EX600-W

E 16 outputs D-sub connector (25 pins) F 16 outputs Spring type terminal block (32 pins) For specications, refer to the Fieldbus system EX600 series in the Web Catalog.

21- AF-A 10- Series Air Filter

Clean series 10 AF 03 A 30 F J B 21 AF 03 A 30 F J B Copper, fluorine and silicone-free + Low particle generation q w e r t Air filter Option/Semi-standard:Selectoneeachfora to e. Option/Semi-standardsymbol:Whenmorethanonespecificationisrequired,indicateinalphanumericorder.

Series AR-B 10- 21- Regulator Series ARK-B 10- Regulator with 21- Backflow Function

Regulator Series AR-B 1021Series ARK-B 1021Regulator with Backflow Function How to Order Clean series K F 10 AR B 30 03 BG 1N K F 21 AR B 30 03 BG 1N Copper, fluorine and silicone-free + Low particle generation q r t y w e Regulator Option/Semi-standard: Select one each for a to g.

Series ARP20 to ARP40 10- 10- 21- 21- Direct฀Operated฀Precision฀Regulator Series ARP20K to ARP40K 10- 10- Direct฀Operated฀Precision 21- 21- Regulator฀with฀Backflow฀Function

Example) 10-ARP30K-03BG-1RY Clean room compliant, copperfree, fluorine-free, silicone-free Clean room compliant Symbol Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without mounting option With bracket With set nut (For

Series 10-SZ3000 5 Port Solenoid Valve Plug-in Type [Option]

Directional Control Valves Air Grippers Modular F. R.

Clean Air Module LLB Series

F1 F 1 LLB3 Standard (100 L/min (ANR)) LLB4 High flow type (500 L/min (ANR)) F 1 Port size Filter F With filter 1 3 3N 12 One-touch fitting Rc 3/8 NPT 3/8 Restrictor Note) Use a resin fitting (no metal) for Rc and NPT thread.

MLU

Plate Cylinder with Lock Series MLU 25, 32, 40, 50 How to Order Without Auto Switch B 25 30 D F MLU B 25 30 D F J79W S MDLU With Auto Switch Number of auto switches Built-in magnet 2 pcs. 1 pc. "n" pcs.

RLQ

Compact Cylinder with Air Cushion and Lock 32, 40, 50, 63 Series RLQ How to Order B 32 50 M F RLQ RDLQ M9BW B 32 50 M F With auto switch Number of auto switches With auto switch (Built-in magnet) Auto switch Mounting style 2 pcs. 1 pc. n pcs.

VHK

D E F G J K C VR 18 1(P) 2(A) 4 4 VHK-04F-04F VHK-06F-04F VHK-06F-06F VHK-08F-06F VHK-08F-08F VHK-10F-08F VHK-10F-10F VHK-12F-10F VHK-12F-12F 31.5 21.8 17.5 3 port valve 3.5 11 3.4 1.2 15 VHK-B1A 1 27 22 26 41 47.6 23.8 23.8 16.5 15.8 15.8 44.5 14.5 16.5 VH 18 6 4 6 41 48 48.6 24.3 23.7 16.5 3.5 16.8 15.8 11 5.1 1.2 15 16 VHK-B1A 44.5 14.5 1 27 22 16.5 26 24.3 16.8 7.2 18 8 6 8 41 50.5 52.4

Booster Regulator VBA Series

Pressure gauge Pressure gauge Port size Applicable series Symbol Port size VBA10A-02 02 03 04 VBA1A VBA2A VBA4A 1/4 3/8 1/2 VBA11A-02 Elbow silencer Silencer Combination of Thread Type and Options VBA20A-03 Body size Option Semi-standard Thread type Nil S GN N GS G Nil GLS -Z LN LS GLN Nil F N T Nil F N T Nil F N T 10A 11A VBA22A-03 20A 22A 40A 42A 43A VBA40A-04 Air Tank Compatibility Chart

Compact Direct Operated 2 Port Solenoid Valve for Water and Air SeriesVDW10/20/30 VX2 How to Order Valves (Single Unit) VXD VD W 2 1 1 G 2 01 VXZ For Water, Air, Vacuum VXE Made to Order (Refer to page 244.) Series VXP 1 10 Valve type Option 2 20 VXR

Valve type Nil Option 20 VXR None 30 F OUT (2) Foot bracket VXH Note) The foot bracket is packed with a valve. 1 VXF (1) IN Material and insulation type VX3 Body material Symbol Seal material Coil insulation Voltage Faston terminal, Molded (F) Grommet / Tape winding (G) VXA NBR Nil Grommet / Molded (W) Voltage Symbol A B G H J L Note) FKM Brass (C37) EPDM VCHm 1 2 3 4 5 6 V S R 100 VAC (50

Flat Type Pad/Bellows Type Pad with Groove

Pad material Model N/U/CL S F Pad material Model N/U/CL S F ZP3E-32UMl 4.2 3.9 6.7 ZP3E-32UMl-P 7.9 7.6 10.4 ZP3E-40UMl 5.3 4.9 8.4 ZP3E-40UMl-P 9.0 8.5 12.1 ZP3E-50UMl 9.4 8.7 14.9 ZP3E-50UMl-P 17.1 16.3 22.5 404

Air Catch Sensor Series ISA

Example) G36-P4-01-X30 Regulator 2 Port Solenoid Valve AR 20 E 02 1 VCA27A S 5 DL 02 4 Q Port size Thread type Voltage CE marked 02 02N 02F Rc 1/4 NPT 1/4 G 1/4 Rc NPT G Nil N F 1 2 3 4 5 6 36 100 VAC 200 VAC 110 VAC 220 VAC 24 VDC 12 VDC 230 VAC Throttle Option (The shape of pressure gauge) Note 2) Nil S B K Without throttle and manual lock With throttle With manual lock With manual lock

Electric Rotary Table

L L F L mg mg Ta = 2 /360 (Ta = 0.0175) Gravity is applied to rotating direction. Tf = mgL Friction force is applied to rotating direction.

Lubricator Series AL10 to 60

and caution plate for bowl in imperial units (PSI, F) Symbol 1 10 11 2 3 6 8 C R 3W Z Applicable model AL30 to 60 AL30 to 60 AL30 to 60 AL10 to 60 AL10 to 60 AL10 to 60 AL30 to 60 AL20 AL10 to 60 AL30 to 60 AL10 to 60 Body size F.R.L. 10 20 30 40 50 60 AV Thread type Metric thread (M5) Rc NPT G AU Nil AF N F AL20 Port size AR Body size Symbol Port size M5 1/8 1/4 3/8 1/2 3/4 1 10 20 30 40

Soft Start-up Valve

Simple Specials System Please contact your local sales representative for more details. 2 B *1 Soft Start-up Valve AV2000-A/3000-A/4000-A/5000-A Series 2(A) Symbol How to Order (P)1 3(R) AV 00 20 02 B B 1 D q w e r t y u i o A *1 CE compliant Electrical entry Grommet DIN terminal AC V DC V V V q Body size 20 30 40 50 Symbol Description w Thread type Nil Rc V V V V N NPT V V V V F G V V V

PEEK

N.C. 3 2 1 9.5 7 The figures in brackets < > indicate the values for PFA plate material (wetted part material E, F, G).

24

8.4 4.5 2.8 7.8 25 5.4 8.4 4.5 3 8.2 Bore size [mm] f Bore size [mm] f 12 4.5 16 4.5 20 8.5 25 8 Section XX 4 x YY depth YL Bottom view 4 x MM depth ML 4 x NN through Z WA L 4 x OA through 4 x OB counterbore depth OL Section XX Section XX HA: T-slot for hexagon bolt (OL) X0.02 X0.02 DA DB H VA VB T R U X PW MGJ JMGP Section EE 1 G K J PB Q S GA GB T-slot 2 x P (Plug) PA + Stroke 2 x P XA

Rated Flow Range: 40 (5 to 40 L/min), Flow Adjustment Valve: None, Thread: F (G), Port Size: 04 (1/2), Output Specification: F (OUT1: PNP; OUT2: Analog 4 to 20mA), Temperature Sensor: None, Lead Wire: N (w/o Lead Wire w/M8 Connector), Unit Specification: F (Instantaneous Flow Rate: Gal/min; Accumulated Flow: Gal; Temp: °F)

Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: None, Thread: F (G), Port Size: 04 (1/2), Output Specification: F (OUT1: PNP; OUT2: Analog 4 to 20mA), Temperature Sensor: None, Lead Wire: N (w/o Lead Wire w/M8 Connector), Unit Specification: F (Instantaneous Flow Rate: Gal/min; Accumulated Flow: Gal; Temp: °F)