VFN2000N

Hole Pilot EXH. 110.6 18.2 22.2 22.2 3-1/4 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Pilot EXH. 2 x 6 M.T.G. Hole 3 1 5 22.2 22.2 3-1/4 111.5 3 1 5 15.7 2 4 40.3 2 4 JIS Symbol JIS Symbol 2 4 2 4 3 1 5 5 1 3 Cylinder ports are NAMUR hole pattern.

Multistage Ejector Series ZL112/212 1

kPa 13.3 kPa 10 10 0 0 1 2 3 4 5 6 7 8 9 10 11 12 1 2 3 4 5 6 Time to reach vacuum (S) Time to reach vacuum (S) The graphics indicate the time required to reach a vacuum pressure determined by adsorption conditions for workpieces, etc., starting from atmospheric pressure in a 1 sealed tank.

Base Mounted How to Order Manifold VQC1000 Series Plug-in Unit

9 stations S Note 6) Note 1) Without SI unit, the symbol is nil.

Process Pump

Caution 1) Quality of supplied air Mount the filter with filtration of approx. 0.01.

Fieldbus system (SI unit compatible CompoNet TM )

Setting Setting range 10 0 to 6 1 0 to 9 1: The station number should be any number from 00 to 63. If a node is set to a number greater than 63, the "NS" LED will light up.

Multistage Ejector

One-touch Fittings Precautions 1. Insertion of tube 1) Cut the tube perpendicularly, being careful not to damage the external surface. Use SMCs tube cutter TK-1, 2 or 3 for cutting. Do not cut the tube with pliers, nippers, scissors, etc.

Air Suction Filter

Model Symbol Port size A B ZFA100 1/8 18 ZFA200 1/4 20 28 -8- 2) Manifold Model Symbol Port size A B ZFA100 1/8 19 18 ZFA200 1/4 24 28 Model Symbol Single unit Note) Number of manifold stations 2 3 4 5 6 7 8 9 10 L1 38 56 74 92 110 128 146 164 182 200 ZFA100 L2 50 68 86 104 122 140 158 176 194 212 L1 48 76 104 132 160 188 216 244 272 300 ZFA200 L2 60 88 116 144 172 200 228 256 284 312 Note

VF1000/3000/5000 Series (PILOT VALVE : V200)

They are all important notes for safety and must be followed in addition to International Standards (ISO/IEC)*1), and other safety regulations. *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218-1992

OML0002-C

Keep this operation manual available whenever necessary. 1 - INDEX 1. Safety Instructions 3 2. Specifications 5 3. How to Order 6 4. Mounting 4-1. Precautions for mounting 7 4-2. How to mount 9 4-3. Wiring table 15 4-4. Power supply cable wiring diagram 16 4-5. Timing chart 16 5. Functional Explanations 17 6. Outline Dimensions 18 7. Maintenance 7-1.

AME

2 3 4 , AME450 Misc. 212 22 107 106 3 106 10 36 221 21 10 14 9 90 55 110 50 88 3.2 1 , , , 1 1 3 4 4.5 4.5 6 257 314 406 30 40 30 10 15 15 16 20 24 100 150 180 65 85 120 130 180 220 60 76 110 102 136 184 44 66 96 9 11 13 239 291 403 22 32 42 128 167 235 122 160 220 3 122 160 220 10 10 10 AME550 AME650 AME850 1 2 1 2 1 2 1 Please refer to page 14-20-57 for Made to Order Specifications.

Process Pump

Caution 1) Quality of supplied air Mount the filter with filtration of approx. 0.01.

LOCK UP VALVE

Spare Parts List IL201 290301 Diaphragm Assy NBR 1 Part number Part name Material Quantity 29038 Diaphragm NBR 1 290311#1 Valve BRASS 1 JIS B 2401, P21 O ring NBR 1 JIS B 2401, P8 O ring NBR 1 JIS B 2401, P5 O ring NBR 1 JIS B 2401, P3 O ring NBR 2 IL211 290301 Diaphragm Assy NBR 1 Part number Part name Material Quantity 29038 Diaphragm NBR 1 290311#1 Valve BRASS 1 JIS B 2401, P21 O ring

Regulator

Option/Semi-standard symble:When more than one specification is required, indicate in alphanumeric order. 1 3 4 5 6 2 Symble Description 0.020.2MPa 0 0 0 0 Set pressure range 1 1 1 1 0.020.4MPa 2 2 2 2 0.020.8MPa + 1 Exhaust direction 0 0 0 0 Bottom exhaust + 2 Rc Nil Nil Nil Nil Pipe thread type NPT N N N N F F F F G + 3 Port size 02 02 02 02 1/4 + 4 Nil Nil Nil Nil Without pressure gauge

AME

J 25 K 10 L 14 N 90 O 55 P 110 Q 50 R 88 S 3.2 1/2, 3/4 1 3/4, 1 1, 1 1/2 1 1/2, 2 36 9 205 19 100 106 3 106 10 AME450 Related poroducts 212 22 107 106 3 106 10 36 221 21 10 14 9 90 55 110 50 88 3.2 44 66 96 257 314 406 30 40 30 10 15 15 16 20 24 9 11 13 100 150 180 65 85 120 130 180 220 60 76 110 102 136 184 4.5 4.5 6 239 291 403 22 32 42 128 167 235 122 160 220 3 122 160 220 10 10 10

LC-OM089xx

No.LC-OM08901 A (1/3) Part description Qty. LC3F212-5[][]A) Contact BVH-21T-P1.1 12 Directional control equipment 1 Operation manual (This document) 1 Cross recessed bind screw M3 4 1 Spring seat Nominal3 1 ground terminal Tooth lock washer (A) Nominal 3 1 Housing VHR-2N 1 Housing VHR-3N 1 Housing VHR-4N 1 Ensure parts below are included in the package.

Air operated valve

Warning Thread Proper tightening torque (Nm) Rc 1/8 7 to 9 Rc 1/2 28 to 30 Rc3/4 28 to 30 Rc1 36 to 38 (2) Follow the procedures of the manufacturer when fittings other than SMC are used. 4.

S

3/8 050 1/2 075 3/4 100 1 125 1 1/4 40~140F (5~60C) Ambient Temperature With Thread B W/O Thread IEC Standard IP67, JIS0920 (Water Proof, Oil Proof) Housing S T R O K E Bore Size Stroke mm (inch) inch 6 (1/4) 1/4, 3/8, 1/2, 3/4 10 (3/8) 1/4, 3/8, 1/2, 3/4, 1, 1-1/4 15 (5/8) 1/4, 3/8, 1/2, 3/4, 1, 1-1/4 D I M E N S I O N S N O S E M O U N T: NCJPB S Y M B O L S S Z With Auto Switch A C D F

Rotary Actuated Air Gripper/3-Finger Type MHR3/MDHR3 Series Size: 10, 15

3 @1 @0 !1 !0 !2 r w u e !5 y !9 u t MDHR3 !4 !3 q !1 @0 @1 w o e i !5 MHZ MHF r !7 !6 t !8 !0 !2 i !9 y u MHL Component Parts MHR MHR Description Material Description Material Note No. Note No.

Precision Regulator

Recommended tightening torque (Nm) Thread size 1/8 Torque 7 to 9 -9- (2) Do not apply torsion or bending moment other than the weight of the product itself.

Speed Controller with One-touch Fittings Series AS In-line Type 1

12 22 97 43.5 51 10.3 76.9 17.9 21 3/8" AS4001F-11 26.5 106 44.9 52.4 11.6 83.1 21.7 22 1/2" AS4001F-13 15-9-12