INFORMATION Modular Connection Type Residual Pressure Relief 3 Port Solenoid Valve For connecting to F.R.L. units AC25-A AC30-A AC40-A VP500 IN OUT VP700 Allows for space saving and reduced piping labor. Power consumption: 0.35 W (Without light) EXH Exam

C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv VP517Y G3/8 8.8 0.14 2 8.2 0.15 1.8 VP717Y G1/2 13.8 0.11 2.9 12.9 0.18 2.9 2 VP500/700 Series Spacer Center of F.R.L. body D C B Model A B C D Y300-A 4.2 43.4 21.7 57.9 Y400-A 5.2 53 26.5 68.5 A (Spacer width) Seal Y400-A Spacer with Bracket D K Center of F.R.L. body J H F G E E C B Seal A (Spacer width) Y400T-A Model A B C D E F G H J K Y300T-A 4.2

44

10 15 15 19 20 25 28 39 42 52 48 51 61 1/8" (3.18) 0.086" (2.18) Applicable tubing 1.1 10 8 13.5 5 1.5 L1 M KDM 0.098" (2.5) 5/32" (4) H1 1.6 10 8 13.5 5 1.8 d KB 1/4" (6.35) 5/32" (3.95) 6 10 3.3 12 15.2 6 A L2 12 KR H2 0.236" (6) 5/16" (8) 12 14 17.4 6.6 5.3 Connection thread 16 KA 13 3/8" (9.53) 1/4" (6.35) 15 17 20.4 7.6 5.6 18 30 KQG2 1/2" (12.7) 3/8" (9.53) KG 17 19 23.3 8.5 8.5 40

MGP

2 15 1 15 2 15 1 2 1 2 1 2 1 2 1 2 1 2 1 2 1 2 2 10 15 5 10 5 10 10 5 10 D-A9 D-A9V D-M9V D-M9 10 10 10 10 D-M9W D-M9WV D-M9AVL 15 10 D-M9AL 15 10 5 D-Z7 D-Z80 D-Y59 D-Y7P D-Y69 D-Y7PV D-Y7W D-Y7WV 15 10 10 15 10 5 5 5 10 15 15 10 15 D-Y7BAL 10 20 75 18-3.

CRB2-OM00001

(2) C is integration constant.

VFN2000N

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com d n i n i W g c e t i r o i d n e p a t e p i P Leakage Voltage It must be noted that when connecting C-R element parallel to switching element, leakage current flows through C-R element and the leak voltage increases

IDX-OM-O004C

1(ANR)[2065%] 2[32] 3() 430mA 6 1 6. 6.2 IDF15E1 mm 603 41 54 300 16 C R 1 C R 1 87 578 [AC200V] [AC200V] 396 0.8m (10, (:10, :0.8m) 43 15 270 13 4x 380 101 258 314 [AC100V] (:1.9m [AC100V] [AC200V] (17) [AC200V] ( 17) 1.9m 6.3 IDF15E1-10 PC CM ILS FM PTC OLR OLR ILS PTC PTC CM C01 C02 PRS PC C01 C02 C11 FM C11 PRS P 6 2 6.

Activated Carbon Filter

Bowl assembly specifications 1) AMK20 bowl assembly Semi-standard symbol 6 C 6C Semi-standard symbol: "-" Standard Port thread Semi-standard symbol: "C" Port thread Part No. type Part No. type Rc C2SK-C-D G Rc C2SF-D-X401 G NPT C2SK-C(Z)-D NPT C2SF(-Z)-D-X401 Appearance and part No.

Compact Guide Cylinder with One-way Lock Series MLGP ø40, ø50, ø63

GC GA XAH7 depth XL 2-Rc P PB A + Stroke E B + Stroke FA FB C + Stroke PA + Stroke GB Q G J K IE S XAH7 depth XL (mm) MLGPM, MLGPL common dimensions Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB GC H HA IA IB IC ID IE 14 11 100 44 16 12 44 54 10 120 M6 34 52 14 4 14 40 25, 50, 75 100, 125, 150, 175 200, 250, 300, 350 12 13 107 44 20 16 47 64 148 M8 35 64 19 50 11 7 14 115 49 20

VXA31/32

Port R Operating Fluid and Ambient Temperature Operating fluid temperature (C) (3) Vacuum Ambient temperature (C) Temperature conditions Air (Standard) Oil (Standard) (V) Port P Port A Maximum Minimum 60 5 (1) 40 5 40 40 5 5 (2) Note 1) Dew point: 5C or less Note 2) 500 cSt or less Note 3) V in parentheses is option symbol. Option Material No.

Precision Cylinder Series MTS

Material Note 2 Clear anodized Aluminum alloy 1 8 15 Bumper Urethane 1 Clear anodized Aluminum alloy 1 12 to 40 16 Key 1 Aluminum alloy 1 Hard anodized Carbon steel 2 Aluminum alloy 1 Chromated 8: Nickel plated 17 C type snap ring for hole Carbon tool steel 1 Aluminum alloy 1 Chromated 12 to 40: Nickel plated 18 19 20 21 22 23 Magnet Plug 1 1 Stainless steel 8: Quenched 6 Spline rod 3 1 Carbon

KDM

Refer to pages 15-18-3 to15-18-4 for Safety instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 15-110 to 15-1-11 for Precautions on every series. 15-2-106 Rectangular Multi-connector Series KDM Principal Parts Material How to Use Plug case, Socket case Plate, Bracket POM SPCC plated PBT, C3604BD Electroless nickel plated (8) Body Chuck Caution

Clamp Cylinder Series CK1

15 CK1 2 x M6 thread depth 11 (for YA type) 33 2 x M6 thread depth 11 (for IA type) 15 CLK2 20 20 40 57 17 17 A 20 19.5 0.2 0.5 15 25 45 45 60 60 Material: Cast iron Material: Cast iron Unit: mm Part no.

Digital Flow Switch (Remote type monitor unit)

Normal condition (NOR): Flow measurement reference condition 101.3 kPa, 0 C.

Digital Flow Switch

C: Contents revised in several place. D: Contents revised in several places. [September 2016] E: Contents revised in several places. [August 2018] F: Contents are added.

CEP1

R04-J8M7.3 AC100240V DC24V RS-232C RS-232C + BCD 05 5 10 10 15 15 20 20 *1) ( ) () 2-3 CEP1 CEU5 3 CEU1 , CEP1 CEU5 ,CE1-R,23m ,, (8 ) CEP1 ,CE1-R, CEP1 ()() CEP1 ,CE1-R C C () CEP1, CE1-ROOC CE1-RO5 CE1-R10 CE1-R15 CE1-R20 CE1-R*C 3 3-1 CEP1B12 CEP1B20 () 1.5MPa 1.0MPa 0.15MPa 0.1MPa 50~300mm/s 0~60 () 25~85%RH() 0~+1.0 2 3 , JIS2 3-2 7,6 () [,R03-J8M] 23m*

Membrane Air Dryer

C, prevent water droplets from entering the inlet port. (No freezing of the fluid) * Note 2. ANR indicates the flow rate converted to the value at 20 deg. C, under the atmospheric pressure and the state of relative humidity 65%. * Note 3.

FSQ seies

Lad sire Oi ptool \inyt. @3.4, o.2mn1, 2 w1r6 (red, b ack). 0.5m ' . lmpacl sistance J00m/s: {30 6G) . hsu aron resistance ---50Mo or more underl6sr vo tage soovDc (belw6n case and cabre) . w thsland vo tage l500VAC 1 min (between case aid bte) .Ambiontlemperalure 50 140"F (10-60"C) ' Polecton skucture lEC529 spec.lP67, warelprcoj (JtS C 0920), oibrcoj ' Suffx L lor the modelwlth a 3m long

Series VS

Pilot valve assembly SF4-mF-30 SF4-mF-30 SF4-mF-30 SF4-mF-30 SF4-mF-30 SF4-mF-30 SF4-mF-30 6 9 Series VS R8b S VALVES A A F B C B C D D 14 14 14 SMC SMC SMC 12 12 SMC 12 MANUAL MANUAL INDICATOR INDICATOR MANUAL MANUAL INDICATOR INDICATOR OVERRIDE OVERRIDE LIGHT LIGHT OVERRIDE OVERRIDE LIGHT LIGHT E E ALL DIMENSIONS ARE IN MILLIMETERS ALL DIMENSIONS ARE IN MILLIMETERS A B D C E F 188.5 188.5

2-Color Display Digital Pressure Switch Series ZSE80(F)/ISE80(H)

Analog output [mA] Analog output [V] 5 20 For compound pressure 100.0 to 100.0 kPa 100.0 kPa 100.0 kPa 0.100 to 1.000 MPa 0.100 MPa 0.100 MPa Note) 0 1.000 MPa For positive pressure 0.100 to 2.00 MPa 0 2.00 MPa 1 4 Note) Analog output is 0.8 [V] or 3.2 [mA] at the pressure A. 0.6 2.4 B A C B A C Pressure Pressure Descriptions LCD Output (OUT1) display (Orange) Displays the current pressure

IDX-OM-X004

Please put a new absorbent from the ditch of C type stop circle for the hole 10mm below. Please fill the absorbent while lightly giving happen the vibration. When filling the adsorbent, please to come to the center pipe. 6. Please put a new filter element and Panting metal sequentially. 7. please put C type stop circle for the hole in the ditch of case. 8.