Digital Flow Switch (Remote type monitor unit)

Refer to key-lock function (page 46 ). Press the or button in function selection mode to display [F13]. Press the button. Select security code [Pin] and the set value are displayed in turn. Press the or button to select. Press the button. Return to function selection mode.

Digital Flow Switch

Installation 16 Piping 19 Wiring 21 Outline of Settings [Measurement mode] 25 Flow Setting (set value only) of OUT1 OUT2 [3 step setting mode] 26 Default settings 28 Function Setting [Function selection mode] 28 Default settings 28 F0 Reference condition Unit selection function 29 F1 Setting of OUT1 31 F2 Setting of OUT2 39 F3 Response time 44 F10 Display mode 45 F13 Reversed display mode 46

PFxx-OMO0004CN

No.PF-OMO0004CN-E // PFMB7201 2 10 13 14 16 16 19 21 [] 25 OU1OUT2 {3 ] 26 28 [] 28 28 F0 29 F1 OUT1 31 F2 OUT2 39 F3 44 F10 45 F13 46 F20 47 F22 48 F30 49 F31 50 F80 OFF 51 F81 52 F90 53 F98 55 F99 56 57 61 62 64 65 65 68 71 -1No.PF-OMO0004CN-E (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic

PF-OMM0004_C

5 40 PF3W711 10 100 PF3W721 30 250 -79No.PF-OMM0004-D / A B C D 0.6 V 1 V 5 V 5.4 V 2.4 mA 4 mA 20 mA 21.6 mA -80No.PF-OMM0004-D PF3W704/720/740/711 A AA B D E F G H J K L N P PF3W704 3/8 70 50 30 60 40.6 15.2 24 14 35 26 18 13.6 2.7 14 PF3W720 3/8 1/2 78 54 30 60 40.6 15.2 27 18 39 30 18 13.6 2.7 12 PF3W740 1/2 3/4 98 71 38 68 48.6 19.2 32 28 49 35 28 16.8 2.7 12 PF3W711 3/41 124 92 46

PF-OMN0011_C

No.PF-OMN0011CN-C / / PF3W3## SMC 2 9 12 13 15 15 16 21 23 23 F0 25 F1 OUT1 26 F2 OUT2 34 F3 40 F10 41 F20 45 F22 46 F30 48 F80 49 F81 50 F82 51 F90 52 F96 53 F97 54 F98 57 F99 58 59 62 63 66 66 69 71 -1No.PF-OMN0011CN-C (ISO/IEC)(JIS) 1) 2) 1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules

LV50-OMQ0002

[F10] Sub screen Page 41 Flow direction [F20] External input Page 45 [F22] Analogue output Page 46 Free range analogue output for instantaneous flow: OFF [F30] Accumulated value display Page 47 OFF [F32] Setting of flow direction / back flow detection function.

LFE-OMZ0011

Model Indication and How to Order 11 Summary of Product Parts 14 Definition and Terminology 15 Mounting and Installation 17 Installation 19 Piping Method 20 Wiring 22 Setting the Detected Flow Rate 24 Function Setting 26 Default Setting 26 F 1 Setting of OUT1 28 F 2 Setting of OUT2 36 F 3 Response Time 40 F10 Sub screen display 41 F20 External input 45 F22 Analogue Output in free range 46

HRX-OM-W060

Error [FLT] 5.4 Description of Screen HRL Series 5-46 HRX-OM-W060 Chapter 5 Display and Setting of Various Functions Table 5.4-18 Alarms that allow continuous pump operation (2/2) No. Alarm name Alarms that allow continuous Alarm pump operation Operation CH1 CH2 AL23 CH2 High Press. [OFF] / [WRN] [FLT] AL24 CH2 Low Press. [OFF] / [WRN] [FLT] AL25 CH2 Low Press.

HRX-OM-X084

Communication specification Set value Contents Initial value 485 RS-485 232C RS-232C 5.5 Advanced setting mode HRR Series 5-46 HRX-OM-X084 Chapter 5 Display and Setting of Various Functions RS-485 terminal unit 4. Press the [] key. Displays screen for setting RS-485 terminal unit. Select RS-485 terminal unit.

HRX-OM-X071

Communication specification Set value Contents Initial value 485 RS-485 232C RS-232C 5.5 Advanced setting mode HRR Series 5-46 HRX-OM-X071 Chapter 5 Display and Setting of Various Functions RS-485 terminal unit 4. Press the [] key. Displays screen for setting RS-485 terminal unit. Select RS-485 terminal unit.

High Vacuum L Type Valve

11 for the standard material (FKM) at ambient temperatures , excluding gas permeation Flange type KF (NW) KF (NW), K (DN) Main material Body: aluminum alloy, Bellows: SUS316L, Main part: SUS304 and FKM (standard sealant material) Surface treatment for body Outside: hard anodized Inside: basis material Actuation pressure MPa(G) 0.3 to 0.6 0.4 to 0.6 Air consumption cm3 Note 2) for 0.5MPa 46

CG1x-OM0006N

M4x0.7x22L 20 NBA-088S 25 NBA-106S (mm) 32 BGS1-032S 40 BAF-04S 50 BAF-05S 63 BAF-06S 80 BAF-08S 100 BAF-10S D-G5BA mm 20 25 32 40 50 63 80 100 D-G5BA 5 5 5.5 6 7 7.5 7.5 8 30% 1 2 2 mm mm D-G5BA A B Hs 20 25 31.5 31.5 24 26 24 25 28 36 36 46 80 28.5 32 40 50 63 32.5 33 37 36.5 45.5 45.5 42 48.5 57.5 56 100 57 46 68 (mm) 10 20 75 15 3. 3-1. 1 2 3 4 5 6 7 8 9 10 1 2 3 416

MX-OMP0051

8.5 ON 14 2-9 3mm 3mm 2-10 5~6mm 0.05~0.15Nm 90 ( ) 15 D-M9M9W A 10 20 30 40 50 75 100 125 150 10 20 30 40 50 75 100 125 150 MXQ6(A) 18 7.4 7.4 7.4 7.4 0 0.6 3.6 5.6 5.6 MXQ8(A,C) 13.9 13.9 13.9 13.9 13.9 13.9 5.1 5.1 5.1 11.1 28.1 5.1 MXQ12(A,C) 16.5 16.5 16.5 16.5 16.5 16.5 16.5 14.1 6.1 6.1 14.1 14.1 33.1 33.1 MXQ16(A) 20.6 20.6 20.6 20.6 20.6 20.6 20.6 20.6 20 14 14 21 21 27 46

MONOSASHI-KUN WITH BRAKE CONTROLLER

Error Messages & Countermeasures 46 11-1. Controller 11-2. Brake Units Life Span 12. Appendix 50 12-1. Data Sheet Specifications are subject to change without prior notice CE2/CEU2 MONOSASHI-KUN WITH BRAKE/CONTROLLER Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

CEx-OMQ0013

CE*-OMQ0013-F / / 1 7 1-1 1-2 1-3 1-4 8 2-1 2-2 2-3 13 3-1 3-2 3-3 15 4-1 4-2 4-3 17 5-1 5-2 5-3 21 6-1 6-2 22 7-1 7-1-1 7-1-2 7-2 7-2-1 7-2-2 7-3 7-3-1 7-3-2 7-3-3 INPUT 7-3-4 OUTPUT 7-3-5 7-3-6 28 36 9-1 9-1-1 9-1-2 9-1-3 9-2 9-2-1 9-2-2 9-3 9-3-1 45 10-1 10-2 46 11-1 11-2 50 12-1 CE2/CEU2 / *1) (ISO/IEC)(JIS) *2) *1) ISO 4414: Pneumatic fluid power

CEx-OMQ0011

cm)r MPa 4 <>40 20kg 0.Pa 20 440.5 100031.830 4 P6 P7 10ms 9.99sec () (, ON ON P8Err12 * *10msec 9.99sec *() (, * 11-1-2 PRESET " PRG STEP P1 " P1 1000.0 " " 45 WRITE READ UPDOWN LEFTRIGHT WRITE 1 PRG STEP P1 1000.0 " " " " UP 1000.0 DOWN RICHT LEFT 2P2 P2 () 9.9mm PRG STEP P2 1.0 " " " " <> 1.0 1.0 (), Err9 -1.0 +1.0 WRITE 3P3 9 PRG STEP P3 9 " " " " 46

Electric Actuator ／ Slider Type High performance Battery-less absolute encoder

110 Mep (Pitching) 110 10 27 46 Mey (Yawing) 207 20 52 101 Mer (Rolling) Operating temperature range [] 5 to 40 Operating humidity range [%RH] 90 or less(No condensation) Motor size 42 56.4 56.4 28 specifications Motor type Battery-less Absolute(Step motor 24VDC) Electric Encoder Battery-less Absolute encoder Rated voltage [V] 24 VDC10% Power [W] note6) Max. power 222 Max. power 116 Max.

DOC1023126

Timing chart Positioning operation (Double solenoid mode) 46 - Positioning operation by closed center mode Procedure (Closed center mode) 1.Specify and command operation using the operation data by turning IN0 and IN1 inputs ON/OFF. Load the specified operation data.

LEC-OM005xx

Press the MENU key or press the ESC key for several times to return to the menu screen. 46 - 6. Detail Functions 6.1 Step data (1) Outline of step data This actuator system is controlled by predefined step data stored in the controller. A step number in the form of digital code connected to the controller by external PLC can take charge of the actuator.

LEC-T1_C

No.0 LECPA Movement mode Speed LECPA Position LECPA Acceleration LECPA Deceleration LECPA Pushing force 0 INP ON INP ON Trigger level Pushing speed Moving force AREA ON 1 12AREA Area 1 ON 2 Area 2 INP ON INP In position ON INP ON 46 - 6.2 (1) TB Ver. SMC* Teaching Box Hello!