Ozone Resistant 40 30 20 10 0 Initial value Measuring point 6 4.
(Values at the initial period) VQZ VZ VS VFN Base mounted Flow Characteristics/Weight Weight (kg) Flow characteristics P A Port size Rc C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv A E AC 0.34 0.34 0.40 0.40 0.32 Body type Valve model DC 0.46 0.46 0.52 0.52 0.44 VS3115-01 VS3115-02 VS3110-02 VS3110-03 VS3114-00 1 8 1 4 1 4 3 8 2.5 3.6 3.2 3.6 0.39 0.34 0.31 0.18 0.86 0.86 0.93 0.94 0.66 0.88
equipment +10% 15% +10% 15% Single phase 200 to 230VAC (50/60Hz) For 100V Single phase 100 to 115VAC (50/60Hz) R T 1MCCB Noise filter External noise is prevented by the noise filter Servo malfunction indicator PL For power supply switching Power supply 5Ry ON 1MC A surge voltage suppressor should be attached to the electromagnetic contactor and relay.
A5 A5 A6 A6 A7 A7 Internal Internal A8 A8 resistance resistance 10[k ] 10[k ] 24 VDC 24 VDC A9 A9 Main circuit Main circuit power supply power supply for the input for the input A10 A10 signals signals B1 B1 B2 B2 B3 B3 B4 B4 B5 B5 Maximum output Maximum output B6 B6 current: 10 mA current: 10 mA B7 B7 Pulse input internal circuit Note2) B8 Pulse input internal circuit Note2) B8 Pulse input
AC 110 12 2 12 3 q e w e t y 220 10 1 10 1.5 440 6 1 3 1 550 5 0.8 2 0.5 r b contact w a contact r q DC 24 3 2.5 3 2.5 C C 48 1.5 1.2 1.5 1.25 When rising pressure q w = ON e r = OFF When rising pressure q e r y = ON q w r t = OFF 110 0.5 0.25 0.5 0.2 220 0.25 0.1 0.25 0.1 Insulation resistance: 100 M or more at 500 VDC by megameter Voltage resistance: 2000 VAC/1 min. 16-9-5 2 Series
L O L G H F K J E D I A B C 2-4.5 A B C D E F G H I J K L Model 4 ZFC100-04 6 ZFC100-06 53.2 9.1 30 14.1 10 18 11.6 19.5 23 20 29 5/32" ZFC101-03 1/4" ZFC101-07 6 ZFC200-06 8 ZFC200-08 67 15.5 34 17.5 14 22 15.6 23.1 27 24 35 1/4" ZFC201-07 5/16" ZFC201-09 Element Replacement Element replacement procedure 1) Stop operation and reduce the filter's internal pressure to atmosphere. 2) Turn cover
SUS304> 5 (SUS304) () 2 4 (A6063) < A6063> C D E E F C H B G A A mm A B C D E F G H XLH-16 40 100.5 38 1 30 17 35 XLH-25 50 114 48 1 12 40 26 41 XLH-40 65 162.5 66 2 11 55 41 57 XLH-50 70 179.5 79 2 11 75 52 70 8 XL-OMY0003
5 10 []18 12 O 1) FKM M 10 FKM : 110 Pa <> 9 XL-OMY0003
6 6-1. 1 1P4P5 10 XL-OMY0003
6-2 1 2 b 3 1 2 O 4 a aa b O O
DRail mounting Direct mounting 20D-A7H/A80H D-A73C/A80C D-F7BAL/F7BAVL D-F7/J79 D-F7V/J79C D-F7W/F79F D-F7WV D-J79W D-M9 D-M9V D-F9W D-F9WV D-F9BA D-A7/A80 D-A79W D-A9 D-A9V Bore size (mm) A 9 13 11 13.5 B 6 8.5 11.5 14.5 A 9.5 13.5 11.5 14 B 6.5 9 12 15 A 6.5 10.5 8.5 11 B 3.5 6 9 12 C 8 12 10 12.5 D 5 7.5 10.5 13.5 C 12 16 14 16.5 D 9 11.5 14.5 17.5 C 11 15 13 15.5 D 8 10.5 13.5 16.5 32
DRail mounting Direct mounting 20D-A7H/A80H D-A73C/A80C D-F7BAL/F7BAVL D-F7/J79 D-F7V/J79C D-F7W/F79F D-F7WV D-J79W D-M9 D-M9V D-F9W D-F9WV D-F9BA D-A7/A80 D-A79W D-A9 D-A9V Bore size (mm) D 8 10.5 13.5 16.5 C 11 15 13 15.5 D 9 11.5 14.5 17.5 C 12 16 14 16.5 D 5 7.5 10.5 13.5 C 8 12 10 12.5 B 3.5 6 9 12 A 6.5 10.5 8.5 11 B 6.5 9 12 15 A 9.5 13.5 11.5 14 B 6 8.5 11.5 14.5 A 9 13 11 13.5 32
(mm) 12 3.2 4 6 8 10 Tubing I.D.
D E F G H J Model 1 8 1 4 1 4 VND50D-32A VND60D-40A VND70D-50A 1 4 1 2 1 1 2 105 120 140 77 96 113 53 60 74 26.5 30 37 121.5 138 161 20 24 24 130.5 148 171 8 10 12 55 63 74 LVA LVH LVD Port size Flange: 32F, 40F, 50F LVQ J (Valve open) LQ Indicator (Option) LVN Pilot port TI/ TIL PA PAX PB 4 x 2-18 mounting hole Applicable flange Pilot port Rc A B C D E F G H J Model 8 10 12 50 40 32 1 8
Specifications Accuracy: Orifice Size .003” to .040”, Material: FDA Approved Polycarbonate, Max Operating Pressure: 100 PSI Size Color Part Number 1/16 x 10-32 1/8 x 10-32 .003 Gold BMW-062-003-C BMW-125-003-C .004 Purple BMW-062-004-C BMW-125-004-C .005 White BMW-062
Specifications Accuracy: Orifice Size .003” to .040”, Material: FDA Approved Polycarbonate, Max Operating Pressure: 100 PSI Size Color Part Number 1/16 x 10-32 1/8 x 10-32 .003 Gold BMW-062-003-C BMW-125-003-C .004 Purple BMW-062-004-C BMW-125-004-C .005 White BMW-062
Specifications Accuracy: Orifice Size .003” to .040”, Material: FDA Approved Polycarbonate, Max Operating Pressure: 100 PSI Size Color Part Number 1/16 x 10-32 1/8 x 10-32 .003 Gold BMW-062-003-C BMW-125-003-C .004 Purple BMW-062-004-C BMW-125-004-C .005 White BMW-062
Specifications Accuracy: Orifice Size .003” to .040”, Material: FDA Approved Polycarbonate, Max Operating Pressure: 100 PSI Size Color Part Number 1/16 x 10-32 1/8 x 10-32 .003 Gold BMW-062-003-C BMW-125-003-C .004 Purple BMW-062-004-C BMW-125-004-C .005 White BMW-062
Specifications Accuracy: Orifice Size .003” to .040”, Material: FDA Approved Polycarbonate, Max Operating Pressure: 100 PSI Size Color Part Number 1/16 x 10-32 1/8 x 10-32 .003 Gold BMW-062-003-C BMW-125-003-C .004 Purple BMW-062-004-C BMW-125-004-C .005 White BMW-062
Specifications Accuracy: Orifice Size .003” to .040”, Material: FDA Approved Polycarbonate, Max Operating Pressure: 100 PSI Size Color Part Number 1/16 x 10-32 1/8 x 10-32 .003 Gold BMW-062-003-C BMW-125-003-C .004 Purple BMW-062-004-C BMW-125-004-C .005 White BMW-062
Specifications Accuracy: Orifice Size .003” to .040”, Material: FDA Approved Polycarbonate, Max Operating Pressure: 100 PSI Size Color Part Number 1/16 x 10-32 1/8 x 10-32 .003 Gold BMW-062-003-C BMW-125-003-C .004 Purple BMW-062-004-C BMW-125-004-C .005 White BMW-062
Specifications Accuracy: Orifice Size .003” to .040”, Material: FDA Approved Polycarbonate, Max Operating Pressure: 100 PSI Size Color Part Number 1/16 x 10-32 1/8 x 10-32 .003 Gold BMW-062-003-C BMW-125-003-C .004 Purple BMW-062-004-C BMW-125-004-C .005 White BMW-062
Specifications Accuracy: Orifice Size .003” to .040”, Material: FDA Approved Polycarbonate, Max Operating Pressure: 100 PSI Size Color Part Number 1/16 x 10-32 1/8 x 10-32 .003 Gold BMW-062-003-C BMW-125-003-C .004 Purple BMW-062-004-C BMW-125-004-C .005 White BMW-062