Air Catch Sensor Series ISA

0 100 200 300 0 100 200 300 0 Detection distance (m) Detection distance (m) Detection distance (m) Ex. 1) To detect 300 m, select a 1.0 detection nozzle and supply pressure of 0.2 MPa.

3 Port Solenoid Valve

Plug connector lead wires have a standard length of 300 mm, however, the following lengths are also available. Connector Assembly Part No.

Compact Cylinder Series CQS

Proof pressure 1.5 MPa Maximum operating pressure 1.0 MPa Without auto switch: 10 to 70C With auto switch: 10 to 60C Ambient and fluid temperature (No freezing) None, Rubber bumper Rubber bumper Rod end thread Female thread Standard stroke +1.0 0 Through-hole/Both ends tapped common Stroke length tolerance Mounting 12, 16: 1 to 300 mm/s 20, 25: 0.5 to 300 mm/s Piston speed Stroke length

Profile Design ISO/VDMA Air Cylinder Series CP95

Piston speed [mm/s] Maximum air consumption Q [Nl/min.] 100 125 2 300 400 500 300 400 500 80 150 200 150 200 63 50 100 100 32 40 30 40 50 30 40 50 25 20 20 20 15 15 16 10 10 8 2000 10 5 4 1500 3 1000 2 6 500 400 300 1 1 200 0.5 100 0.2 0.3 0.4 0.5 0.6 0.7 0.8 Working pressure [MPa] 1.8-26 Series CP95 Average air consumption of compressed air cylinders and piping Thermal loss is not represented

Compact Guide Cylinder with One-way Lock Series MLGP ø40, ø50, ø63

300300 34 84 122 172 50 4 4.5 3 6 16 22 46 40 M8 x 1.25 92 24 48 124 200 300 36 86 124 174 66 5 6 4 8 20 24 48 50 M10 x 1.5 28 52 128 200 300 38 50 88 124 174 110 80 5 6 4 8 20 24 63 M10 x 1.5 MLGPM (slide bearing)/A, DB, E dimensions MLGPL (ball bushing)/A, DB, E dimensions A E A E Bore size (mm) Bore size (mm) DB st50 50

Compact Electric Actuator Series LG1

7.2 16.4 14.2 6.3 Aluminum alloy frame Slide screw 15.3 16.7 14.0 18.0 12.5 19.5 11.2 25.7 20.8 22.2 9.8 Stainless steel frame C Operating temperature range 5 to 40 (with no condensation) 300 10 mm Lead Horizontal specification Ball screw Maximum work load 100W N 300 20 mm Lead 150 Slide screw 20 mm Lead 500 10 mm Lead Ball screw Maximum speed Horizontal specification 1000 600 500 930

JA/JAH/JB/JS

Refer to pages 10-24-3 to 10-24-6 for Safety Instructions and Actuator Precautions. 40 M12 x 1.5 4400 4400 4400 0.75 30, 40 M12 x 1.75 4400 4400 4400 0.75 5 50 M16 x 1.5 11000 11000 9000 1 50, 63 M16 x 2 11000 11000 9000 1 Mounting 80 M20 x 2.5 18000 18000 14000 1.25 Warning JA100-24-300 JA100-27-150 JA125-27-200 JAl160-33-200 100 M24 x 3 28000 28000 22000 2 1.

energy saving effect

HRSH250/300-A-20 (Air-cooled 200 V type) HRSH250/300-A-40 (Air-cooled 400 V type) Ventilation air inlet Ventilation air inlet Ventilation air outlet 1035 Eye bolt M12 (4 places) Operation display panel 850 Handle Handle Dustproof filter Breaker handle Note) Circulating fluid outlet Rc1 Automatic fluid fill port Rc1/2 Overflow port Rc1 Circulating fluid return port Rc1 1720 Contact input/output

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

3/8 1/2 Non-lube Double acting, Up to 1500 25, 50, 75, 100, 125, 150, 200 Single rod (40 to 63) 1/8 25, 50, 75, 100, 125, 1/4 150, 200, 250, 300 3/8 1/2 Note 1) When exceeding the standard strokes above, the particle generation class may not be satisfied.

JA/JAH/JB/JS

Refer to pages 10-24-3 to 10-24-6 for Safety Instructions and Actuator Precautions. 40 M12 x 1.5 4400 4400 4400 0.75 30, 40 M12 x 1.75 4400 4400 4400 0.75 5 50 M16 x 1.5 11000 11000 9000 1 50, 63 M16 x 2 11000 11000 9000 1 Mounting 80 M20 x 2.5 18000 18000 14000 1.25 Warning JA100-24-300 JA100-27-150 JA125-27-200 JAl160-33-200 100 M24 x 3 28000 28000 22000 2 1.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

speed (mm/s) Collision speed (mm/s) L unit 1000 1000 Air cushion 500 400 300 500 400 300 L unit Air cushion 200 200 1002 3 4 5 10 20 50 100 1 2 3 4 5 10 20 30 400 50 Caution Load weight (kg) Load weight (kg) 1.

AC Servo Motor Driver (Pulse input type/Positioning type)

PA07 1 12 6 3 12 6 3 20 10 5 16 8 4 Feel length multiplication (STM) (Multiplier) PE02 0 0 (<1000 stroke)/0001 (>1000 stroke) Home position return type PE03 0010 3 (Stopper type) Home position return direction PE03 0010 1 (Motor side) Home position return Speed (rpm) PE04 500 150 300 600 150 300 600 90 180 360 112 225 450 Home position return/JOG operation Accelerationeration/De celeration

SFOD-OMT0009CN

USB 7. 106 No.SFOD-OMT0009CN-B 7. 7. 4. ( EMG ) 4. 107 No.SFOD-OMT0009CN-B 1. 1.1 LEY/LEYG LEY16/LEYG16 LEY25/LEYG25 LEY32/LEYG32 LEY40/LEYG40 A B C A B C A B C A B C [mm] 10 5 2.5 12 6 3 16 8 4 16 8 4 [mm] 300 300 300 400 400 400 500 500 500 500 500 500 [mm/s] 500 250 125 500 250 125 500 250 125 300 150 75 [mm/s] 15 8 4 18 9 5 24 12 6 24 12 6 () [mm/s] 22 12 6 26 13 7 34 17 9 34

Ionizer Gun

150 300 450 600 750 900 1050 1200 1350 1500 Distance [mm] Distance [mm] 5) 6) Supply pressure 0.4 MPa Consumed flow rate 316 L/min (ANR) Supply pressure 0.5 MPa Consumed flow rate 390 L/min (ANR) 200 200 150 150 2s 1.5s 100 100 50 50 1.5s 1s 0.5s 1s 0.5s 0 0 -50 -50 -100 -100 -150 -150 -200 -200 0 150 300 450 600 750 900 1050 1200 1350 1500 0 150 300 450 600 750 900 1050 1200 1350 1500 Distance

ML2B

Piston speed (mm/s) 1000 Air cushion RS Q G Adjusting Procedure 500 400 300 Lock nut for adjusting bolt Unit holding bolt RS H A Adjusting bolt 200 RZQ Lock plate holding bolt 0.5 100 10 20 30 4050 100 200 300 400500 MI W S W2 max W1 max W3 max CEP1 Allowable load (N) Shock absorber CE1 ML2B40 Horizontal collision: P = 0.5 MPa Lock plate 2.

AC

Q Model Port size A B C D M P B B E F G H J K L N 22 34.2 42.2 8.5 11 13 23 26 5 7 7 50 70.5 88 AC2041 AC3041 AC4041 248.5 300 187.5 3.5 4 1 5.5 7 9 45 58.5 77 24 35 40 35 29.5 38 30 41 50 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 90 117 154 164.5 207.5 259 78 92.5 112 45 55 70 33 Option marks in the dimension diagram show the direction of inclination from port center to gauge center.

3 Port Solenoid Valve Series VQ100 1

AXT661-12A Nil 300 mm 600 mm 1000 mm 2000 mm 3000 mm 6 10 20 30 Plug connector lead wire length Passage Indicator light Single Latching type A-C ON (Set) Indicator light Passage The lead wire length of the valve with lead wire is 300 mm.

Table of Contents

AS3201F -03-10 200 400 200 100 0 0 SV400 AN300 -KM12 T1209 SV300 ANA1 -C12 T1075 800 400 MB 100 MB 80 600 300 Stroke (mm) AS5000-02 AS420-02 AS4000-03 400 200 200 100 0 0 400 800 CS1 125 MB 100 600 300 Stroke (mm) AS5000-02 AS420-02 200 400 AS4000-04 200 100 0 0 Solenoid valve Silencer Tubing Speed controller Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900

Vacuum System Peripherals:

Metal Seal, Rubber Seal 3 port solenoid valve Series VQZ200/300 Piping specifications Solenoid valve Port size Effective area (mm2) (Cv) Flow characteristics C (dm3/(sbar)) VQZ215 VQZ235 VQZ225 VQZ245 VQZ315 VQZ335 VQZ325 VQZ345 1.7 2.3 1.7 2.5 3.0 4.5 2.9 4.4 VQZ 200 1 8 1 4 , Base mounted (With sub-plate) VQZ 300 , 1 4 3 8 Base mounted 3 port solenoid valve Series VK Compact size: Width

VQ

Consult SMC for other voltages. 2.9-12 Series VQ100 Plug Lead Unit Manifold (VV3Q12) L1 10.8 3.5 5 L2 3 P E 8.9 P E 11 Round head screw M1.7 X 14 W (L type) 28.7 26.5 W (M type) 300 33.8 300 2-3.5 Mounting hole 4-M5 SY P, E port Manual override SYJ 11.5 P=10 300 Latching, 100V AC or more VK H (M type) U side D side n 5 4 3 2 1 300 H (L type) VZ VT VT 42.2 L type M type 36.3 VP W