Wireless System

A 14 A B A B A 14 A B A 14 A B 3 2 A 14 U side D side D side U side 0 1 5 4 2 3 B 12 B 12 B 12 B 12 B 12 7 8 1 2 3 4 5 Valve stations EX600-ED4 1 set EX600-WEN1 1 set EX600-EU1 1 set SS5Y3-10S6WE72-05B-C6 (Type 10 5-station manifold base, Wireless EtherNet/IP) Negative common, M12 connector IN/OUT pin arrangement 1, I/O unit: 2 stations * SY3100-5U1 3 sets (2-position single part no.) *

SFOD-OMT0012

It may cause injury; or damage to the actuator or the user's system. 40 No.SFOD-OMT0012-A (3) Single step operation in Step Data window a) Step Data window From the View (V) menu in the main window, select the Step Data window. Refer to section "4.1 (1-1-2) View (V)" for how to display the Step Data window. b) Change to Remote mode Change the mode to Remote mode in the main window.

High Pressure Coolant Valve

Accessory Function plate for VO307 (D sealing, with thread): DXT152-14-5A 628 A VNH Series High Pressure Coolant Valve 3.5 MPa, 7.0 MPa Specifications 3 port valve 2 port valve A B Model A B VNH211 -15A A B VNH311 -20A A B VNH411 -25A A B VNH113 -10A A B VNH213 -15A A B VNH313 -20A A B VNH413 -25A A B VNH133 -10A A B VNH233 -15A A B VNH333 -20A A B VNH433 -25A VNH111 -10A Operating fluid

ACG

Series ACG How to Order ACG 30 A 03 G1 Option Symbol Description Applicable model Body size Nil 1 2 3 6 8 C J N R ACG20 to 40 Port size Symbol (8) 0.02 to 0.2 MPa setting ACG20 to 40 20 30 40 1/8 Metal bowl ACG20 to 40 3/8 Lubricator with drain cock ACG20 to 40 1/2 Nylon bowl ACG30, 40 Metal bowl with level gauge ACG20 With bowl guard Model combination ACG20 to 40 (9) Filter case with drain

AW-B 10- Series 21- Filter Regulator AW K-B 10- Series Filter Regulator with 21- Backflow Function

Note 2) Drain guide is NPT1/8 (applicable to the 10-/21-AW20(K)-B) and NPT 1/4 (applicable to the 10-/21-AW30(K)-B to AW60(K)-B). Note 3) Drain guide is G1/8 (applicable to the 10-/21-AW20(K)-B) and G 1/4 (applicable to the 10-/21-AW30(K)-B to AW60(K)-B). Note 4) Option B, G, H are not assembled and supplied loose at the time of shipment.

AC Servo Motor Driver (MECHATROLINK-III type)

Lead Series Lead (Including Pn20E Pn210 symbol pulley ratio) A 12 65536 750 LEY25/LEYG25 B 6 375 LEY25D/LEYG25D C 3 131072 375 A 20 65536 1250 LEY32/LEYG32 B 10 625 LEY63D C 5 131072 625 A 16 1000 LEY B 8 500 LEY32D/LEYG32D C 4 250 65536 A 20 1250 B 10 625 C 5 131072 625 LEY63 5(2.86) L 229376 625 (Pulley ratio 4/7) H 20 1250 LEFS25 A 12 750 B 6 375 H 24 1500 LEFS32 A 16 1000 B 8 500 LEF

Pin Clamp Cylinders

A: Lock unit holding bolt R 075 CKQG32X B 08 CKQG32X CK1 B: Cylinder holding bolt Guide pin diameter * Refer to Table 1 (Symbol 2) below. Applicable hole diameter of workpiece * Refer to Table 1 (Symbol 1) below.

Fieldbus system CC-Link IE Field compatible SI Unit IO-Link Master Unit

code, Socket, Straight 2 m, SPEEDCON compatible PCA-1564930: Cable with M12 connector, B code, Socket, Straight 6 m, SPEEDCON compatible PCA-1564943: Cable with M12 connector, B code, Socket, Right angle 2 m, SPEEDCON compatible PCA-1564969: Cable with M12 connector, B code, Socket, Right angle 6 m, SPEEDCON compatible -90No.EX-OMW1003-A Revision history A: Contents revised in several places

AR20-B to AR60-B

pressure switch *5 67 Regulator AR20-B to AR60-B Series Regulator with Backow Function AR20K-B to AR60K-B Series AC AF+AR+AL AW+AL AF+AR AF+AFM+AR AW+AFM AF Attachment AFM / AFD AR AL AW AR40-B, AR40K-B AR20-B, AR20K-B Nq Body size 20 25 30 40 50 60 Symbol Description c Set pressure *6 Nil 0.05 to 0.85 MPa setting 1 0.02 to 0.2 MPa setting + d Exhaust mechanism Nil Relieving type N Non-relieving

IZT40/41/42

42 40 41 42 40 41 IZT40 IZT41 IZT42 Standard, AC type D 1 6H R F IZTB 40 16 Bar w q e r t y u i y Plug position q Model t One-touch fitting Symbol Model 40 Standard, AC type 42 Dual AC type Symbol Metric size 4H 4 Straight 6H 6 Straight 8H 8 Straight AH 10 Straight 4L 4 Elbow 6L 6 Elbow 8L 8 Elbow AL 10 Elbow Symbol Position Nil Without plug Q High-voltage cable side R Opposite side of the

Fieldbus system Analog unit

12 11 10 9 8 7 6 5 4 3 2 1 0 0 0 0 0 MSB AD value LSB Byte1 Byte2 CH1 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 0 0 0 0 MSB AD value LSB -29No.EX-OMN0038-C (2)Signed binary data format and twos complement data format Output signal range: 0 to 10 V, 0 to 5 V, 0 to 20 mA Output signal range: 1 to 5 V, 4 to 20 mA AD value Output signal range (a to b) AD value Output signal range (0 to b) Voltage

Hand Valve Series VH

0 C +0.5 0 4-Rc 1/4, 3/8 4 (B) B 0.1 Max. panel thickness D (mm) A 3.2 3.2 3.2 Model B 40 51 64 C 35 41 51 D 3.5 6 8 VH200 VH300 VH400 3.6-12 Series VH Panel Mounted/Dimensions VH41l-02 to 04 VH41l-06 2 (A) 4 (B) 4 (B) 2 (A) 25 25 3 (R) 1 (P) 3 (R) 1 (P) 107.5 19 l102 102 89 88 4-6.6 4-6.6 88 81 94 148 144 97 97 67 1.5 65 1.5 125 123 105.5 3 (R) 3 (R) 1 (P) 1 (P) 25 17 2 4-Rc1/4, 3/

Manifold Specifications

Series VZ1000 Manifold Specifications Manifold Standard Manifold Specifications Type 20 Single base/B mount Common SUP/Common EXH 2 to 20 stations Valve Rc 1 8 M5 x 0.8 Model Manifold type P(SUP)/R(EXH) Valve stations A, B port location VK VZ VF 1(P), 3(R) port 4(A), 2(B) port Port size Valve Note) effective area (mm2) VFR VZ1120 1 4: 0.48, 4 3: 0.85 VP4 Note) Value at manifold base mounted

Digital Gap Checker ( compatible)

(B) Within the acceptable range (Seats correctly).

Electric Actuators

284 230 to 100 LXSH5SB LXSH2SB LXSH5SA LXSH2SA LXSH5BC LXSH2BC LXSH5BD LXSH2BD LXSH5SB-B LXSH2SB-B LXSH5SA-B LXSH2SA-B LXSH5BC-B LXSH2BC-B LXSH5BD-B LXSH2BD-B 5 phase 272 to 200 2 phase 256 to 200 286 5 phase 270 to 100 2 phase 254 to 100 266 5 phase to 30 250 2 phase to 30 294 268 5 phase to 80 252 2 phase to 80 304 280 5 phase to 200 264 2 phase to 200 286 278 5 phase to 100

AC Servo Motor Driver (SSCNET Type)

Recommended Parameter Values [LEF] LEFS25 LEFS32 LEFS40 Lead symbol H A B H A B H A B Series Lead 20 12 6 24 16 8 30 20 10 Parameter *1,*2 Para. Initial value Recommended value No.

PSxx-OMM0006CN

relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218-1992: Manipulating industrial robots-Safety JIS B 8370: JIS B 8361: JIS B 9960-1: (1 ) JIS B 8433-1993: 2) : : : 1. 2. 3. 1. 2. 3. 4

ZSE30A(F)/ISE30A

A Formula for Obtaining the Set-Value P-1 P_1 or P_2 H_1 or H_2 H-1 P_1 (P_2) = A (A-B)/4 n_1 (n_2) = B + (A-B)/4 H_1 (H_2) = | (A-B)/2| n-1 Min. B Released Work 1 Work 2 Work n D Peak/Bottom value indication Atmosphere This function constantly detects and updates the maximum (minimum) value and allows to hold the maximum (minimum) pressure value.

High Vacuum L Type Valve

T Port 3(R) A G A Unit: mm Model A B C Fn Fd G J XLFV-16-2 40 108 38 30 17 41 XLFV-25-2 50 121 48 40 26 46 XLFV-40-2 65 171 66 55 41 54.5 XLFV-50-2 70 185 79 75 52 71 XLFV-63-2 88 212 100 87 95 70 80.5 XLFV-80-2 90 257 117 114 110 83 90.5 Model K L M N S T XLFV-16-2 17.2 10.2 3.6 3.6 M5 M5 XLFV-25-2 21.4 10.2 3.6 3.6 M5 M5 XLFV-40-2 33.9 10.2 3.6 3.6 M5 M5 XLFV-50-2 35.3 12 4 2 Rc1/8 M5 XLFV

Heat Resistant Solid State Auto Switch

No.D-S-OMS0002-B