Table of Contents - Tubing

200 LX5 + 200 LX3 + 200 LX5 + 200 LX3 + 200 1 2 3 1 2 3 1 2 1 2 1 2 3 to 90 3 to 90 3 to 63 3 to 90 3 to 66 3 to 44 3 to 90 3 to 40 3 to 45 3 to 35 3 to 35 3 to 30 4 2.5 6 4 8 5 10 6.5 12 8 B (Black), W (White), R (Red), BU (Blue), Y (Yellow), G (Green), C (Transparent), YR (Orange) L* is calculated by the number of coils (N) x O.D. 10Clean Series (Example) 10-TCU0425B-1 TUB-11 Polyurethane

0.01

Stations Stations 3 2 1 IISA2CSL-3B5DLCE21 set (3 stations manifold part number) ISA2-HE41P 3 sets (Air catch sensor part number) IISA2VPR-3B5DLC1 set (3 stations manifold part number) ISA2-GE41 3 sets (Air catch sensor part number) Prefix the part number of the air catch sensor with an asterisk ().

Industrial Filters

660 965 80 120 25 (1B) 40 (1 1/2B) 50 (2B) 20 (3/4B) 20 (3/4B) 500 4 500 20 80 24 330 216.3 230 490 905 1220 80 120 25 (1B) 40 (1 1/2B) 50 (2B) 20 (3/4B) 20 (3/4B) 500 4 750 20 90 32 330 216.3 230 490 1160 1485 80 120 25 (1B) 40 (1 1/2B) 50 (2B) 20 (3/4B) 20 (3/4B) 500 4 1000 20 105 41 330 216.3 230 490 1415 1750 80 120 25 (1B) 40 (1 1/2B) 50 (2B) 25 (1B) 20 (3/4B) 570 7 500 20 115 37 400

IDX-OM-V020

. 1-5 1.4 LIMITED WARRANTY AND DISCLAIMER/ COMPLIANCE REQUIREMENTS . 1-6 Chapter 2 Name and Function of Parts . 2-1 2.1 NAME AND FUNCTION OF PARTS . 2-1 Chapter 3 Transportation and installation . 3-1 3.1 TRANSPORTATION . 3-1 3.2 INSTALLATION . 3-2 3.2.1 Environment . 3-2 3.2.2 Anchorage . 3-2 3.2.3 Air piping. 3-3 3.2.4 Drain tube . 3-4 3.2.5 Electrical wiring . 3-5 3.3 CAUTIONS ABOUT REINSTALLATION

LFE-OMY0008

HYS WIN ACCUMU PLS 2. 2. 2. 2. 1_P/1_N(29 ) 3. 3. 3. 3. Add/dEC P1AH/n2AH P1dH/n1dH (31 ) P1L/n1L P1H/n1H/H1 (30 ) P_1/n_1/H_1 (30 ) 4. 4. 4. 4. SoG/SoR/REd/GRN(33 ) 5. 5. 5. 5. [F 1] OUT1 28 No.LFE*-OMY0008 1. 1. 1. 1. [F 1] [oUt1] 30 () 2. 2. 2. 2. (ON-OFF ) 29 No.LFE*-OMY0008 3. 3. 3. 3. a. ([n_1]) (33 ) b.

IDX-OM-U010

DISPOSAL . 1-5 1.4 LIMITED WARRANTY AND DISCLAIMER/ COMPLIANCE REQUIREMENTS . 1-6 Chapter 2 Name and Function of Parts . 2-1 2.1 NAME AND FUNCTION OF PARTS. 2-1 Chapter 3 Transportation and installation . 3-1 3.1 TRANSPORTATION . 3-1 3.2 INSTALLATION . 3-2 3.2.1 Environment . 3-2 3.2.2 Anchorage . 3-2 3.2.3 Air piping . 3-3 3.2.4 Drain tube . 3-4 3.2.5 Electrical wiring . 3-5 3.3 CAUTIONS

IDX-OM-W095

IDFC80-23 IDFC90-23 2080 0.151.0MPa (7) (1) () 2045 oC85% (2) 20 oC 4.7m 3/min 7.8m 3/min 10.9m 3/min 15.4m 3/min 10 oC 2.8m 3/min 4.7m 3/min 6.5m 3/min 9.2m 3/min 3 oC 0.9m 3/min 1.6m 3/min 2.2m 3/min 3.1m 3/min 0.7MPa 50 oC 35 oC () 230V (50Hz) 10% (3) (4) 1.0kW 1.6kW 2.4kW 2.8kW (4) 5.5A 8.0A 13.0A 14.0A 30mA (5) 10A 15A 20A 30A R410A (HFC) GWP:2088 (6) 39010g 53010g 63010g

Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

1 q i !2 e !

VT325

3-Rc 1/4, 3/8 Width across flats 3-4.5 mounting hole DIN terminal (D) Conduit terminal (T) Applicable cable O.D. 6 to 12 Manual override (Non-locking) Manual override (Non-locking) Connector 2-mounting groove 2-mounting groove Width across flats 3-Rc 1/4, 3/8 3-Rc 1/4, 3/8 Width across flats With locking manual override Conduit terminal with indicator light (TL) Manual override (Non-locking

IP80-OM00019

E 4 IP8100 7 3 (1) (2) (1) 3-1 IP8000 3-1-1 IP600IP6000IP600IP6000 6 L 5 7 6 L 7 5 3-1-2 (1)50%(50%) 100% 0% (2)1030 50% 100% (0%) 8 (3)9 ( ) () () () 9 8 3-2 IP8100 3-2-1 IP610,IP6100IP610IP6100 IP6100H() OUT1 OUT2 OUT1 OUT2 10 11 10 11 3-2-2 (1) (P368010-23) (2) IP610 ( (P368010-24) M81.25 12 3-2-3 (1) ()DA ()RA DA RA 0 0 (2) () () 13 (3) A (4) (3.6 4.1N.m

51

D-A9 30 Note 1) 15 5 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 35 + 35 (n 2) 20 + 35 D-M9V 35 20 5 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 25 + 35 (n 2) 15 + 35 D-A9V 25 15 5 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 D-M9WV D-M9AV 35 + 35 (n 2) 20 + 35 35 20 10 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 D-C7 D-C80 60 + 45 (n 2) 20 + 45 60 20 5 (n = 2, 3, 4, 5

Fluoropolymer Piping Equipment

Page 4 6 8 10 12 19 1/8" 3/16" 1/4" 3/8" 1/2" Material: Super PFA LQHB LQHB TL TIL TL TIL TL Metric Size TLM TILM TLM TILM P.948 TD TID TD TID TIL Inch Size TH TIH TH TIH Material: PFA 2, 3, 4, 6, 8, 10, 12, 16, 19, 25 TLM Metric Size From page 949 1/8", 3/16", 1/4", 3/8", 1/2", 3/4" 1", 1 1/4" TILM Inch Size 4 6 8 10 12 1/8" 3/16" 1/4" 3/8" 1/2" 4 6 8 10 12 1/8" 3/16" 1/4" 3/8" 1/2" 3/4"

LV50-OMQ0002

Remarks Weight With lead wire and M12 connector LFE-1-A3 Lead wire length: 3 m Approx. 175 g LFE-1-D Tapping screw 3 x 10, 4 pcs. Approx. 45 g Bracket LFE-2-D Tapping screw 3 x 10, 4 pcs. Approx. 70 g LFE-3-D Tapping screw 3 x 10, 4 pcs.

High Purity Fluoropolymer Fittings/Needle Valve/Tubing

Series Appearance Class Metric size Inch size 1/4" 3/8" None 1/8" 1/2" 3/4" 6 8 10 12 19 3/16" 1/8" 1/4" 3/8" 1/2" 3/4" 4 2 3 Male 4 P.19 Connector LQ2H 5 2 3 Female 4 P. 20 5 2 3 Male 4 P. 21 Elbow LQ2L 5 2 3 Female 4 P. 22 5 2 3 Male 4 P. 23 Run tee LQ2R 5 2 3 Female 4 P. 24 5 2 3 Male 4 P. 25 Branch tee LQ2B 5 2 3 Female 4 P. 26 5 2 3 Union elbow LQ2E 4 P. 27 5 2 3 Union tee LQ2T 4 P.

IDX-OM-W093

. *2) JIS B8370 URLhttp://www.smcworld.com/ IDX-OM-W093 1 . 1-1 1.1 . 1-1 1.1.1 . 1-1 1.2 . 1-2 1.2.1 . 1-2 1.2.2 . 1-2 1.2.3 . 1-2 1.2.4 . 1-3 1.2.5 . 1-4 1.2.6 . 1-5 1.3 . 1-6 1.4 / . 1-7 2 . 2-1 2.1 . 2-1 3 . 3-1 3.1 . 3-1 3.2 . 3-2 3.2.1 . 3-2 3.2.2 . 3-2 3.2.3 . 3-3 3.2.4 . 3-4 3.2.5 . 3-5 3.3 . 3-7 4 / . 4-1 4.1 . 4-1 4.2 . 4-1 4.3 . 4-2 4.4 . 4-2 4.5

Electro-pneumatic Proportional Valve Series VEF/VEP 1

8 1 2 3 Nil 02 03 Symbol Set pressure range (MPa) 2 Without sub-plate Rc 1/4 Rc 3/8 Nil 02 03 03 04 06 0.05 to 0.65 MPa 1 2 2 Rc 1/4 Rc 3/8 Rc 1/2 Rc 3/8 Rc 1/2 Rc 3/4 0.1 to 0.9 MPa 2 02 03 04 03 04 06 1 3 30 Rc 3/8 Rc 1/2 Rc 3/4 4 0.005 to 0.15 MPa 1 1 4 45 1 2 3 4 12 8 4.5 2.5 Without sub-plate Rc 1/4 Rc 3/8 Nil 02 03 JIS Symbol Flow type Flow type Pressure type 2 3 03 04 06 25 Rc 3/8

IDX-OM-W094

. *2) JIS B8370 URLhttp://www.smcworld.com/ IDX-OM-W094 1 . 1-1 1.1 . 1-1 1.1.1 . 1-1 1.2 . 1-2 1.2.1 . 1-2 1.2.2 . 1-2 1.2.3 . 1-2 1.2.4 . 1-3 1.2.5 . 1-4 1.3 . 1-5 1.4 / . 1-6 2 . 2-1 2.1 . 2-1 3 . 3-1 3.1 . 3-1 3.2 . 3-2 3.2.1 . 3-2 3.2.2 . 3-2 3.2.3 . 3-3 3.2.4 . 3-4 3.2.5 . 3-5 3.3 . 3-7 4 / . 4-1 4.1 . 4-1 4.2 . 4-1 4.3 . 4-2 4.4 . 4-2 4.5 . 4-2 4.6

VPA4

1.4 Nm M5: 2.9 Nm 5-3-26 3 Dimensions VPA4150-Bottom ported SA VA SA 4-Rc 1/8 pilot port (5-Rc 3/8, 1/2) 4-9 mounting hole (11) VA (Rc 3/4, 1) VM Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VR VH VHS 5-Rc 3/8, 1/2 (Rc 3/4, 1) ( ): For Rc 3/4, 1 VPA4250--, VPA4350

3M/SMseries

Series/Port Size Type of Actuation 2 position 2 position single double @ ]zNPTF w %NPTF titvF30(X) NVF3q)O 3 Dosition 3 po6ition 3 pogition closed cnter exhaust center pressue center . t : ' . " i : , : stlfm'JNfils #Nll;117.h ainnMh HlfFinlh NVF5000 NVF5000 2 pBition 2 position 3 position single double closed center M 3 position 3 posilion exhaLrst center Plessule centl %NPTF ffi^ 4il7h

Compressed Air Preparation Filter

Construction: AFF, AM, AMD t q IN OUT w Component Parts No. Description Material 1 Body Aluminum die-cast 2 Flange Aluminum die-cast 3 Bowl Stainless steel e r Replacement Parts No.