MY1

For detailed selection procedures, refer to pages 8-11-70 to 8-11-71. 100 200 300 400500 1000 1500 100 200 300 400500 1000 1500 100 200 300 400500 1000 1500 Piston speed (mm/s) Piston speed (mm/s) Piston speed (mm/s) 8-11-68 8-11-69 66 Series MY1H Model Selection Following are the steps for selecting the most suitable Series MY1H to your application. Calculation of Guide Load Factor 1.

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In the unlikely event that malfunction is caused by ground, please disconnect the unit from ground. 66

Digital Flow Switch (Integrated display type) ( compatible)

(Refer to page 66)) (3) Change the set value with the UP or DOWN button, and press the SET button to set the value. Then, the setting moves to the setting of OUT2. (The snap shot function can be used. (Refer to page 66)) (4) Press the SET button for less than 2 seconds to complete the OUT1 setting. [P_2] or [n_2] is displayed on the sub screen (left side).

Air Slide Table

184.5 4 2 138 161 MXQ25A-75Z 60 45 110 42 92 209.5 6 3 163 186 MXQ25A-100Z 48 20 46 44 120 28 117 250.5 8 4 174 197 MXQ25A-125Z 60 18 60 66 170 67 142 314.5 8 4 238 261 MXQ25A-150Z 65 43 85 66 170 66 168 339.5 8 4 263 286 47 Air Slide Table/Double-ported Type MXQA Series Dimensions: MXQ 25A [Adjuster Option] MXQ 25A-m With adjuster option (25) Double-ported type MXQA Metal stopper with

Air Fittings & Tubing

17 10 76 21 33.5 23.8 18.5 17 26.5 1 2 KQ2W10-04S 65 66 145 68 78 22 1 4 3 8 62 63.5 57.5 59.5 KQ2W12-02S KQ2W12-03S 17 12 22 47.7 37.7 20.9 17 28.5 1 2 KQ2W12-04S 66 68.5 22 147 101 105 3 8 1 2 71 (71) 76 80 KQ2W16-03S KQ2W16-04S 26.5 22 69.5 75 20.9 34 25 100 (84) 16 Reference dimensions after R(PT) thread installation.

0.4

RD SD LRUN PW 93.5 116 B RATE 42 (35) 66 75 80 x 1 x 10 STATION NO.

5

Applicable bore size TX Rod trunnion Head trunnion CD LX LZ Z + Stroke Z + Stroke CM-B020 20 32 36 108 8 66 82 CM-B032 25 40 40 112 9 74 90 32 114 CM2YU/CM2YT (Rod/Head trunnion) CM-B040 40 53 44.5 143.5 10 87 103 Note) A pivot bracket pin and retaining rings are not included with the pivot bracket.

MY1

For MY1M50, 63 Work piece EY SMC EC a FH a 5 4.5 6 4 9 9.5 W 58 70 88 104 128 152 TT 5 (max. 11) 5 (max. 16.5) 8 (max. 20) 9 (max. 25) 13 (max. 33) 13 (max. 38) T 7 12 15 15 25 25 S 46.7 67.3 73.2 73.2 99 99 h 3.5 4.5 5.5 5.5 11 11 FW 66 82 95 FH 16 22 22 FC 14 17 22 22 30 35 FB 52 67 78 F 5 6 8 8 8 8 EY 50 57.5 73 87 115 138.5 EC 7.7 9 11.5 12 18.5 19 EB 32 38 50 57 66 77 E 20 24

0.4

L7 L6 L5 VV5Q11 (L1) 28 (n-1) x 10.5 1.5 A FG + + 0V 24V SMC S E R I A L U N I T MODEL SC (SI No.EX120-STA1) 2 93.5 66 64 ERR T/R RUN 0 1 DIP SW. Drawing shows a SC case.

LEC-OM02704CN

6.1.8 66 6.1.9 69 6.1.10 6-10 6.1.11 6-11 6.1.12 6-11 6.1.13 6-12 6.2 (PB) 6-14 6.2.1 6-14 6.2.2 6-15 6.3 (PC) 6-21 6.3.1 6-21 6.3.2 6-22 6.3.3 S 6-28 6.3.4 6-28 6.3.5 6-28 6.3.6 6-29 6.4 (PD) 6-30 6.4.1 6-30 6.4.2 6-31 6.4.3 (LSP)(LSN) 6-39 6.4.4 6-40 7 MR Configurator 717-27 7.1 72 7.2 73 7.3 75 7.4 76 7.5 78 7.6 7-10 7.7 7-14 7.7.1 JOG

Aluminum High Vacuum Angle Valve

Indicator: Dimensions (b) E C D E C XLA F A (a) XL XL XLQ E (c) XM XY H DXSA XVD B G XGT CYV A (mm) A B C D E Note 1) F G H Model XLH-16 XLH-25 XLH-40 XLH-50 40 100.5 38 1 30 17 35 50 114 48 1 12 40 26 41 65 162.5 66 2 11 55 41 57 70 179.5 79 2 11 75 52 70 Note 1) Dimension E applies when heater option is included.

MHZ

66 Long Stroke Type/Series MHZL2 Finger Option Through-holes in Opening/ Closing Direction [2] Side Tapped Mounting [1] 4-MM (Thread for mounting attachment) C C MHZ MHF MHL MHR 4-H (Hole for mounting attachment) B A MHK S S MHS O B A O MHC (mm) (mm) MHT H 2.9 3.4 4.5 5.5 Specifications and dimensions other than the above are the same as the basic type.

0.55

VP500-224-1 (M4 x 46) VP300-224-1 (M3 x 36) VP700-224-1 (M5 x 66) For valve mounting 10 Series VP300/500/700 How to Order Pilot Valve Assembly Caution When only the pilot valve assembly is replaced, it is not possible to change from V211 (Grommet or L/M-type) to V212 (DIN or Conduit type), or vice versa.

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

EE PL RT L12 KK SW G BG L8 VD VA WA WB WH ZZ E Bore size (mm) R Without rod boot With rod boot 32 40 50 63 80 100 125 32.5 146 26 7 4 4 4 94 16 12 32 30 M6 x 1 10 22 G 1/8 13 6 M10 x 1.25 47 Up to 1000 Up to 2000 38 163 30 9 5 4 4 105 16 16 37.5 35 M6 x 1 13 24 G 1/4 14 6.5 M12 x 1.25 54 Up to 1000 Up to 2000 46.5 179 37 10.5 6 4 4 106 16 20 37.5 40 M8 x 1.25 17 32 G 1/4 15.5 8 M16 x 1.5 66

CNG

(186) 30 22 55 5 6 M8 x 1.25 24 1/8 21.5 2 65 5.5 6 52 25 65 3 12 M4 x 0.7 Stroke x 215 (223) 31 151 (159) 40 193 (201) 30 24 62 5.5 8 M10 x 1.25 29 1/8 26.5 2.5 73 5.5 7 60 30 75 3 12 M5 x 0.8 218 (226) 38 154 (162) 40 196 (204) 35 24 62 5.5 10 M10 x 1.25 35.5 1/8 26.5 2.5 73 6.6 7 60 30 75 3 12 M5 x 0.8 241 (250) 47 169 (178) 50 221 (230) 35 25 70 6 14 M14 x 1.5 44 1/8 28 2.5 81 6.6 8 66

CJ2X/CUX/CQSX/CQ2X/CM2X

For details about auto switches with pre-wire connector, refer to page 10-20-66. 10-3-6 Low Speed Cylinder Double Acting, Single Rod Series CJ2X Specifications Double acting, Single rod Action Air Fluid 1.05 MPa Proof pressure 0.7 MPa Maximum operating pressure 0.06 MPa Minimum operating pressure Without auto switch: 10 to 70C (No freezing) With auto switch: 10 to 60C (No freezing) Ambient

Slider Type Ball Screw Drive/11-LEFS Series

) depth 3 (102) Encoder cable (7) 64 4 x M5 x 0.8 thread depth 8.5 Motor cable (6) Body mounting reference plane Note 1) 45 38 50 3.5 +0.025 0 3H9 ( ) depth 3 Motor option: With lock Encoder cable (7) Lock cable (4.5) (2.2) L Motor cable (6) (52) A (Table traveling distance) Note 2) (169) 52 58 Stroke (54) (56) 10 (209) 38 34 21 Encoder Z-phase detecting position Note 3) (4) 38.5 48 24 66

CE

For details, refer to page 10-20-66. Normally closed (NC = b contact), solid state switch (D-F9G/F9H type) are also available. For details, refer to page 10-20-40. 10-12-26 26 Series CEU/Series CE Counter/Extension Cable Multi-counter How to Order RE A B CEU5 REC CX Power supply voltage CY Nil D 100 to 240 VAC A COM COM COM B 12 VDC GND F.G. R.S.

LEC-OM02904

53 5.1.2 54 5.1.3 55 5.1.4 56 5.1.5 57 5.1.6 57 5.1.7 58 5.1.8 59 5.1.9 5-10 5.1.10 5-11 5.2 (No.PB) 5-12 5.2.1 5-12 5.2.2 5-13 5.3 (No.PC) 5-20 5.3.1 5-20 5.3.2 5-21 5.3.3 5-24 5.3.4 5-27 5.4 (No.PD) 5-28 5.4.1 5-28 5.4.2 5-29 5.4.3 master-slave 5-33 6 616-12 6.1 62 6.1.1 62 TM 63 6.1.2 MR Configurator2 6.2 64 6.2.1 64 6.2.2 65 6.2.3 66

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

Note 6) When the release valve is not used, design the circuit for vacuum release separately in order to release a workpiece. 26 42 36 52 46 62 56 72 66 82 76 92 86 102 96 112 Note 1) The above dimensions are for ZZQ104-BSB. ZQ1 3M-K1 L-E G-00. ZQ1 3M-K2 L-E GK-00. ZQ1 3M-J1 L-F-00. ZQ1 3M-Q1 L-E -00. In case of ZQ1 3M-F -00, the overall length is 87.2.