Line Filter Rated Pressure: 3.5, 7, 14, 21 MPa FH34/44/54/64 Series

06 FH440-08 FH440-10 FH440-12 FH640-03 FH640-04 FH640-06 FH640-08 FH640-10 FH640-12 3/8 3/8 10 10 FH441-04 FH441-06 FH441-08 FH441-10 FH441-12 FH441-16 FH441-20 FH441-24 FH641-04 FH641-06 FH641-08 FH641-10 FH641-12 FH641-16 15 (1/2B) 15 (1/2B) 1/2 1/2 20 20 20 (3/4B) 20 (3/4B) 3/4 3/4 50 50 Max. 21 MPa 25 (1B) 25 (1B) 1 1 80 80 Max. 7 MPa 32 (1 1/4B) 32 (1 1/4B) 1 1/4 1 1/4 120 120 40

Guide Table Series MGF ø40, ø63, ø100 1

10 10 MGF40 Data MGF40 10 5 4 3 5 4 3 2 2 5 5 1 10 20 30 40 50 100 200 300 400 1 5 4 10 20 30 40 50 100 200 300 400 5 10 50 100 10 50 100 Eccentric distance l (mm) Eccentric distance l (mm) Stroke (mm) Stroke (mm) l = 200 mm l = 300 mm Graph (3) Graph (4) v = 150 mm/s or less v = 200 mm/s or less Graph (7) Graph (8) 20 300 300 200 200 MGF100 MGF100 20 100 100 MGF100 MGF100 10 MGF100 MGF100

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

R 3/8 R 1/2 10-32 UNF NPT 1/8 0 1 Meter-out Meter-in Be sure to read before handling.

Wireless System

Link, No Activity (10 Mbps) 7 LINK/ACT1 LINK/ACT2 Orange LED flashes. Link, Activity (10 Mbps) Red LED is ON. IP address has been duplicated. 100 Mbps: Green 10 Mbps: Orange OFF EtherNet/IP is not connected. 15 Wireless System EX600-W Series LED Display Wireless slave unit No. LED name Function Color of LED Operation Green LED is ON.

99

) FGH100-06 {Rc3/4} FGH200-06 {Rc3/4} FGH300-06 {Rc3/4} 0.05 0.05 0.05 Pressure drop (MPa) Pressure drop (MPa) Pressure drop (MPa) 0.01 0.01 0.01 0.005 0.005 0.005 0.001 10 30 50 70 100 0.001 10 30 50 70 100 0.001 10 30 50 70 100 Flow rate (L/min) Flow rate (L/min) Flow rate (L/min) FGH100-10 {Rc1} FGH200-10 {Rc1} FGH300-10 {Rc1} 0.05 0.05 0.05 Pressure drop (MPa) Pressure drop (MPa) Pressure

MGF

weight m (kg) Load weight m (kg) 30 30 MGF63 10 20 20 MGF63 5 10 10 MGF40 5 4 3 5 4 3 MGF40 MGF40 5 MGF40 2 2 3 5 2 1 1 10 20 30 40 50 100 200 300 400 10 20 30 40 50 100 200 300 400 10 50 100 5 10 50 100 Eccentric distance l (mm) Eccentric distance l (mm) Stroke (mm) Stroke (mm) How to read the graph 1) When the load weight is 70kg, eccentric distance is 60mm, and the maximum speed is 150mm

In-line Air Filter

L/min Proof pressure MPa 0.2 1.5 0 to 60 5 (Filtration efficiency 95%) 0.1 (Vacuum pressure 20 kPa) Operating and ambient temperature range C Filtration m 0.0 0 10 20 30 40 50 60 Operating temperature [C] Element replacement differential pressure MPa Filtration area mm2 1260 750 Applicable tubing material Weight g Internal capacity cm3 Nylon, Soft nylon, Polyurethane 25.0 7.0 79.7 23.6 27.3

Guide Table Series MGF

weight m (kg) Load weight m (kg) 30 30 MGF63 10 20 20 MGF63 5 10 10 MGF40 5 4 3 5 4 3 MGF40 MGF40 5 MGF40 2 2 3 5 2 1 1 10 20 30 40 50 100 200 300 400 10 20 30 40 50 100 200 300 400 10 50 100 5 10 50 100 Eccentric distance l (mm) Eccentric distance l (mm) Stroke (mm) Stroke (mm) How to read the graph 1) When the load weight is 70kg, eccentric distance is 60mm, and the maximum speed is 150mm

Series 10-VQD1000 4 Port Direct Operated Poppet Solenoid Valve

Symbol (B) 2 (A) 4 1 (P) 3 (R) Flow Rate Characteristics C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 14/2(PA/B) 4/25/3(A/BEA/EB) Flow rate characteristics Valve model Port size Body ported 10-VQD1121(V)-L M-M5 10-VQD1121 -L M-M5 10-VQD1151(V)-L M-M5 10-VQD1151W-L M-M5 0.05 0.07 0.06 0.07 Base mounted (With sub-plate) 0.22 0.27 0.22 0.27 0.16 0.24 0.10 0.25 0.05 0.07 0.05 0.07 0.19 0.28 0.22 0.27

Pressure Sensor

C: Complete revision. D: Modified errors in text. E: Measurement laws are added. F: Modified errors in text. [October 2017] G: Contents revised in several places.

Safety Speed Control Valve (SSC Valve) Series ASS 1

(C) Fig. (B) Fig. (A) Set needle Piston valve Switching valve Switching valve Switching valve Switching valve Cylinder Cylinder Cylinder Cylinder Check valve (Stroke end) Fig. (C) Set pressure for piston valve > Pressure in the cylinder Set pressure for piston valve < Pressure in the cylinder (Stroke end) The air that has been supplied by the switching valve closes the check valve.

refrigerationR134a (HFC)PID controlTemperature: 10 to 35 C, Humidity: 30 to 70%RHClear water, Deionized water10 to 408.0 (at 20 C)1.25 (at 20 C)?

refrigerationR134a (HFC)PID controlTemperature: 10 to 35 C, Humidity: 30 to 70%RHClear water, Deionized water10 to 408.0 (at 20 C)1.25 (at 20 C)?

IR20-OM00008

c. d (4)[][] -10- 8 2 6 3 2 () 5 2 2 (80-) (80-) 2 2 9 EXH 2 ON-OFF 1 1 7 2 2 2 No.

IR30-OM00013

(C) (A) (A) (C) (A) (C) BLEED SUP OUT SU P N/ M Pa/ ( S) N N m 1 1 M Pa/m ( ) m 2 M Pa M Pa (A) /N (B) / ( ) m 2 ( A ) m 2 5- I R 3 0 0 1 SUP OUT 2 3%F.S. 3 R B(P36203018) G 2 3 RcF N IR3000G43-2-01 G43-P2-N01-X30 IR3010G43-4-01 G43-P4-N01-X30 IR3020G43-10-01 G43-P10-N01-X30 02:1/4 03:3/8 04:1/2 Rc FG NNPT 00.010.2MPa 10.010.4MPa 20.010.8MPa PRECI SI O N REG

Filter Regulator AW30, 40

-02 Round Square embedded type Round Square embedded type G46-10-02 G36-10-01 1.0MPa Note 3) GC3-10AS Note 2) GC3-10AS GC3-10AS 1 4 1 8 1 4 Note 1) Pressure gauge G46-2-02 G36-2-01 G46-2-02 Set pressure + 0.05MPa (at relief flow rate of 0.1l/min(ANR)) 5 to 60C (With no condensation) 5m 0.2MPa Note 3) GC3-2AS GC3-2AS GC3-2AS Note 4) AD48 N.O.

AMX-OM-F005-C

C. auto drai n: 4 or m ore ( I . D . ) , 10 ( O . D . ) N . O . aut o drai n: 6. 5 or m ore ( I . D . ) , 10 ( O . D . ) AM G 850: 9 or m ore ( I . D . ) , 2. 8 m or l ess ( overal l l engt h) Instal l i t i n w here pressure i s hi gher and tem perature i s l ow er. 2W ARN I N G Fol l ow i ng envi ronm ent s l ead t o cause breakage.

AW-B 10- Series 21- Filter Regulator AW K-B 10- Series Filter Regulator with 21- Backflow Function

Model Option 10-/21-AW20(K)-B 10-/21-AW30(K)-B 10-/21-AW40(K)-B 10-/21-AW40(K)-06-B 10-/21-AW60(K)-B Bracket assembly Note 1) AW23P-270AS AR33P-270AS AR43P-270AS AW62P-270AS Note 2) Set nut AR23P-260S AR33P-260S AR43P-260S 10: G49-10-01, 21: G49-10-01-MS-X3 Standard Pressure gauge Note 4) Round type Note 3) 10: G49-4-01, 21: G49-4-01-MS-X3 0.02 to 0.2 MPa setting Note 1) Assembly of a bracket

Clean Regulator/Fluororesin Type

ARM 2 2 3 3 3 4 4 5 5 6 6 2 2 2 3 3 4 4 5 5 6 6 1 2 1 2 3 1 2 1 2 1 2 A B C A B A B A B A B 6 x 4 4 x 3 10 x 8 8 x 6 6 x 4 12 x 10 10 x 8 19 x 16 12 x 10 25 x 22 19 x 16 1/4" x 5/32" 3/16" x 1/8" 1/8" x 0.086" 3/8" x 1/4" 1/4" x 5/32" 1/2" x 3/8" 3/8" x 1/4" 3/4" x 5/8" 1/2" x 3/8" 1" x 7/8" 3/4" x 5/8" SMC SMC SMC ARP P U Panel mount union Union IR-A IR SMC IRV : Basic size : With reducer

Low torque Metal seal type Rotary joint

* flange: MQR8-F (for MQRF8-M5) * flange: MQR12-F (for MQRF12-M5) * o 55 * o 45 * o 41 * o 50 * 4-4.5 mounting hole * 4-8 counter bore 5.5 4.5 mounting hole +0.05 4.1 depth10 54h8 24 x M5 x 0.8 10 counter bore depth1.5 30h8 (10 from end) 49h8 0 -0.033 25h8 16-M5 x 0.8 10 counter bore depth1.5 0 0.033 3 120 140 17 *7 (10 from end) 3 (87) 1 2 3 4 5 6 7 8 9 10 11 12 1 2 31 9 8.2 x 11 = 90.2