76

Ventilation direction Heavy duty auto drain Terminal block for signal 1.6 (40) 4 x 0.79 (20) 28.0 (712) 0.078 (2) 0.79 (20) 27.6 (700) 0.039 (1) 3.7 (94) 4.2 (107) 3.0 (75) 29.6 (752) Drain tube (O.D. 0.39 (10), Length approx. 6.6 FT (2 m)) (Can also be connected on the other side.)

Low torque Metal seal type Rotary joint

MQRF2-M5) * flange: MQR12-F (for MQRF12 M5) * 45 * 37 0.03 4.5 * 4-3.5 mounting hole * 4-3.5 mounting hole 3 +0.1 0 depth 10 2-M3 x 0.5 thread length 6 P.C.D.29 44h8 (10 from end) 35h8 (10 from end) 20h8 8.2 x 3 = 24.6 P = 8.2 2 70 *5 (55) 13 15h8 4-M5 x 0.8 10 counter bore depth 1.5 50 2 8.2 26 1 2 (34) 1 2 3 4 2 1 8-5 x 0.8 10 counter bore depth 1.5 14 *5 27 6.5 3.5 6.5 3.5 15H8 (8) 20H8

IDX-OM-W093

1 4.1 . 4-1 4.2 . 4-1 4.3 . 4-2 4.4 . 4-2 4.5 . 4-2 4.6 . 4-2 5 . 5-1 5.1 . 5-1 5.2 . 5-2 5.2.1 . 5-2 5.2.2 . 5-2 6 . 6-1 6.1 . 6-1 6.2 . 6-4 IDF60/70/80/90 Series IDX-OM-W093 7 . 7-1 7.1 . 7-1 7.2 GWP . 7-2 7.3 . 7-3 7.4 . 7-4 7.5 . 7-6 8 A . 8-1 8.1 . 8-1 8.2 . 8-1 8.3 . 8-1 8.4 . 8-1 8.5 . 8-2 9 C . 9-1 9.1 . 9-1 9.2 . 9-1 10 L . 10-1 10.1 . 10-1 10.2

MRQ

(mm) Stroke Size Y Q E Mounting screw 58.5 ( 5 stroke) /2 61 ( 10 stroke) /2 61 ( 15 stroke) /2 63.5 ( 20 stroke) /2 61 ( 25 stroke) /2 63.5 ( 30 stroke) /2 63.5 ( 40 stroke) /2 66 ( 50 stroke) /2 66 ( 65 stroke) /2 71 ( 75 stroke) /2 68.5 ( 90 stroke) /2 73.5 (100 stroke) /2 68 ( 5 stroke) /2 68 ( 10 stroke) /2 70.5 ( 15 stroke) /2 68 ( 20 stroke) /2 70.5 ( 25 stroke) /2 68 ( 30 stroke)

ZB-OM00301

10 ZB1-VPN3A KJ H 04 04 C2 2 H 02 2 C4 4 L 04 4 N1 1/8" 01 1/8" N3 5/32" 03 5/32" L2 2 4 L4 4 LN1 1/8" LN3 5/32" -N KJL04-C1-N 10 Assy ZB1-FE3-A 30m ZA ** 10 1 0-101kPa15V 2%F.S ZA ZB1-SE1-A 3 -100100kPa15V 2%F.S.

99

0.005 0.005 0.005 0.001 10 30 50 70 100 0.001 10 30 50 70 100 0.001 10 30 50 70 100 Flow rate (L/min) Flow rate (L/min) Flow rate (L/min) FGH100-04 {Rc1/2} FGH200-04 {Rc1/2} FGH300-04 {Rc1/2} 0.05 0.05 0.05 Pressure drop (MPa) Pressure drop (MPa) Pressure drop (MPa) 0.01 0.01 0.01 0.005 0.005 0.005 0.001 10 30 50 70 100 0.001 10 30 50 70 100 0.001 10 30 50 70 100 Flow rate (L/min) Flow rate

Process Pump Series PA3000/5000/PAX1000 Series PB1000

(A) 2 N.O. N.C. N.O.

KN Series Nozzles for Blowing

Copper extension nozzle/KNL (mm) Model Nozzle size D Outside diameter L1 Weight (g) KNL3-06-150 KNL3-06-200 KNL3-08-200 KNL3-08-250 KNL3-10-250 KNL3-10-300 KNL6-06-150 KNL6-06-200 KNL6-08-200 KNL6-08-250 KNL6-10-250 KNL6-10-300 1.5 2 2 2.5 2.5 3 1.5 2 2 2.5 2.5 3 6 6 8 8 10 10 6 6 8 8 10 10 300 300 300 300 300 300 600 600 600 600 600 600 43 43 61 61 94 94 84 84 117 117 183 183 O.D.

IDX-OM-W053

5-1 . 5-1 6 6-1 . 6-1 6-2 . 6-2 6-3 . 6-3 6-4 . 6-4 7 A 7-1 . 7-1 7-2 . 7-1 7-3 . 7-1 1 8 C 8-1 . 8-1 8-2 . 8-1 8-3 . 8-1 9 G 7-1 . 9-1 10 H 10-1 . 10-1 10-2 . 10-1 11 K 11-1 . 11-1 11-2 . 11-1 12 L 12-1 . 12-1 12-2 . 12-1 12-3 . 12-2 12-4 . 12-2 13 R 13-1 . 13-1 13-2 . 13-2 13-3 . 13-2 14 T 14-1 . 14-1 14-2 . 14-1 14-3 . 14-2 14-4 . 14-2 14-5 .

Filter for Cleaning Solvent Quick Change Filter Series FQ1

3 I.D. 10.8 x 2.4 O-ring JIS B2401-4D-P11 FPM 4 Series FQ1 Dimensions Bracket 32 V-band support 2.3 75 (25) 50 100 (80) 75 70 70 30 50 10 92 7 2-A 10 108 R3.5 R8 127 (60) R25 120 109 Part number A Applicable bore size Rc 1 Rc 3/4 Rc 1/2 BP-13S BP-14S BP-15S 34.5 27.5 22 120 50 AIR VENT 10 G1/4 10 92 7 R3.5 2-Rc P 102 (43) A I N INLET OUTLET B (108) Intermediate holder Note) Installed only

Series 10-VQD1000 4 Port Direct Operated Poppet Solenoid Valve

Valve 10-VQD1000 Dimensions Plug lead unit manifold: 10-VV4QD15Lead wire length 300 mm Indicator light 4 x Rc1/8 (P, R port) 2-4.5 (Mounting hole) 57.5 52.5 51 1(P) 3(R) 1(P) 3(R) 32 16 17 9 10 P=11 10 4 4 36.5 L2 L1 41.5 45 M plug connector (M) D side Stations U side 1 2 3 4 5 n Direct manual override (Non-locking) 2n-C4, M5 (A, B port) C4: 4 One-touch fitting M5: M5 thread 2(B) 2(B) 27.5

VQ

Wire color Black Brown Red Orange Yellow Pink Blue Violet Gray White White Yellow Orange Yellow Pink Blue Violet Gray Orange Red Dot marking VQ 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 4 1 5 10 VQZ 16 11 20 17 VZ Multi-connector pin arrangement DIN rail mounting bracket VS White Black Black Red Red Red Black Black White Pin No. 1 SOL. 1 station SOL. 2 stations 2 SOL. 3 stations

Stainless Steel Heat

x 3 x 60 = 2736g/h. 6 7 8 3 1 2 3 4 5 Dew point conversion chart 60 50 40 30 Pressure dew point C 20 10 1.5MPa 1.3MPa 1.1MPa 0.9MPa 0.7MPa 0.5MPa 0.3MPa 0.1MPa Atmospheric pressure 0 -40 -30 -20 -10 -60 -50 -60 -50 -40 -30 -20 -10 0 10 20 30 Atmospheric pressure dew point C 8 Series IDUS/IDFS Safety Instructions These safety instructions are intended to prevent a hazardous situation and/

Fluoropolymer Piping Equipment

Page 4 6 8 10 12 19 1/8" 3/16" 1/4" 3/8" 1/2" Material: Super PFA LQHB LQHB TL TIL TL TIL TL Metric Size TLM TILM TLM TILM P.948 TD TID TD TID TIL Inch Size TH TIH TH TIH Material: PFA 2, 3, 4, 6, 8, 10, 12, 16, 19, 25 TLM Metric Size From page 949 1/8", 3/16", 1/4", 3/8", 1/2", 3/4" 1", 1 1/4" TILM Inch Size 4 6 8 10 12 1/8" 3/16" 1/4" 3/8" 1/2" 4 6 8 10 12 1/8" 3/16" 1/4" 3/8" 1/2" 3/4"

AKH/AKB Series

Inch size Millimeter size Port size 5/32 04 03 4 M5 M5 x 0.8 Thread type 1/4 06 07 6 U10/32 10-32UNF 5/16 08 09 8 Metric system thread (M5) 01 1/8 3/8 10 11 10 Nil Unified thread (10-32UNF) 02 1/4 1/2 12 13 12 Rc(PT) 03 3/8 N NPT 04 1/2 Check valve free flow direction Applicable Tube O.D.

Process Valve

Note) A: Non-locking push type A (projecting) 1 6A 8A 10A 10A 15A 20A 25A 32A 40A 50A 1 8 1 4 3 8 3 8 1 2 3 4 4 Note 2) 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz Valve size 1 to 4 10 5 6 Note 2) Note) B: Slotted locking type B (tool required) 7 Note 2) 2 15 Note 1) CE-compliant: For D or DZ only Note 2) Semi-standard Note 3) For other rated voltages, please consult with SMC. 3 20 25

VCW

Grommet: G Conduit: C Approx. 300 Approx. 280 D D Q F Q F C C G (PF) 1/2 R R E E A H 2-P Port size 2-M B B A H 2-P Port size 2-M L L K K DIN connector: D Conduit terminal: T Cable 6.8 to 10 27.5 F F Q (Q) S 34 25 U R C R C (44) G (PF) 1/2 E B A H D 2-P Port size (S) E G (PF) 1/2 B A H D 2-M 2-P Port size 2-M L L K K N.C.

RLQ

unlock. 2.

3 Port Solenoid Valve Rubber Seal Series SY100 1

pcs. of socket) Nil 6 10 15 20 25 30 50 300 mm 600 mm 1000 mm 1500 mm 2000 mm 2500 mm 3000 mm 5000 mm 4-3-7 8 Series SY100 Body Ported Grommet (G), (H): SY1 3 (A)-PM3(-F) 1 2 G H 21.3 9 4 1.7 6.6 21 16 10 2-1.8 (Mounting hole) 2-2.8 (Mounting hole) (Light/Surge voltage suppressor) 23.8 (For AC) Manual override Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080

Direct Operated, 2 Port Solenoid Valve, For Water, Oil, Steam, Air, Series VX

[660] (164) 0.6 0.7 Critical pressure 0.65 [658] (158) 0.5 0.6 0.55 Sonic [656] (151) 0.5 0.4 0.45 [654] (143) 0.4 0.3 0.35 0.3 [650] (133) 0.2 0.25 0.2 [646] (120) 0.15 0.1 0.1 0.05 2 2 2 2 3 2 3 2 3 2 03 04 VX211 VX22 VX23 VX2 4 VX2 50 VX2 60-02 VX2 602 10 15 5 3 5 10 15 20 25 30 4.5 10 15 20 30 40 50 60 3 2 6 30 60 8 25 35 10 20 40 10 35 Flow rate Q kg/h Figures inside [ ] indicate