m (95% filtered particle size)Max. 0.1 mg/m3 (ANR) (Before saturated with oil: 0.01 mg/m3 (ANR) or less, approx. 0.008 ppm) (2)PolycarbonateStandard450.44

m3/sN02NPT1/4118 g90 gC01Rc1/8114 g86 g1 x 10?5 Pa?m3/s

m3/sN02NPT1/4118 g90 gC01Rc1/8114 g86 g1 x 10?5 Pa?m3/s

m (95% filtered particle size)Max. 0.1 mg/m3 (ANR) (Before saturated with oil: 0.01 mg/m3 (ANR) or less, approx. 0.008 ppm) (2)PolycarbonateStandard250.22

m (95% filtered particle size)Max. 0.1 mg/m3 (ANR) (Before saturated with oil: 0.01 mg/m3 (ANR) or less, approx. 0.008 ppm) (2)PolycarbonateOption80.18

m (95% filtered particle size)Max. 0.1 mg/m3 (ANR) (Before saturated with oil: 0.01 mg/m3 (ANR) or less, approx. 0.008 ppm) (2)PolycarbonateOption80.18

Safety Instructions

Tightening the threaded portion of an M3, M5 or M6 fittings 1) M3 First, tighten it by hand, then give it an additional 1/4 turn with a wrench. 2) M5 and M6 First, tighten it by hand, then give it an additional 1/6 turn with a wrench. Mounting Caution 1. Check tubing for damage before installing. Confirm model size, etc. 2.

Air Catch Sensor

Material Cover Front rim Retaining rim Description Part no. includes M3 X 8 tapping screws (2 pcs.)

3.2

close proximity with each other either horizontally or vertically Plug connection ower supply output connection 30 e-Con connector Analog output or auto shift input 2 outputs + Sensor connection M5 female thread, through type (with mounting holes) M3 M5 female thread, through type M5 6 reducer 4 reducer R1/8,NPT1/8 Applications Manifolding is possible.



VEX1130 3-01, 02 Foot (Option) 2-M3 x 0.5 (Mounting thread) 4-4.5 (Mounting hole) Pressure gauge (Option) A section view Air operated type 2-M5 x 0.8 Bracket E (Option) 2-4.5 , 1 8 1 4 (Mounting hole) 14-6-8 9 Precision Regulator Series VEX130 3 Body Ported VEX1330 3-02, 03, 04 Pressure gauge (Option) F.R.L.

VCA

Terminal cover Round head combination screw M3 Tightening torque 0.5 to 0.6Nm A G1/2 Tightening torque 0.5 to 0.6Nm + mark mark 2 1 + A Round head combination screw M3 Tightening torque 0.5 to 0.6Nm Electrical Connections Conduit terminal Caution View A-A (Internal connection diagram) Grommet There is polarity only when equipped with light.

VCB

Terminal cover A Round head combination screw M3 Caution 1. Filters and strainers 1. Be careful regarding clogging of filters and strainers. 2. Replace filter elements after one year of use, or earlier if the pressure drop reaches 0.1MPa. 3. Clean strainers when the pressure drop reaches 0.1MPa. 2.

Series VCL

A Round head combination screw M3 2 1 + "+" mark "" mark A Round head combination screw M3 Conduit terminal View A-A (Internal connection diagram) There is polarity only when equipped with light. Note) Tighten the terminal cover mounting screws and terminal screws with a torque of 0.5N-m.

Series VCS

Round head combination screw M3 Conduit terminal View A-A (Internal connection diagram) There is polarity only when equipped with light. Electrical Circuits Caution Operating Precautions Conduit terminal Grommet/Conduit Warning 1. Valves will reach high temperatures from high temperature fluids such as steam.

VCW

A Round head combination screw M3 2 1 + "+" mark "" mark A Round head combination screw M3 Conduit terminal View A-A (Internal connection diagram) There is polarity only when equipped with light.

VKF300

Grommet: G DIN terminal: D 4-Rc(PT) 1/8 (ports P, R) Manual override (non-locking) Applicable cord O.D. 4 to 6.5 Max .10 71.5 78.5 71 Light (DZ type only) 2-4.5 (mounting holes) 67.5 59 19 17 2 R P P R 34 2.3 7 20 Pg.7 4-Rc(PT) 1/8 (ports P, R) A A A P = 19 13.5 L2 L1 4 1 7 8 26 47.5 Approx. 300 (lead wire length) n-Rc(PT) 1/8, M5 x 0.8 (port A) 7 20 34 2-4.5 (bracket mounting holes) 4-M3

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

How to Order Valve T VQZ212 5M N7 Example/Valve VQZ212R 5M C6 External pilot specification Thread (Cylinder ports, and P/R ports) Rc(PT) N NPT External pilot port T NPTF M3 X 0.5 (VQZ200) M5 X 0.8 (VQZ300) F G(PF) Note) R port of VQZ200 is only PF 1/16 Cylinder ports Symbol M5 02 N1 N3 N7 N9 N11 3/8" 1/8" 5/32" 1/4" 5/16" M5 Tube O.D.

XL

XLG/XLGV (O-ring seal, Double acting) Low gas entrainment with employment of O-ring seal system. 2 High Vacuum Angle Valve Flange size Options Application Switch Heater Indicator Leakage Pa m3/sec Valve type Operating pressure Pa Service life (Million cycles) Shaft seal system Models Actuation High temp. specification Internal External 16 25 40 50 63 80 XLA Single acting (N.C.)

CDQ2BP series

35.320 L 0.0353 L 0.2642 Weight g 0.0353 kg 2.2046 1.356 N . m 1.356 J 3.6 l\rJ mm3 cm3 (cc) m3 L L rn3 in3 Energy ft3 N. m f t 3 J gar(u.s.)

NCRBIBwserbs

(Not a\ailabl on NCRBI BWl0) x ( ) : When porl A is pressunzed. x x Optional M3 fiiing available S ho/r lo ofder page NCDRBIOWIQoI$ol[r$Q Rotation Time Setting Bodg To k Used As A Flange ltcRElB\ltfto Actual Torque Even a small torque generated by the rotary actuator, due to inertia, can cause damage. Therefore.