XLA Series

Tighten bolt b in numerical order to assemble the Body and the Bonnet assembly. When tightening bolt b, tighten manually until the O ring is compressed, then perform extra tightening in diagonal order. For models with heater, tighten bolt a to mount the heater to the body.

XMD/XYD Series

Dimensions C D L1 L2 Fd Fc C Fn (Fc) (KF Flange) (K Flange) (CF Flange) K B J H A G A Unit: mm Model A B C D Fn Fd Fc G H J KK P.C.D.

VFR2000 Series

Lead wires from solenoid Lead wire at both of solenoid A and B sides in manifold is valve are connected with the terminals on upper side of connected to connector terminal as COM specification. terminal block. (On the terminal block, lead wire is connected with both A and B sides of solenoid valve in accordance with the corresponding markings A and B on the block .)

VFS4000-OMY0001

8370: JIS B 8361: JIS B 9960-1: -1 ) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4

Sine Rodless Cylinder Series REA

Stop 5 Series REA Sine Rodless Cylinder Dimensions (mm) REA 25, 32, 40 1in = 25.4mm Effective thread depth J L 0 0.1 NN G 4-MM H G B 2Port size I X D NB NB T N K W N S + Stroke F NA F R ZZ + Stroke MM x J B D F G H I K L N NA NB NN Model Port size REA25 REA32 REA40 Rc(PT) 1/8 46 27.8 13 8 20.5 34 10 70 M5 x 0.8 x 8 15 30 13 M26 x 1.5 Rc(PT) 1/8 60 35 16 9 22 40 15 80 M6 x 1.0 x 8 17 36 15

Manifold Regulator Modular Type ARM2500/3000 Series

x 1.5 14.5 x 10.5 x 2 Bracket A 2 Bracket KA00078 KA00083 2 1 set assembly Bracket B O-ring 136312 136412 NBR 7 13 JIS B 2401 P3 JIS B 2401 P5 Hex. socket head cap screw 2 KA00299 KA00961 O-ring NBR 8 How to order (1) When adding n stations to ARM Regulator n pcs.

PSxx-OMT0005CN

8370: JIS B 8361: JIS B 9960-1: 1 ) JIS B 8433: *2) 1. 2. 3. 1. 2. 3. 4

Process Pump

Actuating chamber A Actuating chamber A Actuating chamber B Actuating chamber B Discharge Discharge port port Pump chamber B Pump chamber B Pump chamber A Pump chamber A Suction port Suction port Diaphragm Fig. 1 Fig. 2 Fluid flow Air flow 12 11. Sensor mounting (leakage sensor) Series PAF can have a sensor for detecting diaphragm breakage.

High Vacuum L Type Valve

Tighten bolt b in numerical order to assemble the body and the bonnet assembly. When tightening bolt b, tighten manually until the O ring is compressed, then perform extra tightening in diagonal order. For models with heater, tighten bolt a to mount the heater to the body.

XSA Series

Note 8) Grommet value. 10 XSA-OMS0001-A Fluid property Face seal fitting / compression fitting XSA1-12 XSA1-22 XSA2-22 XSA2-32 XSA2-43 XSA3-32 XSA3-43 C [dm3/(sbar)] 0.55 1.07 1.07 1.51 2.78 1.54 2.89 b 0.41 0.36 0.34 0.24 0.21 0.24 0.21 (Rc, NPT) Threaded ports XSA1-11 XSA1-21 XSA2-22 XSA2-32 XSA3-33 XSA3-43 C [dm3/(sbar)] 0.54 1.14 1.14 2.23 2.37 3.5 b 0.36 0.39 0.42 0.38 0.40 0.15 3.

MGF

+ Stroke Dimensions (mm) A B GB Bore size 40 63 100 58 48.5 36.5 GB 73 61.5 38 78 66.5 38 Dimensions not listed above are the same as the standard model.

TA301

Cv b Cv b Cv b Cv Grommet VTA315 1.6 0.30 0.39 1.7 0.39 0.45 1.9 0.38 0.49 1.7 0.36 0.45 0.16 VOA315 1.4 0.12 0.33 1.2 0.18 0.29 1.5 0.16 0.35 1.2 0.13 0.28 Construction/Dimensions Precautions Breathing port of diaphragm Pilot port Rc 1/8 Be sure to read before handling.

Interface Regulator for VQ4000 5 Port Solenoid Valve

Interface regulator SMC 1 P 5 3 R2 R1 PE How to Order Applicable interface regulator model Reduced pressure port Solenoid valve model ARBQ4000-00-A-1 A VQ40 (plug-in type) ARBQ4000-00-B-1 B ARBQ4000-00-P-1 P ARBQ4000-00-A-5 A VQ45 (plug lead type) ARBQ4000-00-B-5 B ARBQ4000-00-P-5 P Circuit Diagrams Reduced pressure port: A Reduced pressure port: B Reduced pressure port: P SMC Pneumatics,

VZM400

3 EA EA y A A P P r q B EB B !4 EB !7 !1 !2 t Component Parts Aluminum alloy NBR Note No. !0 Description Material No. PBT ADC Material Note q Description Black zinc chromated Metallic plated Pilot body Body Piston guide B Valve Metallic plated !1 !2 w e Return spring Cushion Cushion Valve spring Return spring Piston B Head cover r Stainless steel Spool/sleeve Stainless steel ZDC !

XL-OMV0002

8370: JIS B 8361: JIS B 9960-1: 1 ) JIS B 8433-1993: *2) 1. 2. 3. 2 XL-OMV0002 1. 2. 3. 4., / 1 1.5 *3) *3)1 1 () 3 XL-OMV0002 1.1 A6063SUS316LSUS304 FKM XLC-80,XLC-100,XLC-160 :Y-VAC2 60 XLC-16,XLC-25,XLC-40 0.3MPa0.5MPa XLC-50,XLC-63,XLC-80,XLC-100,XLC-160 0.4MPa0.5MPa 245250Hz 30m/s (/H0 H4 H5) 4 XL-OMV0002 510 O 0.1mm0.2mm Assy O 5 P11 O 6 (P12P14) 5 XL-OMV0002 2.2

XMC/XYC Series

XMC Exterior dimensions C D L1 L2 Fn Fc C (Fc) (KF Flange) (CF Flange) J H B A G A Unit:mm Model A B C D Fn Fc G H J P.C.D L1 L2 XMC-16 40 110 38 1 30 34 17 40 26 P.C.D 27 6x4.4 XMC-25 50 120 48 1 40 26 39 28 XMC-40 65 171 66 2 55 70 41 63 36 P.C.D. 58.7 6x6.6 C D L1 L2 Fn Fd Fc C (Fc) (KF Flange) (K Flange) (CF Flange) H J K B A G A Unit:mm Model A B C D Fn Fc Fd G H J K P.C.D L1 L2 XMC-

10

A Applicable absorber B SR Dimensions RBC08C RBC10C RBC14C RBC20C RBC27C RJ08U 6.5 6.8 6 RJ10U 9 8.7 7.5 X RJ14U 12.5 12 10 16 18 20 RJ2015U 21 25 25 RJ2725U H B T 2 x D MM L Part no.

SY3000-OMH0002

8370: JIS B 8361: JIS B 9960-1: -(1 :) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4.2 2 No.SY3000-OMH0002 / / / / 1 1 3) 3) 1 1 () 3 No.SY3000-OMH0002 SY Series 3 3 3 3 5 5 5 5 / / / / 1 DC VQ (DC ) N.O.( ) 3 () 0.1 2 C-R ( ) C-R ( ) 3 3 EXH ( ) ( ) 3 DC 3% AC 20% (SSR )AC 1) (C-R ) OFF 2)() 4 No.SY3000-OMH0002 SY Series 3 3 3 3 5 5 5 5 / / / / -10 1V () (1) ()COM COM (

Air Slide Table Series MXQ

Weight g 65 65 25 15 15 B side traveling parallelism to A side Refer to Graph 1.

Digital Flow Switches Series PF2A

Pin description Load is an analog input equipment such as a voltmeter, ammeter. 1 DC(+) PF2A7H-(-M) 68 69 2 Analog output 3 DC() Accumulated pulse output wiring examples 4 OUT1 4-I thread with depth J 40 Max. 30 V 80 mA or less OUT1 Load Black H 0 V or Blue 50 msec 50 msec PF2A7H-(-M) 28 29 A B C D E F G H I J Model Brown PF2A703H PF2A706H PF2A712H 55 160 40 92 67 55 Rc1, NPT1, G1 36 M5 x