MHC2

Operating equipment: MHC2-6D A part a b c d e f = 20 (mm) = 3 (mm) = 4 (mm) = 4 (mm) = 5 (mm) = 6 (mm) b c a Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com e B part f d z f1 x.Calculate the inertial moment of the attachment.

IDX-OM-X004

. 3 1 3 3 Shutdown . 3 2 3 4 Check points before restart . 3 2 3 5 Precautions for long-term non-operation . 3 2 Chapter 4 Maintenance 4 1 Daily inspection . 4 1 4 2 Periodical Maintenance . 4 1 4 2 1 Exchange of absorbent . 4 1 4 2 2 Service parts . 4 2 4 2 3 Exchange of other parts . 4 4 4 2 4 Check points book . 4 6 Chapter 5 Troubleshooting 5 1 Cause and countermeasure of errors . 5

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Bracket AF3000 1/4, 3/8 5 AF4000 1/4, 3/8, 1/2 Float style auto drain AF4000-06 3/4 Pressure differential auto-drain 3/4, 1 AF5000 AF6000 1 Mist Separator Series AFM AFM2000 1/8, 1/4 Bracket AFM3000 1/4, 3/8 0.3 Float style auto drain AFM4000 1/4, 3/8, 1/2 Pressure differential auto-drain AFM4000-06 3/4 Micro Mist Separator Series AFD AFD2000 1/8, 1/4 Bracket AFD3000 1/4, 3/8 0.01 Float style

IDX-OM-W038

WEB IDF-S0001 1 C32FP-260S 1 IDF-S1932 1 2 44 IDH Series 4.1 IDX-OM-W038 4 4.2.4 2 4 x 40 x 72 (1) 1.4 (5)( ,) 2.O 3.O 4. 5. 6.4 7. 1 1 OUT IN 4 4 3 3 2 2 5 5 6 IDH*4 IDH*6 1 2 AMH-EL350 3 AMH-EL250 4 O 5 AM-CA250C-D E AM-CA250C-C AM-CA350C-D E AM-CA350C-C 6 45 IDH Series 4.2 IDX-OM-W038 4 (2) 1.4 (5)( ,) 2.O 3.O 4. 5. 6.4 7. 1 1 IN OUT 4 4 3 3 2 2 5 5 IDH*4

SI Unit for Vacuum Manifold

Process data size Vacuum manifold stations Input process data Output process data 4 4 byte 2 byte 8 5 byte 3 byte 12 6 byte 4 byte 16 7 byte 5 byte 4.1. Input process data Table 4-2.

CYV

B T Y L Depth ED T 4-LD PA K 4-MM Counter bore depth C Thread depth M F QW PB N A E depth EK Q + Stroke G Z + Stroke Stroke adjustment screw (inner cover) LW A A HP H HL HA HA HI TA TA R 4-J Depth JK Thread depth PC (from counter bore surface) 2-P 2-Counter bore dia.

Compact Guide Cylinder with One-way Lock Series MLGP ø40, ø50, ø63

Series MLGP Dimensions 40 to 63/MLGPM, MLGPL/Retraction locking (mm) LOCK 1in = 25.4mm XAH7 depth XL T-slot dimensions 4-YY depth YL a b XB XAH7 c d e X XC XAH7 Bore size (mm) XL a b c d e 6.5 11 10.5 5.5 40 4 Section XX detail 8.5 13.5 13.5 50 7.5 4.5 WB Z WA Section XX 17.8 63 11 18.5 10 7 Bottom view Section XX L 4-NN through Section XX WA Z IA IC 4-MM depth ML 4-OA through 4-OB counter

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators Note 2) 2 x 3.5 through M5 x 0.8 32 0.5 15.5 25 6 Rod end nut 9 Flat washer 5 9.2 10.5 4 4 10 15.5 27 + Stroke 14 25 8 4 41 + Stroke 16 17.5 5 Note 2) 2 x 2 x 6.5 counterbore 2 x 2 x M4 x 0.7 effective depth 7 2 x M5 x 0.8 (Piping port) M5 x 0.8 (Relief port) 5.5 2 x 3.5 through 38 M6 x 1.0 0.5 20 29 8 Rod end nut 10 Flat washer 11.5 6 12 4

3 Port Air Operated Valve

(Values at the initial period) Flow Rate Characteristics/Weight C [dm 3/(sbar)] b Cv 1 2 (P A) 2 3 (A R) Weight (g) Note) Port size Model C [dm 3/(sbar)] b Cv 3.5 4.2 7.9 8.9 11.9 15.1 1/8 1/4 1/4 3/8 3/8 1/2 0.26 0.22 0.21 0.16 0.21 0.21 0.8 1.0 1.8 2.2 2.7 3.6 3.6 4.2 7.2 8.9 11.8 15.3 0.26 0.23 0.27 0.20 0.20 0.22 0.9 1.0 1.8 2.1 2.7 3.7 118 114 237 229 501 484 VPA342 VPA542 VPA742

2-Color Display Digital Pressure Switch Series ZSE80(F)/ISE80(H)

Piping Specifications 02 R1/4 N02 NPT1/4 F02 G1/4 C01 Rc1/8 A2 URJ1/4 B2 TSJ1/4 Model Port size Mass (Bottom ported) 117 g 118 g 114 g 120 g 111 g Mass (Rear ported) 89 g 90 g 86 g 86 g 92 g 83 g Leakage 1 x 105 Pam3/s 1 x 1010 Pam3/s 733 Series ZSE80/ISE80 Analog Output Voltage output Current output A B C Range For vacuum pressure Rated pressure range 10.1 kPa 0 0.0 to 101.0 kPa 101.0 kPa

PFxx-OMX0002

Lead wire with M12 connector (ZS-49-A) M12 female Pin number Description M12 male Pin number 1 L+ 1 2 N.C. or Other 2 3 L3 4 C/Q 4 -97No.PF-OMX0002-B Revision history A: Contents revised in several places. [August 2022] B: Contents revised in several places.

Series AP3100

turn lever knob 1/4 turn round knob Connections (Inlet, Outlet) Indicator switch Handle 4) ISH Code Connections 1/4 inch face seal (Female) 1/4 inch face seal (Male) 3/8 inch tube weld 1/2 inch face seal (Female) 1/2 inch face seal (Male) 1/2 inch tube weld 3/4 inch face seal (Female) 3/4 inch face seal (Male) 3/4 inch tube weld Pull twist knob with LOTO FV4 MV4 TW6 FV8 MV8 TW8 FV12 MV12

V100

N.O. 0 to 0.7 0 to 0.7 0 to 0.7 0 to 0.7 0.1 0.1 Standard Large flow capacity 4-2-1 2 3 Port Direct Operated Solenoid Valve Rubber Seal Series V100 Specifications Air Fluid Ambient and fluid temperature (C) 10 to 50 (No freezing. Refer to page 4-18-2.)

Heavy Duty Stopper Cylinder

NPT1/4 G1/4 40 54 31 3 6.7 19 109 49 6 20.6 12.5 23 Rc1/4 NPT1/4 G1/4 Note 1) Dimensions when equipped with auto switch are the same as drawing above.

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

No deflection or contact occurs even for long strokes, since the cylinder is rigidly attached to the base and the slide table is independently supported by a linear guide. a t e l u g c e i Fine adjustments at the end of the stroke Fine adjustments between 2 to 0 mm can be made on one side (4 to 0 mm for both sides). t 4 n Reduced outgassing r a e p r Low particulate generation at the stroke

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

1/8 1/8 1/4 1/4 P, R port 1/8 Port size 1/8 1/8 6 one-touch fitting 1/8 1/8 A port C6 8 one-touch fitting C8 X port Note) M5 x 0.8 M5 x 0.8 M3 x 0.8 Note) Only for external pilot Flow Characteristics Flow characteristics Port size 1R2 (PRA) 2R3 (ARR) Manifold C [dm3/(sbar)] 1(P), 3(R) port 2(A) port b Cv C [dm3/(sbar)] b Cv Type SS3YJ7-20 1/8 2.2 2.2 2.1 2.2 2.0 1.6 2.1 0.34 0.39 0.35 0.35

PS-OMH0005CN

(mm 2) (mm) SMC(1) 0.81.0 ZS-28-C 1.01.2 ZS-28-C-1 26-24 (28) 0.14-0.2 (0.08) 1.21.6 ZS-28-C-2 1.01.2 ZS-28-C-3 1.21.6 ZS-28-C-4 22-20 0.3-0.5 1.62.0 ZS-28-C-5 1 (DC+) 2 3 (DC-) 4 (IN15 V) A A -15No.PS-OMH0005CN-D No 8 7 CH4_OUT1 6 CH3_OUT1 5 CH2_OUT1 4 CH1_OUT2 3 CH1_OUT1 2 DC(-) 1 DC(+) -16No.PS-OMH0005CN-D ( ) ( ZS-26-A) PSE200-(M)NPN 5 +1 Max. 30 V80 mA 1 V DC(+) CH1_

Rodless Cylinder for Vacuum Series CYV ø15, ø32

B T Y L Depth ED T 4-LD PA K 4-MM Counter bore depth C Thread depth M F MX MTS QW PB MY CY N A E depth EK MG Q + Stroke G CX Z + Stroke Stroke adjustment screw LW (inner cover) DA A -X 20HP H HL HA HA HI Data TA TA R 4-J Depth JK Thread depth PC (from counterbore surface) 2-P 2-Counterbore dia.

MHL2

4!6@6#0 <32, 40> ei!4!

EX500-GPR1A.eng

Consider this key position when selecting sensor. 4 3 1 1 2 3 Input "1" (n+1) 0 Input "0" (n) side Input "1" (n+1) side 1 1 3 3 Input "0" (n) 2 4 key 4 2 M12 Block Sensor connector "0" Sensor connector "1" key 4 3 1 2 1 30 31 Input block up to 8 can be connected ( 16 points ). Input numbers are 0 15 from Input unit side.