5 Port Solenoid Valve SY Series

OneOne1 4 7.4 (3.8) 0.36 (0.29) 1.9 (0.86) 1.8 (1.4) 0.35 (0.37) 0.44 (0.35) Exhaust center Exhaust center 3 position 3 position touch fitting touch fitting 1.3 0.33 0.33 4.3 0.3 0.99 158 384 166 111 116 336 342 392 for 6 for 8 4.4 (3.2) 0.53 0.35 (0.26) 0.41 1.0 (0.71) 2.1 1.7 (0.80) 0.44 0.31 (0.47) 0.33 0.42 (0.23) 1.7 Pressure center Pressure center Single Single 103 145 303 346 107 153

RB/RBL/RBQ

Substitute 11.7 J for E and 0.3 for . 30.7 36.8 43.0 67.5 73.6 92.0 153 J 38.5 46.2 53.9 84.7 92.4 115 192 Substitute both absorbed energy E and collision speed for Data A in order to calculate the corresponding weight of the impacting object. 50.3 60.3 70.4 111 121 151 251 Me 260 kg D63.6 76.3 89.1 140 153 191 318 7.

ASR

18.5 37.5 18.5 63.9 8 67.3 25.3 24.3 21 R1/4 49.2 55.8 50.8 25.9 49.8 44.8 18.8 120 21 143 59 32.6 10 122 146 22 34.4 60.8 12 20.9 160 137 36.5 17 62.9 6 140 163 18.5 37.5 18.5 63.9 8 67.3 25.3 24.3 21 R3/8 49.2 57.4 52.4 25.9 51 46 20 130 21 153 59 32.6 10 133 156 22 34.4 60.8 12 20.9 237 219 32.6 21 18.5 62.8 10 86.3 30 29.7 25 R3/8 65.5 67.6 60.1 27.7 61.2 53.7 20.6 221 239 22 34.4 20.9

Process Valve

Model Main port 1(A), 2(B) A B C D E F G H I J K L M N P Q R S T U VNB2-10A VNB2-15A VNB3-20A VNB4-25A 3 8 1 2 3 4 1 144.5 55 125.5 52 26 4.5 24.3 2.3 25 34 63 42 28 14 72.5 80.5 75 80 84.5 124 60.5 73 135.5 151.5 137 153 156 172 62 72 31 36 5.5 6.5 28.3 33.3 2.3 2.3 30 35 43 49 80 90 50 60 35 44 17.5 22 84 100 92 108 84 90 89 95 93.5 99.5 Port size: 10A, 15A, 20A, 25A Vacuum pilot K L N

MGQ

138 100 124 M10 x 1.5 M10 x 1.5 M10 x 1.5 150 130 69 148 110 132 M10 x 1.5 M10 x 1.5 M10 x 1.5 188 160 88 185 140 166 M12 x 1.75 M12 x 1.75 M12 x 1.75 224 190 108 221 170 200 M14 x 2 M14 x 2 M14 x 2 MGQL (Ball bushing bearing) A, DB, E Dimensions MGQM (Slide bearing) A, DB, E Dimensions Bore size (mm) A E DB Symbol Stroke A DB E 50 st or less 53 54 60 61 84 89 Over 50 st 90 90 102 102 143 153

Hydraulic Cylinders

CHKDB Bore size Rod end thread type Auto switch Quantity XC63 Stroke Intermediate stroke Stroke 55, 60, 65, 70 80, 85, 90, 95 Applicable tube For 75mm stroke For 100mm stroke Dimensions CHKDB--XC63 B A 55, 60, 65, 70 80, 85, 90, 95 Stroke Bore size (mm) 32 A B A B 136 126 40 140 130 165 155 50 146 135 171 160 63 155 142 180 167 80 170 153 195 178 100 197 171 222 196 Note) Dimensions other

XLA Series

C D C E E (K flange ) (KF flange) Fd Fn Heater (option) Auto switch (option) H G B A A Unit: mm Model A B C D E Fn Fd G H XLA-16 40 103 38 1 30 17 40 XLA-25 50 113 48 1 12 40 26 39 XLA-40 65 158 66 2 11 55 41 63 XLA-50 70 170 79 2 11 75 52 68 XLA-63 88 196 100 3 11 87 95 70 69 XLA-80 90 235 117 3 11 114 110 83 96 XLA-100 108 300 154 3 11 134 130 102 131 XLA-160 138 315 200 3 11 190 180 153

XLF Series

F Fd d d d Heater (option) Auto switch (option) G G G G H H H H B B B B A A A A A A A A Unit: mm Model A B C D E Fn Fd G H XLF-16 40 103 38 1 30 17 40 XLF-25 50 113 48 1 12 40 26 39 XLF-40 65 158 66 2 11 55 41 63 XLF-50 70 170 79 2 11 75 52 68 XLF-63 88 196 100 3 11 87 95 70 69 XLF-80 90 235 117 3 11 114 110 83 96 XLF-100 108 300 154 3 11 134 130 102 131 XLF-160 138 315 200 3 11 190 180 153

MNB

BP C D F FY FZ GA GB 20Up to 700 32 6 87 7 1/8 46 54 19.5 3 25 97 10 32.5 56 13 72 22 17 12 13 38 83 10 Data Up to 800 40 8 101 1/8 9 63 52 27 3 31 104 10 38 65 14 83 30 22 16 13 46 91 14 Up to 1000 50 11 9 120 1/4 75 65 32 2 38.5 120.5 12 46.5 77 15.5 100 35 27 20 14 52 104.5 18 Up to 1000 63 11 9 135 75 1/4 90 32 2 39.5 134.5 12 56.5 92 16.5 115 35 27 20 14 62 119.5 18 Up to 1000 80 13 153

CM2

x 2 22 8 46.5 42.5 21.5 0 0.039 32 With Rod Boot h Symbol P RR S U Z ZZ Bore size (mm) B3 f e Stroke Bore size (mm) 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 20 9 62 11.5 115 124 1/8 20 17 36 30 68 81 93 106 131 156 181 25 9 62 11.5 119 128 1/8 25 17 36 32 72 85 97 110 135 160 185 32 12 64 14.5 124 136 1/8 32 17 36 32 72 85 97 110 135 160 185 40 12 88 14.5 153

10

FB FY TX TX TT FT FZ FX TY ZZ + Stroke Rubber Bumper [mm] Bore size [mm] ZZ Bore size [mm] FB FD FT FX FY FZ TT TX TY ZZ 32 147 40 151 50 172 63 172 80 212 100 212 125 249 32 50 7 10 64 32 79 17 48 49 141 40 55 9 10 72 36 90 22 55 58 145 50 70 9 12 90 45 110 22 68 71 164 63 80 9 12 100 50 120 28 81 81 164 80 100 12 16 126 63 153 34 102 102 202 100 120 14 16 150 75 178 40 124 124 202 125 138

DOC1023125

Therefore, the "Absolute encoder ID mismatch error alarm (153)" will not be generated when turning on the power supply in (1). Return to the origin operation For (1), (2), and (3) described above, the first operation command of IN0 and IN1 after turning on the power supply will be the operation to return to the origin.

3 Port Solenoid Valve

L n L: Dimensions n: Stations 1 2 3 4 5 6 7 8 9 10 11 12 L1 L2 L3 L4 L5 53.7 63.9 74.1 84.3 94.5 104.7 114.9 125.1 135.3 145.5 155.7 165.9 42.2 52.4 62.6 72.8 83 93.2 103.4 113.6 123.8 134 144.2 154.4 50.2 60.4 70.6 80.8 91 101.2 111.4 121.6 131.8 142 152.2 162.4 61.2 71.4 81.6 91.8 102 112.2 122.4 132.6 142.8 153 163.2 173.4 68.6 78.8 89 99.2 109.4 119.6 129.8 140 150.2 160.4 170.6 180.8

CQM

497 269 295 320 345 370 396 OUT 147 245 344 50 1133 1341 701 740 780 821 500 540 580 620 661 IN 181 302 422 32 With Auto Switch (Built-in magnet) OUT 241 402 563 Unit: g IN 317 528 739 Cylinder stroke (mm) Bore size (mm) 5 40 OUT 377 628 880 10 100 40 45 50 75 15 20 25 30 35 12 IN 495 825 1150 59 52 68 77 84 93 50 16 OUT 589 982 1370 77 66 87 97 107 118 20 213 227 242 257 122 138 153

Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W

socket head plug) VV VV 1.1 S WX 8.4 2-4 Bottom port (Applicable O-ring) Y Bore size (mm) 16 20 J M5 x 0.8 M6 x 1 MM M4 x 0.7 M5 x 0.8 A B 6.0 7.5 C 3.5 4.5 CH 25 26 G 13.5 12.5 GA 8.5 GB 16.2 20.0 H 52 58 K 10 12 L 110 130 LD 3.6 4.8 LH 38 39 LL 35 45 LW 84 88 M 6.0 7.5 N 20 25 NC 14 17 NE 49.5 55.5 NH 16.5 21.7 NW 56 60 090 110 Bore size (mm) 16 20 PA 40 50 PB 94 100 PG 3.5 4.5 PP Q 153

High Vacuum L Type Valve

Dimensions Unit: mm Model A B C D E Fn Fd G H J K XLD-25 50 123 48 1 12 40 26 41 16 7.5 XLD-40 65 170 66 2 11 55 41 63 20 15 XLD-50 70 183 79 2 11 75 52 68 20 17.5 XLD-63 88 217 100 3 11 87 95 70 72 20 20 XLD-80 90 256 117 3 11 114 110 83 98 20 26.5 XLD-100 108 321 154 3 11 134 130 102 133 20 38 XLD-160 138 335 200 3 11 190 180 153 114 30 40 11 XL*-OMI0011-E 7.

240

size (mm) Bore size (mm) Operating direction -XC22 Fluororubber seal 0.3 0.5 0.7 19 14 8 OUT 28 6 3 14 10 6 IN 21 55 39 23 OUT 78 10 4 46 33 19 IN 66 141 101 60 OUT 201 16 6 121 86 51 IN 172 220 157 94 OUT 314 20 8 185 132 79 IN 264 Weight (g) Stroke (mm) Model 5 10 15 20 25 30 40 50 60 MXH6 MXH10 MXH16 MXH20 61 104 194 352 66 112 204 369 75 125 222 400 80 133 232 417 88 146 250 448 93 153

MGF

Theoretical Output OUT (N) IN (N) (N) Operating pressure (MPa) Bore size (mm) Operating direction Piston area (mm) Rod size (mm) 1.0 0.9 0.8 0.7 0.6 0.2 0.5 0.4 0.3 1256 1130 1004 879 753 251 628 502 1256 OUT 376 40 25 765 688 612 535 459 153 382 306 765 IN 229 3117 2805 2493 2182 1870 623 1558 1246 3117 OUT 935 63 36 2099 1889 1679 1469 1259 419 1049 839 2099 IN 629 7853 7067 6282 5497 4711

Compact Guide Cylinder Series MGQ

, E Dimensions Bore size (mm) 32 40 50 63 80 100 MGZ TA TB V W X YY YL Z T (mm) (mm) 112 122 138 148 185 221 2 2 2 2 2.5 2.5 1 1 1 1 1.5 1.5 80 90 100 110 140 170 5 10 10 10 15 15 100 110 124 132 166 200 M8 x 1.25 11 11 12.5 15 18 21 16 17 17 19 21 25 E DB A 50 st or less 53 54 60 61 84 89 Bore size (mm) Bore size (mm) 32 40 50 63 80 100 MGT A DB E M8 x 1.25 Over 50 st 90 90 102 102 143 153

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

SYJ SX VK VZ VF VFR VP7 VQC SQ Stations n L1 L2 L3 L4 2 135.5 125 105 15 3 4 5 6 7 8 148 137.5 121 13.5 160.5 150 137 11.5 185.5 175 153 16 198 187.5 169 14.5 210.5 200 185 12.5 235.5 225 201 17 VQ VQ4 C4 C6 C8 SS5Y5-45TUStations B-Q (9 pins) VQ5 VQZ VQD C4 C6 C8 C4 C6 C8 Note) Dimensions L1 to L4 of SS5Y5-45TDStations B-Q VFS are the same as SS5Y5-45TUStations B-Q.