0.4

RD SD LRUN PW 93.5 116 B RATE 42 (35) 66 75 80 x 1 x 10 STATION NO.

5

Applicable bore size TX Rod trunnion Head trunnion CD LX LZ Z + Stroke Z + Stroke CM-B020 20 32 36 108 8 66 82 CM-B032 25 40 40 112 9 74 90 32 114 CM2YU/CM2YT (Rod/Head trunnion) CM-B040 40 53 44.5 143.5 10 87 103 Note) A pivot bracket pin and retaining rings are not included with the pivot bracket.

MY1

For MY1M50, 63 Work piece EY SMC EC a FH a 5 4.5 6 4 9 9.5 W 58 70 88 104 128 152 TT 5 (max. 11) 5 (max. 16.5) 8 (max. 20) 9 (max. 25) 13 (max. 33) 13 (max. 38) T 7 12 15 15 25 25 S 46.7 67.3 73.2 73.2 99 99 h 3.5 4.5 5.5 5.5 11 11 FW 66 82 95 FH 16 22 22 FC 14 17 22 22 30 35 FB 52 67 78 F 5 6 8 8 8 8 EY 50 57.5 73 87 115 138.5 EC 7.7 9 11.5 12 18.5 19 EB 32 38 50 57 66 77 E 20 24

0.4

L7 L6 L5 VV5Q11 (L1) 28 (n-1) x 10.5 1.5 A FG + + 0V 24V SMC S E R I A L U N I T MODEL SC (SI No.EX120-STA1) 2 93.5 66 64 ERR T/R RUN 0 1 DIP SW. Drawing shows a SC case.

LEC-OM02704CN

6.1.8 66 6.1.9 69 6.1.10 6-10 6.1.11 6-11 6.1.12 6-11 6.1.13 6-12 6.2 (PB) 6-14 6.2.1 6-14 6.2.2 6-15 6.3 (PC) 6-21 6.3.1 6-21 6.3.2 6-22 6.3.3 S 6-28 6.3.4 6-28 6.3.5 6-28 6.3.6 6-29 6.4 (PD) 6-30 6.4.1 6-30 6.4.2 6-31 6.4.3 (LSP)(LSN) 6-39 6.4.4 6-40 7 MR Configurator 717-27 7.1 72 7.2 73 7.3 75 7.4 76 7.5 78 7.6 7-10 7.7 7-14 7.7.1 JOG

Aluminum High Vacuum Angle Valve

Indicator: Dimensions (b) E C D E C XLA F A (a) XL XL XLQ E (c) XM XY H DXSA XVD B G XGT CYV A (mm) A B C D E Note 1) F G H Model XLH-16 XLH-25 XLH-40 XLH-50 40 100.5 38 1 30 17 35 50 114 48 1 12 40 26 41 65 162.5 66 2 11 55 41 57 70 179.5 79 2 11 75 52 70 Note 1) Dimension E applies when heater option is included.

MHZ

66 Long Stroke Type/Series MHZL2 Finger Option Through-holes in Opening/ Closing Direction [2] Side Tapped Mounting [1] 4-MM (Thread for mounting attachment) C C MHZ MHF MHL MHR 4-H (Hole for mounting attachment) B A MHK S S MHS O B A O MHC (mm) (mm) MHT H 2.9 3.4 4.5 5.5 Specifications and dimensions other than the above are the same as the basic type.

0.55

VP500-224-1 (M4 x 46) VP300-224-1 (M3 x 36) VP700-224-1 (M5 x 66) For valve mounting 10 Series VP300/500/700 How to Order Pilot Valve Assembly Caution When only the pilot valve assembly is replaced, it is not possible to change from V211 (Grommet or L/M-type) to V212 (DIN or Conduit type), or vice versa.

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

EE PL RT L12 KK SW G BG L8 VD VA WA WB WH ZZ E Bore size (mm) R Without rod boot With rod boot 32 40 50 63 80 100 125 32.5 146 26 7 4 4 4 94 16 12 32 30 M6 x 1 10 22 G 1/8 13 6 M10 x 1.25 47 Up to 1000 Up to 2000 38 163 30 9 5 4 4 105 16 16 37.5 35 M6 x 1 13 24 G 1/4 14 6.5 M12 x 1.25 54 Up to 1000 Up to 2000 46.5 179 37 10.5 6 4 4 106 16 20 37.5 40 M8 x 1.25 17 32 G 1/4 15.5 8 M16 x 1.5 66

CJ2X/CUX/CQSX/CQ2X/CM2X

For details about auto switches with pre-wire connector, refer to page 10-20-66. 10-3-6 Low Speed Cylinder Double Acting, Single Rod Series CJ2X Specifications Double acting, Single rod Action Air Fluid 1.05 MPa Proof pressure 0.7 MPa Maximum operating pressure 0.06 MPa Minimum operating pressure Without auto switch: 10 to 70C (No freezing) With auto switch: 10 to 60C (No freezing) Ambient

CNG

(186) 30 22 55 5 6 M8 x 1.25 24 1/8 21.5 2 65 5.5 6 52 25 65 3 12 M4 x 0.7 Stroke x 215 (223) 31 151 (159) 40 193 (201) 30 24 62 5.5 8 M10 x 1.25 29 1/8 26.5 2.5 73 5.5 7 60 30 75 3 12 M5 x 0.8 218 (226) 38 154 (162) 40 196 (204) 35 24 62 5.5 10 M10 x 1.25 35.5 1/8 26.5 2.5 73 6.6 7 60 30 75 3 12 M5 x 0.8 241 (250) 47 169 (178) 50 221 (230) 35 25 70 6 14 M14 x 1.5 44 1/8 28 2.5 81 6.6 8 66

Slider Type Ball Screw Drive/11-LEFS Series

) depth 3 (102) Encoder cable (7) 64 4 x M5 x 0.8 thread depth 8.5 Motor cable (6) Body mounting reference plane Note 1) 45 38 50 3.5 +0.025 0 3H9 ( ) depth 3 Motor option: With lock Encoder cable (7) Lock cable (4.5) (2.2) L Motor cable (6) (52) A (Table traveling distance) Note 2) (169) 52 58 Stroke (54) (56) 10 (209) 38 34 21 Encoder Z-phase detecting position Note 3) (4) 38.5 48 24 66

CE

For details, refer to page 10-20-66. Normally closed (NC = b contact), solid state switch (D-F9G/F9H type) are also available. For details, refer to page 10-20-40. 10-12-26 26 Series CEU/Series CE Counter/Extension Cable Multi-counter How to Order RE A B CEU5 REC CX Power supply voltage CY Nil D 100 to 240 VAC A COM COM COM B 12 VDC GND F.G. R.S.

LEC-OM02904

53 5.1.2 54 5.1.3 55 5.1.4 56 5.1.5 57 5.1.6 57 5.1.7 58 5.1.8 59 5.1.9 5-10 5.1.10 5-11 5.2 (No.PB) 5-12 5.2.1 5-12 5.2.2 5-13 5.3 (No.PC) 5-20 5.3.1 5-20 5.3.2 5-21 5.3.3 5-24 5.3.4 5-27 5.4 (No.PD) 5-28 5.4.1 5-28 5.4.2 5-29 5.4.3 master-slave 5-33 6 616-12 6.1 62 6.1.1 62 TM 63 6.1.2 MR Configurator2 6.2 64 6.2.1 64 6.2.2 65 6.2.3 66

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

Note 6) When the release valve is not used, design the circuit for vacuum release separately in order to release a workpiece. 26 42 36 52 46 62 56 72 66 82 76 92 86 102 96 112 Note 1) The above dimensions are for ZZQ104-BSB. ZQ1 3M-K1 L-E G-00. ZQ1 3M-K2 L-E GK-00. ZQ1 3M-J1 L-F-00. ZQ1 3M-Q1 L-E -00. In case of ZQ1 3M-F -00, the overall length is 87.2.

15

10.5 16.5 11.5 5.4 12 5 40 39 11 28 2 6 60 5.8 8 5.5 CY1F CY1SG20-Z 10 9.5 21.6 44 8.5 62 36 37.5 24 19 20 M6 x 1 M6 x 1 10.5 22 17 5.4 16 2 5.5 8 46 45 16 70 5.8 28 5.5 10 CY1SG25-Z M6 x 1 M6 x 1 10 11 26.4 52 8.5 70 40.5 40.5 27.5 21.5 21 12.5 22 17 6.5 16 2 5.5 8 54 53 20 70 49 7.5 7 10 CYP CY1SG32-Z M8 x 1.25 M8 x 1.25 12.5 14 33.6 64 9.5 86 50 50 33 26 24 11.5 23.5 17.5 8.6 20 5.5 66

AIR FILTER

35 11 13 90 3.2 47 AF60-A 70 66 35 11 13 90 3.2 47 Dimension:B of auto-drain and optional bowl assembly Optional C D Semistandard 2 6 8 C 6C J 2J 6J 8J CJ 6CJ W 6W 2 6 8 C 6C 2 6 8 AF10-A 59.3 59.9 77.9 77.9 77.9 AF20-A 87.4 87.6 87.6 87.6 91.4 93.9 91.4 91.4 91.4 104.9 104.6 104.9 104.9 104.9 AF30-A 117.6 115.1 137.6 121.9 122.1 121.9 142.1 123.6 123.6 156.8 156.8 156.8 156.8

44

33 40 66 30 38 63 51 67 4 2.5 1.8 1.6 d 8 5 KQB2 Applicable tubing 4 3 2.3 2.6 H1 H2 KS KX 6 4 3.3 6 10 5.8 M A L KM 14 8 6 14 6.6 5.3 17 Connection thread 17 KF 17 25 10 7.5 6.8 30 M 22 27.1 17 7.6 17 25 H/DL L/LL 10 8 7.3 35 22 27.1 KC 17 26.6 12 9 8 45 22 28.7 17 8.5 KK 17 26.6 12 10 9 57 KK130 22 28.7 28 29.9 16 13 22 9.3 12 101 22 DM Reference dimensions after installation of R thread

Round Type Hydraulic Cylinder

GA GB H H1 H2 I K MM N NA 0.020 0.053 0.020 0.053 0.025 0.064 0.025 0.064 20 Up to 800 15.5 18 38 13 26 10 16 7 6 51 21 68 12 8 41 5 8 30 5 M8 x 1.25 13 26 23 f8 25 Up to 800 19.5 M10 x 1.25 22 44 17 32 12 16 7 9 53 27 70 12 8 46 6 8 32 5.5 13 28 25 f8 32 Up to 800 21 M14 x 1.5 24 50 22 38 16 19 7 9 55 33 72 12 8 53 8 9 40 7.5 13 36 31 f8 40 Up to 800 21 M16 x 1.5 24 60 24 41 18 21 9 9 66

Electric Actuator Triple Axis P&P Unit

side mount 100 4.2 4.7 150 4.6 5.1 200 5.0 5.5 250 5.4 5.9 300 5.8 6.3 350 6.2 6.7 400 6.6 7.1 450 7.0 7.5 500 7.4 7.9 550 7.8 8.3 Stroke (mm) Y / Z axis in-line mount Y / Z axis side mount 600 8.2 8.7 650 8.6 9.1 700 9.0 9.5 750 9.4 9.9 800 9.8 10.3 850 10.2 10.7 900 10.6 11.1 950 11.0 11.5 1000 11.4 11.9 4 Triple Axis P&P Unit Dimensions (reference drawing for assembling) Stroke+40 85 66