Body Size: 1 (M5 X 0.8, 10-32UNF), Type: 3 (Universal), Control Type: 0 (Meter-out), Thread Type: R, Port Size: M5 (M5 X 0.8), Dimension, Across Flat [H]: Body Size 1: 9mm; Body Size 2, 3, 4 None, Applicable Tubing O.D.: 03 (Ø5/32), Seal Method: None

Body Size: 1 (M5 X 0.8, 10-32UNF), Type: 3 (Universal), Control Type: 1 (Meter-in), Thread Type: R, Port Size: M5 (M5 X 0.8), Dimension, Across Flat [H]: Body Size 1: 9mm; Body Size 2, 3, 4 None, Applicable Tubing O.D.: 03 (Ø5/32), Seal Method: None

Body Size: 1 (M5 X 0.8, 10-32UNF), Type: 3 (Universal), Control Type: 1 (Meter-in), Thread Type: R, Port Size: M5 (M5 X 0.8), Dimension, Across Flat [H]: E (8mm), Applicable Tubing O.D.: 03 (Ø5/32), Seal Method: None

Body Size: 1 (M5 X 0.8, 10-32UNF), Type: 2 (Elbow), Control Type: 1 (Meter-in), Thread Type: R, Port Size: M5 (M5 X 0.8), Dimension, Across Flat [H]: E (8mm), Applicable Tubing O.D.: 03 (Ø5/32), Seal Method: None

VFR3000-OMY0001

(A)(B) (A)(B) Rc 1/8 4 2 4 2 (kg) 0.83 5 1 3 5 1 3 (mm2) PA 44 38 32 (EA)(P)(EB) (EA)(P)(EB) (A)(B) (A)(B) P1=0.7MPa,P2=0.5MPaS PB 38 40 31 4 2 4 2 (mm2) AEA 90 5 1 3 5 1 3 P2=0.5MPaS BEB 77 (EA)(P)(EB) (EA)(P)(EB) ()( ) 2.8N m 7 VFR3000-OMY0001 VFRA3000,4000 3 VFRA3000 VFRA4000 3 1(P) 8 VFR3000-OMY0001 R , 9 VFR3000-OMY0001 No. 1ISO VG 32 R (1) (2) (3) (4) (5) (6) 10 VFR3000

Body Size: 1 (M5 X 0.8, 10-32UNF), Type: 3 (Universal), Control Type: 1 (Meter-in), Thread Type: R, Port Size: U10/32 (10-32 UNF), Dimension, Across Flat [H]: E (8mm), Applicable Tubing O.D.: 03 (Ø5/32), Seal Method: None

Body Size: 1 (M5 X 0.8, 10-32UNF), Type: 2 (Elbow), Control Type: 0 (Meter-out), Thread Type: R, Port Size: U10/32 (10-32 UNF), Dimension, Across Flat [H]: Body Size 1: 9mm; Body Size 2, 3, 4 None, Applicable Tubing O.D.: 03 (Ø5/32), Seal Method: None

Body Size: 1 (M5 X 0.8, 10-32UNF), Type: 2 (Elbow), Control Type: 1 (Meter-in), Thread Type: R, Port Size: U10/32 (10-32 UNF), Dimension, Across Flat [H]: Body Size 1: 9mm; Body Size 2, 3, 4 None, Applicable Tubing O.D.: 03 (Ø5/32), Seal Method: None

Body Size: 1 (M5 X 0.8, 10-32UNF), Type: 3 (Universal), Control Type: 1 (Meter-in), Thread Type: R, Port Size: U10/32 (10-32 UNF), Dimension, Across Flat [H]: Body Size 1: 9mm; Body Size 2, 3, 4 None, Applicable Tubing O.D.: 03 (Ø5/32), Seal Method: None

Body Size: 1 (M5 X 0.8, 10-32UNF), Type: 2 (Elbow), Control Type: 0 (Meter-out), Thread Type: R, Port Size: U10/32 (10-32 UNF), Dimension, Across Flat [H]: E (8mm), Applicable Tubing O.D.: 03 (Ø5/32), Seal Method: None

Body Size: 1 (M5 X 0.8, 10-32UNF), Type: 3 (Universal), Control Type: 0 (Meter-out), Thread Type: R, Port Size: U10/32 (10-32 UNF), Dimension, Across Flat [H]: Body Size 1: 9mm; Body Size 2, 3, 4 None, Applicable Tubing O.D.: 03 (Ø5/32), Seal Method: None

Body Size: 1 (M5 X 0.8, 10-32UNF), Type: 3 (Universal), Control Type: 0 (Meter-out), Thread Type: R, Port Size: U10/32 (10-32 UNF), Dimension, Across Flat [H]: E (8mm), Applicable Tubing O.D.: 03 (Ø5/32), Seal Method: None

Body Size: 1 (M5 X 0.8, 10-32UNF), Type: 2 (Elbow), Control Type: 1 (Meter-in), Thread Type: R, Port Size: U10/32 (10-32 UNF), Dimension, Across Flat [H]: E (8mm), Applicable Tubing O.D.: 03 (Ø5/32), Seal Method: None

53

Cooling Capacity HRSH090-A-20HRSH090-A-4012 12 Ambient temperature 32C Ambient temperature 32C 10 10 Cooling capacity [kW] Cooling capacity [kW] 8 8 Ambient temperature 43C Ambient temperature 43C 6 6 Ambient temperature 45C 4 4 Ambient temperature 45C 2 2 0 0 5 10 15 20 25 30 35 40 5 10 15 20 25 30 35 40 Circulating fluid temperature [C] Circulating fluid temperature [C] HRSH090-W-20/4014

Guide Table Series MGF ø40, ø63, ø100 1

10 10 MGF40 Data MGF40 10 5 4 3 5 4 3 2 2 5 5 1 10 20 30 40 50 100 200 300 400 1 5 4 10 20 30 40 50 100 200 300 400 5 10 50 100 10 50 100 Eccentric distance l (mm) Eccentric distance l (mm) Stroke (mm) Stroke (mm) l = 200 mm l = 300 mm Graph (3) Graph (4) v = 150 mm/s or less v = 200 mm/s or less Graph (7) Graph (8) 20 300 300 200 200 MGF100 MGF100 20 100 100 MGF100 MGF100 10 MGF100 MGF100

VS7-6

6, 8, 10 Piping SYJ F.

MIST SEPARATOR

Applicable tube external DIA. 10 NPT3/8" 10 NPT3/8" 10 NPT3/8" Note 2 Option Semi-standard Semi-standard Port thread Part no. Rc G NPT AD47N-8(Z)-A AD47-8-A B External appearance drawing and part no. Applicable tube external DIA. 10 NPT3/8" 10 NPT3/8" 17 Note 2 Note 2 Option Semi-standard Semi-standard Semi-standard Part no. Part no.

MICRO MIST SEPARATOR

Applicable tube external DIA. 10 NPT3/8" 10 NPT3/8" 10 NPT3/8" Note 2 Option Semi-standard Semi-standard Port thread Part no. Rc G NPT AD37N-8(Z)-A AD37-8-A B External appearance drawing and part no. Applicable tube external DIA. 10 NPT3/8" 10 NPT3/8" 14 Note 2 Note 2 Option Semi-standard Semi-standard Semi-standard Part no. Part no.

Air Slide Table Series MXP ø 6, ø 8, ø 10, ø 12, ø 16

12 16 Piston area (mm2) 0.2 6 10 16 23 40 MTS 0.7 20 35 55 79 141 0.6 17 30 47 68 121 0.5 14 25 40 57 101 0.4 11 20 32 45 80 0.3 8 15 24 34 60 28 50 79 113 201 With Shock Absorber Mass Standard Stroke (g) (mm) Body mass 80 105 100 160 130 210 210 320 640 830 Standard stroke 5, 10 10, 20 10, 20 15, 25 20, 30 Model MXP6 MXP8 MXP10 MXP12 MXP16 Model MXP6-5 MXP6-10 MXP8-10 MXP8-20 MXP10-10 MXP10

AS

Rod O.D.Applicable tubing O.D. 10 20 25 30 M5 standard 01 standard 02 standard 03 standard 04-04 06-06 08-08 10-10 4 4 6 6 8 8 10 10 wBring up the body, while holding it down. w eTake the finger off the release ring and remove the speed controller from the One-touch fitting.