Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS MHS4-63D 7.3 12 M6 x 1 612 Series MHS Specific Product Precautions 2 Be sure to read before handling.
Model/Specifications MHT2-32D MHT2-40D MHT2-50D MHT2-63D Model Bore size (mm) Applicable auto switch Bracket no.
1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.
XLAV 5 Series XLA, XLAV High Vacuum Angle Valve Specifications Model XLA(V)-50 XLA(V)-63 XLA(V)-80 XLA(V)-16 XLA(V)-25 XLA(V)-40 Valve type Normally closed (pressurize to open, spring seal) Non-corrosive gas for aluminum alloy (A6063) and SUS304/316 Fluid 5 to 60C (41 to 140F) [high temperature type: 5 to 150C (41 to 302F)] XLA Operating temperature C 5 to 50C ( 41 to 122F) XLAV Atmospheric
XLAV 5 Series XLA, XLAV High Vacuum Angle Valve Specifications Model XLA(V)-50 XLA(V)-63 XLA(V)-80 XLA(V)-16 XLA(V)-25 XLA(V)-40 Valve type Normally closed (pressurize to open, spring seal) Non-corrosive gas for aluminum alloy (A6063) and SUS304/316 Fluid 5 to 60C (41 to 140F) [high temperature type: 5 to 150C (41 to 302F)] XLA Operating temperature C 5 to 50C ( 41 to 122F) XLAV Atmospheric
XLA XL XLQ XLQ y Body surface treatment/Seal material and its changed part Bodysurfacetreatment Part numbers indicating changed seal material and leakage XM XY Surface treatment External: Hard anodized Internal: Raw material External: Hard anodized Internal: Oxalic acid anodized Symbol Nil A Note 2) Leakage Pam3/s or less Note 1) Changed part None w, e w e Symbol External 1.3 x 10-10 (FKM
flange surface Right flange surface Left flange surface Right flange surface Flange side Flange side Left flange surface Rear flange surface Right flange surface Left flange surface Rear flange surface Right flange surface Nil Left flange surface A F J K M With indicator With indicator Without indicator Without indicator Flange side Flange side t Auto switch type r Temperature specifications XLA
0) XLA Pilot port S (for initial exhaust valve) Magnet (Option) XL Pilot port M (for main exhaust valve) Bellows holder (Material: Stainless steel 304) !
Stainless Steel High Vacuum Angle/In-line Valve XM, XY Series Angle type/ XM Series XY Series In-line type XY Series XM Series XLA XL XLQ Body material: SCS13 (conforms to Stainless steel 304) A precision casting, unified composition prevents accumulation of gas. The XM series is interchangeable with the XL series, aluminum high vacuum angle valve.
Note 3) When mounting D-M9 on the cylinder (32 to 63), auto switch mounting brackets (BMG2-012) are necessary. 544 Parallel Style Air Gripper/2-Finger Type Series MHS2 Model/Specifications MHS2-20D MHS2-25D MHS2-32D MHS2-40D MHS2-50D MHS2-63D MHS2-16D Model Bore size (mm) 16 20 25 32 40 50 63 Air Fluid 0.1 to 0.6 0.2 to 0.6 Operating pressure (MPa) -10 to 60 Ambient and fluid temperature
Chamber XLA XL XVD By switching to the main valve circuit, the main valve opens and the full amount is introduced into the chamber. XLQ Chamber XM XY DXSA XVD XVD XGT CYV 523 XVD Series Specifications Model XVD2-02V XVD2-02S Valve type Normally closed (Pressurize to open, Spring seal) Fluid Nitrogen, Air, Inert gas, etc.
Model/Specifications MHT2-32D MHT2-40D MHT2-50D MHT2-63D Model Bore size (mm) Applicable auto switch Bracket no.
Bypass valve Construction number: (9) Temperature Specifications Common for all sizes General purpose XLA-16*-X65 For high temperature XLA-16*H0-X65 Note1) Auto switch is not included in the bypass valve. Contact SMC if you need auto switch. Note2) The "*" in the table refers to the pilot valve mounting orientation. Refer to the catalog of drawing for How to Order.
Auto switch mounting screw Hysteresis Auto switch Auto switch reset position (OFF) Auto switch operating position (ON) Tightening torque of auto switch mounting screw (Nm) Air gripper model Hysteresis degree (Max. value) MHT2-32D MHT2-40D MHT2-50D MHT2-63D Auto switch model Tightening torque D-M9(V) D-M9W(V) D-M9A(V) D-A9(V) 3 0.05 to 0.15 3 3 0.10 to 0.20 3 651 A Series MHT2 In addition
XLFV16A-30-1-2M9NA-5GS-XN1 Note 4) Bonnet assembly contains the valve seal 1, valve seal 2, and nut assembly. It does not contain external seal. Order separately if it is required.
XLAV16A-30-1-2M9NA-XN1 Note 4) Bonnet assembly contains the valve seal 1, valve seal 2, bellows assembly, and nut assembly. It does not contain external seal. Order separately if it is required.
XLG16-30-1-2M9NA-XN1 Note 4) Bonnet assembly contains the valve seal 1, valve seal 2, and nut assembly. It does not contain external seal. Oerder separately if it is required.
XLC16-30-1-2M9NA-XN1 Note 4) Bonnet assembly contains the valve seal 1, valve seal 2, bellows assembly, and nut assembly. It does not contain external seal. Oerder separately if it is required.
XLF16A-30-1-2M9NA-XN1 Note 4) Bonnet assembly contains the valve seal 1, valve seal 2, and nut assembly. It does not contain external seal. Order separately if it is required.
(Example) 40D-A3C-4, 63D-A3C-6, 100D-A3C-10 50D-A3C-5, 80D-A3C-8 1.08 0.32 0.38 0.38 0.73 Double knuckle Accessory bracket 0.19 0.05 0.05 0.05 0.14 Knuckle pin 10-12-49 Series CE2 Dimensions: 40 to 100 RC 1/4 Pressurized locking port RC P Rod side cylinder port RC P Head side cylinder port Basic style RC 1/4 Unlocking port Unlocked when pressurized 7 (6 core twisted pair shielded wire) Width