Piping: 20 (Body Ported), Stations: 16 Stations, A, B Port: 00T (NPTF)

Piping: 20 (Body Ported), Stations: 18 Stations, A, B Port: 00T (NPTF)

Stations: 20 Stations, Option: D0 (DIN Rail Mount w/o DIN Rail), Port Size: 00T (NPTF)

Stations: 20 Stations, Option: D (DIN Rail Mounting), Port Size: 00T (NPTF)

Stations: 20 Stations, Option: None, Port Size: 00T (NPTF)

PF2D

Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room (1 l/min flow rate).

AME

30 40 30 10 15 15 16 20 24 100 150 180 65 85 120 130 180 220 60 76 110 102 136 184 44 66 96 9 11 13 239 291 403 22 32 42 128 167 235 122 160 220 3 122 160 220 10 10 10 AME550 AME650 AME850 1 2 1 2 1 2 1 Please refer to page 14-20-57 for Made to Order Specifications. 14-20-41

FREE MOUNT CYLINDER

(mm) d L 6 5 18 10 5 20 16 13 33 d 20 14 40 L 25 14 46 32 16 56 9/10 3. Maintenance ! Caution As a jig is required for bore size 6, do not disassemble when replacing seals etc. If overhaul is required, contact SMC Sales Office.

IDX-OM-W014

-1 10 1 IDX-OM-W014 10 M 10-2 ADM200 IDU3E6E-10-M IDU3E6E-20-M IDF-S0087 IDF-S0090 1.0MPa 1 1 2 / AC100V(50/60Hz) AC200V(50/60Hz) 4W IDU Series 10-2 10 2 IDX-OM-W014 10 M 10-3 Rc1/2 32 25 1) 2830Nm 30 (5) (17)(30) 2 2 Rc1/2 10-4 1-1 IDU Series 10-3 10 3 IDX-OM-W014 11 R 11 R 11-1 11-2 1 AC100V AC200V, AC230V INOUT IDU3E/4E/6E-10-R IDU3E/4E/6E-20/23-R (A)

Micro Mist Separator with Prefilter AMH Model Model AMH250 AMH350 AMH450 AMH550 AMH650 AMH850 AMH150 Series AMH can separate and (1) remove aerosol state oil mist in 500 1000 2000 3500 6000 12000 200 Rated flow (l/min(ANR)) compressed air and remove Po

Options J: With drain guide T: With element service indicator Element service indicator Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 10 10 10 10 10 10 10 10 10 I 56 66 66 80 80 90 90 100 150 J 15 20 17 22 19 25 21 30 40 K 5 8 8 8 8 10 10 10 15 L 9 12 12 14 14 14 14 16 20 M 5.5 6 6 7 7 9 9 9 11 N 35 O 54 66 66 80 80 88 88 102 136 P 70 84 84 100 100 110

α PneuAlpha HARDWARE MANUAL

-15% Input Impedance > 800 kOhms Input Current 0.24mA / 240V AC~ Input Voltage 100 240V AC~, +10% -15%, 50 60 Hz Operation Indication Liquid Crystal Display Isolation Circuit None None Response Time (I09 I12) 20 40 ms 20 40 ms Response Time (I01 I08) 10 20 ms 10 20 ms Description AC Input Specication Description Sink (Common) Source (+ Common) 6 PneuAlpha Hardware Specification 2 Table 2.5

VG342

(Normally open) B Electrical entry G Grommet D DIN terminal Thread type Rc Nil G F T Conduit terminal E Grommet terminal NPT N NPTF T Light/Surge voltage suppressor Nil None Port size S With surge voltage suppressor (Only grommet type is only available.) 04 06 10 1 2 3 4 1 Z With light/surge voltage suppressor (Except grommet type) How to Order Pilot Valve Assembly X84 VO307 G 1 SYJ Valve

Compact Vacuum Ejector Series ZA

When viewed from the side of the vacuum ports, the far left station is designated as station 1. 50 AEP 40 40 20 HEP Air consumption 30 20 20 10 Related Suction flow Equipment 10 0 0.6 0.4 0.2 0.5 0.3 0.1 0 8 6 4 2 Suction flow (l/min(ANR)) Supply pressure (MPa) Blanking plate assembly Part no.: ZA1-BP1 ZA07 Flow Characteristics ZA07 Exhaust Characteristics Supply pressure: 0.45 MPa Vacuum

Mist Separator Series AM Model Series AM can separate and Model AM850 AM250 AM350 AM450 AM550 AM650 AM150 remove oil mist in compressed air Rated flow 750 1500 2200 3500 6000 12000 300 (1) (l/min (ANR)) which is difficult to remove by Port size ordin

N.C. auto drain not available for AM650 Options J: With drain guide T: With element service indicator HAl AT IDl Element service indicator AMG Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 10 10 10 10 10 10 10 10 10 I 56 66 66 80 80 90 90 100 150 J 15 20 17 22 19 25 21 30 40 K 5 8 8 8 8 10 10 10 15 L 9 12 12 14 14 14 14 16 20 M 55 6 6 7 7 9 9 9 11 N 35

Rotary Clamp Cylinder: Standard ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63 Series MK

: g Clamp stroke (mm) 10 20 50 Accessories Part no.

AMG

150 H 166 187 187 218 218 241 241 277 334 1/8, 1/4, 3/8 1/4, 3/8 1/2 3/8, 1/2 3/4 1/2, 3/4 1 3/4, 1 1, 11/2 5.5 6 6 7 7 9 9 9 11 10 10 10 10 10 10 10 10 10 63 76 76 90 90 106 106 122 160 20 20 20 20 20 20 20 20 20 63 76 76 90 90 106 106 122 160 100 113 119 145 151 166 173 200 253 13 13 16 16 19 19 22 22 32 159 172 178 204 210 225 232 259 311 AMG150 AMG250 AMG350 AMG450 AMG550 AMG650 AMG150

Angle Seat Valve

Orifice diameter [mm] Port size Valve type Orifice diameter [mm] Port size Valve type Orifice diameter [mm] Port size Valve type N.C. 1/4 to 1 10, 15, 20, 25 10, 15, 20, 25, 35, 40, 50 N.C./N.O. 1/4 to 50A 10 to 12 N.C.

Angle Seat Valve /

used with heated water Can be used with heated water Orifice diameter [mm] Port size Valve type Orifice diameter [mm] Port size Valve type Orifice diameter [mm] Port size Valve type N.C. 1/4 to 1 10, 15, 20, 25 10, 15, 20, 25, 35, 40, 50 N.C.

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

15 20 25 30 40 35 0 2 4 6 8 10 12 16 14 18 20 Flow rate (l/min) Flow rate (l/min) Flow rate (l/min) Construction PF2D504/520 Parts list Material Number Parts o !

VCL

19 0.5 2.0 7 1.4 33 0.2 10 2.1 50 0.1 3 0.35 8.4 2.0 1/4 (8A) 3/8 (10A) 1/2 (15A) 3/4 (20A) 1/4 : 0.58 3/8 : 0.55 1/2 : 0.62 3/4 : 0.78 4 0.60 14 1.1 5 0.85 20 0.7 VCL4 2.0 4 7 1.4 33 0.3 10 2.1 50 0.12 Note 1) Refer to page 17-2-32 in model selection regarding port size and orifice size combinations.