High Vacuum L Type Valve Dimensions Unit: mm Model A B C D E Fn Fd G H J K XLD-25 50 123 48 1 12 40 26 41 16 7.5 XLD-40 65 170 66 2 11 55 41 63 20 15 XLD-50 70 183 79 2 11 75 52 68 20 17.5 XLD-63 88 217 100 3 11 87 95 70 72 20 20 XLD-80 90 256 117 3 11 114 110 83 98 20 26.5 XLD-100 108 321 154 3 11 134 130 102 133 20 38 XLD-160 138 335 200 3 11 190 180 153 114 30 40 11 XL*-OMI0011-E 7.
size (mm) Bore size (mm) Operating direction -XC22 Fluororubber seal 0.3 0.5 0.7 19 14 8 OUT 28 6 3 14 10 6 IN 21 55 39 23 OUT 78 10 4 46 33 19 IN 66 141 101 60 OUT 201 16 6 121 86 51 IN 172 220 157 94 OUT 314 20 8 185 132 79 IN 264 Weight (g) Stroke (mm) Model 5 10 15 20 25 30 40 50 60 MXH6 MXH10 MXH16 MXH20 61 104 194 352 66 112 204 369 75 125 222 400 80 133 232 417 88 146 250 448 93 153
Theoretical Output OUT (N) IN (N) (N) Operating pressure (MPa) Bore size (mm) Operating direction Piston area (mm) Rod size (mm) 1.0 0.9 0.8 0.7 0.6 0.2 0.5 0.4 0.3 1256 1130 1004 879 753 251 628 502 1256 OUT 376 40 25 765 688 612 535 459 153 382 306 765 IN 229 3117 2805 2493 2182 1870 623 1558 1246 3117 OUT 935 63 36 2099 1889 1679 1469 1259 419 1049 839 2099 IN 629 7853 7067 6282 5497 4711
, E Dimensions Bore size (mm) 32 40 50 63 80 100 MGZ TA TB V W X YY YL Z T (mm) (mm) 112 122 138 148 185 221 2 2 2 2 2.5 2.5 1 1 1 1 1.5 1.5 80 90 100 110 140 170 5 10 10 10 15 15 100 110 124 132 166 200 M8 x 1.25 11 11 12.5 15 18 21 16 17 17 19 21 25 E DB A 50 st or less 53 54 60 61 84 89 Bore size (mm) Bore size (mm) 32 40 50 63 80 100 MGT A DB E M8 x 1.25 Over 50 st 90 90 102 102 143 153
socket head plug) VV VV 1.1 S WX 8.4 2-4 Bottom port (Applicable O-ring) Y Bore size (mm) 16 20 J M5 x 0.8 M6 x 1 MM M4 x 0.7 M5 x 0.8 A B 6.0 7.5 C 3.5 4.5 CH 25 26 G 13.5 12.5 GA 8.5 GB 16.2 20.0 H 52 58 K 10 12 L 110 130 LD 3.6 4.8 LH 38 39 LL 35 45 LW 84 88 M 6.0 7.5 N 20 25 NC 14 17 NE 49.5 55.5 NH 16.5 21.7 NW 56 60 090 110 Bore size (mm) 16 20 PA 40 50 PB 94 100 PG 3.5 4.5 PP Q 153
SYJ SX VK VZ VF VFR VP7 VQC SQ Stations n L1 L2 L3 L4 2 135.5 125 105 15 3 4 5 6 7 8 148 137.5 121 13.5 160.5 150 137 11.5 185.5 175 153 16 198 187.5 169 14.5 210.5 200 185 12.5 235.5 225 201 17 VQ VQ4 C4 C6 C8 SS5Y5-45TUStations B-Q (9 pins) VQ5 VQZ VQD C4 C6 C8 C4 C6 C8 Note) Dimensions L1 to L4 of SS5Y5-45TDStations B-Q VFS are the same as SS5Y5-45TUStations B-Q.
BP C D F FY FZ GA GB 20Up to 700 32 6 87 7 1/8 46 54 19.5 3 25 97 10 32.5 56 13 72 22 17 12 13 38 83 10 Data Up to 800 40 8 101 1/8 9 63 52 27 3 31 104 10 38 65 14 83 30 22 16 13 46 91 14 Up to 1000 50 11 120 9 1/4 65 75 32 2 38.5 120.5 12 46.5 77 15.5 100 35 27 20 14 52 104.5 18 Up to 1000 63 11 135 9 75 1/4 90 32 2 39.5 134.5 12 56.5 92 16.5 115 35 27 20 14 62 119.5 18 Up to 1000 80 13 153
(166) 75 (86) 62 (72) 50 38 50 38 Indicator light PA PA R2 R1 P R2 R1 P Indicator light 49 (64) 49 (64) 2-7.5 Mounting hole 2-7.5 Mounting hole 49 (64) 49 (64) G1/2 (cable 6.8 to 10) G1/2 (cable 6.8 to 10) 153 (166) 141 (154) 108.5 (121.5) 50 (63) 5 3 38 (53) 32 (42) 23 (30) 50 (63) 5 3 1 32 (42) 38 (53) 1 23 (30) 2-Rc3/8, 1/2, 3/4 Ports R1, R2 Rc1/8 Port X (PE) 30 (42) 30 (42) 2-Rc3/8,
Note) Refer to the stroke selection Table in Technical Data 2, starting with pages 153 and 154 to determine stroke limitation depending on the type of mounting brackets that will be used. Then make your selection.
Local Area: (800) 258-9200-www.stevenengineering.com Power supply terminal (M3 thread) No. 1 terminal (Rail mounting hole pitch 12.5) Block separation lever (Station n) (Station 1) (Push type) (mm) 2 stations 3 4 5 6 7 8 9 10 stations Stations n L1 L2 L3 L4 260.5 248 235.5 210.5 198 185.5 160.5 148 135.5 (DIN rail dimension) 250 237.5 225 200 187.5 175 150 137.5 125 233 217 201 185 169 153
AL Model Port size A B C D M N P R B B E F G H J K L M5 X 0.8 38.5 50 70.5 70.5 88 88 108 108 108 16 23 26 26 33 36 40 40 40 105 147.5 4.5 5.5 7 7 9 9 12 12 12 50 80 80 80 105 105 105 105 105 91 140 181 181 238 253 300 310 315 5 5 7 7 7 7 10 10 10 7.5 8.5 11 11 13 13 16 16 16 25.5 38 38 38 41 40.5 48 48 48 84.5 124.5 153 153 188 189.5 268 282 282 26 56.8 60.8 60.8 65.5 69.5 75.5 75.5 78 25
(152) 156 30 62 32 25 17 (11.5) (19.5) 145 155 145(153) 32 35 62 38 17 0.25 stroke (22.5) (13) 164 159(168) 173 40 35 70 48 17 (13) (25) 187 182(194) 199 50 40 78 59 17 (25) (13) 187 182(194) 199 63 40 78 72 18 213 229 207(221) 80 52 80 59 10 213 207(221) 229 100 62 80 71 7 ( ): Denotes the dimensions for long strokes.
Therefore, the "Absolute encoder ID mismatch error alarm (153)" will not be generated when turning on the power supply in (1). Return to the origin operation For (1), (2), and (3) described above, the first operation command of IN0 and IN1 after turning on the power supply will be the operation to return to the origin.
300 5 150 175 200 250 125 45 12 101 114 148 181 43 50 57 63 70 94 37 108 16 121 129 146 188 231 57 66 74 83 92 48 137 20 106 119 132 144 157 439 503 567 632 170 182 208 311 375 93 195 25 134 958 1116 150 166 182 197 213 564 643 721 800 229 245 277 406 485 261 Option Weights Unit: g Bore size (mm) 12 16 20 25 1.5 3 6 12 Male thread Nut Rod end thread 1 2 4 8 Rubber bumper (1) 0 1 2 3 159(153
direction Single unit p. 137 p. 143 p. 149 p. 155 VAC VAC ZP3-T p. 137 p. 143 p. 149 p. 155 With adapter Vertical VAC VAC ZP3-T VAC p. 138 p. 144 p. 150 p. 156 With adapter Lateral ZP3-Y Construction Precautions Mounting Bracket Assembly VAC VAC VAC p. 139 p. 145 p. 151 p. 157 With adapter VAC VAC VAC Vertical ZP3-T p. 140 p. 146 p. 152 p. 158 With buffer Lateral ZP3-Y p. 141 p. 147 p. 153
8A, 10A VX VN VQ Main Port Rc(PT) Model 1 8 1 4 3 8 VNA1-6A VNA1-8A VNA1-10A EZ, TZ, DZ: 9mm longer 4.2-7 VNA 10A, 15A, 20A, 25A Port size EZ, TZ, DZ: 9mm longer Main Port Rc(PT) A H I J K R F G L M B S N C T P D U Q E Model 3 8 1 2 3 4 VNA2-10A VNA2-15A VNA3-20A VNA4-25A 72.5 80.5 74.5 79.5 82.5 125.5 142.5 24.3 63 124 2.3 52 42 25 26 28 34 4.5 14 55 60.5 73 1 84 100 92 108 135.5 137 153
Exhaust port K 1/2 Exhaust port U (32) G1/2 G1/2 E (32) U 24 97.5 E 97.5 6 x M10 x 1.5 x 30 24 6 x M10 x 1.5 x 30 (32) (17) 106 (17) 106 Faston terminal 247 S J 24.4 I R 1/2 Exhaust port K Q 11 (17) 97.5 E U 24 6 x M10 x 1.5 x 30 (32) Note) Refer to page 24 for the dimensions on the mounting side. 106 Dimensions (mm) Conduit terminal Conduit Faston type Model E I J K S R U T Q R 99.5 20 153
16 13 134 150 92 108 9 9 75 140 M8 32 135 35 60 80 50 32 75, 100, 125, 150 200, 250, 300 MGT 125 107 19 16 160 176 110 125 9 12 85 165 M8 37 160 40 70 95 60 38 150 142 25 19 190 210 115 135 11 12 95 200 M10 42 194 45 82.5 115 75 50 Bore size (mm) P Note 2) Q R S T U V W WH X Y Z O 20 25 32 40 50 86 80 M6 x 1 M5 x 0.8 21 12 26 12 40 36 30 140 23 M6 x 1 M5 x 0.8 21 12 31 13 98 47 44 37 80 153
Maximum acceleration: 3000mm/s2 Positioning distance (mm) 400 200 100 10 1 10 40.4 20.4 10.4 1.4 0.5 Speed (mm/s) 100 4.5 2.5 1.5 0.6 0.5 250 2.1 1.3 0.9 0.6 0.5 500 1.4 1.0 0.8 0.6 0.5 A B C D Values will vary slightly depending on the operating conditions. 153 8 Series LG1H20 Standard Motor High Rigidity Direct Acting Guide Without Coupling Motor Output Rolled Ball Screw 100W 15mm /20mm
32 50 75 25 28 20 71 13 89 M10 x 1.5 10 22 33 7 80 3/8 to 750 100 22 M26 x 1.5 60 40 37 41 60 90 30 29 20 71 16 110 M12 x 1.75 10 26 33 8 100 1/2 to 750 (mm) Bore size (mm) Trunnion bracket CD (shaft) Z ZZ LD LE LF LG LH LL LP LT LV LX LY LZ RR S U 0.040 0.076 0.040 0.076 0.040 0.076 0.040 0.076 0.050 0.093 0.050 0.093 0.065 0.117 0.065 0.117 20 8 132 141 7 9 2 14 30 27.6 21 3 56.5 42 30 153