ITV

Note) Breathing hole (M3 x 0.5) 3.7 3.7 13.7 1 SUPz VACz OUT port (4, 5/32") SUP, VAC port (4, 5/32") OUTx 3 EXHc ATMc 2 5 EXH, ATM port (4, 5/32") 38 2-M3 x 0.5 thread depth 3.5 Bracket mounting hole L-bracket (Option) Flat bracket (Option) 6-3.5 19 74 2-3.5 19 27 19 64 Minimium bending radius 80 28 Body +50 0 3000 15 35 (30.9) 4 8.7 9.9 Cable connector (4-wire) Straight type (Option) 7

IR1000/2000/3000

SMC 50 35 5 SMC 6 28 (R) P P K U K C S U O C H L S O H L 38 AV AU Panel cut Panel thickness: Max. 4 Panel cut Panel thickness: Max. 3 34 AF 40 15.4 x 5.4 AR Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com IR 8 x 6.5 79 13 45.5 VEX Atmosphere 106 G SET SET Pad side

PF2A/PF2W

Tightening torque Nm 28 to 30 36 to 38 48 to 50 48 to 50 Tightening torque Nm 7 to 9 12 to 14 22 to 24 28 to 30 Thread Rc 3/4 Rc 1 Rc 1 1/2 Rc 2 Thread Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 Supply voltage > Internal voltage drop of switch Minimum operating voltage of load 2. Apply wrench only to the metal part of the pipings when installing the flow switch onto the system piping.

PF2D

Note 7) The sensor unit is conformed to CE mark. 1.0 Operating pressure [MPa] PF2504/520 0.5 PF2540 20 40 60 80 100 0 90 Fluid temperature [C] 16-11-38 3 Series PF2D Digital Flow Switch For Deionized Water and Chemicals How to Order Remote type Display unit PF2D3 A 0 M 0 Unit specifications Nil M With unit switching function Fixed SI unit Note 1) Note 1) Fixed unit: Real-time flow rate: l

PSE550/300

It is also used for switching to the peak display mode. 16-3-38 7 Series PSE300 Controller Dimensions 20 0.1 30 3 31 depth 4 2M3 x 0.5 Power supply/Output connector 1.5 10 ZSE ISE PSE Sensor connector 3.2 1.5 Z I SE3 8.2 PS Power supply/Output connection cable (ZS-28-A) Sensor connector Z I SE1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office

Safety Instructions

Proper tightening torque (Nm) 7 to 9 12 to 14 22 to 24 28 to 30 28 to 30 36 to 38 Thread 1/8 1/4 3/8 1/2 3/4 1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2.

ZSE30/ISE30

Port size One-touch fitting Straight type 4 mm 5/32 inch 1/4 inch 6 mm One-touch fitting Elbow type 4 mm 5/32 inch 1/4 inch 6 mm Sensor pressure receiving area: Silicon, Piping port: C3602 (Electroless nickel plated), O-ring: HNBR Wetted part material O-ring: NBR, fitting: PBT O-ring: NBR With lead wire with connector (2 m) 78 g 76 g 81 g Weight Without lead wire with connector 40 g 38

ZSE F/ISE

Item Reference page 16-2-30 Output type Example of internal circuit and wiring 16-2-31 Auto shift function, Anti-chattering function 16-2-32 Measures to be taken when error occurs 16-2-33 16-2-38 15 Series ZSE60F/ISE60 High Precision, Digital Pressure Switch for General Fluids Dimensions Bracket A A 30 20 ZSE ISE 20 PSE 45 Z I SE3 55 4.5 11.5 40 15 PS 4.5 Z I SE1 2 Courtesy of Steven Engineering

TL/TIL

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 100% Methylne chloride VX3 38% Hydrochloric acid VXA 50% Hydrofluoric acid 60% Hydrogen peroxide VN 100% Methanol LVC Methyl ethyl Ketone LVA 70% Nitric acid LVH 86% Phosphoric acid LVD 85% Caustic potash LVQ 100% Sulfuric acid LQ Note 1) Toluene Xylene

VCL

Dimensions (mm) Electrical entry Z J E H C G A B D Model Grommet Conduit DIN terminal Conduit terminal Y N X W V U T S R Q VV2CL2 56 34.5 4.5 17.3 24.5 38 49 20 28 77 66 99 41.5 58 46 43.5 44 45.5 22 VV2CL3 66 38.5 5.5 19.3 28.5 42 57 25.5 30 86.5 68 101 51 60 48 53 45.5 55 24 VV2CL4 74 41.5 5.5 20.8 28.5 42 57 25.5 30 94 70 103 58.5 62 50 60.5 47.5 62.5 26 17-2-37

VCS

. + 3 stns x 2 3 stns. x 3 2 stns. x 2 + 3 stns. x 2 Dimensions (mm) Electrical entry J E H C G B D Z A Grommet: G Conduit: C Conduit terminal: T Model Y X N T S R Q VV2CS2 77 99 66 41.5 44 50.5 22 34.5 4.5 17.3 24.5 38 20 28 56 49 VV2CS3 86.5 101 68 51 45.5 60 24 38.5 5.5 19.3 28.5 42 25.5 30 66 57 VV2CS4 94 103 70 58.5 47.5 68 26 41.5 5.5 20.8 28.5 42 25.5 30 74 57 17-2-47

VDW

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VX3 2.5 VXA (24.5) 4.5 300 14.7 20 VN 49 28 38 LVC 24.5 LVA (: Thread type) 23/8 (IN port) 10.5 5.5 L3 L2 L1 R2.25 LVH LVD 1 Stations D side 2 3 4 5 n U side LVQ LQ LVN VDW33-GVDW33-GVDW33-GVDW33-GTI/ TIL 83 PA PAX 34 21 5.5 16 PB n-1/8 17.25 17.25 (

VND

N.C. 6A 8A 10A 10A 15A 20A 25A 32A 32F 40A 40F 50A 50F 1 8 1 4 3 8 3 8 1 2 3 4 7 1 15 2 20 25 3 4 1 1 1 4 32 5 11 4 B Flange 11 2 40 6 11 2 B Flange 2 7 50 2 B Flange 17-4-38 3 Series VND Steam Valve: 2 Port Valve For Steam Model Port size Flow characteristics Weight (kg) Av x 10-5 Orifice size (mm) Model Rc Flange Note) VND10D-6A VND10D-8A VND10D-10A VND20D-10A VND20D-15A VND30D-20A VND40D

VVXA21/22

9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com OUT port (Pitch) (Pitch) Individual SUP type OUT port Pilot port Blanking plate IN port L Dimension Pitch Pitch Model Stations 2 3 4 5 6 7 8 9 10 Symbol L1 L2 L1 L2 100 86 126 108 136 122 172 154 172 158 218 200 208 194 264 246 244 230 310 292 280 266 356 338 316 302 402 384 352 338 448 430 388 374 494 476 VVXA21 VVXA22 A 38

Vacuum Ejector with Solid State Timer

wiring is unnecessary) Timer can be easily adjusted without programming Models Standard supply pressure Nozzle diameter (mm) Diffuser construction Air consumption l/min (ANR) Max. suction flow rate l/min (ANR) Model S M H ZMA05H 0.5 12 18 ZMA07H 0.7 24 23 0.5MPa ZMA10H 1.0 46 36 2 stage diffuser ZMA13H 1.3 95 40 ZMA07M 0.7 16 20 ZMA10M 1.0 0.35MPa 26 32 ZMA13M 1.3 70 36 ZMA13S 1.3 75 38

Series VCL

Dimensions (mm) Electrical entry A B C D E G H J Z Model Grommet Conduit DIN connector Conduit terminal Q R S T U V W N X Y VV2CL2 49 20 24.5 28 4.5 38 17.3 34.5 58 22 45.5 44 43.5 46 58 41.5 66 99 77 VV2CL3 57 25.5 28.5 30 5.5 42 19.3 38.5 68 24 55 45.5 53 48 60 51 68 101 86.5 VV2CL4 57 25.5 28.5 30 5.5 42 20.8 41.5 76 26 62.5 47.5 60.5 50 62 58.5 70 103 94 6 Direct Operated 2 Port for

Series VCS

Dimensions (mm) Electrical entry Conduit terminal: T Grommet: G Conduit: C B C D E G H J Z A Model Q R S T N X Y VV2CS2 22 50.5 44 41.5 66 99 77 49 20 24.5 28 4.5 38 17.3 34.5 56 VV2CS3 24 60 45.5 51 68 101 86.5 57 25.5 28.5 30 5.5 42 19.3 38.5 66 VV2CS4 26 68 47.5 58.5 70 103 94 57 25.5 28.5 30 5.5 42 20.8 41.5 74 6 Direct Operated 2 Port for Steam Series VCS VCS (for steam) 2 port solenoid

VDW Series

Refer to pages 11 and 12 regarding manifold additions. 9 Compact Direct Operated Series VDW10/20/30 2 Port Solenoid Valve for Water and Air Dimensions (mm) 1in = 25.4mm VV2DW3 (26.5) 23 2.5 20 14.7 Approx. 300 28 4.5 (24.5) 49 38 24.5 R2.25 L1 L2 L3 5.5 10.5 2-3/8 (IN port) (: Thread type) 1 Stations D side 2 3 4 5 n U side VDW33-*G-* VDW33-*G-* VDW33-*G-* VDW33-*G-* 83 34 5.5 21 16 n-1/

VHS

VHS2500 VHS3500 VHS4500 VHS5500 Model 1/8 1/4 1/4 3/8 1/4 3/8 1/2 3/4 1 1(P)/2(A) Piping port 1/2 1/4 1/8 3/8 3(R) 110 (6.11) 130 (7.22) 16 (0.89) 31 (1.72) 10 (0.56) 14 (0.78) 22 (1.22) 38 (2.11) 57 (3.17) 1(P) 2(A) Effective area (mm2) (Cv) 2(A) 3(R) Combination with a modular style FRL is possible. 33 (1.83) 40 (2.22) 14 (0.78) 29 (1.61) 11 (0.61) 16 (0.89) 15 (0.83) 29 (1.61) 51 (2.83

VXA21/22

The right side of the common port provides plug. 4.1-65 VVXA21/22 Dimensions Common SUP style Individual SUP style L: Dimensions Model Stations 2 3 4 5 6 7 8 9 10 L L1 L2 L1 L2 100 86 126 108 136 122 172 154 172 158 218 200 208 194 264 246 244 230 310 292 280 266 356 338 316 302 402 384 352 338 448 430 388 374 494 476 VVXA21m VVXA22m Model VVXA21m VVXA22m A 38 49 B 20.5 [17.5] 26.5 [22.5]