Model Selection 1

+ 0.1 > 0.5, subsonic flow P1 + 0.1 293 Q = 240 x S (P2 + 0.1) (P1 P2) (4) 273 + t Conversion with sonic conductance C: S = 5.0 x C(5) Q :Air flow rate[dm3/min(ANR)], dm3 (cubic decimeter) of SI unit is good to be described by l (liter), too. 1 dm3 = 1 l S : Effective area [mm2] P1 : Upstream pressure [MPa] P2 : Downstream pressure [MPa] t : Temperature [C] Note) Formula for subsonic flow

SYJ300/500/700

25 25 25 2-3.2 (For mounting) 2-3.2 (For mounting) 28 2-3.2 (For mounting) 2-3.2 (For mounting) 28 28 28 Refer to page 4-4-61 for dimensions with connector cable. 4-4-40 41 3 Port Pilot Operated Solenoid Valve Rubber Seal Series SYJ700 Base Mounted (With Sub-plate) [ ] for AC Grommet (G), (H): SYJ74G H 01 02 1/4, 1/8 port (A port) 25 12 12 V100 SY G: Approx. 300 H: Approx. 600 (Lead wire

Modular F.R.L. Unit

D E G 1 2 3 6 8 C J N R AC25C AC60 AC40A AC40C AC40D AC20A C Float type auto drain (N.C.)

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

6 RMA-63 RMY-63 RMA-40 RMY-40 RMA-25 RMY-25 Special resin MYA16-15-R6656 Scraper MYA40-15-R6658 MYA25-15-R6657 MYA63-15-R6659 !8 1 6.2 x 3 x 1.6 O-ring NBR C-14 10.5 x 8.5 x 1 C-5 @3 4 8-14-16 16 Mechanically Jointed Rodless Cylinder Series MY3A/3B Construction MY3B w e t u i @1 @6 @9 !3 !5 !6 !7 !8 MX MTS y q MY !0 @8 @7 !4 !9 r CY !

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, CYLINDER, ACTUATOR, MGQ GUIDED CYLINDER, NM, 50MM MGQ SLIDE BEARING

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, CYLINDER, ACTUATOR, MGQ GUIDED CYLINDER, SM, 100MM MGQ SLIDE BEARING, 19.92427 lb

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, CYLINDER, ACTUATOR, MGQ GUIDED CYLINDER, PM, 63MM MGQ SLIDE BEARING, 6.63223 lb

The MGQ offers bore sizes from 12 to 100mm and is switch capable.Compact guide cylinder, Bore sizes: 12, 16, 20, 25, 32, 40, 50, 63, 80, 100 *, Strokes from 10mm through 200mm depending upon bore size, Variety of switches and a variety of lead wire lengths, CYLINDER, ACTUATOR, MGQ GUIDED CYLINDER, NM, 50MM MGQ SLIDE BEARING, 5.73201 lb

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, CYLINDER, ACTUATOR, MGQ GUIDED CYLINDER, LB, 32MM MGQ BALL BEARING

The MGQ offers bore sizes from 12 to 100mm and is switch capable.Compact guide cylinder, Ball bushing bearing, Bore sizes: 12, 16, 20, 25, 32, 40, 50, 63, 80, 100 *, Strokes from 10mm through 200mm depending upon bore size, Variety of switches and a variety of lead wire lengths, CYLINDER, ACTUATOR, MGQ GUIDED CYLINDER, MB, 40MM MGQ BALL BEARING

The MGQ offers bore sizes from 12 to 100mm and is switch capable.Compact guide cylinder, Bore sizes: 12, 16, 20, 25, 32, 40, 50, 63, 80, 100 *, Strokes from 10mm through 200mm depending upon bore size, Variety of switches and a variety of lead wire lengths MGQ GUIDED CYLINDER. CYLINDER. ACTUATOR. 20MM MGQ SLIDE BEARING. 1.2283 lb. HM.

This is a legacy product. Please contact us for the latest version.sales@ocaire.com MGQ GUIDED CYLINDER. CYLINDER. ACTUATOR. 25MM MGQ SLIDE BEARING. 2.20462 lb. IM.

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

Lead wire with connector 1.5 45 44 1.5 F02 C01 25 8.5 25 8.5 M5 x 0.8 Thread depth 5 G1/4 Rc1/8 17 Piping port Rc1/8 Piping port G1/4 Gasket 1.5 52.7 46.7 1.5 A2 B2 25 8.5 25 8.5 URJ1/4 TSJ1/4 Piping port URJ1/4 Piping port TSJ1/4 28 ZSE20C(F)/ISE20C(H) Series Dimensions ZSE20C(F) ISE20C(H) Piping direction Piping specification 25 41.7 1.5 2 x 2.6 Depth 12 or less 12 11 4.5 02L 30 4.5 R1/

MU

Snap ring Type C 8 for axis Type C 10 for axis Type C 10 for axis Type C 14 for axis m 1.5 1.25 1.25 1.75 t 0.9 1.15 1.15 1.15 Part no.

High Purity Chemical Valve

Dimensions LLCmA-mm-C Stations 4 x Mounting hole for W Y A K D L3 L2 L1 (Max.

CC

1 36 17.5 88.2 72 1/2 148.5 103.9 45 101 CCVS1-G-S 45 80 86 35 18 35 25 2 36 17.5 72 98 1/2 148.5 57 121.8 101 M5 x 0.8 5.4 to 7.5 C J G5-S CCVS2-G-S 45 80 86 35 18 35 25 1 36 17.5 88.2 72 98 1/2 148.5 57 103.9 101 CCVS3-G-S 45 80 86 35 18 35 25 1 36 17.5 88.2 72 98 1/2 148.5 57 103.9 101 CV CCVS0-S 45 80 86 35 25 36 17.5 88.2 72 98 1/2 57 CCVL02-G-S 66 107 116 50 24 40 28

CC

1 36 17.5 88.2 72 45 1/2 148.5 103.9 101 CCVS1-G-S 45 80 86 35 18 35 25 2 36 17.5 72 98 57 1/2 148.5 121.8 101 M5 x 0.8 5.4 to 7.5 C J G5-S CCVS2-G-S 45 80 86 35 18 35 25 1 36 17.5 88.2 72 98 57 1/2 148.5 103.9 101 CCVS3-G-S 45 80 86 35 18 35 25 1 36 17.5 88.2 72 98 57 1/2 148.5 103.9 101 CV CCVS0-S 45 80 86 35 25 36 17.5 88.2 72 98 57 1/2 CCVL02-G-S 66 107 116 50 24 40 28

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

Positioning pin hole Counterclockwise 5 Adjustment bolt A 5 (For counterclockwise rotation end adjustment) 9 22 CRB2 e B port .5 g Adjustment bolt B n ra (For clockwise rotation end adjustment) nt CRBU2 e m e st is w u dj k CRB1 c a e o is d cl w C A port B port n k er c lo o e l Clockwise C a nt c n dj k u o w 0 MSU o u ti is C st ta e 19 m ro ro ta e ti o d n n e nt e ra ng n 5 g e 9 ra

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

or less 33 or less VQZ2351lC 0.3MPa 25 or less 33 or less 58 VQZ2351SlC SX 20 or less 26 or less VQZ2450lC Exhaust 54 0.15MPa 25 or less 33 or less VQZ2451lC symbol center VK 25 or less 33 or less VQZ2451SlC 58 54 58 25 or less 33 or less VQZ2551lC Pressure center 25 or less 33 or less VQZ2551SlC VZ 9 8 7 6 5 4 3 2 1 Fully open Number of needle rotations (turns) 10 Note 1) Valve for sub-plate

Air Slide Table Series MXS

MXS16 (L) M10 x 1 34.5 5 14 4 MXS-A1627-X11 15 MXS-A1627-X12 25 44.5 B D C M MXS-A2027 5 27.5 MXS20 (L) 6 17 5 M12 x 1.25 MXS-A2027-X11 15 37.5 MXS-A2027-X12 25 47.5 MXS-A2527 5 32.5 MXS25 (L) 6 19 6 M14 x 1.5 MXS-A2527-X11 15 42.5 MXS-A2527-X12 25 52.5 How to Order Adjusting Bolt MXS 12 X11 A 27 Adjustment range Applicable bore size Nil X11 X12 5 mm 15 mm 25 mm 6 8 12 16 20 25 6 8 12 16