Dual Rod Cylinder/High Speed Specification Type Series CXS-XB19

0.42 0.43 0.46 0.49 0.51 0.52 0.55 0.58 CXSL15-XB19 0.34 0.36 0.37 0.38 0.32 0.41 0.42 0.44 0.45 0.48 0.51 0.53 0.54 0.57 0.60 CXSM20-XB19 0.52 0.54 0.56 0.58 0.60 0.62 0.63 0.65 0.67 0.71 0.74 0.76 0.78 0.82 0.86 CXSL20-XB19 0.55 0.57 0.58 0.60 0.62 0.64 0.65 0.67 0.69 0.73 0.76 0.78 0.80 0.84 0.87 CXSM25-XB19 0.75 0.78 0.80 0.83 0.86 0.89 0.91 0.94 0.97 1.03 1.09 1.11 1.14 1.20 1.24 CXSL25

LEC-OM02904

I/O DB No.PD07PD09 DBOFF11kW (11.6) 7kW DO-1 SA No.PD07PD09 OFFOFF SAON 20r/min DO-1 VLC No.PD07PD09 VLCONOFFOFF DO-1 TLC No.PD07PD09 TLCONOFFOFF DO-1 ZSP No.PD07PD09 ZSPONNo.PC07 50r/min DO-1 OFF 70r/min OFF 70r/min 20r/min 20r/min () ON 50r/min ON 50r/min No.PC07 PC07 0r/min 0r/min No.PC07 PC07 ON 50r/min ON 50r/min 20r/min () 20r/min OFF 70r/min OFF 70r/min ON OFF ON

MXS

MGQ MXS8-50F SMXS8, #3 MGG Axial piping (8) MXS8-llP MGC 15.5 Operating port MGF 40 Max 6.5 (mm) 2-M5 X 0.8 Model J 39 44 55 73 91 141 MXS8-10R MXS8-20R MXS8-30R MXS8-40R MXS8-50R MXS8-75R CY1 MY1 15 6.5 * Dimensions not indicated are the same as the basic style.

Series 10-/11-/12, 21-/22- CXS Dual Rod Cylinder

(mm) Model CXS20-10 S SS ZZ Z 10 92 116 30 20 102 126 40 30 112 136 40 40 122 146 40 21-/2210-/11-/12CXS20-20 CXS20-30 CXS20-40 CXS20-50 21-/2210-/11-/1221-/2210-/11-/1221-/2210-/11-/1250 132 156 60 21-/2210-/11-/12100 182 206 80 CXS20-75 CXS20-100 21-/2210-/11-/1275 157 181 60 21-/2210-/11-/12857 Dual Rod Cylinder CXSL 1221CXS / 10-/1122Basic: CXS25, CXSL25 10-/11221221Air Preparation Equipment

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

47.1 IN 982 589 491 393 295 196 687 98.2 OUT CXS25 12 756 454 378 302 227 151 529 75.6 IN 1608 965 804 643 482 322 1126 161 OUT CXS32 16 1206 724 603 482 362 241 844 121 IN Note) Theoretical output (N) = Pressure (MPa) x Piston area (mm2) Weight (kg) Standard stroke (mm) Model 100 90 80 75 70 60 40 50 45 30 35 20 25 10 15 CXSM6 CXSL6 CXSM10 CXSL10 CXSM15 CXSL15 CXSM20 CXSL20 CXSM25 CXSL25

MXS Series Air Slide Table

Axial piping (16) MXS16P 25 62 Max. 6.5 Operating port 2-M5 X 0.8 (mm) J 62 62 62 72 87 137 185 235 Model MXS16-10R MXS16-20R MXS16-30R MXS16-40R MXS16-50R MXS16-75R MXS16-100R MXS16-125R 26 12 Dimensions not indicated are the same as basic type. 23.5 12 Dimensions not indicated are the same as basic type. 61 MXS Series Air Slide Table Dimensions MXS 20 2-M6 X 1 thread 6.5 deep Operating

LEC-OM07605CN

E9 OFF OFFON 50r/min E9.1 OFF ON ON (1) OFF LECSS2-T (2) (2) (3) (3) LECSS2-T: DC215V (4) (4) E9.2 (1) LECSS2-T :DC200V 50r/min E9.3 OFF [AL. E9.1] LECSS2-T Ready ON ON 8 55 8.

MXS

Axial piping type (8) MXS8-P 15.5 Operating port 2-M5 x 0.8 40 Max 6.5 (mm) J 39 44 55 73 91 141 Model MXS8-10R MXS8-20R MXS8-30R MXS8-40R MXS8-50R MXS8-75R 15 6.5 Other dimensions are the same as basic style. 13.5 12 Other dimensions are the same as basic style. 8-4-17 18 Series MXS Dimensions: MXS12 Basic style 2-M4 x 0.7 thread depth 5 Operating port 2-M5 x 0.8 9.5 2 4.75 J 8 Max. 11

Air Slide Table Series MXS

Axial piping type (8) MXS8-P 15.5 Max 6.5 Operating port 2 x M5 x 0.8 (mm) J 39 44 55 73 91 141 Model MXS8-10R MXS8-20R MXS8-30R MXS8-40R MXS8-50R MXS8-75R 32.2 15 D6.5 Other dimensions are the same as the basic style.

Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

(mm) Model CXS20-10 S SS ZZ Z 10 92 116 30 20 102 126 40 30 112 136 40 40 122 146 40 21-/2210-/11-/12CXS20-20 CXS20-30 CXS20-40 CXS20-50 21-/2210-/11-/1221-/2210-/11-/1221-/2210-/11-/1250 132 156 60 21-/2210-/11-/12100 182 206 80 CXS20-75 CXS20-100 21-/2210-/11-/1275 157 181 60 21-/2210-/11-/1285 Dual rod cylinder CXSL 1221CXS / 10-/1122Basic style / CXS25, CXSL25 10-/11221221S ZZ 12 12 SS

JXCx-OMT0023

DO-1 Zero speed ZSP ZSP turns on when the servo motor speed is zero speed (50r/min) or less. Zero speed can be changed using parameter No. PC10. Example Zero speed is 50r/min DO-1 OFF level 70r/min 1) Forward rotation direction 3) 2) 20r/min (Hysteresis width) ON level 50r/min Parameter No. PC10 Servo motor speed 0r/min Parameter No.

Table of Contents

27.5 28 Housing mounting style with auto switch CDBXWM32-25/50, CDBXWM32-25R/50R Plate mounting style with auto switch CDPXWM32-25/50, CDPXWM32-25R/50R Magnet mounting block Auto switch Auto switch Hs Ht Note 1) The dimensions show D-A7 and D-A8.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

Example Zero speed is 50r/min DO-1 1) OFF level 70r/min Forward rotation direction 20r/min (Hysteresis width) 3) 2) ON level 50r/min Parameter No.PC07 Servo motor speed 0r/min Parameter No.PC07 ON level 50r/min OFF level 70r/min Reverse rotation direction 20r/min (Hysteresis width) 4) zero speed (ZSP) OFF ON ZPS turns on 1) when the servo motor is decelerated to 50r/min, and ZPS turns off

LEC-OM02704CN

/min)ZSPONPC17 50r/min O F F 7 0r/min 20r/min O N () 5 0r/min No.PC17 0 r/min No.PC17 O N 5 0r/min 20r/min ( OFF 70r/min OFF ON (ZSP) 50r/minZSPON 70r/minZSPOFF50r/minZSP ON70r/minZSPOFF ZSPON 20r/min CDPS CDPSON . 4.5.2 (I/O)4.8.2 I/O A () LA CN6-11 CN6-24 PA15 CCWBA/2 ABPC19 DO-2 LAR B () LB CN6-12 CN6-25 LBR Z () LZ CN6-13 CN6-26 11 ON() 400s 100r/min DO-2 LZR 4 21 4

CXS

(kg) Standard stroke (mm) Model 75 35 70 30 60 25 50 20 45 40 80 90 100 0.70 0.54 0.66 0.52 0.62 0.50 0.60 0.58 0.56 0.715 0.735 0.755 0.815 CXSM20-A 0.72 0.56 0.68 0.54 0.64 0.52 0.62 0.60 0.58 0.735 0.755 0.775 0.835 CXSL20-A 0.96 0.80 0.92 0.78 0.88 0.86 0.84 0.82 0.98 1.00 1.04 1.08 CXSM25-A 0.97 0.81 0.93 0.79 0.89 0.87 0.85 0.83 0.99 1.01 1.05 1.09 CXSL25-A 1.92 1.53 1.82 1.48 1.72

Table of Contents

Axial piping type (8) MXS8-P 15.5 Operating port 2-M5 x 0.8 40 Max 6.5 (mm) J 39 44 55 73 91 141 Model MXS8-10R MXS8-20R MXS8-30R MXS8-40R MXS8-50R MXS8-75R 15 6.5 Other dimensions are the same as basic style. 13.5 12 Other dimensions are the same as basic style. 8-4-17 18 Series MXS Dimensions: MXS12 Basic style 2-M4 x 0.7 thread depth 5 Operating port 2-M5 x 0.8 9.5 2 4.75 J 8 Max. 11

AC Servo Motor Driver

P S T Zero speed detection ZSP CN1-23 ZSP turns on when the servo motor speed is zero speed (50r/min) or less. Zero speed can be changed using parameter No.PC17. Example Zero speed is 50r/min DO-1 1) OFF level 70r/min Forward rotation direction 20r/min (Hysteresis width) 3) 2) ON level 50r/min Parameter No. PC17 Servo motor speed 0r/min Parameter No.

AC Servo Motor Driver (CC-Link Type ）

Example Zero speed is 50r/min 1) OFF level 70r/min Forward rotation direction 20r/min (Hysteresis width) 3) 2) ON level 50r/min Parameter No.PC17 Servo motor speed 0r/min Parameter No.PC17 ON level 50r/min OFF level 70r/min Reverse rotation direction 20r/min (Hysteresis width) 4) zero speed (ZSP) OFF ON ZSP turns on 1) when the servo motor is decelerated to 50r/min, and ZSP turns off 2) when

AC Servo Motor Driver (CC-Link Type ）

Example Zero speed is 50r/min 1) OFF level 70r/min Forward rotation direction 20r/min (Hysteresis width) 3) 2) ON level 50r/min Parameter No.PC17 Servo motor speed 0r/min Parameter No.PC17 ON level 50r/min OFF level 70r/min Reverse rotation direction 20r/min (Hysteresis width) 4) zero speed (ZSP) OFF ON ZSP turns on 1) when the servo motor is decelerated to 50r/min, and ZSP turns off 2) when

5-Port Solenoid Valve

suppressor S/Z type R/U type SY3AlR 18 26 18 SY5AlR 27 32 27 * P = 0.1 MPa X = 0.5 MPa X 1(P) Release pressure port 3(EB) Vacuum pressure port Manifold Flow Rate Characteristics*1 Flow Rate Characteristics (When restrictor is fully open) q Plug-in Metal Base Manifold type Port size Valve flow rate characteristics 1, 3 (P, EB) 2 (B) 12 (PB) 23 (BEB) C [dm3/(sbar)] b C [dm3/(sbar)] b SS5Y3-50R