XLA Series

External 1.3 x 10-11 for the standard material (FKM) at ambient temperatures , excluding gas permeation Flange type KF (NW) KF (NW) , K (DN) Main material Body: aluminum alloy, Bellows: SUS316L, Main part: SUS304 and FKM (standard sealing material) Surface treatment for body Outside: hard anodized Inside: basis material Actuation pressure MPa(G) 0.4 to 0.7 Air consumption for 0.5MPa 19 46 200 360

XLA- ∗ -F7NJ ∗ - ∗ Series

-11 for the standard material (FKM) at ambient temperatures , excluding gas permeation Flange type KF (NW) KF (NW) , K (DN) Main material Body: aluminum alloy, Bellows: SUS316L, Main part: SUS304 and FKM (standard sealing material) Surface treatment for body Outside: hard anodized Inside: basis material Actuation pressure MPa(G) 0.4 to 0.7 Air consumption cm3 Note 2 for 0.5MPa 19 46 200 360

XL-OMY0002

XLA25-60S-2 XLA25-60S-2 XLA25-60S-3 XLA25-60S-2 XLA25-60S-2 XLA25-60S-2 2 3 4 XLD-80H5 2 XLA25-60S-2 8 XL-OMY0002 4. 4-1 XLD-25 XLD-40 XLD-50 XLD-63 XLD-80 XLD-100 XLD-160 25 40 50 63 80 100 160 [] 5605150 -6 Pa abs 110 14 45 80 160 200 300 800 L/S 1 0.53 28 2.511 48 418 6.531.5 6.531.5 10 FKM1.310 3/s Pam -11 FKM1.310 KFNW KFNW KDN SUS316L,SUS304,FKM 2 MPa G 0.40.7[ ] 46 200 360

XLDV Series

permeation Leakage Pam3/s External 1.3 x 10-11 for the standard material (FKM) at ambient temperature, excluding gas permeation Flange type KF(NW) KF(NW),K(DN) Main material Body: aluminum alloy, Bellows: SUS316L, Main part: SUS304 and FKM (standard sealing material) Note 2 Surface treatment for body Outside: hard anodized Inside: basis material Pilot pressure MPa 0.4~0.7 Main pumping 46 200 360

XMD/XYD Series

10-11 for the standard material (FKM) at ambient temperatures , excluding gas permeation XMD KF(NW) KF (NW),CF KF(NW) KF (NW), K(DN),CF KF(NW), K (DN) Flange type XYD KF(NW) KF(NW) KF(NW) KF(NW), K(DN) KF(NW), K(DN) Main material Body: SCS13(Stainless) Bellows: SUS316L, Main part: SUS304 and FKM (standard sealing material) Note 2) Actuation pressure MPa (G) 0.4 to 0.7 Main pumping 46 200 360

PFxx-OMA1007

140 L/min) (Displays 0 when the value is below 70 L/min) (Displays 0 when the value is below 35 L/min) 7.0 0 to 7%F.S. 320 to 4200 L/min 160 to 2100 L/min 80 to 1050 L/min 40 to 525 L/min (Displays 0 when the value is below 320 L/min) (Displays 0 when the value is below 160 L/min) (Displays 0 when the value is below 80 L/min) (Displays 0 when the value is below 40 L/min) 8.0 0 to 8%F.S. 360

HRX-OM-W032

Each swivel caster can rotate 360 degrees freely. Raise the adjuster foot. Swivel caster Fig. 3-2 Transportation using casters HRS Series 3.1 Transport 3-3 HRX-OM-W032 Chapter 3 Transport and Setting Up 3.2 Installation 3.2.1 Environment Do not set up the product in places possibly exposed to leakage of flammable gas.

LEF-OM002xx

Specification 2.1 Slider type LEF Series / Ball screw drive Specification (1) Step motor (servo 24VDC) Ball screw drive LEFS16 LEFS25 LEFS32 Model 50 to 500 50 to 800 50 to 1000 Stroke [mm] Note1) 14 15 12 25 30 20 45 50 LECP6/LECP1/LECPMJ/JXC91 Work load [kg] Note2) Horizontal 9 10 10 20 20 15 40 45 LECPA 2 4 0.5 7.5 15 4 10 20 Vertical 500 10 to 700 5 to 360 20 to 1100 12 to 750 6 to 400

Electric Actuator / Slider Type 《 AC Servo Motor 》

Slider type LEFS series 2.1 Specification LEFS25,32,40 AC servo motor (100W / 200W/400W/) Model LEFS25 LEFS32 LEFS40 Stroke [mm] Note 1) 50800 501000 1501200 Work load [kg] Note 2) Work load [kg] 10 20 20 30 40 45 30 50 60 Vertical 4 8 15 5 10 20 7 15 30 400 1500 900 450 1500 1000 500 1500 1000 500 401 500 1200 720 360 1500 1000 500 1500 1000 500 501 600 900 540 270 1200 800 400 1500 1000

SFOD-OMT0009CN

. / 1 1.5 *3) *3)1 1 () 6 No.SFOD-OMT0009CN-B 2. 2.1 , 4 4 / 3 2 (SETUP)1 512 2048 I/O 1 4 USB , 7 No.SFOD-OMT0009CN-B 2.2 J X C *3 I/O 1) I/O 1 1.5m 2 1.5m DIN 7 NPN 3 3m 8 PNP 4 3m DIN 4 5 5m 6 5m DIN 7 8 DIN 1)I/O (1.5m~5m) I/O 2 LEY Series LEYG Series LEF Series LES/LESH Series 2) LER Series LEPY/LEPS Series 2 3 LEH Series 2) 360 8 No.SFOD-OMT0009CN-B

JXCx-OMT0001CN

EtherNet/IP EtherNet/IP EtherNet/IP 4 4 / 3 EtherNet/IP (SETUP)1 512 2048 EtherNet/IP IN OUT DRIVE INP 1 4 USB -7No.JXC-OMT0001CN-C 2.2 J X C 9 3 * 7 8 DIN 9 EtherNet/IP 4 LEY Series LEYG Series LEF Series LES/LESH Series LER Series 1) LEP Series (2 3 ) LEH Series 1) (360) -8No.JXC-OMT0001CN-C 2.3 1) PLC 5 EtherNet 2) EtherNet/IP 2) 3) P1P2 1) ENC LE-CP-*-*

JXCx-OMU0004

40 800 7 100 900 50 900 200 900 100 900 50 900 8 150 1000 75 1000 300 1000 200 1000 75 1000 9 200 1200 100 1200 400 1200 250 1200 100 1200 10 250 1400 125 1400 500 1400 300 1400 125 1400 11 300 1600 150 1600 600 1600 400 1600 150 1600 12 350 1800 175 1800 700 1800 500 1800 175 1800 13 400 2000 200 2000 800 2000 540 2000 200 2000 14 450 2500 225 2500 900 2500 600 2500 225 2500 15 700 3000 360

HRX-OM-M005

accompanied by an MSDS. 1.8 Material Safety Data Sheet (MSDS) HRZD Series 1-16 HRX-OM-M005 Chapter 2 Name of Each Section Chapter 2 Name of Each Section 2.1 Name of Each Section Circulating fluid fill port Power cable access Ventilating fan (exhaust side) Circulating fluid return Circulating fluid level gauge Circulating fluid supply Sub tank drain port Main tank drain port CH2 side Rotates 360

SI unit for CC-Link

Operating temperature: 0 to +55 oC (when 8 outputs are used) 0 to +50 oC (when 16 outputs are used) Ambient temperature Storage: -10 to 60 oC Ambient humidity 35 to 85%RH (no condensate) Pollution degree Pollution degree 3 Operating environment No corrosive gas Standard CE marked (EMC directive, RoHS directive) EX120: 110 g or less EX124U/D: 240 g or less EX121: 140 g or less EX126D : 360

JXCx-OMT0002

Ethernet/IP 4 axis type Applicable Actuator Electric Actuator Rod Type LEY Series Electric Actuator Rod Type with Guide LEYG Series Electric Actuator Slider Type LEF Series Electric Slide Table LES/LESH Series Electric Rotary Table LER Series Note1) Electric Actuator Miniature Type LEPY/LEPS Series Electric Gripper (2-Finger Type, 3-Finger Type) LEH Series Note 1) The continuous rotation (360

SFOD-OMT0010

Applicable Actuator Electric Actuator Rod Type LEY Series Electric Actuator Rod Type with Guide LEYG Series Electric Actuator Slider Type LEF Series Electric Slide Table LES/LESH Series Electric Rotary Table LER Series Note2) Electric Actuator Miniature Type LEPY/LEPS Series Electric Gripper (2-Finger Type, 3-Finger Type) LEH Series Note 2) The continuous rotation (360) type is excluded.

XLF Series

External 1.3 x 10-10 for the standard material (FKM) at ambient temperatures , excluding gas permeation Flange type KF (NW) KF (NW) , K (DN) Main material Body: aluminum alloy, Main part: SUS304 and FKM (standard sealing material) Note 2 Surface treatment for body Outside: hard anodized Inside: basis material Actuation pressure MPa(G) 0.40.7 Air consumption cm3 Note 3 for 0.5MPa 19 46 200 360

LA-OMP0023

Positioning resolution [ m] 30 1.25 30 1.25 30 1.25 5 1.25 Positioning operation Positioning repeatability [ m] Note 4) Note 5) 90 5 90 5 90 5 20 5 Measurement Accuracy [ m] Note 4) Note 5) 100 10 100 10 100 10 40 10 Maximum speed [mm/s] Note 6) 400 Operating temperature range [oC] 5 to 40 (No condensation) Operating humidity range [%] 35 to 85 (No condensation) Weight [g] Note 7) 130 190 250 360

LEJ-OM002xx

Vertical 3 5 10 6 10 20 Up to 500 1800 1200 600 1800 1200 600 501 to 600 1580 1050 520 1800 1200 600 601 to 700 1170 780 390 1800 1200 600 701 to 800 910 600 300 1390 930 460 801 to 900 720 480 240 1110 740 370 Speed [mm/s] Note3) Stroke range 901 to 1000 580 390 190 900 600 300 Actuator specification 1001 to 1100 480 320 160 750 500 250 1101 to 1200 410 270 130 630 420 210 1201 to 1300 540 360

High Vacuum L Type Valve

standard material (FKM) at ambient temperatures , excluding gas permeation Flange type KF (NW) KF (NW) , K (DN) Main material Body: aluminum alloy, Bellows: SUS316L, Main part: SUS304 and FKM (standard sealing material) Note 2) Surface treatment for body Outside: hard anodized Inside: basis material Actuation pressure MPa(G) 0.4 to 0.7 Air consumption cm3 for 0.5MPa Note 3) Main pumping 46 200 360