3 Way,3 Port Solenoid Valve NVZ Series A A afll-'h s-zl;lh P R P R (external pilot type) A A , A;Tt-Zb gzt;]ri! , P R P R Model Specifications Air and inert 20-100 PSI (1.5"7kgf/cm,) VAC-1 10Torr 20-1OoPS|(15-7ksflcm'?) N,lax. 120'F (50'C) 20 ms or less (7OPS|) 600 cpm , Slotted Knob locking type Individual, Common Not (Use turbine oil # 1 (lSO VG32) if lubrication is Drovided.)
A A afll-'h s-zl;lh P R P R (external pilot type) A A , A;Tt-Zb gzt;]ri! , P R P R Model Specifications Air and inert 20-100 PSI (1.5"7kgf/cm,) VAC-1 10Torr 20-1OoPS|(15-7ksflcm'?) N,lax. 120'F (50'C) 20 ms or less (7OPS|) 600 cpm , Slotted Knob locking type Individual, Common Not (Use turbine oil # 1 (lSO VG32) if lubrication is Drovided.)
100 100 50 50 0 0 0 5 m/s m/s 19 4-3.
With auto switch CRQ2B S 20 90 CDRQ2B S 20 90 A90 S Shaft type Built-in magnet Single shaft Double shaft S W Rotation 90 80 to 100 170 to 190 180 Size Shaft type 10 15 20 30 40 Air cushion Single shaft Double shaft S W Rotation Air cushion Without Without With Sizes 10, 15 Nil Nil C 90 80 to 100 170 to 190 180 Size 20, 30, 40 10 15 20 30 40 Air cushion Auto switch model Air cushion Without
~:;:--l' VAC Vacuum load lock chamber Digital pressure switch Digital Pressure Switch Series ZSE6/ISE6 (For vacuum) (For positive pressure) Model 1~SV(S % F ,S, ) ".
Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-11 Connection of RS-232C 3.3 Installation HRS Series 3-16 HRX-OM-O021 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.
110 -10 Pam 3/s A B C 0.0-101.0kPa 0 -101.0 kPa -100.0100.0kPa -100 kPa 100 kPa -0.1001.000MPa -0.1 MPa 0 1.
Seal Type: Metal, Configuration: 2-position, Number of Solenoids: Single, Voltage: 24VDC, Pilot: External Individual Pilot Exhaust, Subplate: w/o Subplate, Option: External Pilot Supply
Seal Type: Metal, Configuration: 2-position, Number of Solenoids: Single, Voltage: 24VDC, Pilot: External Individual Pilot Exhaust, Subplate: Side 1/4, Option: External Pilot Supply
Seal Type: Rubber, Configuration: 2-position, Number of Solenoids: Single, Voltage: 24VDC, Pilot: External Individual Pilot Exhaust, Subplate: w/o Subplate, Option: External Pilot Supply
Seal Type: Rubber, Configuration: 2-position, Number of Solenoids: Single, Voltage: 100VAC/50Hz, 115VAC/60HZ, Pilot: External Individual Pilot Exhaust, Subplate: w/o Subplate, Option: External Pilot Supply
Seal Type: Metal, Configuration: 2-position, Number of Solenoids: Single, Voltage: 100VAC/50Hz, 115VAC/60HZ, Pilot: External Individual Pilot Exhaust, Subplate: w/o Subplate, Option: External Pilot Supply
Seal Type: Rubber, Configuration: 2-position, Number of Solenoids: Single, Voltage: 100VAC/50Hz, 115VAC/60HZ, Pilot: External Individual Pilot Exhaust, Subplate: w/o Subplate, Option: External Pilot Supply
Seal Type: Metal, Configuration: 2-position, Number of Solenoids: Single, Voltage: 24VDC, Pilot: External Individual Pilot Exhaust, Subplate: w/o Subplate, Option: External Pilot Supply
Seal Type: Rubber, Configuration: 2-position, Number of Solenoids: Single, Voltage: 200VAC/50Hz, 230VAC/60Hz, Pilot: External Individual Pilot Exhaust, Subplate: w/o Subplate, Option: External Pilot Supply
Seal Type: Metal, Configuration: 2-position, Dual Pressure, Number of Solenoids: Single, Voltage: 100VAC/50Hz, 115VAC/60HZ, Pilot: External Individual Pilot Exhaust, Subplate: w/o Subplate, Option: External Pilot Supply
Seal Type: Metal, Configuration: 2-position, Number of Solenoids: Single, Voltage: 24VDC, Pilot: External Individual Pilot Exhaust, Subplate: Side 3/4, Option: External Pilot Supply
Seal Type: Metal, Configuration: 2-position, Number of Solenoids: Single, Voltage: 100VAC/50Hz, 115VAC/60HZ, Pilot: External Individual Pilot Exhaust, Subplate: w/o Subplate, Option: External Pilot Supply
Seal Type: Rubber, Configuration: 2-position, Number of Solenoids: Single, Voltage: 24VDC, Pilot: Pilot Exhaust through Footprint, Subplate: Side 1/2, Option: External Pilot Supply
Seal Type: Rubber, Configuration: 2-position, Number of Solenoids: Single, Voltage: 24VDC, Pilot: External Individual Pilot Exhaust, Subplate: w/o Subplate, Option: External Pilot Supply