Material Cover Front rim Retaining rim Description Part no. includes M3 X 8 tapping screws (2 pcs.)
close proximity with each other either horizontally or vertically Plug connection ower supply output connection 30 e-Con connector Analog output or auto shift input 2 outputs + Sensor connection M5 female thread, through type (with mounting holes) M3 M5 female thread, through type M5 6 reducer 4 reducer R1/8,NPT1/8 Applications Manifolding is possible.
Terminal cover Round head combination screw M3 Tightening torque 0.5 to 0.6 Nm A G 1/2 Tightening torque 0.5 to 0.6 Nm + Mark Mark 2 1 + A Round head combination screw M3 tightening torque 0.5 to 0.6 Nm Conduit terminal View A-A (Internal connection diagram) 16-8-20 21 Series ISA2 Specific Product Precautions 3 Be sure to read before handling. 2 Port Solenoid Valve Series VCA Regulator Series
Material Cover Front rim Retaining rim Description Part no. includes M3 X 8 tapping screws (2 pcs.)
Grommet: G DIN terminal: D 4-Rc(PT) 1/8 (ports P, R) Manual override (non-locking) Applicable cord O.D. 4 to 6.5 Max .10 71.5 78.5 71 Light (DZ type only) 2-4.5 (mounting holes) 67.5 59 19 17 2 R P P R 34 2.3 7 20 Pg.7 4-Rc(PT) 1/8 (ports P, R) A A A P = 19 13.5 L2 L1 4 1 7 8 26 47.5 Approx. 300 (lead wire length) n-Rc(PT) 1/8, M5 x 0.8 (port A) 7 20 34 2-4.5 (bracket mounting holes) 4-M3
XLG/XLGV (O-ring seal, Double acting) Low gas entrainment with employment of O-ring seal system. 2 High Vacuum Angle Valve Flange size Options Application Switch Heater Indicator Leakage Pa m3/sec Valve type Operating pressure Pa Service life (Million cycles) Shaft seal system Models Actuation High temp. specification Internal External 16 25 40 50 63 80 XLA Single acting (N.C.)
(M3: Port PE) Pilot valve exhaust port Hysteresis setting trimmer (AN203-KM8) Silencer 62.1 57.1 49.4 41.6 33.6 29.5 23.5 21 10 Vacuum port (8.25) 3.75 6 One-touch fitting Port V (5.25) (13.5) 19 88 18.75 16.75 Supply port Button for block separation 6 One-touch fitting Port P1 27 ZYX35LOZ-10S1 (Specifications without vacuum switch) End plate (P44027A) 31 20 EXH.
35.320 L 0.0353 L 0.2642 Weight g 0.0353 kg 2.2046 1.356 N . m 1.356 J 3.6 l\rJ mm3 cm3 (cc) m3 L L rn3 in3 Energy ft3 N. m f t 3 J gar(u.s.)
= (10-3 m2/s) = (mPas)/(kg/m3) 603 PAF Series Performance Curve: Air Operated Type PAF3413 Flow Rate Characteristics PAF5413 Flow Rate Characteristics 0.5 0.5 Cycle 4 Hz Cycle 3 Hz Cycle 2 Hz Cycle 3 Hz Cycle 2 Hz Cycle 1 Hz SUP = 0.5 MPa SUP = 0.4 MPa SUP = 0.5 MPa 0.4 0.4 SUP = 0.4 MPa Discharge pressure (MPa) Discharge pressure (MPa) SUP = 0.3 MPa 0.3 0.3 SUP = 0.3 MPa SUP = 0.2 MPa
m3/sN02NPT1/4118 g90 gC01Rc1/8114 g86 g1 x 10?5 Pa?m3/s
m (95% filtered particle size)Max. 0.1 mg/m3 (ANR) (Before saturated with oil: 0.01 mg/m3 (ANR) or less, approx. 0.008 ppm) (2)PolycarbonateStandard250.22
m (95% filtered particle size)Max. 0.1 mg/m3 (ANR) (Before saturated with oil: 0.01 mg/m3 (ANR) or less, approx. 0.008 ppm) (2)PolycarbonateStandard450.44
m3/sN02NPT1/4118 g90 gC01Rc1/8114 g86 g1 x 10?5 Pa?m3/s
m3/sN02NPT1/4118 g90 gC01Rc1/8114 g86 g1 x 10?5 Pa?m3/s
m3/sN02NPT1/4118 g90 gC01Rc1/8114 g86 g1 x 10?5 Pa?m3/s
m3/sN02NPT1/4118 g90 gC01Rc1/8114 g86 g1 x 10?5 Pa?m3/s
m3/sN02NPT1/4118 g90 gC01Rc1/8114 g86 g1 x 10?5 Pa?m3/s
m3/sN02NPT1/4118 g90 gC01Rc1/8114 g86 g1 x 10?5 Pa?m3/s
m3/sN02NPT1/4118 g90 gC01Rc1/8114 g86 g1 x 10?5 Pa?m3/s
, m3 x 103, ft3, ft3 x 103, ft3 x 1060.1 to 1.5 MPa2.25 MPa20 kPa (at maximum flow rate)0 to 9,999,999,999 l?