1

15 Spacer Grommet: GS Flat terminal: F Conduit: C 280 G F F G 11 300 G F Terminal part Flat terminal connector 11 23 9 H C 15 6.5 H C H C G1/2 Terminal: T DIN terminal: D F G Applicable cable O.D.: 6 to 12 F G Width across flats 22 G1/2 32 (44) H 31.5 25 C H C G1/2 J J Dimensions [mm] Model A B Bs C D E F L M P [inch] Grommet: G Grommet: GS Conduit: C Flat terminal: F DIN terminal: D Terminal

Digital Flow Switch ( compatible)

The straight piping length shall be 8 cm or longer in order to maintain 3%F.S. of the specification. -98No.PF-OMZ0002-A Dimensions PF2MC7501/7102/7202 Symbol Model Piping port size A B D E F H K L N PF2MC7501/7102 Rc1/2, NPT1/2 70 30 60.6 41.2 15 14 26 18 13.6 PF2MC7202 Rc3/4, NPT3/4, G3/4 90 35 66.1 46.7 17.5 24 31 28 16.8 PF2MC7501/7102 G1/2 76 30 60.6 41.2 15 14 26 18 13.6 Bracket dimensions

Magnetically Coupled Rodless Cylinder/Direct Mount Type: Both Sides Piping Type Series CY3R

Magnetically Coupled Rodless Cylinder/Direct Mount Type: Both Sides Piping Type Series CY3R 6, 10, 15, 20 25, 32, 40, 50 63 Replacement Procedure is P.316 Construction Both sides piping type Actuators Modular F.R.L. Pressure Control Equipment Air Preparation Equipment Industrial Filters Replacement Procedure Actuators Modular F.R.L.

VCA

32 R 40 48 56 58.5 41 50 60 68 64 76 86 91 18 24 30 35 28 34 40 40 11.5 14 15 17.5 15 17 20 20 20.5 25 30 34 12.8 19 23 23 M4 M5 M5 M5 VCA21 VCA31 1/4 1/4, 3/8 3/8, 1/2 3/4 VCA41 4 Series VCA How to Order Manifolds (VCA20) VV2C A 2 02 02 How to Order Manifold Assemblies (Example) Enter the valve and option models to be mounted under the manifold base part number.

VCW

36.5 13.5 15 32 25 23 M5 24 59 46 57 60 54.5 48.5 101 57 68 1/2 22 45 89 41 11 17 36 22.5 23 M5 26 64.5 48 62.5 62 60 50.5 103 62.5 70 1/4, 3/8 VCW41 30 50 93.5 41 13.5 17 36 25 23 M5 26 66.5 48 64.5 62 62 50.5 103 64.5 70 1/2 35 60 101 41 17.5 17 36 30 28.2 M5 26 70 48 68 62 65.5 50.5 103 68 70 3/4 4 Direct Operated 2Port for Water Series VCW Dimensions (N.O.)

Digital Pressure Switch

If the installation is using accurate control, wait until the product has warmed up (approximately 10 to 15 minutes).

10-cy3r-e

Magnetically Coupled Rodless Cylinder/Direct Mount Type: Both Sides Piping Type Series CY3R 6, 10, 15, 20 25, 32, 40, 50 63 Replacement Procedure is P.316 Construction Both sides piping type Actuators Modular F.R.L. Pressure Control Equipment Air Preparation Equipment Industrial Filters Replacement Procedure Actuators Modular F.R.L.

SI unit for EtherNet/IP TM

Output data Offset MSB LSB MSB LSB (Word) 15 8 7 0 0 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 -38No.EX-OMP0013-E Dimensions If a fieldwireable connector is used for the power supply connection, and the SI unit is installed directly to a valve manifold, the cable connectors outer diameter should be 16 mm or less.

Magnetically Coupled Rodless Cylinder: Basic Type Series CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40, ø50, ø63

Magnetically Coupled Rodless Cylinder: Basic Type Series CY3B 6, 10, 15, 20, 25, 32, 40, 50, 63 How to Order CY3B 25 300 Basic type Basic type Bore size Standard stroke 6 10 15 20 25 32 40 50 63 6 mm Refer to the standard stroke table shown below. 10 mm 15 mm Port thread type 20 mm Type M thread Rc NPT G Bore size 6, 10, 15 Symbol 25 mm 32 mm Nil 40 mm 20, 25, 32, 40 TN TF 50 mm 50, 63 63

EXxx-OMN0037CN

No.EX-OMN0037CN-A / EX600-AXA EX600-AYA EX600-AMB SMC 3 9 10 12 12 14 15 15 16 16 LED 18 19 19 24 25 25 26 26 LED 27 28 28 32 33 33 34 34 LED 36 37 37 44 -1No.EX-OMN0037CN-A 45 46 46 46 46 46 47 -2No.EX-OMN0037CN-A (ISO/IEC)(JIS) 1 2 *1 ISO 4414: Pneumatic fluid power -General rules relating to systems.

MLGP

Auto switches are shipped together, (but not assembled). 50 63 80 100 20 25 32 40 50 mm 63 mm 80 mm 100 mm 20 mm 25 mm 32 mm 40 mm Locking direction Extension locking Retraction locking F B Cylinder stroke (mm) Refer to Standard Stroke on page 9-11-21. Applicable Auto Switch/Refer to page 9-15-1 for further information on auto switches.

30

32 32, 40 40 32, 40 50 50, 63 44 49.5 49.5 60 60 60 71.5 71.5 17.5 19.5 19.5 20 20 20 22 22 21 24 24 31 31 31 41 41 4.5 5 5 6 6 6 7.5 7.5 7 8 8 11 11 11 14 14 7 8 8 11 11 11 13.5 13.5 13 17 17 22 22 22 27 27 30.5 34 34 38 38 38 44.5 44.5 8 9 9 13 13 13 15 15 0.5 0.5 0.5 0.75 0.75 0.75 1 1 300 800 800 1250 1250 1250 3100 3100 0.03 0.05 0.05 0.11 0.11 0.11 0.22 0.22 JC20-8-100 JC25-10-150 JC32

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

Internal pilot manifold L: Dimensions n: Stations L n 2 110.5 100 86 12 3 123 112.5 96.5 13 4 135.5 125 107 14 5 148 137.5 117.5 15 6 160.5 150 128 16 7 173 162.5 138.5 17 8 173 162.5 149 12 9 185.5 175 159.5 13 10 198 187.5 170 14 11 210.5 200 180.5 15 12 223 212.5 191 16 13 235.5 225 201.5 17 14 235.5 225 212 12 15 248 237.5 222.5 13 16 260.5 250 233 14 17 273 262.5 243.5 15 18 285.5 275

Process Pump

Air consumption (L/min [ANR]) SUP = 0.7 MPa 40 35 30 SUP = 0.5 MPa 25 20 SUP = 0.35 MPa Caution 15 SUP = 0.2 MPa 10 1.

Compact

, 20 0.08 0.06 0.06 ST 5, 10 0.06 ST 15, 20 0.04 0.04 ST 15, 20 0.04 ST 5, 10 0.02 0.02 0.02 ST 5, 10 0.00 0 5 10 15 0.00 0 5 10 15 0.00 0 5 10 15 Load [N] Load [N] Load [N] MXZ16 MXZ16 MXZ16 0.15 0.15 0.15 Table displacement [mm] Table displacement [mm] Table displacement [mm] ST 25, 30 ST 25, 30 ST 25, 30 ST 15, 20 0.10 0.10 0.10 ST 15, 20 ST 15, 20 ST 5, 10 0.05 0.05 0.05 ST 5, 10 ST 5

RSH

Series RSH 20, 32, 50, 63, 80 How to Order RSH 20 15 D L Z73 Heavy Duty Stopper Cylinder Bore size Number of auto switches 20mm 32mm 50mm 63mm 80mm 20 32 50 63 80 S 2 1 Auto switch Stroke Without auto switch (Cylinder built-in magnet) 15mm 20mm 30mm 40mm 20 32 50/63 80 * Refer to the table below for auto switch model nos.

EXxx-OMK0006

(Output on) Index 6320h Write Outputs 32-Bit This object shall set a group of 8 outputs lines as 32-Bit of information.

ZP3

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet Flat Type with Groove A 3 30.5 11 1.2 11 04 6 37 14 14.5 10 47 18 20.5 J K Width across flats E 3 30.5 11 1.8 11 6 37 14 14.5 10 47 18 20.5 06 08 N S U F GN GS HS 7 15 55 36.5 1.2 10 20 62.5 44 06 08 15 55 36.5 1.8 20 62.5 44 04 JB K ZP3 T UM B5 C2 3 31.5 12 11 J K 10 6 38 15 14.5 10 48 19 20.5 JB K 15 56 37.5 10 20 63.5 45 10

MHT2

Bore size 32 mm 32 40 mm 40 50 mm 50 63 mm 63 Action Double acting D Applicable Auto Switch/Refer to page 12-13-1 for further information on auto switches.

MHT2

DRail mounting Direct mounting 20D-A7H/A80H D-A73C/A80C D-F7BAL/F7BAVL D-F7/J79 D-F7V/J79C D-F7W/F79F D-F7WV D-J79W D-M9 D-M9V D-F9W D-F9WV D-F9BA D-A7/A80 D-A79W D-A9 D-A9V Bore size (mm) D 8 10.5 13.5 16.5 C 11 15 13 15.5 D 9 11.5 14.5 17.5 C 12 16 14 16.5 D 5 7.5 10.5 13.5 C 8 12 10 12.5 B 3.5 6 9 12 A 6.5 10.5 8.5 11 B 6.5 9 12 15 A 9.5 13.5 11.5 14 B 6 8.5 11.5 14.5 A 9 13 11 13.5 32