Plug-in/Plug Lead: Single Unit

Nil B Side ported Bottom ported Enclosure Nil W Dust-protected Dusttight/Low jetproof type Note) Note) Not required for plug lead type. 2-6-5 Base Mounted Series VQ5000 Plug-in Type Conduit terminal 2 position single: VQ5100 1 2 195 73 59.5 27.5 27.5 195 122 106 59.5 73 4(A) port 17.5 13.5 2(B) port 2-Rc 3/8 5(R1), 3(R2) port Indicator light 4 2 SMC 5 1 3 16 16 13 A 53 53 66 40 66 B A VQ5000

Fluoropolymer Piping Equipment

B E E F G H L1 L1 L2 L2 M Min. port size LQ3T2A-SB 1/4" 4 17 16 6 12 16 34.5 33.5 39.5 38.5 20 3.9 LQ3T3A-SB 3/8" 5 22.5 19.5 9 18 21 47.5 44.5 49.5 46.5 25 6.3 LQ3T4A-SB 1/2" 6 24.5 22.5 10 20 24 52.5 50.5 54.5 52.5 29 9.5 LQ3T5A-SB 3/4" 7 26.5 24 14 28 32 64 61.5 66 63.5 37 15.8 LQ3T6A-SB 1" 8 30 26 18 36 41 78 74 80 76 49 22 930 A LQ3 Series Space Saving Run Tee How to Order LQ3 T S R

Compact Guide Cylinder

2) 39.5 28 10 8.5 3 26 12 7.5 11 93 13 4.5 13 17 M5 x 0.8 12.5 M5 x 0.8 32 (25 x 2) 25, 50, 100 150, 200 44.5 30 12 11.5 3 32 15 7.5 13 109 16 8 16 21 M6 x 1 15 M6 x 1 40 (32 x 2) 54 37 16 13 4 41 19.5 21 12 17.5 9 120 20.5 4 20.5 27 M8 x 1.25 20 M6 x 1 Bore size OA OB OL P PD PE PW Q R S T U VA WA X YY YL Z Nil TN TF Nil TN TF 20 (16 x 2) 4.3 8 3.5 M5 x 0.8 7.5 19 21 10 36 18 66

CP95

25 75 12 56.5 80 5 10 45 18 11 22 25 65 4.3 4 36 20 30 95 16 72 100 5 10 55 18 11 22 41 20 32 115 25 75 6.3 16 89 4 Mounting style (ES) Bore size (mm) d3 CN S5 K1 K2 I2 G1 G2 G3 EN EU CH H6 ER 32 11 10 38 51 21 18 31 14 32 10 15 10.5 8.5 6.6 40 11 12 41 54 24 22 35 16 36 10 18 12 8.5 6.6 50 15 16 50 65 33 30 45 21 45 12 20 15 10.5 9 63 15 16 52 67 37 35 50 21 50 12 23 15 10.5 9 80 18 20 66

MLU

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2-FD CNA CNS CLS FY FV CLQ (mm) MLGP FV FT ZZ MLUF25, MLUG25 MLUF32, MLUG32 MLUF40, MLUG40 MLUF50, MLUG50 FX 76 94 118 144 FY 14 16 18 22 FZ 66 82 102 126 FD Model FT 8 8 9 12 24 28 32 39 5.5 7 9 11 134 148 158 189.5 FZ FX RLQ 2-FD MLU Rear flange style

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

Station n L1 L2 Station 2 50 41 Station 20 338 329 3 66 57 4 82 73 5 98 89 6 114 105 7 130 121 8 146 137 9 162 153 10 178 169 11 194 185 12 210 201 13 226 217 14 242 233 15 258 249 16 274 265 17 290 281 18 306 297 19 322 313 Port size One-touch fitting 26 Series SYJ500 Type 41 Manifold: Side Ported/SS3YJ5-41Stations -M5, 01 [ ] for AC For 1/8 Grommet (G) For M5 (Pitch) P=16 18 (Pitch) P

Sine Rodless Cylinder Series REBR Direct Mount Type

19.5 11 6.5 3 1.5 35 10.5 16 55 53.5 55 52 29 54 20 51 7 29 K L LD M N P PW QW T TC W WP J x E Q MM Model REBR15 14 53 4.3 5 6 M5 x 0.8 32 18 21 17 25 M5 x 0.8 x 7 84 M4 x 0.7 REBR25 15 70 5.6 6 6.5 Rc 1/8 43 20 25.5 22.5 40 21.5 M6 x 1 x 8 105 M5 x 0.8 REBR32 13 76 7 7 8.5 Rc 1/8 54 26 33 28 50 27 M8 x 1.25 x 10 116 M6 x 1 X Y Z Model REBR15 18 54.5 98 REBR25 28 72 125 REBR32 35 79 148 66

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

K) 28.5 Note 2) 1/8, 1/4 1/8 40 98 27 28.5 M28 x 1 2 1/4, 3/8 1/8 53 117 29 29.5 M38 x 1.5 29.5 2.5 1/4, 3/8, 1/2 1/4 70 148 41 34 M42 x 1.5 34 1 Optional specifications Square embedded type pressure gauge Digital pressure switch Round type pressure gauge Note 3) Bracket mount dimension Panel mount Model Z ARP20(K) ARP30(K) ARP40(K) H J H J H J M N Q R S T U V W Y l28 l27.8 37.5 29.5 40 66

Compact Hydraulic Cylinder Double Acting/Double Rod Series CH
QWB ø 20, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

(mm) H I J K L B U Z A N O P S C D E F M Bore size (mm) 32 M10 x 1.5 60 4.5 14 8.5 65 31.5 14 82 5.5 9 depth 7 Rc 1/8 58.5 12 16 45 20 34 40 M10 x 1.5 69 5 14 8.5 67 35 14 84 5.5 9 depth 7 Rc 1/8 66 12 16 52 22 40 50 M12 x 1.75 86 7 18 11 76 41 19 98 6.6 11 depth 8 Rc 1/4 80 15 20 64 25 50 63 M12 x 1.75 103 7 18 11 80 47.5 19 102 9 14 depth 10.5 Rc 1/4 93 15 20 77 27 60 80 M16 x 2 132 6 22

Sine Rodless Cylinder Series REA

19 REA 50, 63 14 2 -Rc(PT) 1/4 L 0 0.2 NA 33 14 E(h8) E(h8) X PD I 4 -TC Effective thread depth R 14 8 -Q Effective thread depth R 14 22 23 25 K W 23 25 4 -M8 x 1.25 Effective thread depth 12 C 0.1 14.5 B 2 S + Stroke 2 ZZ + Stroke Model B C D E(h8) I K L NA Q x R S TC x R W X ZZ REA50 REA63 0 86 32 53 30-0.033 32-0.039 58.2 25 110 55 M8 x 1.25 x 16 176 M12 x 1.25 x 7.5 60 60 180 100 38 66

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

L7 L6 L5 1021-VV5Q11 (L1) 28 (n-1) x 10.5 1.5 A FG + + 0V 24V SMC S E R I A L U N I T MODEL SC (SI No.EX120-STA1) 2 93.5 66 64 ERR T/R RUN 0 1 DIP SW. Drawing shows a SC case.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

L7 L6 L5 1021-VV5Q11 (L1) 28 (n-1) x 10.5 1.5 A FG + + 0V 24V SMC S E R I A L U N I T MODEL SC (SI No.EX120-STA1) 2 93.5 66 64 ERR T/R RUN 0 1 DIP SW. Drawing shows a SC case.

Electric Actuator

Option #Teaching box #Controller setting software Page 66 Page 65 (With 3 m cable) Part no.: LEC-T1-3JG; Communication cable (With conversion unit) and USB cable are included.

4/5 Port Solenoid Valve

) 3 position 0.42 [0.33] 0.16 [0.080] 36 53 41 63 37 55 2 position 5 port Body ported 0.9 M3 x 0.5 M3 x 0.5 3 position 56 66 58 36 53 41 63 37 55 Note 1) 4 Port Base mounted (For manifold base only) 2 position M5 x 0.8 1/8 56 66 58 3 position Note 1) Dedicated for manifold base.

High Vacuum Angle Valve

Indicator: Dimensions (b) E C D E C XLA F A (a) XL XL XLQ E (c) XM XY H DXSA XVD B G XGT CYV A (mm) A B C D E Note 1) F G H Model XLH-16 XLH-25 XLH-40 XLH-50 40 100.5 38 1 30 17 35 50 114 48 1 12 40 26 41 65 162.5 66 2 11 55 41 57 70 179.5 79 2 11 75 52 70 Note 1) Dimension E applies when heater option is included.

MY1

For detailed selection procedures, refer to pages 8-11-70 to 8-11-71. 100 200 300 400500 1000 1500 100 200 300 400500 1000 1500 100 200 300 400500 1000 1500 Piston speed (mm/s) Piston speed (mm/s) Piston speed (mm/s) 8-11-68 8-11-69 66 Series MY1H Model Selection Following are the steps for selecting the most suitable Series MY1H to your application. Calculation of Guide Load Factor 1.

Title not found

In the unlikely event that malfunction is caused by ground, please disconnect the unit from ground. 66

Digital Flow Switch (Integrated display type) ( compatible)

(Refer to page 66)) (3) Change the set value with the UP or DOWN button, and press the SET button to set the value. Then, the setting moves to the setting of OUT2. (The snap shot function can be used. (Refer to page 66)) (4) Press the SET button for less than 2 seconds to complete the OUT1 setting. [P_2] or [n_2] is displayed on the sub screen (left side).

Air Slide Table

184.5 4 2 138 161 MXQ25A-75Z 60 45 110 42 92 209.5 6 3 163 186 MXQ25A-100Z 48 20 46 44 120 28 117 250.5 8 4 174 197 MXQ25A-125Z 60 18 60 66 170 67 142 314.5 8 4 238 261 MXQ25A-150Z 65 43 85 66 170 66 168 339.5 8 4 263 286 47 Air Slide Table/Double-ported Type MXQA Series Dimensions: MXQ 25A [Adjuster Option] MXQ 25A-m With adjuster option (25) Double-ported type MXQA Metal stopper with

Air Fittings & Tubing

17 10 76 21 33.5 23.8 18.5 17 26.5 1 2 KQ2W10-04S 65 66 145 68 78 22 1 4 3 8 62 63.5 57.5 59.5 KQ2W12-02S KQ2W12-03S 17 12 22 47.7 37.7 20.9 17 28.5 1 2 KQ2W12-04S 66 68.5 22 147 101 105 3 8 1 2 71 (71) 76 80 KQ2W16-03S KQ2W16-04S 26.5 22 69.5 75 20.9 34 25 100 (84) 16 Reference dimensions after R(PT) thread installation.