Operating pressure range: 0.2 - 1MPa, Coil rated voltage: 12, 24VDC; 100, 110 to 120, 200, 220VAC, Allowable voltage fluctuation: -15% to +10% of rated voltage, Ambient & fluid temperature: 0 to 60°C, Electrical entry: grommet, type D DIN connector, type Y DIN connector, SOFT START-UP VALVE, VALVE, SOFT START, 0.48 lb

Operating pressure range: 0.2 - 1MPa, Coil rated voltage: 12, 24VDC; 100, 110 to 120, 200, 220VAC, Allowable voltage fluctuation: -15% to +10% of rated voltage, Ambient & fluid temperature: 0 to 60°C, Electrical entry: grommet, type D DIN connector, type Y DIN connector, SOFT START-UP VALVE, VALVE, SOFT START, 0.74 lb

Operating pressure range: 0.2 - 1MPa, Coil rated voltage: 12, 24VDC; 100, 110 to 120, 200, 220VAC, Allowable voltage fluctuation: -15% to +10% of rated voltage, Ambient & fluid temperature: 0 to 60°C, Electrical entry: grommet, type D DIN connector, type Y DIN connector, PILOT VALVE, VALVE, SOFT START

Operating pressure range: 0.2 - 1MPa, Coil rated voltage: 12, 24VDC; 100, 110 to 120, 200, 220VAC, Allowable voltage fluctuation: -15% to +10% of rated voltage, Ambient & fluid temperature: 0 to 60°C, Electrical entry: grommet, type D DIN connector, type Y DIN connector, SOFT START-UP VALVE, VALVE, SOFT START, 1.6 lb

Operating pressure range: 0.2 - 1MPa, Coil rated voltage: 12, 24VDC; 100, 110 to 120, 200, 220VAC, Allowable voltage fluctuation: -15% to +10% of rated voltage, Ambient & fluid temperature: 0 to 60°C, Electrical entry: grommet, type D DIN connector, type Y DIN connector, SOFT START-UP VALVE, VALVE, SOFT START, 1.6 lb

Operating pressure range: 0.2 - 1MPa, Coil rated voltage: 12, 24VDC; 100, 110 to 120, 200, 220VAC, Allowable voltage fluctuation: -15% to +10% of rated voltage, Ambient & fluid temperature: 0 to 60°C, Electrical entry: grommet, type D DIN connector, type Y DIN connector, SOFT START-UP VALVE, VALVE, SOFT START, 1.54 lb

Operating pressure range: 0.2 - 1MPa, Coil rated voltage: 12, 24VDC; 100, 110 to 120, 200, 220VAC, Allowable voltage fluctuation: -15% to +10% of rated voltage, Ambient & fluid temperature: 0 to 60°C, Electrical entry: grommet, type D DIN connector, type Y DIN connector, SOFT START-UP VALVE, VALVE, SOFT START, 1.54 lb

Operating pressure range: 0.2 - 1MPa, Coil rated voltage: 12, 24VDC; 100, 110 to 120, 200, 220VAC, Allowable voltage fluctuation: -15% to +10% of rated voltage, Ambient & fluid temperature: 0 to 60°C, Electrical entry: grommet, type D DIN connector, type Y DIN connector, SOFT START-UP VALVE, VALVE, SOFT START, 1.6 lb

Operating pressure range: 0.2 - 1MPa, Coil rated voltage: 12, 24VDC; 100, 110 to 120, 200, 220VAC, Allowable voltage fluctuation: -15% to +10% of rated voltage, Ambient & fluid temperature: 0 to 60°C, Electrical entry: grommet, type D DIN connector, type Y DIN connector, SOFT START-UP VALVE, VALVE, SOFT START, 1.6 lb

Operating pressure range: 0.2 - 1MPa, Coil rated voltage: 12, 24VDC; 100, 110 to 120, 200, 220VAC, Allowable voltage fluctuation: -15% to +10% of rated voltage, Ambient & fluid temperature: 0 to 60°C, Electrical entry: grommet, type D DIN connector, type Y DIN connector, SOFT START-UP VALVE, VALVE, SOFT START, 0.27 lb

Operating pressure range: 0.2 - 1MPa, Coil rated voltage: 12, 24VDC; 100, 110 to 120, 200, 220VAC, Allowable voltage fluctuation: -15% to +10% of rated voltage, Ambient & fluid temperature: 0 to 60°C, Electrical entry: grommet, type D DIN connector, type Y DIN connector, SOFT START-UP VALVE, VALVE, SOFT START, 0.27 lb

Operating pressure range: 0.2 - 1MPa, Coil rated voltage: 12, 24VDC; 100, 110 to 120, 200, 220VAC, Allowable voltage fluctuation: -15% to +10% of rated voltage, Ambient & fluid temperature: 0 to 60°C, Electrical entry: grommet, type D DIN connector, type Y DIN connector, SOFT START-UP VALVE, VALVE, SOFT START, 0.74 lb

Operating pressure range: 0.2 - 1MPa, Coil rated voltage: 12, 24VDC; 100, 110 to 120, 200, 220VAC, Allowable voltage fluctuation: -15% to +10% of rated voltage, Ambient & fluid temperature: 0 to 60°C, Electrical entry: grommet, type D DIN connector, type Y DIN connector, SOFT START-UP VALVE, VALVE, SOFT START, 0.74 lb

Operating pressure range: 0.2 - 1MPa, Coil rated voltage: 12, 24VDC; 100, 110 to 120, 200, 220VAC, Allowable voltage fluctuation: -15% to +10% of rated voltage, Ambient & fluid temperature: 0 to 60°C, Electrical entry: grommet, type D DIN connector, type Y DIN connector, SOFT START-UP VALVE, VALVE, SOFT START, 1.6 lb

, 220VAC , Response time (0.5MPa) w/o indicator light andamp; surge voltage suppressor: 32ms or less , Ambient andamp; fluid temperature: 50 C, D-SUB CONNECTOR, VALVE, SS5V2 MANIFOLD SV2000, 21, SS5V2 NO SIZE RATING, 0.06688 lb

VQ4000

SX VK VZ Space saving 40% less VF Capacity saving 50% less (In house comparison) VFR VP7 VP4 VQ Various centralized wiring options Compact design with High speed & Long life VQ4 VQZ Large flow capacity F T kit (D-sub connector) kit (Terminal box) (Suitable for cylinders up to 140) VQD (Metal seal, with light and surge suppressor) VZS Built-in One-touch fitting for easier piping

* 1 XSA Series Normal Close High Vacuum Solenoid Valve

with light (With surge voltage suppressor) C Conduit (With surge voltage suppressor) Table: Spacer Part No.

Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Electric Actuator/Slider Type Ball Screw Drive Clean Room Specification 11-LEFS Series LEFS16, 25, 32, 40

3 Controller/Driver mounting Nil Screw mounting D DIN rail mounting* * DIN rail is not included. Order it separately.

HAW

Accessory (Option) Basic size Symbol Description Nil Applicable air compressor kW Symbol F With screw flange Screw type Reciprocating type D With auto drain Port size 2 2.2 7.5 7 Caution on Design HAW2 Size Applicable model 04 Symbol Rc 06 14 20 30 22 37 55 75 22 37 55 75 110 15 22 37 55 75 1 2 Rc 3 4 Rc 1 1 2 Rc 2 Warning HAW7 HAW22, 37 HAW55, 75 HAW110 1.

Operating pressure range: 0.2 - 1MPa, Coil rated voltage: 12, 24VDC; 100, 110 to 120, 200, 220VAC, Allowable voltage fluctuation: -15% to +10% of rated voltage, Ambient & fluid temperature: 0 to 60°C, Electrical entry: grommet, type D DIN connector, type Y DIN connector, N, "VALVE