16 (6) 106 (76) 42.5 51.5 G1/2 Applicable cable O.D. 6 to 12 3(EXH) 188 3 3 2(OUT) 2 2 75 15 1 1 66 47 28 50 2 x 8.5 Mounting hole 3 x G1/2 x 15 G1/2, 3/4: 70 G1: 80 3 x G3/4 x 16.3 3 x G1 x 19.1 1(IN) 234 Made to Order Made to Order Specifications: Please consult with SMC for

EX500

TYPE1 TYPE1 TYPE1 TYPE1 TYPE1 TYPE1 TYPE1 TYPE1 MADE IN JAPAN MADE IN JAPAN MADE IN JAPAN MADE IN JAPAN MADE IN JAPAN MADE IN JAPAN MADE IN JAPAN MADE IN JAPAN MADE IN JAPAN (mm) 1 2 3 4 5 6 7 8 Stations Rail length L1 110.5 123 148 173 185.5 210.5 223 248 Mounting pitch L2 100 112.5 137.5 162.5 175 200 212.5 237.5 Manifold length L3 L4 82 102 122 142 162 182 202 222 12 12 12.5 12.5 13 13

VZS2000

.: 3.5 to 7 MAX.10 156.5 300 (Lead wire length) 72.5 With light/surge voltage suppressor With light/surge voltage suppressor Pg7 109.5 102 Other dimensions are the same as the grommet type. Other dimensions are the same as the grommet type. 3-7-14

Metal Seal/Rubber Seal Series VQ Body Ported

(F, P, J, L, S kit) Valve and junction box assembly U side end plate assembly D side end plate assembly Station increase parts Housing assembly and SI unit Note 1) S kit P/J kit F kit L kit PS (Side entry) PS (Side entry) Note 1) S kit is composed of a flat ribbon cable housing assembly (AXT100-1-PU20) of q SI unit and w P kit (20 pins). 2-4-102 Exploded View of Manifold Series VQ

PC Wiring System

Dimensions 10.5 10.5 103 (3.6) 16.7 28.3 45 OD/040LP OUT RS4.1 CH 1 CH 5.1 53.5 55 (3.7) 113 0 + 1 3 2 4 7 6 5 10 9 8 13 12 11 14 15 Refer to page 50 in CAT.E02-20 for the junction cable part number. 101 100 102 104 103 106 105 109 108 107 112 111 110 113 114 115 4.5 Models Output Circuit diagram PCW-993193 PCW-993194 PCW-993225 Page 37 in CAT.E02-20 Page 37 in CAT.E02-20 Page 39 in CAT.E02

MXW

Bore size (mm) Rod size (mm) Operating direction -X7 -X9 -X11 -X33 -X39 -X42 -X45 PTFE grease 0.2 0.3 0.4 0.5 0.6 0.7 Grease for food R 20 30 40 51 61 71 101 Adjusting bolt, long specification (Adjustment range: 15 mm) 8 4 Without built-in auto switch magnet L 15 23 30 38 45 53 75 Fluororubber seal R 45 68 90 113 136 158 226 Anti-corrosive specifications for guide unit 12 6 L 34 51 68 85 102

How to Order MGQ M Cylinder stroke (mm) Refer to “ Standard Stroke ” on page 339. Slide bearing Ball bushing bearing Bearing type M L 12 mm 16 mm 20 mm 25 mm 32 mm Bore size 12 16 20 25 32 40 mm 50 mm 63 mm 80 mm 100 mm 40 50 63 80 100 M9BW 2 pcs. 1 pc. n

, 100 20, 30, 40, 50, 75, 100 125, 150, 175, 200 M L MGQ 20, 25 MGJ MGQ 32, 40 50, 63 80, 100 25, 50, 75, 100, 125 150, 175, 200 M L MGP MGQ OUT(N) IN(N) Theoretical Output (N) Bore size (mm) MGG Operating pressure (MPa) Rod size (mm) Piston area (mm2) Operating direction 1.0 0.9 0.8 0.7 0.6 0.5 0.4 0.3 0.2 MGC Made to Order Specifications (For details, refer to pages 1829 to 2021.) 113 102

D. P. Lube ALD600/900 Series

The condition of the generation of micromist can be checked from the oil filler port. 2 2 Fluid Air Proof pressure 1.5 MPa Operating pressure range 0.15 to 1.0 MPa 0.1 to 1.0 MPa 0.03 to 0.1 MPa 0.05 MPa 102 L/min (ANR) Operating pressure differential range Recommended press. differential Note 3) Press. differential setting min. flow 2000 5000 2000 5000 Bowl capacity between levels (cm 3)

Air Cylinder Short Type Standard: Double Acting, Single Rod Series CM3 ø20, ø25, ø32, ø40 How to Order CM3 L 40 150 With auto switch CDM3 M9BW L 150 40 With auto switch (Built-in magnet) Number of auto switches Rod end thread Nil Mounting 2 pcs. Bo

For other applicable auto switches, please contact SMC. 1 Series CM3 Specifications 20 25 32 40 Bore size (mm) Pneumatic Type Double acting, Single rod Action Air Fluid 145 psi (1.0 MPa) Proof pressure 102 psi (0.7 MPa) Maximum operating pressure 7 psi (0.05 MPa) Minimum operating pressure Without auto switch: 14 to 158F (10 to 70C) (No freezing) With auto switch: 14 to 140F (10 to 60C) (

® SEMI Thermo-chiller Series HRW Fluorinated Fluid Type

3.4 gal (13 L) Approx. 3.7 gal (14 L) Circulating fluid recovery tank volume Note 7) 3.2 gal (12 L) Port size Rc3/4 Wetted parts material Copper brazing (Heat exchanger), Stainless steel, EPDM, Silicone, PPS, Fluororesin Temperature range 50 to 95F (10 to 35C) Required flow rate Note 8) 2.6 gpm (10 L/min) 5.3 gpm (20 L/min) 6.6 gpm (25 L/min) 10.6 gpm (40 L/min) Inlet pressure range 44 to 102

Refrigerant R134a (HFC) IDFA  E Series 3E, 4E, 6E, 8E, 11E, 15E (Inlet air temperature: 35 ° C)

Note 3) Refer to pages 101 and 102 for further details on optional specifications. Note4)OptionH(Auto-drainbowltype:Metalbowl)isonlyapplicabletotheIDFA6E-20.However,optionsK,L,andVcannotbe selected in combination. 92 B

Centering Unit MACM Series

For safety instructions, actuator and auto switch precautions, refer to the Handling Precautions for SMC Products and the Operation Manual on the SMC website: http:// www.smcworld.com Stroke [mm] 12 20 30 50 Table center movable range [mm] 24 40 60 100 Centering accuracy [mm] 1 or less Action Double acting Fluid Air Operating temperature 32 to 140F [0 to 60C] Operating pressure 58 to 102

Series PPA PPA100/101/102 Compact Manometer 4

4 Compact Manometer Series PPA PPA100/101/102 How to Order Unit specifications PPA10 0 M Pressure specifications Nil M Option/Case holder With the unit switching function(1) 0.1 to 1 MPa (For high pressure) 101 to 10 kPa (For vacuum) 10 to 100 kPa (For low pressure) 0 1 2 Fixed in SI unit (2) None With PPA-B Nil B Note 1) With unit switching function is not permitted to sell for the domestic

VACUUM GENERATOR, VACUUM EJECTOR, M18, 102 lb

VACUUM GENERATOR, VACUUM EJECTOR, M18, 102 lb

VACUUM GENERATOR, VACUUM EJECTOR, M18, 102 lb

VACUUM GENERATOR, VACUUM EJECTOR, M18, 102 lb

VACUUM GENERATOR, VACUUM EJECTOR, M18, 102 lb

VACUUM GENERATOR, VACUUM EJECTOR, M18, 102 lb

VACUUM GENERATOR, VACUUM EJECTOR, M18, 102 lb