VNH

/60/Hz) DC VO301-00T-X302 Conduit terminal 100 V, 200 V, Other voltage (Option) 24 V, Other voltage (Option) 15 to 10% of the rated voltage Class B or equivalent (130C) 70C or less (When rated voltage is applied.) 12 VA (50 Hz), 10.5 AV (60 Hz) 7.5 VA (50 Hz), 6 VA (60 Hz) 4.8 W Non-locking push type LVA Allowable voltage fluctuation Coil insulation type Temperature rise LVH LVD Inrush Holding

Fieldbus system PROFINET compatible SI Unit

(between FE and all accessible terminals) Insulation resistance 10 M ohm or more (500 VDC is given between FE and all accessible terminals) Ambient temperature Operation: -10 C to 50 C Storage: -20 C to 60 C Ambient humidity 35% to 85% RH (non-condensing) 10 Hz to 57 Hz (constant amplitude) 0.75 mm 57 Hz to 150 Hz (constant acceleration) 49 m/s2 2 hours for each direction X, Y and Z (complies

Series CDU 10-/11- 21-/22- ø6, ø10, ø16, ø20, ø25 Free Mount Cylinder

Model Cushion Bore size (mm) 6 10 16 Action Standard stroke (mm) Auto switch mounting Port size Lubrication Model Rubber Air 10-/21-CDU6 10-/21-CDU10 10-/21-CDU16 Relief type Vacuum suction type 5, 10, 15, 20, 25, 30 10-/21-CDU20 20 5, 10, 15, 20, 25, 30, 40, 50 10-/21-CDU25 25 Non-lube Double acting Single rod M5 x 0.8 11-/22-CDU6 11-/22-CDU10 11-/22-CDU16 6 10 16 5, 10, 15, 20, 25, 30

Manifold Specifications

-5 Gasket DXT192-10-5 (Use caution to the orientation.)

IR1000/2000/3000

44 51 Approx. 90 10 9.5 Bleed Bleed 63 Exhaust SUP(1) OUT(2) G 2 OUT 30 OUT(2) SUP(1) OUT 10 43 35 EXH Approx. 43 2-Rc(PT) 1/8 Port size 2-Rc(PT) 1/4 Port size Rc(PT) 1/8 Pressure gauge port 50 50 35 2-Rc(PT) 1/8 Pressure gauge port Approx. 60 50 Mounting hole IR300-0 IR2120-02 36 2 Bracket (optional) 30 82 Mounting hole Pressure gauge (optional) 60 2.3 48 Bracket (optional) 5.5 9.5 M5

MY1B

Contact SMC when the solid state auto switch is retrofitted. 10 16 20 25 32 40 50 63 80 100 Standard type 10 mm 16 mm 20 mm 25 mm 32 mm 40 mm 50 mm 63 mm 80 mm 100 mm Type Bore size Symbol Centralized piping type Nil G Number of auto switches M thread Rc NPT G 10, 16, 20 Nil Note) For 10, only G is available. 25, 32, 40, 2 pcs. 1 pc. n pcs.

PSxx-OMH0002CN

[kPa]50[kPa]ON 1.0[F.S.]

ITV0000

Return 0.5 0.4 0.2 0 0 Out -0.2 -0.4 -0.5 -0.6 -0.8 0 25 50 75 -1 1 2 3 4 -1 100 5 Input signal % F.S.

LFE-OMY0008

L/min 10 L ON OFF ON () OFF () 2 5 5 10 L/min 10550L 14 No.LFE*-OMY0008 sa ON-OFF () 1 L/min 10 11 12 1 L/min () 0 ta (SI )SI LFE ON-OFF () [S/cm](/ 100200S/cm na ON 0 ha 15 No.LFE*-OMY0008 2MPa(69 ) IN ()IN (68 ) DC(-)/ + 2 2 2 20mm 0mm 0mm 0mm 2 2 2 20mm 0mm 0mm 0mm 5 5 5 50mm 0mm 0mm 0mm 5 5 5 50mm 0mm 0mm 0mm 16 No.LFE*-OMY0008 FR0( FR0( FR0( FR0( ) ) ) ) FR1 FR1

High Vacuum L Type Valve

Heater specifications Model XLH-16 XLH-25 XLH-40 XLH-50 Flange (valve) size 16 25 40 50 Valve type Manual type Fluid Vacuum of inert gas Operating temperature oC 5 to 150 Operating pressure Pa Atmospheric pressure to 1 x 10-6 Conductance l/s Note 1) 5 14 45 80 Internal 1.3 x 10-10 for the standard material (FKM) Leakage at ambient temperatures , excluding gas permeation Pam3/s External 1.3

Electrostatic Sensor Monitor

IZE11 Connected sensor Sensor for 0.4 kV Sensor for 20kV Rated measured range -0.4 to +0.4 kV 1 -20 to +20 kV 2 Set min. unit 0.001 kV 0.1 kV Set measurement distance 10 to 50 mm 25 to 75 mm Power supply voltage 24 VDC 10% (Protected against inverse connection) Current consumption 50 mA or less (Except current consumption at sensor) Sensor input 1 to 5 VDC (Input impedance: 1M ) Input number

3 Port Air Operated Valve

(Convertible) Standard 0.2 to 1.0 Operating pressure range (MPa) For vacuum 100 kPa to 0.2 Pilot pressure (MPa) 0.2 to 1.0 (Equivalent to the operating pressure or more) Ambient and fluid temperature (C) 10 to 50 (No freezing) Lubrication Not required Mounting orientation Unrestricted Impact/Vibration resistance (m/s2) Note) 300/50 Note) Impact resistance: No malfunction to axis and right

POWER CLAMP CYLINDER

DOC1006073 PRODUCT NAME POWER CLAMP CYLINDER MODEL / Series / Product Number CKZ5N Series (50, 63) CKZ5T Series (50, 63) Contents Safety Instructions 1.

PF2D

A quick recovery time indicates little liquid pool. 50 Ratio of resistance [k m] Particle ratio [number/cc] PFMC 100 2 or 3 particles/cc PFMV 10 00 10 20 30 40 50 60 70 PF2A 1 0 5 10 15 20 25 30 Duration of flow [min] Duration of flow [hour] PF3W The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room

PSxx-OMV0003CN

-2No.PS-OMV0003CN-G / *3) 1 1.5 *3)1 1 [] -3No.PS-OMV0003CN-G () () () () -4No.PS-OMV0003CN-G () * UL UL1310 2 UL1585 2 30 Vrms(42.4 V ) (2 ) UL (1 20 ) -5No.PS-OMV0003CN-G * FG (35 N () ,() *() 6 33 () 20 m DC(-)() * ( ) -6No.PS-OMV0003CN-G () CE 0~50(5 ) (FKMHNBR) * 1015 10 1% 1959 LCD * -7No.PS-OMV0003CN-G ISE70 02 L2 M 3 Y K T ISE70 0~1MPa ISE71 0~1.6MPa 02 Rc1/4 N02

Thermo-chiller Series HRS Compact Type (Except HRS050)

brazing), Bronze, Synthetic rubber Single-phase 100 VAC (50/60 Hz), 115 VAC (60 Hz) Allowable voltage range 10% Power supply 15 15 Circuit protector (A) Applicable earth leakage breaker capacity Note 9) (A) Rated operating current (50/60 Hz) (A) 7.7/8.4 0.8/0.8 7.5/8.3 0.7/0.8 Rated power consumption Note 4) (50/60 Hz) (kVA) Noise level Note 10) (50/60 Hz) (dB) 58/55 Fitting (for drain outlet

4

Max. operating frequency Lubrication Manual override Mounting orientation Impact/Vibration resistance Note 2) Enclosure Dustproof Electrical entry Grommet, DIN terminal 100, 200, 110, 220, 240 DC AC (50/60 Hz) Coil rated voltage (V) 24, 12 Allowable voltage fluctuation 15 to +10% of rated voltage 12.7 VA (50 Hz), 10.7 VA (60 Hz) 7.6 VA (50 Hz), 5.4 VA (60 Hz) Without indicator light: 4 W,

Sensor Monitor

, 50, 100, 500, 1000, 5000 ms Enclosure IP40 Environment Withstand voltage 1000 VAC for 1 minute between terminals and housing Insulation resistance 50 M or more between terminals and housing (with 500 VDC megger) Ambient temperature range Operation: 0 to 50 oC, Storage: -10 to 60 oC (No condensation or freezing) Operating humidity range Operation, Storage: 35 to 85%RH (No condensation) Standard

IDX-OM-W026

-8-A-X2112 1 C42FP-260S 1 111692 1 1 2019 3 2019 2 SERIAL No.XP AD48-8-X2110 SMC WEB IDF Series 9-2 9 2 IDX-OM-W026 10 L 10 L 10-1 ( ) 10-2 1.6MPaADH4000-04 IDF22E-**-L IDF37E-**-L IDF55E-**-L IDF75E-**-L 0.151.6 ) N.O. () ) 50L/min(ANR) (ADH4000-04) ( 10) IDF Series 10-1 10 1 IDX-OM-W026 10 L 10-3 IDF Series 10-3 10 2 IDX-OM-W026 11 M 11 M 11-1 ( ) IDF Series

Wireless System

Link, No Activity (10 Mbps) 7 LINK/ACT1 LINK/ACT2 Orange LED flashes. Link, Activity (10 Mbps) Red LED is ON. IP address has been duplicated. 100 Mbps: Green 10 Mbps: Orange OFF EtherNet/IP is not connected. 15 Wireless System EX600-W Series LED Display Wireless slave unit No. LED name Function Color of LED Operation Green LED is ON.