Water-cooledThermo-chiller M Contact input/output signal M Serial RS-485 communication M Analog communication (Refer to Options on page 118.) M DeviceNet communication (Refer to Options on page 118.) Wetted parts adopt the materials compatible for various circulating fluids. (Stainless steel, EPDM, etc.)
109 6D m 14 0E SO 46 2E . 78 4E N 110 6E n 15 0F SI 47 2F / 79 4F O 111 6F o 16 10 DLE 48 30 0 80 50 P 112 70 p 17 11 DC1 49 31 1 81 51 Q 113 71 q 18 12 DC2 50 32 2 82 52 R 114 72 r 19 13 DC3 51 33 3 83 53 S 115 73 s 20 14 DC4 52 34 4 84 54 T 116 74 t 21 15 NAK 53 35 5 85 55 U 117 75 u 22 16 SYN 54 36 6 86 56 V 118 76 v 23 17 ETB 55 37 7 87 57 W 119 77 w 24 18 CAN 56 38 8 88 58 X 120 78 x
T emp. Select the output for fluid temperature (hysteresis or window comparator mode).
Electric Actuator/Guide Rod Slider Belt Drive RoHS Step Motor (Servo/24 VDC) LEL25 Series LEL LEL LECP6 LECP1 Model Selection Step Motor (Servo/24 VDC) Specific Product Precautions How to Order LEL 25 100 M T 1 1 6N q w e r t y !1 u i o !
) Q R Cooling water outlet 87 G (H) K J Cooling water inlet S T 2 x 2 x U Mounting holes D N Drain C (A) B (M) W Rc (mm) B C D E F G H J K L M N P Q R S T U V W Y Z 473 ZA HAW2-04 HAW7-06 HAW22-14 HAW37-14 HAW55-20 HAW75-20 HAW110-30 Model A 360 570 948 1354 1612 2112 1724 1 2 3 4 1 2 1 2 3 4 3 4 3 4 3 4 1 2 1 2 3 4 395 10 10 12 18 18 18 18 4.5 4.5 4.5 6.0 6.0 6.0 8.0 94 94 150 139 139 139
Working Principle Diagram Pressure display Output signal Power supply i Control circuit Input signal q Air supply solenoid valve w Exhaust solenoid valve e Built-in regulator Built-in regulator Solenoid valve EXH EXH P u Pressure sensor t Diaphragm r Pilot chamber EXH y Air supply valve SUP OUT 3 5.0 MPa Maximum Supply Pressure Series ITVX2000 High Pressure Electro-Pneumatic Regulator Series
Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ Solid state auto switches marked with are produced upon receipt of order.
set K T PA 5 3 1 C heck valve set K T PA 5 3 6 S w itching valve set K T PA 5 3 7 4 .
W a r n i n g Only people who have sufficient knowledge and experience are allowed to replace seals. The person who disassembles and reassembles the cylinder is responsible for the safety of the product. C a u t i o n When replacing seals, carefully handle parts to prevent injury to your hands or fingers on the corners of parts. 23 3-2-1.
Do not use compressed air that contains chemicals, synthetic oils including organic solvents, salt or corrosive gases, etc,as it can cause damage or malfunction. 4 C a u t i o n Install an air filter. Install an air filter upstream near the valve. Select an air filter with a filtration size of 5 m or smaller.
W a r n i n g Only people who have sufficient knowledge and experience are allowed to replace seals. The person who disassembles and reassembles the cylinder is responsible for the safety of the product. C a u t i o n When replacing seals, carefully handle parts to prevent injury to your hands or fingers on the corners of parts. 13 3-2-1.
)2 W DC/Energy-saving type VT/VO307W Suitable for use in vacuum applications 101.2 kPa (For vacuum specifications type: VT/VO307V, VT/VO307W) A single valve with 6 valve functions (Universal porting type) Selective porting can provide 6 valve functions, such as N.C. valve, N.O. valve, Divider valve, Selector valve, etc. 307 01 5 D V T F SY SYJ Body type Option T Body ported 0 Manifold VK
/ LED Acknowledge /LED 0: M () 1: Zone Z1 () 2: Zone Z2 () 3: Zone Z3 () 8: M () 9: Zone Z1, Z2, Z3 () 608dec 609dec 610dec 611dec 616dec 617dec US2 LED Acknowledge /LED Bit 0x028X 0: M () 8: M () 9: Zone Z1, Z2, Z3 () 640dec 648dec 649dec 90 No.EX##-OMY0006CN 0x029X Bit LED Acknowledge /LED 656dec 657dec 658dec 0 1 1 2 2 3 0x02AX Bit LED Acknowledge /LED 0: M (
Do not use compressed air that contains chemicals, synthetic oils including organic solvents, salt or corrosive gases, etc,as it can cause damage or malfunction. 4 C a u t i o n Install an air filter. Install an air filter upstream near the valve. Select an air filter with a filtration size of 5 m or smaller.
Range of values: 0: M (High side switch) 1: Zone Z1 2: Zone Z2 3: Zone Z3 8: M (Low side switch) 592dez 593dez 594dez 595dez 600dez An error was detected during the test by briefly switching off at the displayed output. The test error could however indicate a cross-circuit or a hardware error.
Do not use compressed air that contains chemicals, synthetic oils including organic solvents, salt or corrosive gases, etc,as it can cause damage or malfunction. 4 C a u t i o n Install an air filter. Install an air filter upstream near the valve. Select an air filter with a filtration size of 5 m or smaller.
Response delay (Small LED) T h e r m o s t a t is disabled. Filter time setting Sets the response delay time. Ambient temperature is too high. (out of 10-35oC) Correct the ambient temperature within the specification range. SV C 0 to 250 ms 0ms 4 Filter clogged Clean the filter. Set with [] or [] key The fan breaks Check the fan operation. If the fan breaks, need to be replaced.
Function Symbol Specifications DC (1.0 W) AC Electrical entry Nil Standard type High pressure type (Metal seal, VQZ100 only) Light/Surge voltage suppressor (1.0 W) (1) K Electrical entry Symbol (0.5 W) Low wattage type G L LO M MO Y YO YZ YS No Y Grommet (DC specifications) L plug connector with lead wire L plug connector without connector M plug connector with lead wire M plug connector