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Note3) Vacuum grease is applied to (6)axis seal, (7)scraper, (8)O ring for surface seal and fixed seal.

Air supply 2-5 Piping 2-6. Operating Environment 2-7. Lubrication 3. Maintenance. 3-1. Precautions 3-2 Disassembly Drawing 1 Disassembly Drawing 2 3-3.

Q2 +COM 30.30.4 4 L L 5 DC24V LO L 6 DC12V M M 5 MO M 5 4300 5MMO 6 B 6() 9 - No.ZB-OM00301 / kPa / P1 0-101 15V2F.S.7 P3 -100100 15V2F.S.7 8 EA EAM SI 9 NPN2 EAP [psi] 8 0-101 8 EB EBM SI 9 PNP2 EBP [psi] 8 8 FA FAM SI 9 NPN2 FAP [psi] 8 -100100 8 FB FBM SI 9 PNP2 FBP [psi] 8 73m 8 9kPa G 2m V 10 11 12 C2 2 B C4 4 N1 1/8 N3 5/32 K 12 L2 2 L4 4

R3/8, NPT3/8, G3/8 22 7/8 R1/2, NPT1/2, G1/2 27 1-1/16 (4)For M5, 10-32UNF Tightening method First, tighten it by hand, then give it an additional 1/6 turn to 1/4 turn with a wrench. Refer to the table below for reference values.

No.VP300-OMM0002-A Solenoid Valve PRODUCT NAME VP(A)300/500/700 Series (PILOT VALVE : V200) MODEL/ Series Contents Safety Instructions -2,3 Precautions on Design -4,5 Selection -4,5 Mounting -5 Piping -6 Wiring -6 Lubrication -6 Air Supply -6,7 Operating Environment -7 Maintenance -7 Specific Product Precautions -8 to 12 Trouble shooting -13 Remedy -14 -1No.VP300-OMM0002-A Safety Instructions

(d) 1.6 3 1.6 3 DM6-04N DM6-06N DM6-04NU DM6-06NU DM12-04N DM12-06N DM12-04NU DM12-06NU 5 29 6 31 71

PE Q S T U W MACM2 X114 68 74 76 10 27.4 12 34 X115 52 6 62 X116 50 4 30 46 60 64 22.5 MACM4 X114 86 90 90 72 78 32.5 50 19 32 20 33 X115 56 6 78 40 X116 54 4 40 6.6 12 19 17 18 M5 7 MACM6 X114 118 125 125 97 113 33.8 53 28 33.3 30 43 X115 59 6 98 60 X116 57 4 60 MACM10 X114 185 197 198 11 152 182 18 53.8 77 31 24 13 0 53.3 50 70 X115 83 6 108 X116 81 4 5 Centering Unit MACM Series

ISA2 Note) 5 With LED light (24 VDC, Red) 50 20 to 50 l/min Note) 6 With LED light (24 VDC, Green) IS Note) LED light is available for 5, 6, 7, 8 (with terminal box for 24 VDC).

PAB-OM-H005-D PRODUCT NAME Process Pump MODEL / Series / Product Number PAF3413 Contents Safety Instructions P2. to 3 1. Precautions for handling P.4 2. Precautions for installation -P.5 3. Description and function of individual port -P.5 4. How to use -P5. to 6 5. Maintenance and check -P.6 6. Specification and how to order P.6 to 7 7. Discharge capability P.8 to 9 8.

SMC Corporation R&D Center Product Development Division-6 Address: 4-2-2, KINUNODAI,TSUKUBAMIRAI-CITY , IBARAKI-KEN 300-2493, JAPAN Phone:+81-297-52-6 Fax:+81-297-20-5007 E-mail:kaihatsu_6_g3@smcjpn.co.jp Notice: The content of this manual can be revised without a previous notice. ii HEF002-A6 Contents Contents 1 PREPARATION FOR COMMUNICATION -1-1 2 OPTIONS OF COMMUNICATION METHOD -2-1 2.1

SMC Corporation R&D Center Product Development Division-6 Address: 4-2-2, KINUNODAI,TSUKUBAMIRAI-CITY , IBARAKI-KEN 300-2493, JAPAN Phone:+81-297-52-6 Fax:+81-297-20-5007 E-mail:kaihatsu_6_g3@smcjpn.co.jp Notice: The content of this manual can be revised without a previous notice. ii INR-244-831 Contents Contents 1 PREPARATION FOR COMMUNICATION -1-1 2 OPTIONS OF COMMUNICATION METHOD -2-1

) 2 5 Body (Material: A6063) Valve (Material: SUS304) 6 Valve seal 2 (Maintenance part) 3 (Valve seal 2) Nut assembly (Maintenance part) (Set of a nut and a washer) 9 Washer (Material: SUS304 or equivalent) Nut (Material: SUS304 or equivalent) (Shaft) 11 XL-OMS0001-B 5-2.Dimensions C E C E E (KF flange) Fd (K flange) Fn D H B A G A Unit: mm Model A B C D E Fn Fd G H XLA-16-2 40 108 38 20

(mm) A 3.2 3.2 3.2 B 40 51 64 C 35 41 51 D 3.5 6 8 VH200 VH300 VH400 5-8-13 8 Series VH Dimensions: Panel Mounted VH41-02 to 04 VH41-06 ( ): Long handle type ( ): Long handle type 2 (A) 4 (B) 4 (B) 2 (A) 25 (32) 107.5 19 102 3 (R) 1 (P) 3 (R) 1 (P) 88 102 89 4-6.6 4-6.6 88 81 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-

The signal has to be converted by an A/D converter for pressure display or switch output. Current output signal is a current signal in the range of 4 to 20 [mA]. The signal is transformed into a voltage signal before being converted by a A/D converter for pressure display or switch output.

None With flow control With micro by-pass With flow control & micro by-pass With pop-up indicator With indicator light High back pressure (60psi)(.42MPa) Nil 1 2 3 4 5 6 Applicable Tubing Size Body Class Body Class Connecting Tube Outside Diameter Connecting Tube Outside Diameter Symbol 2 3 4 5 6 Symbol 2 3 4 5 6 Metric Sizes 04 06 08 10 12 19 25 00 Inch Sizes 03 05 07 11 13 19 25 00 4 6

Exr 27N-4O (40pm), 2NB '||oL: O.der ol assembly (Erample) OO' NAF + NAFI + iIAL Port Atlachment modl Air entry Port sire Applicable 0 6 % N P T t o I N P T Description Location s MF +NAq +a +M! NAF +6+ NAR NAC50?

No.VEX-OMV0001 / / VEX1 -2, 3 / -4 -5 -5 -5 -5 -5, 6 -6 -6 -79 -1012 1 VEX-OMV0001 1) 2) (ISO/IEC) (JIS) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218-1992: Manipulating industrial

Applicable fitting size (D) PSE53-R06 6 mm PSE53-R07 1/4 inch With sensor cable -14No.PS-OME0004-G Revision history A: For B: Change template. C: Complete revision. D: Modified errors in text. E: Measurement laws are added. F: Modified errors in text. [October 2017] G: Contents revised in several places.

Example: -BKN Refer to pages 42 to 46 and 52 to 54 for manifold option parts. 7 6 D side 14 15 0 1 8 9 Manifold base (8 stations) DIN rail mounting SS5Q13-SB08-D 1 set (SB kit 8-station manifold base part no.) SQ1130-5-C6 4 sets (Single type part no.) SQ1230-5-C6 3 sets (Double type part no.) SSQ1000-10A-3 1 set (Blanking plate part no.) SI Unit Part No.