XLAQ/XLDQ

assembly (Maintenance parts) (Material: Stainless steel 304 plus sealant) S valve (Material: Stainless steel 304) i Valve side exhaust Refer to page 478 for the maintenance parts. 473 XLDQ Series Dimensions C D E E C G H I H V A C F U U M V E A V L Heater (Option) (Maintenance space) Indicator Auto switch (Option) B L K S H J M G A A (mm) Model A 189 198 B 66 79 C 2 2 D 11 11 E 55 75 F 41

MY1

Blue [Black] Lead wire length: 0.5m 7 7 6 7 8 8 D-A96(V) Lead wire length: 3m 35 35 30 35 41 41 DC(+) Brown [Red] LED (+) Resistor Reed switch Load OUT Black [White] Reverse current prevention diode DC power () DC() Blue [Black] Dimensions D-A90, D-A93, D-A96 D-A90V, D-A93V, D-A96V The dimension inside ( ) is for D-A93. 13 Reed Switches: Direct Mounting Type D-Z73, D-Z76, D-Z80 Specifications

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

+0.052 0 26H9 36 3-4H9 depth 4 +0.030 0 4 3 ( A , B , C ) 3-R2 3-R2 2-5.5 through 4.5 19 10.5 13 48h9 0 0.062 36 7 6 22.3 10.5 44 3 11 10 58.5 2-5.5 through Angle adjustment bolt 6 Adjustment: Max.10.2 2-M5 x 0.8 1.5 7 +0.030 0 3-4H9 long groove depth 3 B port A port 0.5 ( A , B , C ) 4-M5 x 0.8 depth 10 6g6 0.004 0.012 14h9 0 0.043 42 0 0.062 48h9 41 11-5-12 These drawings indicate the

MK

1.5 R + Clamp stroke (Basic) (mm) Q A G I J S T B H K L O U C P V D E R X F Yh9 Z Model 0.1 0.2 MKB32 1 8 0 0.15 0.15 31.5 9 depth 7 M10 x 1.5 93.5 71.5 45 5.5 12 37 7.5 60 14 16 34 4.5 Rc / 54 3 6.5 14 0.15 20 0.15 7 30 0.062 0 0.1 0.2 MKB40 1 8 65 29.5 35 9 depth 7 M10 x 1.5 94.5 52 5.5 12 8 69 14 16 40 5 Rc / 61 3 6.5 14 24 7 30 0.062 0.1 0.2 0 MKB50 1 4 0.15 0.15 11 depth 8 76.5 34 41

ML2B

For details, refer to page 10-20-41. Reed switch D-X 20Data 10-13-17

RZQ

cylinder tube length Full stroke RHC CDQ2 MK(2) RS Q G Overall length of cylinder tube RS H A Comparison of cylinder tube overall length (mm) RZQ Full stroke = 300 mm (150 + 150 = 300 mm in case of CG1BN) MI W S CG1BN150+150-XC11 Dual stroke cylinder RZQ-CDQ2 Additional cylinder tube length RZQA300-150 CDQ2A300D Bore size (mm) CEP1 A CE1 32 591 37 345.5 382.5 40 606 37 355 392 CE2 50 631 41

CQM

40.5 10.5 10.5 64 62 53.4 Rc1/4 NPT1/4 NPT1/4 G1/4 75, 100 60.5 40.5 HA NN NN OA Bore size (mm) 32 40 50 V W HB IA IB J KA KB L M N OB RA RB S U Z , TN, TF , TN, TF 38 10 5 60 58.5 4.5 28 19.8 7 34 5.5 9 7 58.5 31.5 10 M5 x 0.8 10-32UNF M6 x 1.0 1/4-20UNC 14 46 10 5 69 67.5 5 33 23.3 7 40 5.5 9 7 66 35 10 M5 x 0.8 10-32UNF M6 x 1.0 1/4-20UNC 14 58 12 6 86 84.5 7 42 29.7 8 50 6.6 11 8 80 41

Cylinder with Turntable Series MGT ø63, ø80, ø100 1

54 62 39 46 56 M10 X 1.5 M12 X 1.75 M14 X 2.0 8.6 10.6 12.5 25, 50, 75, 100, 125, 150, 175, 200 (mm) Bore size (mm) OB OL P PA PB PW Q RA RB RC S SA SB T U VA VB WA WB 50, 75, 100st Larger than 100st 25st 50, 75, 100st Larger than 100st 25st 117 128 168 55 74 89 54 56 71 100 125 150 24 24 35 188 225 272 70 80 100 14 14.5 17.5 Rc1/4 Rc3/8 Rc3/8 9 8 8 14 17.5 20 124 156 188 148 198 236 39 41

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

50 59.5 79 6 7.5 9.5 11.5 14 11 14 19 24 30 0.15 0.29 0.56 1.04 2.6 11 13.5 16 20 22 22 27 32 41 46 0.75 1 1.25 2 2.5 1300 3100 5000 7900 15300 6000 11000 18000 28000 54000 8-25-25 25 Series MGZ/MGZR Proper Auto Switch Mounting Position (Detection at stroke end) D-M9N/M9P/M9B D-F9NW/F9PW/F9BW A 28 28 26 D-A9, A9V D-F9BAL Bore size (mm) A 27 27 25 A 24 24 22 B 7 7 8 B 6 6 7 B 3 3 4 0 to 1

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

Switch spacer (BMY3-016) (M2.5 x 41) Switch mounting screw Accessories Flat head watchmakers screwdriver Switch Spacer (mm) 16 25 40 63 Applicable bore size (mm) Switch spacer BMY3-016 Other than the applicable auto switches listed in How to Order, the following auto switches can be mounted. For detailed specifications, refer to page 8-30-1.

10-cna2-e

Contents Bore size (mm) MB40-PS MB50-PS MB63-PS 40 50 63 80 100 MB40-PS MB50-PS MB63-PS MB80-PS MB100-PS #9 $0 41 Piston seal NBR Rod seal A NBR Set of left nos. #9, $0, $3, $5 Rod seal B NBR MB80-PS 42 $3 44 $5 46 Release piston seal NBR MB100-PS 41, 42, 44 and 46 to 49 are non-replaceable parts, so they are not included in the seal kit.

10-cna2w-e

. #8, #9, $2, $4 Rod seal B NBR MBW80-PS 41 $2 43 $4 45 Release piston seal NBR MBW100-PS 40, 41, 43 and 45 to 48 are non-replaceable parts, so they are not included in the seal kit. Cushion seal Urethane Since the lock of the CNA2 series cannot be disassembled and is normally replaced as a unit, kits are for the cylinder section only.

Compact

The auto switch may be damaged if a screw other than the one supplied is used. 25ALEC Weight (g) LEC S LEC SS-T D-M9P(V) D-M9B(V) D-M9N(V) Auto switch model 0.5 m (Nil) 8 7 LEC Y 1 m (M) 14 13 Lead wire length 3 m (L) 41 38 Motorless 5 m (Z) 68 63 LAT Dimensions LZ (mm) D-M9 D-M9V LC3F2 Mounting screw M2.5 x 4 L Slotted set screw (flat point) 500 (1000) (3000) (5000) Indicator light 2.6 3.95

LJ1H

A B C D 41 42 Standard Motor 200W Series LJ1H30 High Rigidity Direct Acting Guide Motor Output Rolled Ball Screw 20mm/10mm lead Vertical Mount How to Order Stroke LJ1H303 NA 1 K F 2 Cable entry direction Top entry Power supply voltage Cable entry direction Cable length Left entry 100VAC (50/60Hz) 200VAC (50/60Hz) Actuator cable Axial Right Left Top Bottom Brake cable Left Axial Axial Axial

Clean Air Module

) 111 59 71 80.4 41 59 59 Rc 3/8 (NPT 3/8) 521 3.5 (3.5) Note) This port is unavailable.

IN20267

TYPE Class Instance Attribute Size Description Output 100 100 3 1 INT Position set-point Input 150 150 3 2 INT 2 bytes measured position, 2 bytes diagnostics Figure 16-1 Explicit Messaging 41 - IN20267 Installation and Handling 17. Air supply 17.1. Use clean air.

Compact Guide Cylinder

Height (Compared with the current product (MGP-Z)) Overall length (Compared with the current product (MGP-Z)) Current product MGP-Z [mm] Current product CXS [mm] Current product MGP-Z [mm] Current product CXS [mm] JMGP [mm] JMGP [mm] Bore size [mm] Bore size Stroke [mm] 12 26 17 17*1 12-10 stroke 52 43 82*1 16 30 18 20*2 16-10 stroke 56 43 89*2 20 36 22 25 25 42 26 30 32 48 32 38 40 54 41

KT10

Gauge port 2) (Inlete, Outletr) Porting Configuration Pressure gauge Code r psig/bar unit MPa unit r e 0 6 10 20 40 60 Q No pressure gauge w q w q 600 psig/bar 3) 4.1 MPa 7 MPa 14 MPa 28 MPa 41 MPa 70 MPa qIN wOUT eGauge port (Inlet) rGauge port (Outlet) Connections (Inletq, Outletw) 1000 psig/bar 3) Ports Code 2000 psig/bar 3) Connections 4P V 4PN 4000 psig/bar 3) e 4P 4PN 4 4B NPT 1/4 inch

Peltier-type Chiller Thermo-con/ Compact Type

Peltier-type Chiller Thermo-con/ Compact Type Air-cooled Compact 130 mm x 210 mm x 150 mm Height Width Depth Low-noise design (at low load): 37 dB 130 mm 150 mm Display/Operation panel 210 mm Circulating fluid level gauge Dustproof filter Replaceable Cooling capacity: 220 W Superior temperature control Temperature stability: 0.1C Now only takes about 41 seconds to lower the temperature by

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

Weight (g) LEC S LEC SS-T D-M9P(V) D-M9B(V) D-M9N(V) Auto switch model 0.5 m (Nil) 8 7 LEC Y 1 m (M) 14 13 Lead wire length 3 m (L) 41 38 Motorless 5 m (Z) 68 63 LAT Dimensions LZ (mm) D-M9 D-M9V LC3F2 M2.5 x 4 L M2.5 x 4 L Indicator light Slotted set screw Slotted set screw 8 Indicator light 2 3.2 4.6 2.6 4 2.8 2.7 2.7 20 2.8 4 22 3.2 2.6 9.5 Most sensitive position 6 4 6 Most sensitive