SFOD-OMT0011CN

Stop (2) JOG a) View (V) 4.1 (1-1-2) View (V) b) 4.5 JOG c) JOG+/EMGx OFF OFF JOG : Stop EMGx OFF OFF Stop EMGx OFF OFF (EMGx)EMGx No.SFOD-OMT009 Stop Stop (3) 1 a) View (V) 4.1 (1-1-2) View (V) 40 No.SFOD-OMT0011CN-A b) Remote mode ON SVRE ON c) All axes Return to Origin d) Execute d) start e) Stop EMGx OFFOFF Stop (EMGx)EMGx No.SFOD-OMT009 Stop USB OFF, 41

MHx-OMY0001

14.3 6 4 MHM-32D 19 19 39.8 3.8 14.5 35.3 6.3 22.5 23 MHM-32D1 *2 *2 *2 51.8 MHM-32D2 19 19 14.5 MHM-50D 27.2 27.2 54.2 1.2 22.7 49.7 3.7 31.5 38 MHM-50D1 *2 *2 *2 66.2 MHM-50D2 27.2 27.2 22.7 -11- *1 1mm *2 A *3 MHM-16DD-M9(W,A)V D-P3WA 56mm Nm D-M9(V) D-M9W(V) D-M9A(V) D-P3DWA 0.050.15 -12- (mm) L1 L2 L3 L4 L5 L6 16 5 MHM-16D 1 1 1 1 MHM-25D 36 34 MHM-32D 50 24 MHM-50D 23 25 80 41

Line filter

. -15- 3) AFF40 bowl assembly / auto drain Option symbol Semi-standard symbol 6 J 6J Semi-standard: "J" Standard Port thread type Semi-standard: "-" Standard Port thread Part No. type Part No. Rc C4SF-J-D G Rc C4SF-D G NPT C4SFN-J(Z)-D NPT C4SF(-Z)-D Appearance and part No. Semi-standard: "6J" Standard Port thread type Semi-standard: "6" Standard Port thread Part No. type Part No.

Mist Separator

. -15- 3) AM40 bowl assembly / auto drain Option symbol Semi-standard symbol 6 J 6J Semi-standard: "J" Standard Port thread type Semi-standard: "-" Standard Port thread Part No. type Part No. Rc C4SF-J-D G Rc C4SF-D G NPT C4SFN-J(Z)-D NPT C4SF(-Z)-D Appearance and part No. Semi-standard: "6J" Standard Port thread type Semi-standard: "6" Standard Port thread Part No. type Part No.

Micro Mist Separator

. -15- 3) AMD40 bowl assembly / auto drain Option symbol Semi-standard symbol 6 J 6J Semi-standard: "J" Standard Port thread type Semi-standard: "-" Standard Port thread Part No. type Part No. Rc C4SF-J-D G Rc C4SF-D G NPT C4SFN-J(Z)-D NPT C4SF(-Z)-D Appearance and part No. Semi-standard: "6J" Standard Port thread type Semi-standard: "6" Standard Port thread Part No. type Part No.

Antibacterial Filter (5μm) Antibacterial Filter (0.1μm) Odor Removal Filter Bacteria Removal Filter

Procedure 1 Insert to the product Insert with aligning the mating mark Mating mark of the body Mating mark of the bowl assembly HF2-BFA HF2-BFB HF2-BFC HF2-BFD Procedure 2 Rotate 30 degrees HF2-BFA HF2-BFB HF2-BFC HF2-BFD Lock button Caution Make sure that the lock button is locked to the flute of the product before pressurising it. 15 7.

Micro Mist Separator

. -15- 6-3. Bowl assembly / auto drain for AFD40-D Option symbol Semi-standard symbol 6 J 6J Semi-standard: (Standard) Semi-standard: J Piping port Piping port (4) Part No. thread ty pe (4) Part No. thread ty pe Rc Rc C4SF-J-D C4SF-D G G C4SFF-J-D NPT C4SF(-Z)-D NPT C4SFN-J(Z)-D Appearance and part No.

Pressure Relief 3 Port Valve with Locking Holes

Description Material assembly Note assembly 11 Bracket A Stainless steel 1 pc 12 Bracket B Steel strip 1 pc Zinc chromate 13 Mounting screw Steel wire 2 pcs Zinc chromate 14 Element assembly PP 1 pc 15 O-ring NBR 1 pc -11- 6Assembly of Optional Parts (1) Bracket 1) Mounting of Bracket A Insert Bracket A from the front of product so that the fingers of Bracket A hold the product at groove

15, 4 connection methods, Maximum operating pressure: 0.8MPa, REGULATOR, MFLD W/GAUGES, AIRLINE EQUIPMENT, ARM MANIFOLD REGULATOR, CD, ARM 1/8INCH STANDARD (NPT), 3.96832 lb, ModelPipingPort sizeMass (g) IN sideOUT sideTotal mass (n: stations)Regulator (Except manifold)ARM2000Common IN1/41/8(188 x n) + 43136

15, 4 connection methods, Maximum operating pressure: 0.8MPa, REGULATOR, MFLD W/GAUGES, AIRLINE EQUIPMENT, ARM MANIFOLD REGULATOR, CB, ARM 1/8INCH STANDARD (PT), 3.74785 lb, ModelPipingPort sizeMass (g) IN sideOUT sideTotal mass (n: stations)Regulator (Except manifold)ARM2000Common IN1/41/8(188 x n) + 43136

The series is available in base mounted or body ported styles.Bar stock type manifold for SYJ7000 valves, Supply and exhaust ports common, Valves individually wired, Maximum 20 stations available as standard (types 21, 40, 41, 42); maximum 15 stations available as standard (type 20), 11 port sizes available 4/5 PORT SOLENOID VALVE. SYJ 5 port valve manifold. 195.00000 lb. VVD.

base mounted or body ported styles.Bar stock type manifold for SYJ7000 valves, Supply and exhaust ports common, Valves individually wired, Maximum 20 stations available as standard (types 21, 40, 41, 42); maximum 15 stations available as standard (type 20), 11 port sizes available NEW SY5000 MFLD. MANIFOLD. VALVE. NEW SY5000 MFLD, FITTING LESS THAN 1/4. UJ.

Exhaust Cleaner for Clean Rooms AMP Series

Port size 3 Symbol 2 02 03 04 06 1/4 3/8 1/2 3/4 Models AMP220 AMP320 AMP420 Model 1000 (35) 200 (7) 500 (17.5) Max. flow capacity l/min (ANR)(SCFM) 1/2, 3/4 1/4, 3/8 3/8, 1/2 Port size (nominal size B) 1.15 (2.54) 0.43 (0.95) 0.68 (1.50) Weight kg (lb) Specifications Fluid Compressed air Element upstream pressure 0.1MPa or less (14.5 psi or less) Ambient and fluid temperature 5 to 50C (41

Trimmer Auto Switch Series D-
7K/D-R
K

to 5 30 to 4 Air cylinder Compact guide cylinder MGP 3.5 5 4.5 4.5 5.5 5.5 5.5 5.5 5.5 6 CA2 Air cylinder 4 4 6 6 6 Sensor unit D-F7K Air cylinder (mm) Model Bore size (mm) 12 4.5 16 20 25 32 40 50 63 80 100 125 7.5 140 7.5 160 CQ2 CM2 Compact cylinder 5.5 5.5 5 5.5 5.5 5.5 6 5.5 6 7.5 Air cylinder 3.5 3.5 3.5 3.5 2 D-7K/D-RK Dimensions Sensor unit D-F7K 8 3.2 3.5 4 15 SMC 11 1 7 23

Air Cylinder NCJ2 Series Miniature Stainless Steel Body

Se page 15 minimum Auto Switch mournable strckes.

Floating Joint/Stainless Steel Type Series JS

JS20, 32, 40, 63 M M U U D J F H B E G P A Rod end nut (mm) 30 Description H B C D d: Nominal thread size d Nut for JS10 M4 x 0.7 3.2 7 8.1 6.8 Nut for JS16 M5 x 0.8 4 8 9.2 7.8 Nut for JS20 M8 x 1.25 5 13 15 12.5 D C Nut for JS32 M10 x 1.25 6 17 19.6 16.5 Nut for JS40 M14 x 1.5 8 22 25.4 21 H B Nut for JS63 M18 x 1.5 11 27 31.2 26 (mm) Max. tension and compression N Allowable eccentricity

VH Series, 4 Way Hand Valve

0.3 0.4 0.5 0.6 0.7 0.8 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.8 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.6 0.1 0.2 0.3 0.4 0.5 0.5 0.1 0.2 0.3 0.4 2000 4000 6000 0 0 0 200 400 600 800 1000 1000 2000 Flow rate /min(ANR) Flow rate /min(ANR) Flow rate /min(ANR) VH600 Effective area S=194mm2 Supply pressure MPa 0.7 0.7 0.6 0.6 0.5 0.5 0.4 0.4 0.2 0.3 0.3 0.2 0.1 0.1 0 5 10 15

Precision Clean Regulator Series SRP

1.6 Port size A B IN OUT Model Port size D C B A 30 30 23.5 14 M5 x 0.8 SRP111-M5 40 40 22.5 15 Rc 1/8 SRP111-01 C D 3

Series CRB2-Z, single or double vane, rotary actuator is availbable in 10, 15, 20, 30 and 40 bore.  The single vane style use specially designed seals and stoppers which enable this compact type actuator to rotate up to 270 degrees.  Double vane type i, Actuator, Rotary Vane Type, ROTARY ACTUATOR, 517, 41 lb

The series is available in base mounted or body ported styles.Bar stock type manifold for SYJ5000 valves, Supply and exhaust ports common (20, 31, 32, 41 types), Valves individually wired, Maximum 20 stations available as standard, 10 port sizes available, MFLD ASSY, 15-STA, VALVE, SS5YJ5 MANIFOLD SYJ5000 5/PORT, 1J, SS5YJ5 OTHER SIZE RATING, 1.11926 lb