MLGP

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 20 1 10 30 31 100 101 200 300 1 10 30 31 100 101 200 300 Stroke (mm) Stroke (mm) MLGPL32 to 63 MLGPL32 to 63 30 30 50, 63 50, 63 Load weight m (kg) 50, 63 50, 63 50, 63 32, 40 32, 40 10 10 32, 40 32, 40 50, 63 32, 40 32, 40 5 10 50 51 100 101 5 10 50

High Vacuum L Type Valve

Bellows assembly (7) XL1A16-2-101 XL1A25-2-101 XL1A40-2-101 XL1A50-2-101 Nut assembly (9) XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 63 80 Valve size Description Part indication No. Bellows assembly (7) XL1A63-2-101 XL1A80-2-101 Nut assembly (9) XL1A50-10-1 XL1A80-10-1 Note 1) Bellows assembly contains the valve seal 1. It does not contain the valve seal 2.

XL-OMY0001

XL1A25-2-101 XL1A40-2-101 XL1A50-2-101 XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 63 80 XL1A63-2-101 XL1A80-2-101 XL1A50-10-1 XL1A80-10-1 112 2 1 FKM:No.1349-80 [] XL1A16-2-101-XN1 EPDM Barrel Perfluoro Kalrez Chemraz VMQ FKM for R R R PLASMA No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 R 1Barrel Perfluoro R Kalrez Chemraz

MLGP

200 300 1 10 30 31 100 101 200 300 Stroke (mm) Stroke (mm) MLGPL32 to 63 MLGPL32 to 63 30 30 50, 63 50, 63 Load weight m (kg) 50, 63 50, 63 50, 63 32, 40 32, 40 10 10 32, 40 32, 40 50, 63 32, 40 32, 40 5 10 50 51 100 101 5 10 50 51 100 101 200 200 300 300 Stroke (mm) Stroke (mm) MLGPL80/100 MLGPL80/100 40 40 100 100 100 80 80 80 Load weight m (kg) Load weight m (kg) 100 100 80 100 80 10

MLGP

200 300 1 10 30 31 100 101 200 300 Stroke (mm) Stroke (mm) MLGPL32 to 63 MLGPL32 to 63 30 30 50, 63 50, 63 Load weight m (kg) 50, 63 50, 63 50, 63 32, 40 32, 40 10 10 32, 40 32, 40 50, 63 32, 40 32, 40 5 10 50 51 100 101 5 10 50 51 100 101 200 200 300 300 Stroke (mm) Stroke (mm) MLGPL80, 100 MLGPL80, 100 40 40 100 100 100 80 80 80 Load weight m (kg) Load weight m (kg) 100 100 80 100 80 10

MLGP

200 300 1 10 30 31 100 101 200 300 Stroke (mm) Stroke (mm) MLGPL32 to 63 MLGPL32 to 63 30 30 50, 63 50, 63 Load weight m (kg) 50, 63 50, 63 50, 63 32, 40 32, 40 10 10 32, 40 32, 40 50, 63 32, 40 32, 40 5 10 50 51 100 101 5 10 50 51 100 101 200 200 300 300 Stroke (mm) Stroke (mm) MLGPL80, 100 MLGPL80, 100 40 40 100 100 100 80 80 80 Load weight m (kg) Load weight m (kg) 100 100 80 100 80 10

Air Slide Table

[N] Bore size [mm] 6 8 12 16 20 25 Piping port size M5 x 0.8 Fluid Air Action Double acting Operating pressure 0.15 to 0.7 MPa*1 (End lock: 0.35 to 0.7 MPa)*1 Bore size [mm] Rod size [mm] Operating direction Piston area [mm2] Operating pressure [MPa] 0.2 0.3 0.4 0.5 0.6 0.7 6 3 OUT 57 11 17 23 29 34 40 IN 42 8 13 17 21 25 29 Proof pressure 1.05 MPa 8 4 OUT 101 20 30 40 51 61 71 Ambient and

VFS valve manifold, 4/5 PORT SOLENOID VALVE, I50, 3.09500 lb

Part Number Description: MANFLD 2-STA   Product Line: V   Product Line Description: VALVE   Family Code: 351   Family Description: VV*FS* MANIFOLD VFS SERIES   Class Code: PM   Part Code: 2   Reference Code:  J   Click here to report information errorImage shown may not match exact part number

This is a legacy product. Please contact us for the latest version.sales@ocaire.com

High Vacuum Angle Valve

Valve size 16 25 40 50 63 80 Bellows assembly u XL1A16-2-101 XL1A25-2-101 XL1A40-2-101 XL1A50-2-101 XL1A63-2-101 XL1A80-2-101 Nut assembly o XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 XL1A80-10-1 Bellows assembly * Bellows assembly includes the valve seal 1 (Standard material: FKM).

MY1

For details, refer to page 8-11-101.

3

(Refer to page 403 for details of the MK2T series.) 12, 16 20, 25 103 101 MK 102 (MK2T) Allowable moment of inertia [kgm2] Allowable moment of inertia [kgm2] 104 MK 103 105 16 Standard arm single unit 104 20, 25 Standard arm single unit 12 Standard arm single unit 106 105 50 100 200 50 100 200 Maximum piston speed [mm/s] Maximum piston speed [mm/s] 32, 40 50, 63 101 101 (MK2T) MK (MK2T) Allowable

Cylinder with Lock Series MNB

to 150 50 50 50 50 50 50 201 to 300 100 100 100 100 100 100 301 to 400 125 125 125 125 125 125 401 to 500 150 150 150 150 501 to 600 175 175 601 to 700 187.5 187.5 701 to 750 73 81 89 89 101 101 1 to 50 86 94 102 102 114 114 51 to 100 98 106 114 114 126 126 101 to 150 111 119 127 127 139 139 201 to 300 161 169 177 177 189 189 301 to 400 186 194 202 202 214 214 401 to 500 227 227 239

3-Screen Display Multi-channel Digital Sensor Monitor Up to 4 pressure sensors can be connected!

Rated pressure range Rated pressure range Rated pressure range Rated pressure range Rated pressure range 100 kPa to 100 kPa 0 to 500 kPa 0 to 1 MPa 0 to 2 MPa 0 to 5 MPa 0 to 10 MPa 101 kPa to 0 100 kPa to 100 kPa 0 to 100 kPa 0 to 1 MPa 101 kPa to 0 100 kPa to 100 kPa 0 to 1 MPa 0 to 2 kPa 101 kPa to 0 100 kPa to 100 kPa 0 to 500 kPa 0 to 1 MPa C O N T E N T S How to Order p. 7 Internal

High Vacuum Angle Valve

Valve size 16 25 40 50 63 80 Bellows assembly u XL1A16-2-101 XL1A25-2-101 XL1A40-2-101 XL1A50-2-101 XL1A63-2-101 XL1A80-2-101 Nut assembly o XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 XL1A80-10-1 Bellows assembly * Bellows assembly includes the valve seal 1 (Standard material: FKM).

CQS

MU Theoretical Output (N) OUT IN DAllowable Kinetic Energy (J) Operating pressure (MPa) Rod size (mm) Operating direction Piston area (mm 2) Bore size (mm) 12 16 20 25 Bore size (mm) 0.3 0.5 0.7 -X Standard 0.022 0.038 0.055 0.09 84.8 IN 25 42 59 12 6 With rubber bumper 0.043 0.075 0.11 0.18 20113 OUT 34 57 79 151 IN 45 75 106 16 8 Data Minimum Operating Pressure (MPa) 201 OUT 60 101 141

15

[mm] Size Stroke range [mm] MA MC MD MH ML MO MR XA XB 15 to 39 24 32 50 M5 x 0.8 6.5 4 5 40 to 100 42 41 101 to 124 75 125 to 200 59 49.5 201 to 400 76 58 25 20 29 20 to 39 22 36 50 M6 x 1 8.5 5 6 40 to 100 36 43 101 to 124 80 125 to 200 53 51.5 201 to 500 70 60 32 25 30 50 to 70 24 50 44 65 M8 x 1.25 10 6 7 75 to 120 45 60.5 125 to 200 58 67 205 to 500 86 81 100 505 to 800 135 63 38 857

CQS

JIS symbol Theoretical Force Unit: N OUT IN Operating pressure (MPa) Rod diameter (mm) Piston area (mm 2) Bore size (mm) Operation 0.3 0.5 0.7 84.8 IN 25 42 59 12 6 CU 113 OUT 34 57 79 151 IN 45 75 106 16 CQS 8 201 OUT 60 101 141 236 IN 71 118 165 CQ2 20 10 314 OUT 94 157 220 MU 378 IN 113 189 264 25 12 491 OUT 147 245 344 Intermediate Strokes Spacer is attached on standard stroke body.

LJ1H

screw 12 10 20 12 10 20 20 20 40 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 2 Horizontal 8 25 25 18 Standard motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101