x 0.8)], Fitting (P Port): 0 [w/o Fitting (M5 x 0.8)]

Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: P (PNP Open Collector 1 Output), Unit Specification: M (SI Unit Only), Piping Specification: M5 (M5 Female Thread), Option 1: w/o Lead Wire, Option 2: None, Option 3: T (w/o Operation Manual, Calibration Certificate)

Series: 1 (JSY1000), Type: 40 (Side Ported), Valve Stations: 3 Stations, P,E Port Entry: B (Both Sides), A,B Port Size: M5 (M5 x 0.8), Thread Size: F (G)

x 0.8)], Fitting (P Port): 0 [w/o Fitting (M5 x 0.8)]

Series: 3 (JSY3000), Type: 40 (Side Ported), Valve Stations: 2 Stations, P,E Port Entry: B (Both Sides), A,B Port Size: M5 (M5 x 0.8), Thread Size: F (G)

Air-hydro Unit

CC100-L1-G CC160-L1-G 3/8 186 1/2 64 104 86 88 53 121.8 151.5 98 35 18 35 104 45 86 45 83 60 1/2 223 1/2 92 139 116 123 61 121.8 156.5 98 35 18 35 109 65 86 45 88 65 1/2 259 3/4 92 139 116 123 61 133.8 185.5 134 40 24 50 140 65 116 66 112 85 3/4 319.5 3/4 144 202.5 180 183 60 133.8 181.5 134 40 24 50 136 93 116 66 108 81 L Dimension (mm) T Model NB Effective oil level stroke W QL S QB NL P

Series 10-MGF ø40, ø63, ø100 Guide Table

8.7 120 X T V 1/4 1/4 1/8 40 P 46 46 38 PP 70 50 M12 x 1.75 M10 x 1.5 M8 x 1.25 N H GA C M6 M6 M5 18.5 KA KB 100 63 30, 50, 75, 100 40 78 73 58 66.5 61.5 48.5 4 4 3.5 8 100 90 120 160 1/8 1/8 1/8 8 200 160 20 20 11.5 11.5 9.5 846 Guide Table 10-MGF Specific Product Precautions Be sure to read this before handling.

High Pressure Coolant Valve

to 8 Pilot EXH port 10(P2) Silencer installed (Standard) EBKX-L7004-040: VNH1, VNH2 AN210-02: VNH3, VNH4 Light/surge voltage suppressor (For DZ) Pilot SUP port 12(P1) Manual override (Non-locking push type) N P2 P1 Main port 1 (Back side port 2) U: Female thread for bracket mounting Same as back side 8 locations J B G Bracket (Option mark: B) H I 15 R S K L M E T: Long hole for mounting P

CC

4T Mounting hole for hexagon socket head cap screw Air port size Rc REC CX CY MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com RHC MK(2) RS Q G Oil draining hole Rc 1/4 Oil port size Rc RS H A (mm) Model Air port size Rc Oil port size Rc A B C DA DB DL H NL P

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

Motor output [W]/Size [mm] 100/40 200/60 Motor type AC servo motor (100/200 VAC) Electric specifications Encoder Motor type S2, S3: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7: Absolute 18-bit encoder (Resolution: 262144 p/rev) Power consumption [W] Note 7) Horizontal 65 80 Vertical 165 235 Standby power consumption when operating [W] Note 8) Horizontal 2 2 Vertical

A dedicated exhaust port (M5) is installed to remove air from the nozzle. The IT series comes with monitor signal output and shock/ vibration resistance., Operation Manual, E/P REGULATOR, PRE-SET, INSTRUMENTATION, IT2000/ITV2000 E/P REGULATOR, EB, IT2000 3/8 INCNPT VERSION, .77161 lb, ModelITV101 ITV103 ITV105 ITV201 ITV203 ITV205 ITV201------------

A dedicated exhaust port (M5) is installed to remove air from the nozzle. The IT series comes with monitor signal output and shock/ vibration resistance., Operation Manual, E/P REGULATOR, INSTRUMENTATION, IT4000/ITV3000 E/P REGULATOR, EB, IT4000 3/8 INCNPT VERSION, 1.32277 lb

A dedicated exhaust port (M5) is installed to remove air from the nozzle. The IT series comes with monitor signal output and shock/ vibration resistance., E/P REGULATOR, INSTRUMENTATION, IT2000/ITV2000 E/P REGULATOR, DB, IT2000 1/4 INCNPT VERSION, 1.50489 lb

10%, Ripple (p-p) 10% or less (with power supply polarity protection)45 mA or lessNPN or PNP open collector 2 outputs (Selectable)80 mA28 V (at NPN output)1 V or less2.5 ms (with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?1 digitVariable (0 or above) Note 1)Variable (0 or above) Note 1)0.6 to 5 V ?2.5% F.S.?1% F.S. or lessApprox. 1 k 2.4 to 20 mA ?2.5% F.S.?

HRX-OM-S004

How to see the serial number S O 001 January 2014 S O 001 Year Symbol Remarks Month Symbol Remarks Serial no. 2014 S Repeated from A to Z in alphabetical order 1 O Repeated from O to Z in 2015 T 2 P alphabetical order, with O for January and Z for December 2016 U 3 Q Fig. 1-1 Position of the product label HRS Series 1.4Product Label 1-3 HRX-OM-S004 Chapter 1 Safety Instructions 1.5 Safety

XL-OMY0001

relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218: Manipulating industrial robots-Safety JIS B 8370: JIS B 8361: JIS B 9960-1: -1 ) JIS B 8433: *2) 1. 2. 3. 1. 2. 3. 4. 2 XL-OMY0001 / 1 1.5 *3) 3)1 1 () 3 XL-OMY0001 1 &/ 1.52 2 ( ) 5 5 P-

MHx-OMY0005

. <> AS1211F-M3 AS1201F-M5 AS1000 AS1002F 2-4. 1. 2. 2. 4. 1. () 2. 5 3. 4. 5 10 2-5 1.

10%, Ripple (p-p) 10% or less (with power supply polarity protection)45 mA or lessNPN or PNP open collector 2 outputs (Selectable)80 mA28 V (at NPN output)1 V or less2.5 ms (with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?1 digitVariable (0 or above) Note 1)Variable (0 or above) Note 1)0.6 to 5 V ?2.5% F.S.?1% F.S. or lessApprox. 1 k 2.4 to 20 mA ?2.5% F.S.?

10%, Ripple (p-p) 10% or less (with power supply polarity protection)45 mA or lessNPN or PNP open collector 2 outputs (Selectable)80 mA28 V (at NPN output)1 V or less2.5 ms (with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?1 digitVariable (0 or above) Note 1)Variable (0 or above) Note 1)0.6 to 5 V ?2.5% F.S.?1% F.S. or lessApprox. 1 k 2.4 to 20 mA ?2.5% F.S.?

10%, Ripple (p-p) 10% or less (with power supply polarity protection)45 mA or lessNPN or PNP open collector 2 outputs (Selectable)80 mA28 V (at NPN output)1 V or less2.5 ms (with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?1 digitVariable (0 or above) Note 1)Variable (0 or above) Note 1)0.6 to 5 V ?2.5% F.S.?1% F.S. or lessApprox. 1 k 2.4 to 20 mA ?2.5% F.S.?