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4 11 4 11 4 11 2 VPA3185 2.3 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Dimensions 3-Rc 1/8 pilot port 2-Mounting hole Port size Rc (EXH port) Port size 2-Rc (IN, OUT port) IN, OUT EXH Port size Rc A Model Mounting hole C D E F G H K L B J 3 8 1 2 3 4 VPA3145

Side mounting Body tapped Maximum tightening Thread depth: Max. thread depth: Model Bolt L1(mm) L2(mm) torque MXQ6 M40.7 2.1 5 8 MXQ8 M40.7 2.1 8 11 MXQ12 M50.8 4.4 11 15 MXQ16 M61 7.4 14 19 MXQ20 M61 7.4 9 MXQ25 M81.25 18 12 MXQ6A M40.7 2.1 8 11 MXQ8A M40.7 2.1 8 11 MXQ12A M50.8 4.4 8 12 MXQ16A M61 7.4 12 17 MXQ20A M61 7.4 9 MXQ25A M81.25 18 12 MXQ6B M40.7 2.1 5 8 MXQ8B M50.8 4.4 4 9 MXQ12B

Page 4 last updated 11/03/03 10:05 AM Microprocessor-Controlled Electro-Pneumatic Regulator ITV2000 EASY PROGRAMMING GUIDE ADJUSTING THE MINIMUM AND MAXIMUM PRESSURES The ITV allows the user to customize the minimum pressure (zero point) at 0% input signal and the maximum pressure (span) at 100% input signal.

Doc.no.DOC1019547 PRODUCT NAME Speed controller with indicator Compact Type MODEL/ Series/ Product Number JAS-S* Doc.no.DOC1019547 Contents 1.Saftey Instructions 34 2.Specific Product Precautions 510 3.Applications 11 4.Specifications 11 5.Malfunctions and Countermeasures 11 6.Construction 1213 2 - Doc.no.DOC1019547 Speed controller with indicator Compact Type JAS-S* Series Safety Instructions

D: Limited warranty and Disclaimer are added. E: Modified errors in text. F: Revision. G: Contents are added. [July 2016] H: Contents revised in several places. [December 2021] I: Contents are added.

M L1 L2 1 4 8 6 DEF06-02 48 20 11 16 16 50.5 46.5 17 15 13 11 19 17 14 12 14 12 6max. 4max. 3 8 DEF08-03 66 3 8 3 8 DEF10-03 10 12 53.5 89 DEF12-03 54.5 34 51 17 17 17 17 15 17 19 19 104 17 19 17 19 7max. 7max. 105 Series H, DL, L, LL Self-align Fittings Plug: DP Applicable tube O.D. Weight (g) Part No.

Piping 10 7.1 Piping connections to the PD Ports 10 7.2 Piping connections to the Supply (P) port 11 8. Construction 12 9. Dimensions 15 10.

Mounting Wiring/Piping Caution Warning 11. Transition wiring of ionizer For transition wiring of ionizers, use a transition wiring cable for connection between ionizers. Use a power supply cable for connection between ionizer and power supply or external equipment. (Transition wiring is not possible with the IZS40.)

2 ZFB101-05 ZFB101-07 ZFB201-07 ZFB301-11 ZFB401-13 65 54 53 27.2 24.2 24 19.7 17.7 17.5 " " 15.2 18.5 21.7 14.4 15.5 50 15 12.5 22.5 26 48 12.8 8.5 52 57 64.5 28 30 34 9.5 11 13.5 24.5 27 30.5 13.5 14.5 16.5 16 17 21.5 61 65 81 17.5 21.5 25.6 16.6 18 23 70 87.5 30.2 34 21.7 24 280

C: Revision D: Limited warranty and Disclaimer and measurement laws are added. E: Contents revised in several places. F: Contents revised in several places.

Auto switch Auto Switch Specifications D-M9N-5(With indicator light) Auto switch model D-M9N-5 Electrical entry direction In-line Wiring 3-wire Output NPN type Applicable load IC circuit,Relay,PLC Power supply voltage 5 , 12 , 24 VDC (4.5 to 28 V) Current consumption 10 mA or less Load voltage 28 VDC or less Load current 40 mA or less Internal voltage drop 0.8 V or less at 10 mA (2 V or less

D-M9N-5 ( ) D-M9N-5 3 NPN IC PLC DC51224V(4.528V) 10mA DC28V 40mA 10mA 0.8V (40mA 2V ) DC24V 100A ON CE RoHS D-M9N-5 M2.54L 15 - 5. 5-1. 1. () 2. 3. 4. 1. 5-2. 1. 2. 3. 4. Nm JMHZ2-16D M3x0.5 0.59 16 - M6x23 6.3Nm M4x10 1.0Nm 17 - P165-2. M3x7 0.59Nm 18 - (0.7mm) 19 - 5-3.

Tube deformation ratio at the minimum bending radius Here, : Deformation ratio (%) d: Tubing diameter (mm) L: Measured length (mm) D: Mandrel diameter (mm) (Twice against the minimum bending radius) Test temperature: 20 +/5oC Relative humidity: 65 +/5% (3) Do not use fluids other than listed on the specifications. Applicable fluids are air,N2,water and steam.

D-sub 9 pin (socket type) Fixed screw: M2.6 6-8 Unused Unused 9 Unused BUS 1-2 Unused 8 1 Install the product above 0.6m from the floor. 3-5 PT-RTD 5.2 Environment 6 Output Cutoff Alarm a contact (OPEN During Alarm) 15 9 Signal D-sub 15 pin (Socket type) 7 Output Cutoff Alarm Common External Do not use in an environment where the product is directly exposed to Fixed screw: M2.6 temperature

Chamfered port size D (Recommended value) Rc, G NPT, NPTF Female thread size 1 8 1 4 3 8 1 2 10.5 to 11.8 14.1 to 15.8 17.4 to 19.4 21.7 to 25.1 10.2 to 11.8 13.6 to 15.8 17.1 to 19.4 21.4 to 25.1 15-1-11

OUT2 setting/(CH1 only) MPa or kPa OUT1 OUT2 CH 1 2 3 4 PRESSURE Normally Open Normally Closed SET SET 16-3-11 11 Series PSE530/200 Operation 1: Initial Setting 4 Response time setting MPa kPa OUT1 OUT2 CH 1 2 3 4 PRESSURE 5 ms 20 ms 160 ms 640 ms SET Press SET button.

Enclosure: None (IP40), SI Unit: ND (PROFIBUS DP - 16 Outputs - Connector D-sub), SI Unit Output Polarity: N (-COM), Stations: 4 Stations, P, E Port Entry: D (D Side 2~10 Stations), SUP/EXH Block Assembly: Internal Pilot, A, B Port: C8 (ø8 One-touch Fitting), Mounting: D (DIN Rail Mounting), DIN Rail Option: 11 (for 11 Stations; Longer Rail than Total Length of Specified Valve Stations)

E 2 IISA2 *1 16 1~6 C +2 *2 *A V 2 E2 (MPa) 0.2MPa 0.4MPa G2 (MPa) *P2 (MPapsi) SR *Z2 (psi) SL E4 (MPa) PR G4 (MPa) PL *P4 (MPapsi) * *Z4 (psi) * *1psi *21/8 B D DIN + 2 C 1 AC100V M 2 AC200V W 3 AC110V 4 AC220V 2 5 DC24V D DIN 6 DC12V DL DIN() 36 AC230V DO DIN() T TL () * -11No.PS-OMF0005CN-E G E 2 1 ISA2 G 0.25mm *L L H 0.5mm N P * Rc1/8 N NPT1/8 *F G1/8 1 NPN * 5

L (L) M (M) DC +DIN +-1 2 (G) A C S DIN DIN DIN DIN DIN D 68mm Y 4.57mm T 68mm E 2.32.8mm E, T 1.25-3, 1.25-3S, 1.25Y-3N, 1.25Y-3S D,Y R Y Z EZTZDZLZMZ AC24V (+) D C S VF1000 VF1000 VF1000 VF1000 VF3000 VF3000 VF3000 VF3000 VF5000 VF5000 VF5000 VF5000 () P P(SUP) P A B A(CYL2) B(CYL1) A B EA EB R1(EXH2) R2(EXH1) R1 R2 (B)2 4(A) (B)2 4(A) (R2)3 1 5(R1) (P) (R2)3 1 5(R1) (P) 3(