CE

For details, refer to page 10-20-66. Normally closed (NC = b contact), solid state switch (D-F9G/F9H type) are also available. For details, refer to page 10-20-40. 10-12-26 26 Series CEU/Series CE Counter/Extension Cable Multi-counter How to Order RE A B CEU5 REC CX Power supply voltage CY Nil D 100 to 240 VAC A COM COM COM B 12 VDC GND F.G. R.S.

CHKD/CHKG

(mm) Rod end male threads Water resistant type (mm) a b c e f g h Bore size (mm) B C N S g h A Bore size (mm) 20 20 12.5 15 M10 x 1.25 6 10 23 66 61 43 18 26.5 6 33 76 25 25 15.5 18 M12 x 1.25 6 12 26 71 63 45 18 30 6 36 81 32 32 22 25 M16 x 1.5 7 14 35 86 71 51 20 38 7 45 96 40 40 27 30 M20 x 1.5 7 19 40 95 75 55 20 45 7 50 105 50 50 32 35 M24 x 1.5 8 24 46 106 81 60 21 55 7 56 116 63 63

CE

For details, refer to page 10-20-66. Normally closed (NC = b contact), solid state switch (D-F9G/F9H type) are also available. For details, refer to page 10-20-40. 10-12-26 Series CEU/Series CE Counter/Extension Cable Multi-counter How to Order RE A B CEU5 REC CX Power supply voltage CY Nil D 100 to 240 VAC A COM COM COM B 12 VDC GND F.G. R.S.

ZP

Short dia. 13-11-66 Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX Ideal for heavy weight material or objects with a large surface area.

Plug-in/Plug Lead: Single Unit

Nil B Side ported Bottom ported Enclosure Nil W Dust-protected Dusttight/Low jetproof type Note) Note) Not required for plug lead type. 2-6-5 Base Mounted Series VQ5000 Plug-in Type Conduit terminal 2 position single: VQ5100 1 2 195 73 59.5 27.5 27.5 195 122 106 59.5 73 4(A) port 17.5 13.5 2(B) port 2-Rc 3/8 5(R1), 3(R2) port Indicator light 4 2 SMC 5 1 3 16 16 13 A 53 53 66 40 66 B A VQ5000

Rotary Actuator/Vane Style Series CRB1

Port location Size: 100 CRQ2 1/8 1/4 1/8 1/4 Side ported Port size 1/8 1/4 1/8 1/4 Axial ported MSQ Mounting Basic style, Foot style Size: 50 Volume Size: 63 MSZ (cm 3) CRQ2X MSQX Single vane (S) Double vane (D) Rotating angle Classification CRB1BW50 CRB1BW80 CRB1BW63 CRB1BW100 CRB1BW50 CRB1BW63 CRB1BW80 CRB1BW100 MRQ JIS Symbol 90 30 70 88 186 48 98 136 272 180 49 94 138 281 Standard 270 66

Fluoropolymer Piping Equipment

B E E F G H L1 L1 L2 L2 M Min. port size LQ3T2A-SB 1/4" 4 17 16 6 12 16 34.5 33.5 39.5 38.5 20 3.9 LQ3T3A-SB 3/8" 5 22.5 19.5 9 18 21 47.5 44.5 49.5 46.5 25 6.3 LQ3T4A-SB 1/2" 6 24.5 22.5 10 20 24 52.5 50.5 54.5 52.5 29 9.5 LQ3T5A-SB 3/4" 7 26.5 24 14 28 32 64 61.5 66 63.5 37 15.8 LQ3T6A-SB 1" 8 30 26 18 36 41 78 74 80 76 49 22 930 A LQ3 Series Space Saving Run Tee How to Order LQ3 T S R

Compact Guide Cylinder

2) 39.5 28 10 8.5 3 26 12 7.5 11 93 13 4.5 13 17 M5 x 0.8 12.5 M5 x 0.8 32 (25 x 2) 25, 50, 100 150, 200 44.5 30 12 11.5 3 32 15 7.5 13 109 16 8 16 21 M6 x 1 15 M6 x 1 40 (32 x 2) 54 37 16 13 4 41 19.5 21 12 17.5 9 120 20.5 4 20.5 27 M8 x 1.25 20 M6 x 1 Bore size OA OB OL P PD PE PW Q R S T U VA WA X YY YL Z Nil TN TF Nil TN TF 20 (16 x 2) 4.3 8 3.5 M5 x 0.8 7.5 19 21 10 36 18 66

CP95

25 75 12 56.5 80 5 10 45 18 11 22 25 65 4.3 4 36 20 30 95 16 72 100 5 10 55 18 11 22 41 20 32 115 25 75 6.3 16 89 4 Mounting style (ES) Bore size (mm) d3 CN S5 K1 K2 I2 G1 G2 G3 EN EU CH H6 ER 32 11 10 38 51 21 18 31 14 32 10 15 10.5 8.5 6.6 40 11 12 41 54 24 22 35 16 36 10 18 12 8.5 6.6 50 15 16 50 65 33 30 45 21 45 12 20 15 10.5 9 63 15 16 52 67 37 35 50 21 50 12 23 15 10.5 9 80 18 20 66

MLU

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2-FD CNA CNS CLS FY FV CLQ (mm) MLGP FV FT ZZ MLUF25, MLUG25 MLUF32, MLUG32 MLUF40, MLUG40 MLUF50, MLUG50 FX 76 94 118 144 FY 14 16 18 22 FZ 66 82 102 126 FD Model FT 8 8 9 12 24 28 32 39 5.5 7 9 11 134 148 158 189.5 FZ FX RLQ 2-FD MLU Rear flange style

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

Station n L1 L2 Station 2 50 41 Station 20 338 329 3 66 57 4 82 73 5 98 89 6 114 105 7 130 121 8 146 137 9 162 153 10 178 169 11 194 185 12 210 201 13 226 217 14 242 233 15 258 249 16 274 265 17 290 281 18 306 297 19 322 313 Port size One-touch fitting 26 Series SYJ500 Type 41 Manifold: Side Ported/SS3YJ5-41Stations -M5, 01 [ ] for AC For 1/8 Grommet (G) For M5 (Pitch) P=16 18 (Pitch) P

Sine Rodless Cylinder Series REBR Direct Mount Type

19.5 11 6.5 3 1.5 35 10.5 16 55 53.5 55 52 29 54 20 51 7 29 K L LD M N P PW QW T TC W WP J x E Q MM Model REBR15 14 53 4.3 5 6 M5 x 0.8 32 18 21 17 25 M5 x 0.8 x 7 84 M4 x 0.7 REBR25 15 70 5.6 6 6.5 Rc 1/8 43 20 25.5 22.5 40 21.5 M6 x 1 x 8 105 M5 x 0.8 REBR32 13 76 7 7 8.5 Rc 1/8 54 26 33 28 50 27 M8 x 1.25 x 10 116 M6 x 1 X Y Z Model REBR15 18 54.5 98 REBR25 28 72 125 REBR32 35 79 148 66

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

K) 28.5 Note 2) 1/8, 1/4 1/8 40 98 27 28.5 M28 x 1 2 1/4, 3/8 1/8 53 117 29 29.5 M38 x 1.5 29.5 2.5 1/4, 3/8, 1/2 1/4 70 148 41 34 M42 x 1.5 34 1 Optional specifications Square embedded type pressure gauge Digital pressure switch Round type pressure gauge Note 3) Bracket mount dimension Panel mount Model Z ARP20(K) ARP30(K) ARP40(K) H J H J H J M N Q R S T U V W Y l28 l27.8 37.5 29.5 40 66

Compact Hydraulic Cylinder Double Acting/Double Rod Series CH
QWB ø 20, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

(mm) H I J K L B U Z A N O P S C D E F M Bore size (mm) 32 M10 x 1.5 60 4.5 14 8.5 65 31.5 14 82 5.5 9 depth 7 Rc 1/8 58.5 12 16 45 20 34 40 M10 x 1.5 69 5 14 8.5 67 35 14 84 5.5 9 depth 7 Rc 1/8 66 12 16 52 22 40 50 M12 x 1.75 86 7 18 11 76 41 19 98 6.6 11 depth 8 Rc 1/4 80 15 20 64 25 50 63 M12 x 1.75 103 7 18 11 80 47.5 19 102 9 14 depth 10.5 Rc 1/4 93 15 20 77 27 60 80 M16 x 2 132 6 22

Sine Rodless Cylinder Series REA

19 REA 50, 63 14 2 -Rc(PT) 1/4 L 0 0.2 NA 33 14 E(h8) E(h8) X PD I 4 -TC Effective thread depth R 14 8 -Q Effective thread depth R 14 22 23 25 K W 23 25 4 -M8 x 1.25 Effective thread depth 12 C 0.1 14.5 B 2 S + Stroke 2 ZZ + Stroke Model B C D E(h8) I K L NA Q x R S TC x R W X ZZ REA50 REA63 0 86 32 53 30-0.033 32-0.039 58.2 25 110 55 M8 x 1.25 x 16 176 M12 x 1.25 x 7.5 60 60 180 100 38 66

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

L7 L6 L5 1021-VV5Q11 (L1) 28 (n-1) x 10.5 1.5 A FG + + 0V 24V SMC S E R I A L U N I T MODEL SC (SI No.EX120-STA1) 2 93.5 66 64 ERR T/R RUN 0 1 DIP SW. Drawing shows a SC case.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

L7 L6 L5 1021-VV5Q11 (L1) 28 (n-1) x 10.5 1.5 A FG + + 0V 24V SMC S E R I A L U N I T MODEL SC (SI No.EX120-STA1) 2 93.5 66 64 ERR T/R RUN 0 1 DIP SW. Drawing shows a SC case.

Electric Actuator

Option #Teaching box #Controller setting software Page 66 Page 65 (With 3 m cable) Part no.: LEC-T1-3JG; Communication cable (With conversion unit) and USB cable are included.

4/5 Port Solenoid Valve

) 3 position 0.42 [0.33] 0.16 [0.080] 36 53 41 63 37 55 2 position 5 port Body ported 0.9 M3 x 0.5 M3 x 0.5 3 position 56 66 58 36 53 41 63 37 55 Note 1) 4 Port Base mounted (For manifold base only) 2 position M5 x 0.8 1/8 56 66 58 3 position Note 1) Dedicated for manifold base.

High Vacuum Angle Valve

Indicator: Dimensions (b) E C D E C XLA F A (a) XL XL XLQ E (c) XM XY H DXSA XVD B G XGT CYV A (mm) A B C D E Note 1) F G H Model XLH-16 XLH-25 XLH-40 XLH-50 40 100.5 38 1 30 17 35 50 114 48 1 12 40 26 41 65 162.5 66 2 11 55 41 57 70 179.5 79 2 11 75 52 70 Note 1) Dimension E applies when heater option is included.