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x 0.8 12 10 12 10 1 (P) 3 (R) 1 (P) XT34 Poppet VM200 2 port 3 port (A) 2 (A) 2 Side ported 1/4 Page 337 12 12 10 10 1 (P) 3 (R) 1 (P) VM400 3 port (OUT) 2 3 10 12 1 (N.C.)

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Model Section Type Round type Standard G27-10-R1 G36-10-l01 G46-10-l01 0.02 to 0.2 MPa setting G27-10-R1 Note 2) G36-4-l01 G46-4-l01 Round type (with color zone) Standard G36-10-l01-L G46-10-l01-L 0.02 to 0.2 MPa setting G36-4-l01-L G46-4-l01-L Pressure gauge Note 1) Option Spacer Y100-A Y200-A Y300-A Y400-A Y500-A Spacer with bracket Y100T-A Y200T-A Y300T-A Y400T-A Y500T-A AC-A Check valve

CATALOG

www.stevenengineering.com I 6.11 VACUUM VACUUM PADS SERIES ZP H O W T O O R D E R ZPT P A D V E R T I C A L T Y P E W I T H O U T B U F F E R ZPT V A C U U M E N T R Y ( A L S O M O U N T I N G T H R E A D D I A) P A D D I A M E T E R S Y M B O L T H R E A D D I A M E T E R 2~ 8 10~ 16 20~ 32 40 50 02 2 04 4 06 6 08 8 10 10 13 13 16 16 20 20 25 25 32 32 40 40 50 50 P A D M AT E R I A L Male

Table of Contents

A + Stroke 4-FD C J G5-S Rear flange style: MQQLG 10, 16, 20 25, 28 Bore size (mm) Stroke range (mm) A L 2-FD 4-FD CV 10 10 to 40 75 8 16 10 to 60 88.5 10 MVGQ 20 10 to 60 97 10 FV FV M 25 10 to 50, 75, 100 104.5 12 CC 28 10 to 50, 75, 100 124 12 L FT FX B + Stroke FZ FX (Dimensions except A and L are same as rod side flange style.)

5 Port Solenoid Valve Series SY3000/5000/7000/9000

SX3000-75-1A SX5000-76-5A 10-SY3000 10-SY5000 M2: 0.16Nm M3: 0.8Nm M4: 1.4Nm 463 Base mounted 10-SY3000/5000 Type 45 Dimensions: Series 10-SY3000 Note) [ ]: AC 10-SS5Y3-45Stations DC4,N3 C6,N7 10-SS5Y3-45Stations UC4,N3 C6,N7 (Pitch) (Pitch) P = 10.5 DIN rail release button DIN rail release button 24.8 13.5 21.7 P=10.5 24.8 13.5 11.2 22.2 11.2 R R A A A A A A A A A A 10.2 25.2 22.2 10.2 25.2

4/5 Port Solenoid Valve

Type 10-SS5YJ3-S31 Type 10-SS5YJ3-32 Type 10-SS5YJ3-S32 Type 10-SS5YJ3-32P Applicable manifold base Type 10-SS5YJ3-20 Type 10-SS5YJ3-21P Manifold base Applicable manifold base Type 10-SS5YJ3-41 Type 10-SS5YJ3-S41 Type 10-SS5YJ3-46 Type 10-SS5YJ3-S46 Manifold base Manifold base Protrusion for positioning A mark A mark Manifold gasket Manifold gasket Manifold gasket A A SYJ3000-14-7 SYJ3000

One-touch Fittings

[mm] Weight [g] With a rib X Y Nylon Urethane M L1 Rib 3.2 1/8 KQ2L23-01mS1 10 7.1 6.7 9.5 10 14.5 16.7 17.2 13.3 3 2.5 2.5 4.6 1/4 KQ2L23-02mS1 14 7.1 6.7 9.5 10 14.5 21.2 20.1 13.3 3 2.5 2.5 14.1 D1 4 1/8 KQ2L04-01mS1 10 8.2 7.7 10 10 14.8 16.2 17.2 13.3 4.6 3.3 3 4.8 V 1/4 KQ2L04-02mS1 14 8.2 7.7 10 10 14.8 21.7 21.1 13.3 4.6 3.3 3 14.3 V D2 A L2 6 1/8 KQ2L06-01mS1 10 10.4 9.7 12 10

Electric Actuators

m a = 2000 1000 L1 a = 3000 0 10 20 30 Transfer load m (kg) 600 L2 400 Mer m Rolling Yawing 200 L2 0 10 20 30 Mer m Transfer load m (kg) 2000 a = 1000 L3 1000 a = 2000 m a = 3000 Mey a 0 10 20 30 Transfer load m (kg) Refer to page 145 for deflection data. 10 Standard Motor/Horizontal Mount Specification Series LJ1H20 Dimensions/LJ1H202PC Scale: 10% When two dimensions are shown, the top

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

10-SS5Y5-45Stations DC4, N3 C6, N7 C8, N9 10-SS5Y5-45Stations UC4, N3 C6, N7 C8, N9 Button for DIN rail release 26 25 P = 16 (Pitch) 17 26 17 P = 16 (Pitch) 14.5 32 Button for DIN rail release 14.5 32 15.5 31.5 15.5 31.5 R A A A A A R A A A A A B P B B B B B B B B B P Applicable tubing O.D.: 10, 3/8" (P , R port) One-touch fitting Applicable tubing O.D.: 10, 3/8" (P , R port) One-touch fitting

A

N D A R D S T R O K E Stroke Bore Size 5, 10 12, 16, 20, 25, 32, 40 10, 20 50 MORE DIMENSIONS S E E N E X T P A G E Courtesy of Steven Engineering, Inc. !

Table of Contents

Mep 2000 a = 1000 L1 (mm) Pitching m : Transfer load (kg) a : Work piece acceleration (mm/s) Me: Dynamic moment L : Overhang to work piece center of gravity (mm) m a = 2000 1000 L1 a = 3000 0 2 4 6 8 10 Transfer load m (kg) 600 L2 400 L2 (mm) Mer Rolling Yawing m 200 L2 Mer 0 2 4 6 8 10 m Transfer load m (kg) 3000 a = 1000 L3 (mm) 2000 L3 1000 a = 2000 m a = 3000 Mey a 0 2 4 6 8 10 Transfer

AC Servo Motor Driver (Network card type ）

2 to 10 AWG20 2 21/0.18 34.6 or less 1.35 4.7 0.1 HRZFEV-A(CL3) AWG20 2 cores LE-CSB-SB 2 to 10 Lock cable LE-CSB-RA 2 to 10 Note 5) or less 1.37 4.5 0.3 (Note 4) RMFES-A(CL3X) AWG20 2 cores LE-CSB-RB 2 to 10 AWG20 2 110/0.08 39.0 Note 1. d is as shown below. d Conductor Insulation sheath 2.

5-Port Solenoid Valve

(Pitch) P = 16 Applicable connector: 26 pins MIL type with strain relief (Conforming to MIL-C-83503) 4(A) port side : Blue (For rubber seal) : Gray (For metal seal) 2(B) port side : Yellow 50 Valve Replacement Parts 16 24.1 Triangle mark (8) A 51PG (20 pins) 51PH (10 pins) 14 A B A B A 14 A B A 14 A B A 14 A B A 106.2 14 A With Residual Pressure Release Valve 116.6 81.6 Triangle mark Triangle

AC Servo Motor Driver (Pulse input type/Positioning type ）

frame 10 A 20 Note 1.

Table of Contents

10-10 0 5 10 t i o o n L DTime [min] Operation cycles -X e e a a l l k k a t e l u w w g a a c 2 e i o o g g 1 O-ring seals separate vacuum and atmosphere. t Employs a magnetically coupled rodless cylinder with no air leakage from moving parts. n 1 r a L L e e e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and low particulate

Table of Contents

A part z1 m1 = 20 x 3 x 4 x 2.7 x 10-6 = 6.48 x 10-4 (kg) Weight calculation m1 = a x b x c x Relative density IZ1 Inertial moment around Z1 axis IZ1 = {m1 (a2 + b2) / 12} x 10-6 = {6.48 x 10-4 x (202 + 32)/12} x 10-6 = 2.21 x 10-8 (kg.m2) = 2.21 x 10-8 + 6.48 x 10-4 x 16.42 x 10-6 = 0.20 x 10-6 (kg.m2) IA Inertial moment around Z axis IA =IZ1 + m1r12 x 10-6 z f2 z2 B part r2 = 23.5(mm)

NCQ2/CQ2

D-A9 D-A9 V D-A79W D-P3DW A 11.5 6.5 4.5 7 A 7 10 13 13.5 17 12 10 12.5 B 3 2.5 3.5 4 5 7.5 10.5 13.5 A 11 14 17 17.5 21 16 14 16.5 B 7 6.5 7.5 8 9 11.5 14.5 17.5 A 9.5 12.5 15.5 16 18 13 11 13.5 B 5.5 5 6 6.5 6 8.5 11.5 14.5 A 10 13 16 16.5 18.5 13.5 11.5 14 B 6 5.5 6.5 7 6.5 9 12 15 A 15 18 21 21.5 23.5 18.5 16.5 19 B 11 10.5 11.5 12 11.5 14 17 20 A 7 10 13 13 15.5 10.5 8.5 11 B 3 2.5 3.5

Table of Contents

B 19.5 25 29.5 C 6.5 7 14.5 A 8 8 8 8 10 10 Model MGQ32 MGQ40 MGQ50 MGQ63 MGQ80 MGQ100 Detailed figure of a section Detailed figure of b section a a a b MGQ32 to 50 MGQ63 to 100 8-20-10 11 Compact Guide Cylinder Series MGQ Proper Auto Switch Mounting Position (Detection at stroke end) Minimum Stroke for Auto Switch D-Z7/Z80 D-Y5/Y6/Y7(V) D-Y7W(V) 1 pc. 2 pcs. 5 10 5 5 10 15 Auto switch D-Z7

ZP

flat 10 Width across flat 10 A A 10 10 2 2 1.8 1.8 8.4 6 Dimensions (per stroke) Dimensions (per stroke) 10 13 Weight (g) Non-rotating (J) Rotating (K) Weight (g) Non-rotating (J) Rotating (K) 14 11 A B D A B D Model Model ZP3-T13B;3-B5 ZP3-T13B;6-B5 ZP3-T13B;10-B5 ZP3-T10B;3-B5 ZP3-T10B;6-B5 ZP3-T10B;10-B5 8.5 9.7 11.7 8.6 9.8 11.8 8.6 9.7 11.7 8.7 9.8 11.8 15 18 22 34.5 41 51 11 14.5 20.5

Compact Cylinder

9.5 12.5 15.5 16 18 13 11 13.5 B 10 10.5 12.5 13 13.5 19 21.5 20.5 A 10 13 16 16.5 18.5 13.5 11.5 14 B 10.5 11 13 13.5 14 19.5 22 21 B 15.5 16 18 18.5 19 24.5 27 26 A 7.5 10 13 13.5 15.5 10.5 8.5 11 B 7.5 8 10 10.5 11 16.5 19 18 A 11.5 6.5 4.5 7 B 7 12.5 14.5 13.5 A 15 18 21 21.5 23.5 18.5 16.5 19 A 7.5 10 13 13.5 17 12 10 12.5 A 11.5 14 17 17.5 21 16 14 16.5 Bore size 12 16 20 25 32 40 50