ZQ

None Vacuum switch electrical entry Connector type Lead wire length: 0.6 m C Pilot valve (Refer to Table (1).)

Air Slide Table Series MXQ

Applicable cylinder bore size Metal stopper 6 8 12 16 20 25 6 8 12 16 20 25 3 Air Slide Table Series MXQ Shock Absorber Specifications Table Accuracy RB0805 RB0806 RB1007 RB1411 RB1412 Shock absorber model MXQ8 MXQ12 MXQ16 MXQ20 MXQ25 B C Applicable slide table Radial internal clearance 19.6 14.7 5.88 2.94 0.98 Max. absorbed energy J 12 11 7 6 5 Stroke absorption mm M 50 to 500 Max. impact

Compact Vacuum Ejector Series ZQ

None Vacuum switch electrical entry Connector type Lead wire length: 0.6 m C Pilot valve (Refer to Table 1.)

LZ-OM003xx

A B C D E F Model no. A B C D E T Use 2 spanner flats when fixing the foot to the motor. Recom m ended setscrew: M6 4pcs. 4 Knock pin 2pcs. Use (1)(across flat) when fixing the foot at the rod. L[]ZB[]3 119.5+st 69.7+st 4 6.8 L[]ZB[]5 155.5+st 92.7+st 4 7 Model no.

Slit Valve

Standard/XGT222 B Opening size C 50 A A Opening size B 253 112 D !

Water Separator Series AMG Please refer to page 14-20-62 for specific product precautions. 1

M Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G S 6.0 , 2 H 463.5 I 180 J 30 K 15 L 24 N 120 O 184 P 220 Q 110 R 18 460.5 AMG850 1 2 13 42 348 220 57.5 220 10 14-20-7

Electric Actuator / High Rigidity Slider Type 《 AC servo motor ・ Motorless 》

Additionally, when running the positioning operation, do not set within 7 mm of both ends.

Compact Pad

Symbol/Type U: Flat C: Flat with rib UT: Thin flat B: Bellows Compact Pad 3, 4, 5, 6, 7, 8 Pad diameter 7 types of 3 to 8 are added.

PAB-OM-B007-B

set K T PA 5 3 1 C heck valve set K T PA 5 3 6 S w itching valve set K T PA 5 3 7 4 .

Profile Design ISO/VDMA Air Cylinder Series CP95

G Rear flange F Front flange L Foot C Male rear clevis D Female rear clevis 1.8-29

CVRA1-E

Rotation angle rad Inertia moment kgm For equiangular acceleration, the angular velocity, , after t seconds are obtained using the following equations. ) 1 ( ) 2 ( C : Integration constant Because the displacement angle in t=0 becomes =0, it becomes C=0.

Toggle Type Air Gripper

Tightening torque Tightening torque Model Screw (Nm) A M6 4.8 B M5 2.8 MHT2-32DZ C M8 12 A M6 4.8 B M6 4.8 MHT2-40DZ C M8 12 A M8 12 B M8 12 MHT2-50DZ C M10 24 A M10 24 B M10 24 MHT2-63DZ C M10 24 13 - 3-4. Construction / Parts list Components No.

VQ1000/2000 Series (PILOT VALVE : V100)

No.VQ1000V-OMM0002-B Solenoid Valve PRODUCT NAME VQ1000/2000 Series (PILOT VALVE : V100) MODEL/ Series Contents Safety Instructions -2,3 Precautions on Design -4,5 Selection -4,5 Mounting -5 Piping -6 Wiring -6 Lubrication -6 Air Supply -7 Operating Environment -7 Maintenance -7,8 Specific Product Precautions -9,10,11 Trouble shooting -12,13 -1No.VQ1000V-OMM0002-B Safety Instructions These

AMF

NBR JIS B2401G35 1 pc. u 4.6-30 Series AMF Dimensions: AMF150 to AMF350 M Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 146 167 167 198 198 I 56 66 66 80 80 J 15 20 17 22 19 K 5 8 8 8 8 L 9 12 12 14 14 N 35 40 40 50 50 O 54 66 66 80 80 P 70 84 84 100 100 Q 26 28 28 34 34 R 4.5 5 5 5 5 S 1.6 2.0 2.0 2.3 2.3 1/8, 1/4,3/8 1/4, 3/8 5.5 6 6 7 7 139 152 158 184

IR10-OM00007

(IR1000:F.S.=0.2MPa,IR1010:F.S.=0.4MPa,IR1020:F.S.=0.8MPa) ) F.S. (2) (3) (4) 0.010.8MPa(IR1000 0.005MPa) 1 IR1000 IR1010 IR1020 [MPa] MAX. 1.0 [MPa] () 0.05 [MPa] 0.0050.2 0.010.4 0.010.8 0.2% 0.5% 4.4L/min(ANR) [1.0MPa ] -560 Rc1/8 Rc1/8 [2 ] 0.14kg (1) (0.05MPa) (2) IR1000:0.2MPa (3)2 ON-OFF () (4) -4- (C)2 (C) (A) (A) (C) (A) (C) BLEED SUP(1) OUT(2) SUP N

FGX-OM-R008

A Dimensions: SFE4G/5H/7J Model A B C SFE4G 6 68.5 16.5 SFE5H 8 79 20.5 SFE7J 10 89 24 -7- Dimensions (Bracket) 1) SFE-BR3 2) SFE-BR4/5/7 Dimensions: SFE-BR4/5/7 Model A B C D E F G H J SFE-BR4 30 16 7 4.5 7.5 (24.5) 17 15.5 (19.5) SFE-BR5 30 10 8.2 4.5 8.1 (29) 20 18 (23) SFE-BR7 34 14 7.35 4.5 9.8 (35) 24 20 (27.3) ( ): The values inside the brackets are given as a guide. -8- Revision history

Floating Joint/Stainless Steel Type Series JS

23 41 7 14 14.3 27 49.2 14.3 1 11000 3

PAB-OM-B006-B

Replacement parts C aution S tart & S top S ee C ircuit E xample 1 C onnect air piping to the port A IR S UP, and transported fluid piping to the suction port F L UID IN and the discharge port F L UID OUT respectively. S et pilot air pressure in the range of 0 .2 MPa and 0 .7 MPa(2 to 7 .1 kgf/c )by using regulator. K eep ball valve open on the discharge side.

High Vacuum Slit Valve

177 Wiper XGT300-4-9S Fixed bolt XGT300-2-5S Multiple connector XGT300-50AS For XGT31-50336-C Auto switch ASSY D-sub connector XGT300-50DS For XGT31-50336-F C Connected connector of Auto switch B C Name Order No.

Serial Transmission System Series EX250 Series EX500

Stations 1 station MADE IN JAPAN C US TYPE1 R EX500-IE1 (PNP) 1 24VDC/60mA/IP65 8-point integrated type, M8 connector, PNP specifications C US TYPE1 R EX500-IE1 (PNP) 24VDC/60mA/IP65 TYPE1 EEX500-IB1-M6 1 set EX500-IE1 4 sets EX500-IE3 2 sets 24VDC/60mA/IP65 MADE IN JAPAN C US TYPE1 R EX500-IE1 (PNP) MADE IN JAPAN C US TYPE1 8-point integrated type, M8 connector, NPN specifications R MADE