Rotary Table: High Precision Type

MSUA1-*S P402070-2A MSUA1-*SE P402070-2B MSUA3-*S P402090-2A MSUA3-*SE P402090-2B MSUA7-*S P402060-2A MSUA7-*SE P402060-2B MSUA20-*S P402080-2A MSUA20-*SE P402080-2B Table. 15 Model Unit part no.

Rotary Table

10 7 190 28.7 31 10 24.7 15 10 Operating range m: The value in which the auto switch operating range Lm is converted to axis rotating value.

Rotary Table

Do not mount the product in locations where it is exposed to radiant heat. 15 - Maintenance Warning Removal of equipment, and supply/exhaust of compressed air.

MRQB-OM0002

2 13 3. 3. 3. 3. 3-1. ,,,2 2 3-2. 2 2 2 32 40 VF3000 VZ3000 AS2000 6/4 14 4. 4. 4. 4. 4-1. , ,, ,4.1 , ,4.1 ,,, 4.1 4.1 [N] 5 10 15 20 25 30 40 50 75 100 32 14 13 13 13 13 13 12 11 10 9 40 23 22 22 21 21 21 19 18 16 15 , , , 4.24.34.2, 15 4.2 4.2 [N] [MPa] [mm 2] 0.15 0.2 0.3 0.4 0.5 0.6 0.7 [mm] OUT 804 121 161 241 322 402 482 536 32 12.2 IN 675 101 135 202 270 337

MHS

40DB MHSH3-50 DB MHSH3-63 DB MHSH3-80 DB mm 5 5 10 10 15 N 6~10 11~15 20~25 29~34 49~59 g 500 740 1,290 2,250 4,000 g 32 40 50 63 80 MHSHJ3-D 430 600 1,020 1,710 3,040 MHSHJ3-DA 550 800 1,380 2,360 4,120 MHSHJ3-DB 520 770 1,340 2,310 4,120 5 3. 3-1. 1 2 3 3-2. 1 .

LECA6_C

LEC-OM08001 DC24V / / LECA6 Series 1. . 4 2. . 6 2.1. . 6 2.2. 7 2.3 . 8 2.4 (). 9 (1) . 9 2. 9 3. 9 4. 10 5(). 10 6. 10 3. . 11 3.1. . 11 3.2. 12 3.3. . 13 1LECA6. 13 2DIN LECA6D. 13 3.4. 14 1. 14 2. 14 3. 15 4. . 16 4.1 CN1. 16 4.2 CN2CN3:. 16 4.3 CN4I/O . 16 1. 16 2. 17 4.4 CN5I/O . 17 5.

LECP6_C

14 18 (6.3) B1 A1 5 6 17.7 14.2 A6 B6 B1 A1 10.2 2 1 B3 A3 (5.7) 15 16 11 30.7 45 - 115 I/O No.

LEC-OM038xx

Specifications .11 3. 1 Specifications.11 3. 2 Details of parts.13 3.3 Outside dimension diagram.14 (1) Screw mount type (LECGMJ2) .14 (2) DIN rail mount type (LECGMJ2D).14 3.4 How to install.15 (1) How to install.15 (2) Installation location .15 4.

JXCx-OMT0030CN

JXC-OMT0030CN GWProfibus / LEC-GPR1 1 . 4 2 . 6 21 . 6 22 . 6 23 . 7 24 () . 8 1 . 8 2 . 8 3LEC . 8 4 . 8 5 . 8 6 . 9 7 . 9 3 . 10 31 . 10 32 . 12 33 . 13 1LECGPR1 . 13 2DIN LECGPR1D . 13 34 . 14 1 . 14 2 . 14 4 . 15 41 ADDRESS,B RATE . 15 42 CN2SW . 16 43 LEC . 17 44 SIEMENS PLC S7 . 19 5 . 21 51 CN4: . 21 52 CN3: . 21 53 CN1:CONT . 21 54 CN2:PC/TB . 22 1 - 6CN . 23 61 . 23

Fieldbus system EtherNet/IP TM compatible SI unit

hold the input signal. 15 ms Generates error per unit when the short circuit of the output device is detected. 1 Disable Does not generate an error.

SI unit for EtherNet/IP TM

Status Condition 0 No supply voltage SP Status of solenoid power supply 1 Supply voltage OK 0 Short circuit DI Status of sensor power supply 1 Normal Output area mapping Output data MSB LSB MSB LSB Offset (word) 15 8 7 0 0 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 1 31 30 29 28 27 26 25 24 23 22 21 20 19 18 17 16 -28No.EX-OMK0004-B Output No. assignment Combinations of output data and valve

SI unit for CC-Link

Supply 15 to 30 VDC to the power supply for communication. Check the power supply for communication voltage.

Fieldbus system PROFIBUS DP compatible SI unit

No.EX-OMN0028-B PRODUCT NAME Fieldbus system PROFIBUS DP compatible SI unit MODEL / Series / Product Number EX600-SPR#A EX600-ED# Table of Contents Safety Instructions 3 System Outline 9 Definition and terminology 10 Assembly 12 Mounting and Installation 15 Installation 15 Wiring 17 SI Unit Model Indication and How to Order 18 Summary of Product parts 18 Mounting and Installation 19 Wiring

Compact Vacuum Unit Ejector/ Vacuum Pump System

Accessories to supply valve/ release valve Model Accessories ZB1-VQ110UMounting screws (M1.7 x 15); 2pcs. ZB1-VQ110U-B Mounting screws (M1.7 x 22); 2pcs. ZB1-VQ110LMounting screws (M1.7 x 22); 2pcs. ZB1-VQ120UMounting screws (M1.7 x 15); 2pcs. ZB1-VQ120U-B Mounting screws (M1.7 x 22); 2pcs. ZB1-VQ110Mounting screws (M1.7 x 15); 2pcs.

Actuator Position Sensor

Check if the product satisfies the specified accuracy 10 to 15 minutes after supplying power. Output will drift after the power was supplied. Wait for 10 to 15 minutes for warming up. Warming up inadequate Incorrect wiring and incorrect load specification Check if a correct load is connected to the analogue output.

A_HEC-OM-I009

degC Fig. 6-1 Cooling capacity 2) Heating capacity Fluid: water Fluid: water 1000 2000 900 Ambient 35C 1800 Ambient 30C 800 1600 Ambient 25C Heating capacity W Heating capacity W 700 1400 600 Ambient 20C 1200 500 Ambient 15C 1000 400 800 300 Ambient 15C 600 200 400 100 0 200 10 15 20 25 30 35 40 45 50 10 15 20 25 30 35 40 45 50 Circulating fluid temperature degC Fluid temperature degC Fig

ATX-OM-F004E

Outer dimensions and descriptions of each part part 2) Descriptions of each part HAA7 to 22 24 12 15 5 HAA37 11 22 23 13 7 9 10 4 21 28 29 30 1 13 19 8 25 27 17 3 14 Components of aircooled aftercooler and descriptions No.

Multi-channel Digital Sensor Monitor

For precise pressure detection, allow the product to warm up for 10 to 15 minutes. Check if the product satisfies the specified accuracy 10 minutes after supplying power. Warming up inadequate Product failure Replace the product. -75No.PS-OMW0005-C Problem No.

Filter Regulator

Mate the 2 fingers of the pressure gauge cover assembly with the 2 finger slits of the pressure gauge, and rotate the pressure gauge cover assembly 15 degrees to the opposite direction of the arrow (clockwise).

Digital Pressure Switch

If the installation is using accurate control, wait until the product has warmed up (approximately 10 to 15 minutes).