Rotary Clamp Cylinders

MK-A012 MK-A016 Bore size (mm) 12 16 20 25 32 40 50 63 12 70 87 16 100 123 20 250 290 25 280 320 32 500 525 40 595 640 50 1100 1350 63 1520 1805 Clamp bolt, Hexagon socket head cap screw, Hexagon nut, Spring washer MK-A020 MK-A032 Additional Weight MK-A050 Unit: g 50 7 46 13 350 345 63 17 46 25 350 531 40 6 21 7 200 198 20 6 10 2 100 133 25 7 10 3 100 153 32 7 21 5 200 166 16 32

MXS Series Air Slide Table

30 55 65 70 GA 16 16 16 16 51 61 109 159 KA NA 2 2 2 2 2 4 4 4 N 4 4 4 4 6 6 6 8 HA 40 40 40 50 30 70 70 70 G 16 16 16 16 21 26 39 19 H 40 40 40 50 30 35 35 35 NN 2 2 2 2 3 4 5 7 I 10 10 10 10 15 40 55 68 J 40 40 40 50 60 85 118 155 K 29 39 49 59 69 94 119 144 Z 75 75 75 85 100 150 198 248 M 76 76 76 86 101 151 199 249 ZZ 87 87 87 97 112 162 210 260 Note) Refer to "Dimensions" of MXS 16

5-Port Solenoid Valve

If the layout is specified, indicate it on the manifold specification sheet. i Mounting and Option Symbol Mounting Option Name plate Station number Nil Direct mounting 32 M12 NB NBN 16 NC NCN 32 *4 D-sub ND NDN 16 VA VAN CC-Link 32 M12 VB VBN 16 DA DAN EtherCAT 32 M12 DB DBN 16 FA FAN PROFINET 32 M12 FB FBN 16 EA EAN EtherNet/IP 32 M12 EB EBN 16 *3 GAN Ethernet POWERLINK 32 M12 *3 GBN 16

Stopper Cylinder

6 @0 o 20 32, 40, 50 w @2 @1 !5 !4 t i i u !8 !9 w @2 u !5 !4 y q !9 @0 @1 t e @0 !6 !6 !8 o y q e o Double acting with spring loaded (B) !0 20, 32, 40, 50 12, 16 !0 Single acting / spring extend (T) !1 !2 !0 12, 16 20, 32, 40, 50 !0 !3 Component Parts No.

Air Fittings & Tubing

Weight (g) (1) D L A M 7 32 32 24 19 17 14 4 9 8 9 7 2 KQ2R01-03 KQ2R01-05 KQ2R01-07 KQ2R03-05 KQ2R03-07 KQ2R05-07 KQ2R05-09 KQ2R07-09 KQ2R07-11 KQ2R09-11 KQ2R09-13 KQ2R11-13 9.6 34.5 18.5 17.5 17 5 32 3 16 1 4 3 16 1 4 1 4 5 16 5 16 3 8 3 8 1 2 1 2 15.5 2.5 1 8 34 9.2 34 34.5 34.5 36.5 37 40 40 41 44 10 5 32 17.5 16 3 10.4 11.4 10.7 18.5 18 18.5 19.5 3 16 16.5 3.5 1 4 13.2 17 4.6 14 5 16

CM2

(mm) Bore size (mm) Bore size (mm) LZ LY LV LT LP LH Q LG P LF N1 WB G LD WA 20 20 20 152 59 18.4 3.2 37 30 30 6 15 8 6.8 8.5 13 17.5 21.5 25 25 25 156 59 18.4 3.2 37 30 30 6 15 8 6.8 13 17.5 10.5 24.5 32 32 32 174 75 28 4 50 40 40 6 15 8 9 13 17.5 11.5 27 40 40 40 203 75 28 4 50 40 40 8 15 11 9 16 21.5 15 32.5 6-4-20 21 Series CM2 Accessory Bracket Dimensions Single Knuckle Joint Single

XL

T msec 600 600 Bellows seal 400 400 200 200 0 0 16 25 40 50 63 80 16 25 40 50 63 80 Size Size XLF Normally closed XLG Double acting (dual operation) Valve type Model 140 140 120 120 100 100 80 80 T msec T msec T msec O-ring seal 60 60 40 40 20 20 0 0 16 25 40 50 63 80 16 25 40 50 63 80 Size Size Valve type XLD Normally closed Model Exhaust Initial exhaust valve 1200 1200 1000 1000 800 800

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

(G), (H): SY7 40(R)-Q 02 03 3 4 5 Scale: 35% G H SV SY SY SYJ SX VK VZ VF VFR VP7 VQC SQ VQ L type plug connector (L): SY7 40(R)-L-Q M type plug connector (M): SY7 40(R)-M-Q DIN terminal (D): SY7 40(R)-D-Q 02 03 3 4 5 3 4 5 02 03 02 03 3 4 5 VQ4 VQ5 Applicable cable O.D. 3.5 to 7 VQZ 91.5 VQD 84 172.4 Max. 10 72.7 VFS VS VS7 Pg.1.2-16 VQ7 20.5 20.5 174.2 33 60.6 11.5 26.5 1.2-41 Base Mounted

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

VFS Cylinder Speed Chart Bore size Series CJ2 Pressure 0.5 MPa Load factor 50% Stroke 60 mm VS4 Series MB, CA1 Note) Pressure 0.5 MPa Load factor 50% Stroke 500 mm 6 10 16 20 25 32 40 40 50 63 80 100 Series CM2 Pressure 0.5 MPa Load factor 50% Stroke 300 mm Average speed (mm/s) Series VQ7 EVS 800 700 600 500 400 300 200 100 0 749 749 Perpendicular, upward actuation Horizontal actuation 610

CG5-S

200 18 15.5 13 16.5 25 8 18 12 35 5 31 M4 x 0.7 5 6 14 3 M8 x 1.25 29 1/8 9 83 13 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.084 0 +0.084 0 25 8 16 to 300 22 19.5 17 18.5 27 10 18 12 40 6 33 M5 x 0.8 5.5 8 14 3.5 M10 x 1.25 29 1/8 9 83 13 32 10 24 to 300 22 19.5 17 20 32 12 18 12 40 6 38 M5 x 0.8 5.5 10 16 3.5 M10 x 1.25 35.5 1/8 11 85 15 40 10 24 to 500 30 27 19 26 40 16 19 13 50 8

17

16 16 16 16 16 2.2 (1) 2.2 (1) 12 12 12 12 12 12 1.1 (0.5) 10 20 30 31 50 100 101 300 200 1.1 (0.5) 10 20 30 31 50 100 101 300 200 Stroke (mm) Stroke (mm) MGPL32 to 63, MGPA32 to 63 MGPL32 to 63, MGPA32 to 63 110 (50) 110 (50) Load mass m lbs (kg) Load mass m lbs (kg) 63 63 50,63 50 50 50,63 50,63 22 (10) 22 (10) 40 40 40 50,63 40 40 40 32 32 32 32 32 32 11 (5) 10 20 30 50 40 51 100 101

Vacuum Pad

ZP2-16UCL ZP (10, 13, 16) U ZP (10, 13, 16) C ZP (10, 13, 16) B ZP (10, 16) D ZPT2-A5, A6 ZPT2-B5, B6 B01, N01 T01 P. 72 P. 73 ZP (20, 25, 32) U ZP (20, 25, 32) C ZP (20, 25, 32) B ZP25D ZP2-B25J ZP2-B30J ZP2-25UCL ZP2-32UCL ZPT3-A6, A8 ZPT3-B5, B6, B8 B01, N01 T01 P. 72 P. 73 ZP (40, 50) U ZP (40, 50) C ZP (40, 50) B ZP40D ZPT4-A6, A8 ZPT4-B6, B8 B01, N01 T01 ZP2-40UCL ZP2-50UCL P. 72 P

Vacuum Pad

ZP2-16UCL ZP (10, 13, 16) U ZP (10, 13, 16) C ZP (10, 13, 16) B ZP (10, 16) D ZPT2-A5, A6 ZPT2-B5, B6 B01, N01 T01 P. 72 P. 73 ZP (20, 25, 32) U ZP (20, 25, 32) C ZP (20, 25, 32) B ZP25D ZP2-B25J ZP2-B30J ZP2-25UCL ZP2-32UCL ZPT3-A6, A8 ZPT3-B5, B6, B8 B01, N01 T01 P. 72 P. 73 ZP (40, 50) U ZP (40, 50) C ZP (40, 50) B ZP40D ZPT4-A6, A8 ZPT4-B6, B8 B01, N01 T01 ZP2-40UCL ZP2-50UCL P. 72 P

Vacuum Pad

ZP2-16UCL ZP (10, 13, 16) U ZP (10, 13, 16) C ZP (10, 13, 16) B ZP (10, 16) D ZPT2-A5, A6 ZPT2-B5, B6 B01, N01 T01 P. 72 P. 73 ZP (20, 25, 32) U ZP (20, 25, 32) C ZP (20, 25, 32) B ZP25D ZP2-B25J ZP2-B30J ZP2-25UCL ZP2-32UCL ZPT3-A6, A8 ZPT3-B5, B6, B8 B01, N01 T01 P. 72 P. 73 ZP (40, 50) U ZP (40, 50) C ZP (40, 50) B ZP40D ZPT4-A6, A8 ZPT4-B6, B8 B01, N01 T01 ZP2-40UCL ZP2-50UCL P. 72 P

Vacuum Pad

ZP2-16UCL ZP (10, 13, 16) U ZP (10, 13, 16) C ZP (10, 13, 16) B ZP (10, 16) D ZPT2-A5, A6 ZPT2-B5, B6 B01, N01 T01 P. 72 P. 73 ZP (20, 25, 32) U ZP (20, 25, 32) C ZP (20, 25, 32) B ZP25D ZP2-B25J ZP2-B30J ZP2-25UCL ZP2-32UCL ZPT3-A6, A8 ZPT3-B5, B6, B8 B01, N01 T01 P. 72 P. 73 ZP (40, 50) U ZP (40, 50) C ZP (40, 50) B ZP40D ZPT4-A6, A8 ZPT4-B6, B8 B01, N01 T01 ZP2-40UCL ZP2-50UCL P. 72 P

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

R 32 DS5032 45 14 34 3.3 11.5 32.5 3 5 5.5 22 10 30 10.5 6.6 10 11 17 40 DS5040 55 16 40 4.3 12 38 4 5 5.5 25 10 35 11 6.6 12 13 20 50 DS5050 65 21 45 4.3 14 46.5 4 5 6.5 27 12 40 15 9 16 18 22 63 DS5063 75 21 51 4.3 14 56.5 4 5 6.5 32 12 45 15 9 16 18 25 80 DS5080 95 25 65 4.3 16 72 4 5 10 36 16 45 18 11 20 22 30 100 DS5100 115 25 75 6.3 16 89 4 5 10 41 16 55 18 11 20 22 32 * Supplied with

High Vacuum Angle Valve, XL Series

T msec 600 600 Bellows seal 400 400 200 200 0 0 16 25 40 50 63 80 16 25 40 50 63 80 Size Size XLF Normally closed XLG Double acting (dual operation) Valve type Model 140 140 120 120 100 100 80 80 T msec T msec T msec O-ring seal 60 60 40 40 20 20 0 0 16 25 40 50 63 80 16 25 40 50 63 80 Size Size Valve type XLD Normally closed Model Exhaust Initial exhaust valve 1200 1200 1000 1000 800 800

Pneumatics Best 2 Auto Switch Guide Applicable Cylinder Series 1 CDA2-X1184 MDB-X1184 CDQ2-XB14 CDG5·S CDJ5·S Cylinder series CDJP2 MDU-Z CDQM CDQS HYDQ CDJ2 CDM2 CDM3 MDB1 HYDB CDG1 CDG3 CDQ2 CDUJ CDA2 CDS1 CDS2 MDB RDQ CQU CDU ø125 to ø200 ø125 to ø160

, 63 to 100 50 16, 20 25 to 63 16, 20 6, 10, 12, 16 8 to 40 6, 10 12 to 20 25 32 to 100 25 to 63 10 to 20 25 to 40 50, 63 16, 20 25 to 63 16, 25, 40 16 to 63 6 to 20 25 to 63 6 to 40 10 to 32 10, 15, 25 15, 32 6 to 20 6 to 16 6 to 25 6 to 25 8 to 20 8 to 25 4, 6, 8 6 to 16 32 to 63 32 to 63 25 to 32 10 to 20 Bore size D-H7 D-H7C D-H7BAL D-H7NF D-H7W D-G5/K5 D-G5BAL D-G59F D-G5NTL D-G5W/K59W

Environment

16 20 24 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 16 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 800 800 800 800 L6 L6 [mm] L6 [mm] L6 [mm] L6 [mm] 600 600 600 600 Z 400 400 400 400 200 200 200 200 0 0 4 8 12 16 20 24 0 0 0 0 2 4 6 8 10 12 14 16 0 10 20 30 40 50 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load

MY2

M2 m1 M3 30 50 200 m3 Allowable moment (Nm) Allowable moment (Nm) MY1C Load weight (kg) 40 Load weight (kg) Diagonal cam follower 20 45 Lateral cam follower 50 30 100 20 10 10 0 MY2C 0 0 16 25 40 0 16 25 40 16 25 40 16 25 40 Bore size (mm) Bore size (mm) Bore size (mm) Bore size (mm) Diagonal cam follower 60 Lateral cam follower MY2HT MY2H MY1H MY2HT MY2H MY1H MY2C MY1C MY2C MY1C Features